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| Number | Title | Issue Date |
| 7440254 | Micro-electromechanical variable capacitor A micro-electromechanical variable capacitor with first and second capacitor plates spaced apart to define a gap therebetween. The first plate has two control electrodes and an active electrode. The second plate is movable relative to first plate when a voltage is a... | 10/21/2008 |
| 7434463 | Electrostatic-capacity-type acceleration sensor and acceleration measuring device therewith A moving member having a plurality of moving electrodes is supported by support members at both ends thereof on a substrate surface in such a way that it can be subjected to displacement in a two-dimensional plane. A plurality of fixed electrodes are arranged to fac... | 10/14/2008 |
| 7385800 | Micro-electro-mechanical system (MEMS) capacitors, inductors, and related systems and methods According to one aspect, the subject matter described herein includes a MEMS fixed capacitor and a method for fabricating the MEMS fixed capacitor. The MEMS fixed capacitor can include a first stationary, capacitive plate on a substrate. Further, the MEMS fixed capa... | 06/10/2008 |
| 7369394 | Variable capacitor, circuit module, and communications apparatus A variable capacitor includes a supporting substrate and a plurality of variable capacitance elements, and bias lines. The plurality of variable capacitance elements is formed on the supporting substrate, each of which is composed of a lower-laid first electrode lay... | 05/06/2008 |
| 7363819 | High-pressure sensor housing which is simplified by means of a connection element (also emc) A device for measuring pressure, in particular for measuring high pressure, is provided, having a pressure sensor situated in a sensor housing, the sensor housing having a first sensor housing part provided with a pressure connecting piece and a second sensor housin... | 04/29/2008 |
| 7363814 | Multi-axial angular velocity sensor An angular velocity sensor for detecting angular velocity about a Z-axis in an XYZ coordinate system has a substrate oscillator, a flexible member for connecting the oscillator to a casing, a device for oscillating the oscillator in an X-axis direction, and a detect... | 04/29/2008 |
| 7360455 | Force detector and acceleration detector and method of manufacturing the same An electrode layer is formed on the upper surface of a first substrate, and a processing for partially removing the substrate is carried out in order to allow the substrate to have flexibility. To the lower surface of the first substrate, a second substrate is conne... | 04/22/2008 |
| 7334484 | Line pressure measurement using differential pressure sensor A pressure sensor assembly for sensing a pressure of a process fluid includes a sensor body having a cavity formed therein to couple to a process fluid pressure. A deflectable diaphragm in the cavity deflects in response to the first and second process fluid pressur... | 02/26/2008 |
| 7325457 | Sensor and sensor module A sensor and sensor module with small power consumption and high reliability are disclosed. The sensor includes a capacitor having a capacitance varying with a physical quantity, a capacitance-voltage conversion circuit for converting the capacitance of the capacito... | 02/05/2008 |
| 7324323 | Photo-sensitive MEMS structure A heat-sensitive apparatus includes a substrate with a top surface, one or more bars being rotatably joined to the surface and having bimorph portions, and a plate rotatably joined to the surface and substantially rigidly joined to the one or more bars. Each bimorph... | 01/29/2008 |
| 7242569 | Tunable capacitors using fluid dielectrics Capacitors 10, 20, 40, 50, 70, 80) having a fluid dielectric material that is transported or undergoes a phase change are disclosed. The dielectric medium change results in a change in the total dielectric constant of the material between the electrodes (1... | 07/10/2007 |
| 7228739 | Precision flexure plate A precision flexure plate includes a flat disk positioned between two capacitor plates and supported by S-shaped beams. Deflection of the disk due to gravitational loads and resulting capacitance change is used to measure the accelerations in the direction perpendic... | 06/12/2007 |
| 7178398 | Coplanar proofmasses employable to sense acceleration along three axes An apparatus in one example comprises a first proofmass employable to sense a first acceleration along a first input axis; a second proofmass employable to sense a second acceleration along a second input axis; and a third proofmass employable to sense a third accel... | 02/20/2007 |
| 7161791 | Variable capacitance membrane actuator for wide band tuning of microstrip resonators and filters A device for varying the capacitance of an electronic circuit is disclosed. The device comprises a flexible membrane located above the electronic circuit, a metal layer connected to the flexible membrane, and bias circuitry located above the membrane. Variation of t... | 01/09/2007 |
| 7152485 | Acceleration detector An electrode layer is formed on the upper surface of a first substrate, and a processing for partially removing the substrate is carried out in order to allow the substrate to have flexibility. To the lower surface of the first substrate, a second substrate is conne... | 12/26/2006 |
| 7150192 | Acceleration measurement method using electrostatic-capacity-type acceleration sensor An acceleration measurement method adapted to an electostatic-capacity-type acceleration sensor comprising a first capacitance detector and a second capacitance detector both of which have moving electrodes and fixed electrodes arranged on a substrate surface so tha... | 12/19/2006 |
| 7141447 | Method of forming a seal between a housing and a diaphragm of a capacitance sensor The axial distance between opposing conductors of a capacitance pressure transducer can depend, in part, upon the thickness of a seal that is disposed between a housing and a diaphragm of the capacitance pressure transducer. The present invention utilizes spacer ele... | 11/28/2006 |
| 7132723 | Micro electro-mechanical system device with piezoelectric thin film actuator A radio frequency (RF) micro electro-mechanical system (MEMS) device and method of making same are provided, the device including an RF circuit substrate and an RF conducting path disposed on the RF circuit substrate, a piezoelectric thin film actuator, and a conduc... | 11/07/2006 |
| 7059188 | Angular velocity sensor A flexible substrate (110) having flexibility and a fixed substrate (120) disposed so as to oppose it are supported at their peripheral portions by a sensor casing (140). An oscillator (130) is fixed on the lower surface of the flexible s... | 06/13/2006 |
| 7061745 | Variable capacitor adjustable by linear motor The disclosure describes a variable capacitor device, which is formed by a linear motor and a variable capacitor having at least one stator electrode and a movable electrode. A piezoelectric transducer of the linear motor is frictionally coupled to the movable elect... | 06/13/2006 |
| 7047810 | Micro-electro-mechanical pressure sensor A pressure sensor is disclosed for measuring fluid pressure comprising a pressure sensing structure comprising a mass target suspended on a spring mechanism, wherein the mass target and the spring mechanism together exhibit high Q mechanical resonance, wherein the m... | 05/23/2006 |
| 7023066 | Silicon microphone A solid-state transducer is disclosed. The transducer comprises a semi-conductor substrate forming a support structure and having an opening. A thin-film structure forming a diaphragm responsive to fluid-transmitted acoustic pressure is disposed over the opening. Th... | 04/04/2006 |
| 6992492 | Capacitive sensor A capacitive sensor is disclosed that includes a variable capacitor transducer that varies its capacitance with changes in an environmental parameter. The present invention is adapted to measure any linear parameter such as pressure, force, or distance. The sensor o... | 01/31/2006 |
| 6952337 | Variable capacitor A variable capacitor is provided such that it is possible to make nonlinear distortion small and use at high power handling capability, and such that a variable rate of capacitance is not influenced by a high-frequency voltage substantially. A variable capacitor is ... | 10/04/2005 |
| 6941810 | Angular velocity sensor An angular velocity sensor for detecting an angular velocity component includes an oscillator having mass, a sensor casing for accommodating the oscillator therewithin, a flexible member for connecting the oscillator to the sensor casing so that the oscillator can b... | 09/13/2005 |
| 6925884 | Capacitive differential pressure sensor In a differential pressure sensor, the measurement value is corrected with the help of the nominal pressure NP. In this way, influences on the measurement value because of deformations of the body of the differential pressure sensor and change in the material stiffn... | 08/09/2005 |
| 6891711 | Ultra-miniature, high temperature, capacitive inductive pressure transducer An ultra miniature high temperature capacitive inductive pressure transducer is fabricated by MEMS techniques. The transducer consists of two separated pieces of silicon which form the plates of the capacitor, one of which plate is micromachined in such a way to all... | 05/10/2005 |
| 6848310 | Capacitive dynamic quantity sensor, method for manufacturing capacitive dynamic quantity sensor, and detector including capacitive dynamic quantity sensor A capacitive dynamic quantity sensor includes a semiconductor substrate, a weight, a movable electrode, and two fixed electrodes. The weight is movably supported by the semiconductor substrate. The movable electrode is integrated with the weight. The fixed electrode... | 02/01/2005 |
| 6791342 | Electrostatic capacitance sensor In an electrostatic capacitance sensor, an electrode is formed on a base board. The electrode is covered with a resist. A conductive rubber includes a first face and a second face. The first face has a fist area and is opposed to the resist. The second face is oppos... | 09/14/2004 |
| 6781814 | Capacitive pressure transducer A capacitive fluid pressure transducer (10′) has a sensing element (12) received in an electrically conductive cup-shaped shield member (24) which is crimped onto the base of an electrical connector (20′). A conditioning circuit (1... | 08/24/2004 |
| 6694814 | Dynamic sensor having capacitance varying according to dynamic force applied thereto A dynamic sensor includes stationary electrodes and movable electrodes facing each other and forming a capacitance therebetween. The capacitance changes in accordance with a dynamic force such as acceleration imposed on the sensor. Plural projections are ... | 02/24/2004 |
| 6684711 | Three-phase excitation circuit for compensated capacitor industrial process control transmitters A capacitor industrial process control transmitter includes a three-phase excitation circuit to charge a sensing capacitor and a compensation capacitor of the transmitter and transfer charges to an integrator. The sensing capacitor is charged during the f... | 02/03/2004 |
| 6651506 | Differential capacitive pressure sensor and fabricating method therefor A pressure sensor using two capacitors for measuring a pressure stimulus includes a substrate having a diaphragm positioned at a center portion thereof. The diaphragm has a reduced thickness so that the diaphragm displaces upward and downward in response ... | 11/25/2003 |
| 6536280 | Thin film MEMS sensors employing electrical sensing and force feedback This invention discloses a method for electronically decreasing the sensitivity of thin film movable micromachined layers to vibrations, accelerations, or rotations that would result in part or all of the movable layer being displaced in the direction of ... | 03/25/2003 |
| 6532834 | Capacitive pressure sensor having encapsulated resonating components A capacitive pressure sensor for measuring a pressure applied to an elastic member includes a capacitive plate disposed adjacent to the elastic member so as to define a gap between a planar conductive surface of the elastic member and a corresponding plan... | 03/18/2003 |
| 6473289 | Vacuum variable capacitor An improved vacuum variable capacitor can include one or more characteristics that provide advantages over previous vacuum variable capacitors. In particular, the vacuum variable capacitor can be constructed so as to enable the capacitance to be adjusted ... | 10/29/2002 |
| 6244112 | Acceleration sensor and process for the production thereof A single crystal silicon substrate (1) is bonded through an SiO2 film (9) to a single crystal silicon substrate (8), and the single crystal silicon substrate (1) is made into a thin film. A cantilever (13) is formed on the single crystal silico... | 06/12/2001 |
| 6227050 | Semiconductor mechanical sensor and method of manufacture A semiconductor mechanical sensor having a new structure in which a S/N ratio is improved. In the central portion of a silicon substrate 1, a recess portion 2 is formed which includes a beam structure. A weight is formed at the tip of the beam, and in the... | 05/08/2001 |
| 6215645 | Differential capacitor structure A differential capacitor structure (10) formed overlying a substrate (12) having a middle layer (24) disposed between a lower layer (18) and an upper layer (28). The lower layer (18) is a static layer that is formed on the substrate (12), the middle layer... | 04/10/2001 |
| 6148670 | Apparatus and method for multi-axis capacitive sensing A device for detecting with differential capacitors accelerations in more than one orientation through time-division multiplexing. A micromachined mass is movable along or about any axis in response to a force. The mass forms the common electrode of a set... | 11/21/2000 |
