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Class 359/731 - With concave and convex reflectors in series


Subclass of Class 359 - Optical: systems and elements
Definition: Subject matter where the lens system includes both concave
No. of patents: 155
Last issue date: 04/24/2012


1        
NumberTitleIssue Date
8164838Projection optical system and projection type image display device
A projection optical system includes: a refracting optical section composed mainly of a plurality of lenses disposed in order from a reducing side, and having positive power; a first reflecting optical section having a concave reflecting optical surface; and a secon...
04/24/2012
7957078Projection optical system and projection type image display device
A projection optical system includes: a refracting optical section composed mainly of a plurality of lenses disposed in order from a reducing side, and having positive power; a first reflecting optical section having a concave reflecting optical surface; and a secon...
06/07/2011
7701647Compact fast catadioptric imager
A compact, optically fast catadioptric imager. In one embodiment, the catadioptric imager of this invention includes a first group of optical elements optically disposed to receive electromagnetic radiation from an object and having positive optical power, a second ...
04/20/2010
7446952Catadioptric projection objective
A catadioptric projection objective for imaging an off-axis effective object field arranged in an object surface of the projection objective onto an off-axis effective image field arranged in an image surface of the projection objective has: an optical axis; an effe...
11/04/2008
7414781Catoptric objectives and systems using catoptric objectives
In general, in a first aspect, the invention features a system that includes a microlithography projection optical system. The microlithography projection optical system includes a plurality of elements arranged so that during operation the plurality of elements ima...
08/19/2008
7359050Compact triple pass hyperspectral imager
A compact, triple pass hyperspectral imager (spectrometer). The hyperspectral imager (imaging system) of this invention includes an optical sub-system, a reflective slit element, a reflective dispersive element located substantially at a front plane, the front plane...
04/15/2008
7300185Quadrilateral symmetrical light source
A reflector for focusing light emitted from a light source in a generally planar direction is disclosed. The reflector is matched with the light source that is preferably a light emitting diode (LED) mounted on a substrate. The reflector is mounted over the LED on t...
11/27/2007
7283204Method of producing an optical imaging system
A method of producing an optical imaging system having a plurality of optical elements after the imaging system is initially assembled and adjusted. During a subsequent measurement of the imaging system, the wavefront errors in the exit pupil, or an area conjugate t...
10/16/2007
7271905Method and apparatus for self-referenced wafer stage positional error mapping
A wafer stage overlay error map is created using standard overlay targets and a special numerical algorithm. A reticle including a 2-dimensional array of standard overlay targets is exposed several times onto a photoresist coated silicon wafer using a photolithograp...
09/18/2007
7268956Solid catadioptric lens with two viewpoints
A dual viewpoint solid catadioptric lens has a first spherical refractive surface S1 having a center C1 located on an optical axis of the lens and having a radius r1, and a second spherical refractive surface S2 having a center C2 ...
09/11/2007
7265829Reflective optic system for imaging microplate readers
A reflective light imaging system for use in high-throughput screening of samples disposed in multiple-well plates. The system can include a set of mirrors and lenses. The first mirror has a central aperture through which light from the object passes. The first mirr...
09/04/2007
7252411Device for depicting a linear optical marking
A device for depicting a linear optical marking (36, 38) in a room, including a housing (11) with a light source (16, 18) that emits the light along an optical axis (15, 17), as well as a lens (28, 30) that both reflects the light ...
08/07/2007
7239453Projection optical system and projection exposure apparatus
A catadioptric projection optical system includes a first optical system, for receiving light from an object, a second optical system, for forming an image of the object on an image plane, and a third optical system disposed optically between the first optical syste...
07/03/2007
7237915Catadioptric projection system for 157 nm lithography
A photolithographic reduction projection catadioptric objective includes a first optical group G1 including an even number of at least four mirrors M1–M6; and a second at least substantially dioptric optical group G2 imageward than the ...
07/03/2007
7218445Microlithographic reduction projection catadioptric objective
A photolithographic reduction projection catadioptric objective includes a first optical group having an even number of at least four mirrors and having a positive overall magnifying power, and a second substantially refractive optical group more image forward than ...
05/15/2007
7177104Image-taking optical system
An image-taking optical system for forming an optical image of an object on the light-receiving surface of an image sensor includes a plurality of optical blocks. The optical blocks each have a prism unit provided with a curved surface and an optical unit composed o...
02/13/2007
7158215Large field of view protection optical system with aberration correctability for flat panel displays
An exposure system for manufacturing flat panel displays (FPDs) includes a reticle stage adapted to support a reticle. A substrate stage is adapted to support a substrate. A reflective optical system is adapted adapted to image the reticle onto the substrate. The re...
01/02/2007
7136235Optical apparatus
The present invention provides an optical apparatus including an objective lens system for focusing optical radiation from a scene or object into an intermediate image and has at least one lens element which imposes a substantial degree of negative distortion on the...
11/14/2006
7092168Projection optical system and projection exposure apparatus
A catadioptric projection optical system for projecting an image of an object onto an image plane through two intermediate image formations. The catadioptric projection optical system includes a first optical system, for receiving light from the object, including a ...
08/15/2006
7088526Lens collimator and method of producing optical signals with reduced aberrations
A lens collimator according to the present invention includes a plurality of lens elements bonded together. The lens elements, preferably three, each include spherical surfaces and are generally concentrically disposed relative to each other. The lens elements are a...
08/08/2006
7085075Projection objectives including a plurality of mirrors with lenses ahead of mirror M3
According to one exemplary embodiment, a projection objective is provided and includes at least two non-planar (curved) mirrors, wherein an axial distance between a next to last non-planar mirror and a last non-planar mirror, as defined along a light path, is greate...
08/01/2006
7082001Dual mode mirror imaging system
A dual mode mirror imaging system is described having a Cassegrain-type objective assembly having a primary mirror with a hole in its center and a secondary mirror spaced in front of the primary mirror, and imager optics disposed in the hole. The secondary mirror is...
07/25/2006
7079314Catadioptric optical system and exposure apparatus equipped with the same
A catadioptric optical system comprising a first imaging optical system for forming an intermediate image of a first plane surface, a second imaging optical system for forming a final image of the first plane surface onto a second plane surface which is substantiall...
07/18/2006
7075726Projection optical system and projection exposure apparatus
A projection optical system projects an image of an object onto an image plane, and includes a first imaging optical system for forming an image of the object, and a second imaging optical system for re-imaging the image upon the image plane, wherein the first and s...
07/11/2006
7055972Device for an optical system
An optical device includes an objective and a detector or reticle interacting with the objective via a stop aperture. A decentralizing function for the objective and stop relative to the detector or the reticle is arranged to prevent beams reflected byte surface or ...
06/06/2006
7053986Projection optical system, exposure apparatus, and device manufacturing method
A projection optical system projects an image of a first object onto a second object. A first imaging optical system forms a first intermediate image of the first object, and is a refractive optical system. A second imaging optical system forms a second intermediate...
05/30/2006
7046459Catadioptric reductions lens
A catadioptric projection lens for imaging a pattern arranged in an object plane while creating a real intermediate image, having a catadioptric first lens section having a concave mirror and a beam-deflection device, as well as a dioptric second lens section that f...
05/16/2006
7016124Image-formation optical system and optical apparatus
An image-formation optical system is disclosed which is an off-axial optical system configured using reflective surfaces, with which the performance deterioration with respect to manufacturing discrepancies is reduced, and which can be made sufficiently compact. The...
03/21/2006
7002154Optical system for a wide field of view staring infrared sensor having improved optical symmetry
A wide-angle IR imaging system (1A) has an entrance aperture (40) for admitting IR from a scene and a dewar (4A) that contains a coldshield (3) that encloses a cooled IR detector (2) disposed at an image plane (2A). The dewa...
02/21/2006
6995918Projection optical system and projection exposure apparatus
A projection optical system for projecting an image of an object onto an image plane. The projection optical system includes a first imaging optical system for forming an image of the object in which the first imaging optical system includes a first mirror for refle...
02/07/2006
6995930Catadioptric projection objective with geometric beam splitting
A projection exposure lens has an object plane, optical elements for separating beams, a concave mirror, an image plane, a first lens system arranged between the object plane and the optical elements for separating beams, a second double pass lens system arranged be...
02/07/2006
6995886Optical scanning device
An optical scanning device is suitable for scanning a first information layer (23) of a first optical record carrier (21) with a first radiation beam (27) and a second information layer (47) of a second optical record carrier (45) ...
02/07/2006
6995833Projection optical system, exposure apparatus, and device manufacturing method
A projection optical system for projecting an image of a first object onto a second object includes a first imaging optical system that forms a first intermediate image of the first object, and includes a lens, a second imaging optical system that forms a second int...
02/07/2006
6963395Method and apparatus for inspecting an EUV mask blank
An apparatus and method for at-wavelength EUV mask-blank characterization for inspection of moderate and low spatial frequency coating uniformity using a synchrotron or other source of EUV light. The apparatus provides for rapid, non-destruction, non-contact, at-wav...
11/08/2005
6956694Broad spectrum ultraviolet inspection systems employing catadioptric imaging
An ultraviolet (UV) catadioptric imaging system, with broad spectrum correction of primary and residual, longitudinal and lateral, chromatic aberrations for wavelengths extending into the deep UV (as short as about 0.16 μm), comprises a focusing lens group with mul...
10/18/2005
6947210Catoptric projection optical system, exposure apparatus and device fabrication method using same
A catoptric projection optical system for projecting a pattern on an object surface onto an image surface and for serving as an imaging system that forms an intermediate image includes first, second, third and fourth mirrors serving substantially as a coaxial system...
09/20/2005
6947189Apparatus and method for optical raster-scanning in a micromechanical system
A method of operating a micromechanical scanning apparatus includes the steps of identifying a radius of curvature value for a micromechanical mirror and modifying a laser beam to compensate for the radius of curvature value. The identifying step includes the steps ...
09/20/2005
6940803Optical head, recording and reproducing apparatus and solid immersion lens
A recording and reproducing apparatus has an optical head that is provided with a laser light source for emitting light and a reflection converging optical system. The reflection converging optical system reflects light emitted from the laser light source, and conve...
09/06/2005
6902282Fast, wide-field-of-view, relayed multimirror optical system
An all-reflective, relayed optical system is arranged along a beam path. The optical system includes a first mirror having positive optical power, and a second mirror having a negative optical power, wherein the second mirror receives the beam path reflected from th...
06/07/2005
6900951Display optical system
The invention relates to a small-format display optical system using a reflection type image device as an image display device and capable of displaying bright, high-resolution images. The display optical system comprises a reflection type display device 3 fo...
05/31/2005
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