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| Number | Title | Issue Date |
| 8102638 | Micro electromechanical capacitive switch A capacitive switch for microelectromechanical systems (MEMS) comprises a topmost metal plate which extends across a bridge structure formed by a polymer layer. The polymer layer comprises poly-monochoro-para-xylene (parylene-C). The space below the polymer layer co... | 01/24/2012 |
| 8027143 | MEMS tunable device A micro-electromechanical device has a substrate (60), a movable element (15), a pair of electrodes (40) arranged on the substrate and on the movable element to move the movable element, and a controller (50) to supply the electrodes. To ... | 09/27/2011 |
| 7903386 | Apparatus and method for drive controlling micro machine device In a method for drive controlling a micro machine device including two electrodes opposing each other and a dielectric layer sandwiched therebetween, a control voltage in a rectangular waveform in which positive and negative polarities are alternately inverted is ap... | 03/08/2011 |
| 7821768 | Laminated variable capacitor A laminated variable capacitor including: input-output terminals for inputting an alternating-current signal and outputting an output signal; and controlling terminals for controlling a capacitance value for voltage of the input alternating-current signal; wherein a... | 10/26/2010 |
| 7724494 | Variable capacitor and method of making the same A capacitor manufacturing method provides variable capacitors whose capacitances remain stable under the influence of temperature change. Such a variable capacitor includes a fixed electrode, a movable electrode film facing the fixed electrode, and an anchor portion... | 05/25/2010 |
| 7667946 | Tunable capacitor using electrowetting phenomenon A tunable capacitor using an electrowetting phenomenon includes a first electrode; a second electrode which is spaced apart from the first electrode and faces the first electrode; a fluidic channel which is disposed between the first electrode and the second electro... | 02/23/2010 |
| 7400489 | System and a method of driving a parallel-plate variable micro-electromechanical capacitor A method of driving a parallel-plate variable micro-electromechanical capacitor includes establishing a first charge differential across first and second conductive plates of a variable capacitor in which the first and second conductive plates are separated by a var... | 07/15/2008 |
| 7346981 | Method for fabricating microelectromechanical system (MEMS) devices A process for fabricating a MEMS device comprises the steps of depositing and patterning on one side of a wafer a layer of material having a preselected electrical resistivity; bonding a substrate to the one side of the wafer using an adhesive bonding agent, the sub... | 03/25/2008 |
| 7319580 | Collapsing zipper varactor with inter-digit actuation electrodes for tunable filters According to one embodiment a microelectromechanical (MEMS) switch is disclosed. The MEMS switch includes a substrate, a plurality of actuation electrodes mounted on the substrate, a plurality of bottom electrodes mounted on the substrate, a capacitor having subcomp... | 01/15/2008 |
| 7317233 | Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same There are many inventions described and illustrated herein. In one aspect, the present invention is directed to a MEMS device, and technique of fabricating or manufacturing a MEMS device having mechanical structures and anchors to secure the mechanical structures to... | 01/08/2008 |
| 7302858 | MEMS capacitive cantilever strain sensor, devices, and formation methods An embodiment of the invention provides a MEMS cantilever strain sensor. Capacitor plates in a MEMS device of the invention are carried on cantilevered opposing micro-scale plates separated by a micro-scale gap under an unstrained condition. At least one of the micr... | 12/04/2007 |
| 7282803 | Integrated electronic circuit comprising a capacitor and a planar interference inhibiting metallic screen An electronic circuit includes a substrate. A capacitor and at least one semiconductor component are supported by a surface of the substrate. A substantially planar screen, oriented parallel to the surface of the substrate and made of metallic material, is placed be... | 10/16/2007 |
| 7277267 | Multi-layer capacitive transducer A capacitive transducer of multi-layer construction includes two rotor plates supported by flexible springs, the plates being spaced apart and rigidly connected by a stem. One rotor plate my be used as either a pickup electrode or a grounded target electrode for det... | 10/02/2007 |
| 7274277 | Ferroelectric devices and method relating thereto The present invention relates to an electrically controllable/tunable microwave device comprising a ferroelectric substrate with a variable dielectric permitivity and conducting electrodes, arranged on said substrate, and the capacitance of which depends on applied ... | 09/25/2007 |
| 7265019 | Elastomeric CMOS based micro electromechanical varactor A micro electro-mechanical system (MEMS) variable capacitor is described, wherein movable comb electrodes of opposing polarity are fabricated simultaneously on the same substrate and are independently actuated. The electrodes are formed in an interdigitated fashion ... | 09/04/2007 |
| 7257281 | Method for fabricating thick film alumina structures used in high frequency, low loss applications and a structure resulting therefrom A method for fabricating thick film alumina structures used in high frequency, low loss applications is provided. More particularly, the invention is directed to a co-fire process for fabricating, or laminating, thick film structures to one another by printing a con... | 08/14/2007 |
| 7224040 | Multi-level thin film capacitor on a ceramic substrate In accordance with the teachings described herein, a multi-level thin film capacitor on a ceramic substrate and method of manufacturing the same are provided. The multi-level thin film capacitor (MLC) may include at least one high permittivity dielectric layer betwe... | 05/29/2007 |
| 7211923 | Rotational motion based, electrostatic power source and methods thereof A power system includes a member with two or more sections and at least one pair of electrodes. Each of the two or more sections has a stored static charge. Each of the pair of electrodes is spaced from and on substantially opposing sides of the member from the othe... | 05/01/2007 |
| 7177068 | Apparatus, method and system for providing enhanced mechanical protection for thin beams An arrangement for a micro-mechanical beam includes a support structure to provide an increase in bending stiffness of the micro-mechanical beam without significantly influencing torsional stiffness, where the support structure is configured to directly attach to th... | 02/13/2007 |
| 7155182 | Varactor with extended tuning range The invention proposes a device for high-frequency and/or radio-frequency tuning comprising within one IC-package a first variable capacitor (C1) and at least one second capacitor (C2), each of the at least one second capacitor (C2) ... | 12/26/2006 |
| 7126447 | RF-mems switch An RF-MEMS switch includes a plurality of movable electrodes disposed with a space provided therebetween in the direction of RF signal conduction of an RF signal-conducting unit which is provided above the RF signal-conducting unit. A movable electrode displacing un... | 10/24/2006 |
| 7092232 | Variable capacitance capacitor, circuit module, and communications apparatus A variable capacitance capacitor has a plurality of variable capacitance elements, using a thin-film dielectric layer whose dielectric constant varies with voltage application, connected in series with one another between the high-frequency signal input and output t... | 08/15/2006 |
| 7075209 | Compliant bistable micromechanism A method for designing and optimnizing compliant mechanisms is provided, in addition to bistable compliant mechanism designs. According to the method, a selected compliant structure may be modeled analytically, and the characteristics of the analytical model may be ... | 07/11/2006 |
| 7054132 | Variable capacitance element A variable capacitance element includes a movable element provided above a substrate using supporting portions and support beams so as to be displaced from the substrate. An insulating film and a movable electrode are provided on a conductor facing surface of the mo... | 05/30/2006 |
| 7045466 | Three dimensional high aspect ratio micromachining Multi-level structures are formed in a semiconductor substrate by first forming a pattern of lines or structures of different widths. Width information on the pattern is decoded by processing steps into level information to form a MEMS structure. The pattern is etch... | 05/16/2006 |
| 7032448 | Capacitive humidity sensor A capacitive humidity sensor includes a detection portion and a reference portion. The detection portion includes detection electrodes and a moisture sensitive film. The reference portion includes reference electrodes and a moisture permeation film as a capacitance ... | 04/25/2006 |
| 7031137 | Variable micro-capacitor with a high ratio and a low operating voltage A MEMS micro-capacitor having a variable capacity is disclosed. The MEMS micro-capacitor has at least one fixed electrode (3) positioned on one surface of a substrate (1); bending means with respect to the surface of the substrate including at least on... | 04/18/2006 |
| 7030463 | Tuneable electromagnetic bandgap structures based on high resistivity silicon substrates Electrically tunable electromagnetic bandgap (“TEBG”) structures using a ferroelectric thin film on a semiconductor substrate, tunable devices that include such a TEBG structure, such as a monolithic microwave integrated circuit (“MMIC”), and a method produc... | 04/18/2006 |
| 7031136 | Variable capacitors, composite materials Tunable capacitors (10, 20, 30, 40) have a dielectric material (16, 26, 36, 42) between electrodes, which dielectric material comprises an insulating material (17, 27, 37, 42) and electrically conductive material, (18, 28, 38, 48) e.g., c... | 04/18/2006 |
| 7027284 | Variable capacitance element A variable capacitance element includes a coplanar line or signal conduction and a movable body, which are vertically displaced through a supporting bar and which are provided on a substrate. A movable electrode is provided between a first driving electrode and seco... | 04/11/2006 |
| 7006342 | Variable capacitor having a rigidity-increasing feature A variable capacitor. The variable capacitor has a movable capacitor electrode including a major surface and a fixed capacitor electrode including a major surface. The major surface of the fixed capacitor electrode is opposite the major surface of the movable capaci... | 02/28/2006 |
| 6975498 | Variable capacitor A variable capacitor includes a stator and a rotor rotatably supported by a cover relative to the stator. The stator includes a first stator electrode of two or more layers and a second stator electrode of two or more layers in the interior of a dielectric substrate... | 12/13/2005 |
| 6952337 | Variable capacitor A variable capacitor is provided such that it is possible to make nonlinear distortion small and use at high power handling capability, and such that a variable rate of capacitance is not influenced by a high-frequency voltage substantially. A variable capacitor is ... | 10/04/2005 |
| 6944008 | Charge dissipation in electrostatically driven devices A charge-dissipation structure is formed within the dielectric of an electrostatically driven device, such as a micro-electro-mechanical systems (“MEMS”) device, by ion implantation. Electrical and other properties of the charge-dissipation structure may be cont... | 09/13/2005 |
| 6937456 | Direct digitally tunable microwave oscillators and filters A tunable element in the microwave frequency range is described that may include one or more tunable elements that are directly digitally controlled by a digital bus connecting a digital control circuit to each controlled element. In particular, each digital signal ... | 08/30/2005 |
| 6920311 | Adaptive radio transceiver with floating MOSFET capacitors An exemplary embodiment of the present invention described and shown in the specification and drawings is a transceiver with a receiver, a transmitter, a local oscillator (LO) generator, a controller, and a self-testing unit. All of these components can be packaged ... | 07/19/2005 |
| 6909589 | MEMS-based variable capacitor A variable capacitor device using MEMS or micromachining techniques wherein thin-films of materials are deposited, patterned and etched to form movable micromechanical elements on the surface of a substrate composed of either semiconductor, glass, metal, or ceramic ... | 06/21/2005 |
| 6853476 | Charge control circuit for a micro-electromechanical device A charge control circuit for controlling a micro-electromechanical device having a variable capacitance is disclosed. In one embodiment, a charge storage device is configured to store a charge amount. A switch circuit is configured to control the variable capacitanc... | 02/08/2005 |
| 6833985 | Variable capacitance element A variable capacitance element includes a coplanar line or signal conduction and a movable body, which are vertically displaced through a supporting bar and which are provided on a substrate. A movable electrode is provided between a first driving electrode and seco... | 12/21/2004 |
| 6738601 | Adaptive radio transceiver with floating MOSFET capacitors An exemplary embodiment of the present invention described and shown in the specification and drawings is a transceiver with a receiver, a transmitter, a local oscillator (LO) generator, a controller, and a self-testing unit. All of these components can be packaged ... | 05/18/2004 |
