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| Number | Title | Issue Date |
| 7796371 | Integrated capacitive microfluidic sensors method and apparatus A micro fluidic device and method for capacitive sensing. The device includes a fluid channel including an inlet at a first end and an outlet at a second end, a cavity region coupled to the fluid channel, and a polymer based membrane coupled between the fluid channe... | 09/14/2010 |
| 7437936 | Window for measuring device The present disclosure provides for systems and methods for fabricating measuring devices, e.g., a pressure gauge, thermometer or the like. More particularly, the present disclosure provides for systems and methods for fabricating a window for use with a measuring d... | 10/21/2008 |
| 7418871 | Method for detecting a pressure of a medium and pressure measuring device A pressure measuring device for detecting a pressure to be measured of a medium, having a pressure housing; a converter situated in the pressure housing for converting a mechanical force produced by the pressure to be measured into an electrical signal; an output un... | 09/02/2008 |
| 7412892 | Method of making pressure transducer and apparatus A method for making a pressure transducer comprising: forming a recess in a diaphragm, the diaphragm having a thinned region that deflects responsively to pressure being applied thereto; depositing a glass frit in the recess; embedding a plurality of strain gages in... | 08/19/2008 |
| 7404330 | Pressure sensor A pressure sensor includes a metal housing and a semiconductor chip. The housing has a diaphragm unitary with the housing and an inlet for introducing fluid to the diaphragm. The inlet has a first end exposed to the diaphragm and a second end exposed to an outside o... | 07/29/2008 |
| 7400488 | Variable capacitance membrane actuator for wide band tuning of microstrip resonators and filters A device for varying the capacitance of an electronic circuit is disclosed. The device comprises a flexible membrane located above the electronic circuit, a metal layer connected to the flexible membrane, and bias circuitry located above the membrane. Variation of t... | 07/15/2008 |
| 7395716 | Variable capacitance measuring device A variable capacitance measuring device can comprise any one or more features in various different embodiments allow a reliable, compact device to be achieved. A capacitor electrode, a gettering housing, and pinch-off connector may be aligned along a common axis may... | 07/08/2008 |
| 7394641 | MEMS tunable capacitor with a wide tuning range A MEMS tunable capacitor and method of fabricating the same, includes a plurality of fixed charge plates on a substrate, the plurality of fixed charge plates having a same height, being arranged in a shape of comb-teeth and being electrically connected to one anothe... | 07/01/2008 |
| 7382599 | Capacitive pressure sensor A capacitive pressure sensor is provided. The capacitive pressure sensor includes a glass substrate that has a pair of surfaces facing each other. A first silicon substrate has a fixed electrode passing through the glass substrate to be exposed at one surface and a ... | 06/03/2008 |
| 7372346 | Acoustic resonator A tuneable film bulk acoustic resonator (FBAR) device. The FBAR device includes a bottom electrode, a top electrode and a piezoelectric layer in between the bottom electrode and the top electrode. The piezoelectric layer has a first overlap with the bottom electrode... | 05/13/2008 |
| 7368921 | Printed capacitive sensor The invention relates to a flexible, resilient capacitive sensor suitable for large-scale manufacturing. The sensor includes a dielectric, an electrically conductive detector and trace layer on the first side of the dielectric layer comprising a detector and trace, ... | 05/06/2008 |
| 7360431 | Pressure sensor device including a diaphragm and a stopper member having a curved surface facing the diaphragm The pressure sensor device has a laminated diaphragm (12) in which a strain resistance gauge is formed in a surface and a stopper member (13) including a concave portion forming a curved surface parallel to a surface formed by displacement of the diaph... | 04/22/2008 |
| 7353713 | Flexible apparatus and method to enhance capacitive force sensing A flexible apparatus and method to enhance capacitive force sensing is disclosed. In one embodiment, a force measuring device includes a sensor capacitor having a fixed surface and a movable surface substantially parallel to the fixed surface, at least one spring as... | 04/08/2008 |
| 7347110 | Tactile sensing device and an apparatus using the same The present invention provides a tactile sensing device comprising a tactile sensing layer, a pressure adjusting unit, at least one pressure sensing unit and a control unit. The tactile sensing layer includes a plurality of elastic elements, each of which has an inn... | 03/25/2008 |
| 7345866 | Continuously tunable RF MEMS capacitor with ultra-wide tuning range A method is provided of continuously varying the capacitance of a MEMS varactor having a cantilever assembly mounted on a base portion, the cantilever assembly having a first capacitance plate and a dielectric element mounted thereon, and the base portion having a s... | 03/18/2008 |
| 7345867 | Capacitive pressure sensor and method of manufacturing the same A capacitive pressure sensor and method of manufacturing the same is provided. The capactive pressure sensor includes a glass substrate that has a pair of surfaces opposite to each other. A recessed portion is provided to form a cavity on one of the pair of principa... | 03/18/2008 |
| 7334484 | Line pressure measurement using differential pressure sensor A pressure sensor assembly for sensing a pressure of a process fluid includes a sensor body having a cavity formed therein to couple to a process fluid pressure. A deflectable diaphragm in the cavity deflects in response to the first and second process fluid pressur... | 02/26/2008 |
| 7334489 | Dual rate force transducer A dual rate force transducer is disclosed. A spring is machined to have a first spring portion with a first spring rate, a second spring portion with a second spring rate, and a platen between the spring portions. A pair of flanges are affixed to the distal ends of ... | 02/26/2008 |
| 7331238 | Pressure detection device A pressure detection device includes a case unit which has therein an accommodation space and a pressure introduction passage, and a pressure detection unit having a detection surface for detecting a pressure applied thereto. Two ends of the pressure introduction pa... | 02/19/2008 |
| 7325457 | Sensor and sensor module A sensor and sensor module with small power consumption and high reliability are disclosed. The sensor includes a capacitor having a capacitance varying with a physical quantity, a capacitance-voltage conversion circuit for converting the capacitance of the capacito... | 02/05/2008 |
| 7321281 | Hermetically sealed relay having low permeability plastic housing A high voltage relay comprises a hermitically sealed housing made of ethylene vinyl alcohol (EVOH) and having internal components for changing the state of said relay. Terminals are electrically connected to the internal components for connection to external circuit... | 01/22/2008 |
| 7319581 | Capacitive pressure sensor A capacitive pressure sensor includes: a conductive silicon substrate having a diaphragm; an insulating substrate having a fixed electrode, the insulating substrate overlapping the conductive silicon substrate so as to be bonded thereto; and a sealed chamber formed ... | 01/15/2008 |
| 7308830 | Pressure sensor fault detection A diagnostic system for a pressure sensor having a cavity configured to receive on applied pressure is provided. The cavity has a first and a second wall. A deflectable diaphragm is positioned in the cavity and configured to form a first and a second capacitance wit... | 12/18/2007 |
| 7305889 | Microelectromechanical system pressure sensor and method for making and using According to some embodiments, an apparatus includes a substrate that defines a plane. The apparatus also includes a first conducting plate that is substantially normal to the substrate and a second conducting plate that is (i) substantially normal to the substrate ... | 12/11/2007 |
| 7302857 | Method for reducing the temperature dependence of a capacitive sensor and a capacitive sensor construction A method of manufacturing a sensor including forming an insulating layer on top of a conductive substrate, and forming a conducting electrode on top of the insulating layer. Further, the insulating layer is formed to include support areas formed at edges of the cond... | 12/04/2007 |
| 7301351 | Printed capacitive sensor The invention relates to a flexible, resilient capacitive sensor suitable for large-scale manufacturing. The sensor comprises a dielectric, an electrically conductive detector and trace layer on the first side of the dielectric layer comprising a detector and trace,... | 11/27/2007 |
| 7288424 | Integrated driver process flow An integrated device includes one or more device drivers and a micro-electro-mechanical system (MEMS) structure monolithically coupled to the one or more device drivers. The one or more device drivers are configured to process received control signals and to transmi... | 10/30/2007 |
| 7278321 | Pressure sensor A pressure sensor for sensing a pressure level of a medium. The pressure sensor includes a rigid substrate having a medium contacting side and a pressure sensitive resistor mounted on the medium contacting side. The resistor exhibits a change in resistance in respon... | 10/09/2007 |
| 7276917 | Printed capacitive sensor The invention relates to a flexible, resilient capacitive sensor suitable for large-scale manufacturing. The sensor includes a dielectric, an electrically conductive detector and trace layer on the first side of the dielectric layer including a detector and trace, a... | 10/02/2007 |
| 7270009 | Diaphragm type pressure sensor A diaphragm pressure sensor includes a first insulating substrate, a conductive substrate with a diaphragm, and a second insulating substrate with a gas inlet are bonded so as to form a pressure reference room between the diaphragm and the first insulating substrate... | 09/18/2007 |
| 7270012 | Semiconductor device embedded with pressure sensor and manufacturing method thereof The method for promoting the size reduction, the performance improvement and the reliability improvement of a semiconductor device embedded with pressure sensor is provided. In a semiconductor device embedded with pressure sensor, a part of an uppermost wiring is us... | 09/18/2007 |
| 7262693 | Process field device with radio frequency communication A field device for use in an industrial process control or monitoring system includes terminals configured to connect to a two-wire process control loop. The loop carries data and provides power to the field device. RF circuitry in the field device is provided for r... | 08/28/2007 |
| 7260994 | Low cost high-pressure sensor A pressure sensing apparatus including a thin disc of a metal having a ceramic material layer and piezoresistive elements formed thereon. A surface of the disc is bonded to a diaphragm assembly on a pressure port base constructed of a low cost metal. The bonding pro... | 08/28/2007 |
| 7260996 | Pressure measuring apparatus and pressure sensor thereof The present invention relates to a pressure measuring apparatus, characterized in that: the pressure measuring apparatus comprises a pressure sensor having a first resistor for sensing an external stress and a second resistor acting as a reference, wherein the secon... | 08/28/2007 |
| 7254008 | Integrated capacitive microfluidic sensors method and apparatus A microfluidic device and method for capacitive sensing. The device includes a fluid channel including an inlet at a first end and an outlet at a second end, a cavity region coupled to the fluid channel, and a polymer based membrane coupled between the fluid channel... | 08/07/2007 |
| 7249515 | Capacitive pressure sensor For minimizing the span error of a pressure sensor having an essentially cylindrical platform and a measuring membrane joined to an end face of the platform, with the pressure measuring cell being axially clamped between an elastic sealing ring, which bears against ... | 07/31/2007 |
| 7243530 | Free fall sensor A free fall sensor includes an electrically conductive container, an electrically conductive pin having an end inserted into the container, and a movable electrode enclosed in the container, the movable electrode including a coil spring cantilevered on the end of th... | 07/17/2007 |
| 7240558 | Pressure sensor A pressure sensor for sensing a pressure level of a pressurized medium. The pressure sensor includes a housing that has a high pressure side, a low pressure side and an aperture. A substrate is located in the aperture. The substrate has a pair of ends and a center p... | 07/10/2007 |
| 7242089 | Miniature silicon condenser microphone A silicon condenser microphone package includes a transducer unit, a substrate, and a cover. The substrate includes an upper surface transducer unit is attached to the upper surface of the substrate and overlaps at least a portion of the recess wherein a back volume... | 07/10/2007 |
| 7242570 | Vacuum capacitor A vacuum capacitor including an insulating cylinder having first and second ends which are opposite to each other. A stationary-side flange is installed to the first end of the insulating cylinder. A stationary electrode supporting plate is installed to an inner sur... | 07/10/2007 |