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| Number | Title | Issue Date |
| 8057053 | Device for controlling temperature of an optical element A device serves for controlling temperature of an optical element provided in vacuum atmosphere. The device has a cooling apparatus having a radiational cooling part, arranged apart from the optical element, for cooling the optical element by radiation heat transfer... | 11/15/2011 |
| 8052289 | Mirror array for lithography A mirror array apparatus includes a carrier configured to support a plurality of individually adjustable reflective elements. At least one actuator is associated with each reflective element, the actuator being configured to adjust the orientation or position of the... | 11/08/2011 |
| 7740362 | Mirror with thermally controlled radius of curvature A radius of curvature controlled mirror for controlling precisely the focal point of a laser beam or other light beam. The radius of curvature controlled mirror provides nearly spherical distortion of the mirror in response to differential expansion between the fron... | 06/22/2010 |
| 7641349 | Systems and methods for collector mirror temperature control using direct contact heat transfer As disclosed herein, a device may comprise an optic disposed in a near vacuum environment, the optic formed with a surface portion; a temperature controlled member formed with a surface portion conforming to the optic surface portion; and a liquid interposed between... | 01/05/2010 |
| 7591561 | Liquid cooled mirror for use in extreme ultraviolet lithography Methods and apparatus for internally or directly cooling a mirror using a fluid with laminar flow properties are disclosed. According to one aspect of the present invention, an internally cooled mirror includes an optical surface that absorbs light, and at least one... | 09/22/2009 |
| 7374300 | Metal reflector and process for producing it The invention provides a process for producing a high-precision reflector and its coating. A reflector is produced from a solid material using a material-removing process and is coated with a cold-light mirror layer. ... | 05/20/2008 |
| 7362415 | Lithographic apparatus and device manufacturing method A system and method are used to allow for compensation of a thermal output of an array of individually controllable elements. This can be done by inputting control signals to the array when it is not being used to pattern a projection beam in order to maintain the t... | 04/22/2008 |
| 7360582 | Flow distributing unit and cooling unit having bypass flow A cooling unit for cooling in particular power semiconductors contains a distributor for guiding liquid across a surface to be cooled. The distributor comprises an inlet manifold (8) and outlet manifold (9), whereby the inlet and outlet manifolds are c... | 04/22/2008 |
| 7355672 | Method for the removal of deposition on an optical element, method for the protection of an optical element, device manufacturing method, apparatus including an optical element, and lithographic apparatus A method for the removal of a deposition on an optical element of an apparatus including the optical element includes providing an H2 containing gas in at least part of the apparatus includes producing hydrogen radicals from H2 from the H2... | 04/08/2008 |
| 7349063 | Reflection mirror apparatus, exposure apparatus and device manufacturing method A reflection mirror apparatus, used in a reflection optical system of an exposure apparatus which performs exposure processing by guiding exposure light by reflection, has a mirror having a reflection surface to reflect the exposure light, and radiation plates for r... | 03/25/2008 |
| 7347572 | Telescope mirror for high bandwidth free space optical data transmission Optical mirror elements for high bandwidth free space optical communication are produced by an electroforming replication technique. Onto the precision surface of a mandrel that is a negative of the required optical surface a layer of metal is deposited forming an e... | 03/25/2008 |
| 7329014 | Collector mirror for plasma-based, short-wavelength radiation sources The invention is directed to a collector mirror for short-wavelength radiation based on a plasma. It is the object of the invention to find a novel possibility for managing the temperature of a collector mirror for focusing short-wavelength radiation generated from ... | 02/12/2008 |
| 7330236 | Exposure apparatus, and device manufacturing method using the same Disclosed is an exposure apparatus having a specific structure that includes a cold trap plate for attracting contaminant substances which might cause a decrease of reflectance of a mirror when adhered thereto, and a radiation shield member for preventing excessive ... | 02/12/2008 |
| 7324262 | Optical shutter and light scanning apparatus employing the same An optical shutter includes a cell having a transparent panel and a hydrophobic transparent insulation panel which are arranged to face each other, a transparent electrode formed on an outer surface of the hydrophobic transparent insulation panel, and an opaque drop... | 01/29/2008 |
| 7295331 | Optical element with an optical axis The invention concerns an optical element (1) with an optical axis (3), designed in particular for an exposure lens used in semiconductor lithography. Said optical element comprises at least an extension (2, 2′) in the direction of the optical... | 11/13/2007 |
| 7292307 | Cooling apparatus, optical element having the same, and exposure apparatus A cooling apparatus for use with an optical element having a concave part includes a cooling mechanism, located in the concave part of the optical element, for cooling the optical element through radiation in a non-contact manner. ... | 11/06/2007 |
| 7264363 | Deformable-mirror cooling This invention relates to a cooled deformable-mirror and its mount. A deformable mirror is provided comprising a reflective element provided on a substrate that is secured to a deformable element, wherein the substrate comprises at least one channel having a pair of... | 09/04/2007 |
| 7249858 | Heat storage equipment for mirrors Compact features provide faster and more efficient gathering and storage of a sufficient reservoir of heated water to heat a shaving mirror to non-fogging temperature. The features are arranged on the vertical surfaces of the mirror to enable water to enter the rese... | 07/31/2007 |
| 7227635 | Device and method for positioning a sample mounted on a glow discharge spectrometer This invention relates to a device and a method for positioning a sample (8) mounted on a glow discharge spectrometer (6). A sample (8) to be analyzed is mounted on the first electrode means (5) of a glow discharge spectrometer (6)... | 06/05/2007 |
| 7211299 | UV curing method and apparatus A UV curing apparatus and method is provided for enhancing UV curing of inks, coatings and adhesives having UV photo initiators therein by subjecting the UV curable inks, coatings or adhesives to UV light at different wavelengths. Preferably, the UV LED assemblies a... | 05/01/2007 |
| 7193772 | Conductively cooled liquid thermal nonlinearity cell for phase conjugation and method A thermal nonlinear cell and method. The cell includes a substantially planar nonlinear medium and a mechanism for removing thermal energy from the medium in a direction substantially orthogonal to said medium. In one embodiment, the mechanism for removing thermal e... | 03/20/2007 |
| 7188964 | Integrated actuator meniscus mirror An integrated actuator meniscus mirror includes an optical substrate having a mirror surface on one side and a support structure on the other and a plurality of actuators embedded in the support structure, spaced from and generally parallel to the mirror surface for... | 03/13/2007 |
| 7187399 | Exposure head with spatial light modulator In an exposure head of the invention, plural first micro-focusing elements are arranged in a first microlens array so as to correspond to plural micromirrors in a DMD. An aperture array that includes plural apertures arranged so as to respectively correspond to the ... | 03/06/2007 |
| 7175712 | Light emitting apparatus and method for curing inks, coatings and adhesives A UV curing apparatus and method is provided for enhancing the distribution and application of UV light to UV photo initiators in a UV curable ink, coating or adhesive. The UV curing apparatus and method comprises UV LED assemblies in a first row with the UV LED ass... | 02/13/2007 |
| 7165854 | Reflecting mirror and its fabrication method A reflecting mirror fabrication method, which includes the steps of (a) stamping a steel plate into a back panel, which has a rib-reinforced base, a rim extending around the rib-reinforced base, (b) installing nuts in the back side of the back panel for mounting, (c... | 01/23/2007 |
| 7161658 | Lithographic apparatus and device manufacturing method A lithographic apparatus is disclosed. The apparatus includes a projection optics assembly for projecting a patterned beam of radiation onto a target portion of a substrate. The assembly includes a plurality of movable optical elements and a plurality of sensor unit... | 01/09/2007 |
| 7125128 | Adaptive-optics actuator arrays and methods for using such arrays Actuator arrays for use in adaptive-optical elements and optical systems containing at least one such element are disclosed. The actuator arrays provide more precise control of the shape of the adaptive-optical surface while utilizing fewer actuators than convention... | 10/24/2006 |
| 7095480 | Cooling apparatus A cooling apparatus arranged in a vacuum or reduced pressure atmosphere for use with an optical element having an illuminated area onto which light is irradiated concave part includes a temperature variation mechanism that changes a temperature of part of the coolin... | 08/22/2006 |
| 7092144 | Mirror assemblies incorporating variable index of refraction materials A mirror assembly including an active lens and a reflective surface. The mirror assembly may change its refractive index when a voltage is applied to the active lens, thereby changing the field of view in the lens. Exemplary applications include a blind spot system ... | 08/15/2006 |
| 7051800 | Hot plate cooling system A cooling system for a hot plate. The cooling system includes a plurality of pipelines inside the hot plate. Each pipeline has an inlet and an outlet. The inlet permits a cooling fluid to enter and the outlet permits the cooling fluid to leave. The cooling fluid run... | 05/30/2006 |
| 7050149 | Exposure apparatus and exposure method An exposure apparatus able to maintain reflectances of mirrors and transmittances of lenses and to maintain initial performance over a long period by using exposure light of a wavelength of the vacuum ultraviolet region to illuminate a mask and transfer images of pa... | 05/23/2006 |
| 6992306 | Temperature adjustment apparatus, exposure apparatus having the same, and device fabricating method A temperature adjustment apparatus for adjusting the temperature of an optical member includes a first radiation mechanism, with a first radiation member, that transfers the radiation heat between a predetermined area of the optical member and for adjusting the temp... | 01/31/2006 |
| 6986585 | Radius of curvature controlled mirror A controlled radius of curvature mirror assembly comprising: a distortable mirror having a reflective surface and a rear surface; and in descending order from the rear surface; a counter-distortion plate; a flow diverter having a flow diverter aperture at the center... | 01/17/2006 |
| 6959992 | Adaptive mirror comprising cooling channels A mirror, in particular an adaptive mirror configured as a laser beam guidance component. The mirror comprises a housing, to which a mirror element that is optionally deformable is allocated. The aim of the invention is to construct the mirror element with an oval, ... | 11/01/2005 |
| 6947201 | Transverse electrodisplacive actuator array A transverse electrodisplacive actuator array for controlling the optical phasing of a reflective surface includes a support structure; a plurality of electrodisplacive actuator elements extending from a proximate end at the support structure to a distal end; each a... | 09/20/2005 |
| 6942352 | Transfer optics A transfer optic mirror thin enough to permit small influence functions for surface changes is made from cynate ester composites. The thin mirror resulting is then shaped by a plurality of piezolectric actuators connectors to push/pull rods spread evenly over the ba... | 09/13/2005 |
| 6911110 | Thermally controlled solar reflector facet with heat recovery A high concentration central receiver system and method provides improved reflectors and a unique heat removal system. The central receiver has a plurality of interconnected reflectors coupled to a tower structure at a predetermined height above ground for reflectin... | 06/28/2005 |
| 6906865 | Light altering device A line producing system includes an input beam of radiant energy that enters a side of a low cost, radiant energy altering device. The radiant energy emerges from the light altering device radiating in a nearly 360 degree disc pattern forming a ring of ever expandin... | 06/14/2005 |
| 6906864 | Light altering device A line producing system includes an input beam of radiant energy that enters a side of a low cost, radiant energy altering device. The radiant energy emerges from the light altering device radiating in a nearly 360 degree disc pattern forming a ring of ever expandin... | 06/14/2005 |
| 6877869 | Mirror for laser applications and method for manufacture of said mirror A mirror for laser application and a method for manufacturing the mirror is disclosed herein. The mirror comprises several layers including a top layer used as the mirror surface. A cooling structure including a plurality of cooler layers are providing between the t... | 04/12/2005 |
