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| Number | Title | Issue Date |
| 7434472 | Differential pressure transducer configurations including displacement sensor The present invention pertains to differential pressure transducers. In an embodiment of the invention, a differential pressure transducer includes a transducer housing, a diaphragm, a bellows, and a sensing assembly. The transducer housing, diaphragm, and bellows a... | 10/14/2008 |
| 7418871 | Method for detecting a pressure of a medium and pressure measuring device A pressure measuring device for detecting a pressure to be measured of a medium, having a pressure housing; a converter situated in the pressure housing for converting a mechanical force produced by the pressure to be measured into an electrical signal; an output un... | 09/02/2008 |
| 7395719 | Preformed sensor housings and methods to produce thin metal diaphragms A preformed sensor housing including a conduit having an inside; a plug disposed within the conduit; and a deposit covering a portion of the plug and a portion of the conduit. A method is also disclosed for creating a thin film diaphragm on a housing including the s... | 07/08/2008 |
| 7363811 | Measurement pickup A measurement pickup is provided offering a high measure of safety and having a measurement pickup housing, a sensor element arranged in the measurement pickup, at least one connection element closing the measurement pickup housing, and an excess-pressure protection... | 04/29/2008 |
| 7363814 | Multi-axial angular velocity sensor An angular velocity sensor for detecting angular velocity about a Z-axis in an XYZ coordinate system has a substrate oscillator, a flexible member for connecting the oscillator to a casing, a device for oscillating the oscillator in an X-axis direction, and a detect... | 04/29/2008 |
| 7360431 | Pressure sensor device including a diaphragm and a stopper member having a curved surface facing the diaphragm The pressure sensor device has a laminated diaphragm (12) in which a strain resistance gauge is formed in a surface and a stopper member (13) including a concave portion forming a curved surface parallel to a surface formed by displacement of the diaph... | 04/22/2008 |
| 7360455 | Force detector and acceleration detector and method of manufacturing the same An electrode layer is formed on the upper surface of a first substrate, and a processing for partially removing the substrate is carried out in order to allow the substrate to have flexibility. To the lower surface of the first substrate, a second substrate is conne... | 04/22/2008 |
| 7360428 | Capacitive pressure measuring cell with a membrane bed The invention relates to a pressure measuring cell comprising a base body, a membrane that is connected to the base body, thus forming a measuring chamber. During operation, the membrane is subjected to a deflection which is dependent on a pressure that is to be mea... | 04/22/2008 |
| 7356913 | Process for manufacturing a microsystem A process for making microswitches or microvalves, composed of a substrate and used for shifting between a first state of functioning and a second state of functioning by means of a bimetal-effect thermal sensor. The sensor includes a deformable element attached, at... | 04/15/2008 |
| 7353711 | Capacitive sensor A capacitive sensor including a housing having a hermetically sealed cavity, a plate in the cavity, a diaphragm forming a part of the cavity and spaced from the plate, a conductive layer on the first diaphragm, and a second conductive layer on the plate, the first a... | 04/08/2008 |
| 7353719 | Pressure sensor and method for fabricating the same A pressure sensor comprising a plurality of sensor parts arranged in matrix. A first electrode being connected with first wiring and a second electrode being connected with second wiring are disposed oppositely through a cavity part in the sensor part. The second el... | 04/08/2008 |
| 7347102 | Contact-type electric capacitive displacement sensor A contact-type electric capacitive displacement sensor includes a stationary element having a stationary plate, a stationary conductive pattern formed on the stationary plate and an insulation film coated on the stationary plate and a displaceable element having a d... | 03/25/2008 |
| 7334480 | Dual membrane sensor for temperature compensated pressure sensing A pressure sensor that has a sensor membrane for exposure to fluid at a pressure to be sensed, and a compensation membrane sealed from the fluid at the pressure to be sensed. Associated circuitry connected to the sensor membrane converts deflection into an output si... | 02/26/2008 |
| 7334484 | Line pressure measurement using differential pressure sensor A pressure sensor assembly for sensing a pressure of a process fluid includes a sensor body having a cavity formed therein to couple to a process fluid pressure. A deflectable diaphragm in the cavity deflects in response to the first and second process fluid pressur... | 02/26/2008 |
| 7327003 | Sensor system Rather than increasing the mass of the structure, the structure in a sensor system suspends its substrate from some mechanical ground. Motion of the substrate relative to the mechanical ground thus provides the movement information. To those ends, the sensor system ... | 02/05/2008 |
| 7319581 | Capacitive pressure sensor A capacitive pressure sensor includes: a conductive silicon substrate having a diaphragm; an insulating substrate having a fixed electrode, the insulating substrate overlapping the conductive silicon substrate so as to be bonded thereto; and a sealed chamber formed ... | 01/15/2008 |
| 7316163 | Method of forming a seal between a housing and a diaphragm of a capacitance sensor The axial distance between opposing conductors of a capacitance pressure transducer can depend, in part, upon the thickness of a seal that is disposed between a housing and a diaphragm of the capacitance pressure transducer. The present invention utilizes spacer ele... | 01/08/2008 |
| 7317199 | Circuit device To provide a circuit device suitable for incorporating a semiconductor element emitting or receiving short-wavelength light. The circuit device includes a casing, a semiconductor element, and a cover portion. The casing has an opening on the top face thereof. The se... | 01/08/2008 |
| 7305888 | Optical interferometric pressure sensor A vacuum measuring cell has a first housing body and a membrane, both of Al2O3 ceramic or sapphire. The membrane is planar with a peripheral edge joined by a first seal to the first housing body to form a reference vacuum chamber. A second hous... | 12/11/2007 |
| 7305889 | Microelectromechanical system pressure sensor and method for making and using According to some embodiments, an apparatus includes a substrate that defines a plane. The apparatus also includes a first conducting plate that is substantially normal to the substrate and a second conducting plate that is (i) substantially normal to the substrate ... | 12/11/2007 |
| 7305890 | Micro-electromechanical sensor A force or pressure transducer is includes a substrate, a dielectric material disposed on the substrate, a spacing member disposed on the dielectric material, and a resilient element disposed on both the dielectric material and the spacing member. A portion of the r... | 12/11/2007 |
| 7284439 | Method for producing a pressure sensor for detecting small pressure differences and low pressures A process for producing a plate for a capacitive sensor element. In one embodiment of the present invention, a method includes forming a plate from a substantially pure aluminum oxide slurry, heating the plate a first time in an oven to sinter the plate, cooling the... | 10/23/2007 |
| 7284444 | Hermetically sealed displacement sensor apparatus A hermetically sealed displacement sensor has strain gauges placed on thin flexible triangular shaped beams of a load beam cell. The strain gauges are enclosed in a hermetically sealed cavity which cavity is sealed by means of a cover plate placed over the load beam... | 10/23/2007 |
| 7284443 | Semiconductor pressure sensor and process for fabricating the same This invention aims to realize reduction in size without impairing measurement accuracy or connection reliability in a semiconductor pressure sensor in which a glass substrate is adhered to a rear-surface side of a pressure-sensitive chip in which piezoresistive pre... | 10/23/2007 |
| 7278321 | Pressure sensor A pressure sensor for sensing a pressure level of a medium. The pressure sensor includes a rigid substrate having a medium contacting side and a pressure sensitive resistor mounted on the medium contacting side. The resistor exhibits a change in resistance in respon... | 10/09/2007 |
| 7273763 | Method of producing a micro-electromechanical element In a method of producing a micro-electromechanical element a first intermediate layer, which is applied to a first main surface of a first semiconductor wafer, is structured in a first step so as to produce a recess. The first semiconductor wafer is connected via th... | 09/25/2007 |
| 7270868 | Micromechanical component A component having a surface micromechanical structure containing both movable elements and immovable elements, and a method of manufacturing same are described. The surface micromechanical structure of the component is produced in a functional layer, which is conne... | 09/18/2007 |
| 7268646 | Temperature controlled MEMS resonator and method for controlling resonator frequency There are many inventions described and illustrated herein. In one aspect, the present invention is directed to a temperature compensated microelectromechanical resonator as well as fabricating, manufacturing, providing and/or controlling microelectromechanical reso... | 09/11/2007 |
| 7266999 | Thick film technology based ultra high pressure sensor utilizing integral port and diaphragm construction A method and apparatus for configuring a pressure sensor. A homogeneous piece of metal can be provided. A pressure port and a machined diaphragm are integrated onto the homogeneous piece of metal, wherein the machined diaphragm is connected to the pressure port. The... | 09/11/2007 |
| 7263892 | Passive tire pressure sensor and method A surface acoustic wave device includes a micro-machined pressure transducer for monitoring tire pressure. The device is configured having a micro-machined cavity that is sealed with a flexible conductive membrane. When an external tire pressure equivalent to the ca... | 09/04/2007 |
| 7260994 | Low cost high-pressure sensor A pressure sensing apparatus including a thin disc of a metal having a ceramic material layer and piezoresistive elements formed thereon. A surface of the disc is bonded to a diaphragm assembly on a pressure port base constructed of a low cost metal. The bonding pro... | 08/28/2007 |
| 7262693 | Process field device with radio frequency communication A field device for use in an industrial process control or monitoring system includes terminals configured to connect to a two-wire process control loop. The loop carries data and provides power to the field device. RF circuitry in the field device is provided for r... | 08/28/2007 |
| 7254008 | Integrated capacitive microfluidic sensors method and apparatus A microfluidic device and method for capacitive sensing. The device includes a fluid channel including an inlet at a first end and an outlet at a second end, a cavity region coupled to the fluid channel, and a polymer based membrane coupled between the fluid channel... | 08/07/2007 |
| 7252005 | System and apparatus for sensing pressure in living organisms and inanimate objects System and apparatus for measuring pressure including a microelectronic device, an interface member attached to the microelectronic device, a pressure sensor having a diaphragm responsive to external pressure exerted upon the diaphragm, wherein the interface member ... | 08/07/2007 |
| 7252011 | Surface area deposition trap The disclosed pressure transducer assembly includes a housing, a pressure sensor disposed within the housing, a coupling establishing a sealed pathway between the housing and an external source of gas or fluid, and a deposition trap disposed in the pathway. The depo... | 08/07/2007 |
| 7243552 | Pressure sensor assembly A silicon-based high pressure sensor module incorporates a low temperature cofired ceramic (LTCC) substrate. The LTCC substrate can withstand high pressures. A bossed container filled with oil is mounted on the substrate and houses a sensor cell. The top surface of ... | 07/17/2007 |
| 7240558 | Pressure sensor A pressure sensor for sensing a pressure level of a pressurized medium. The pressure sensor includes a housing that has a high pressure side, a low pressure side and an aperture. A substrate is located in the aperture. The substrate has a pair of ends and a center p... | 07/10/2007 |
| 7242570 | Vacuum capacitor A vacuum capacitor including an insulating cylinder having first and second ends which are opposite to each other. A stationary-side flange is installed to the first end of the insulating cylinder. A stationary electrode supporting plate is installed to an inner sur... | 07/10/2007 |
| 7235914 | Piezoelectric micro-transducers, methods of use and manufacturing methods for same Various micro-transducers incorporating piezoelectric materials for converting energy in one form to useful energy in another form are disclosed. In one embodiment, a piezoelectric micro-transducer can be operated either as a micro-heat engine, converting thermal en... | 06/26/2007 |
| 7231828 | High temperature pressure sensing system A high temperature pressure sensing system (transducer) including: a pressure sensing piezoresistive sensor formed by a silicon-on-insulator (SOI) process; a SOI amplifier circuit operatively coupled to the piezoresistive sensor; a SOI gain controller circuit includ... | 06/19/2007 |
