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| Number | Title | Issue Date |
| 8107147 | Two-mirror scanning system A scanning beam projection system includes a two-mirror scanning system. One mirror scans in one direction, and a second mirror scans in a second direction. A fast scan mirror receives a modulated light beam from a fold mirror and directs the modulated light beam to... | 01/31/2012 |
| 7397615 | Directing electromagnetic energy from an area or volume source An eye mirror in which a first defining ray 5 is reflected from a further defined mirror 2 and intersects a fixed defined unit 75 at a respective further point 8 within a circular cone 91 defined by the angular input aperture at th... | 07/08/2008 |
| 7391580 | Ultra compact mono-bloc catadioptric imaging lens A mono-bloc catadioptric imaging lens comprising a solid body and a single-focal Maksutov type construction characterized by two refractive surfaces and two reflective surfaces wherein all surfaces are surfaces of revolution and wherein at least one surface is asphe... | 06/24/2008 |
| 7385756 | Catadioptric projection objective A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective comprises: a first objective part for imaging the pattern provided in the object plane into a first inte... | 06/10/2008 |
| 7348575 | Projection optical system, exposure apparatus, and exposure method A catadioptric projection optical system for forming a reduced image of a first surface (R) on a second surface (W) is a relatively compact projection optical system having excellent imaging performance as well corrected for various aberrations, such as chromatic ab... | 03/25/2008 |
| 7317583 | High numerical aperture projection system and method for microlithography The present invention relates to a high numerical aperture exposure system having a wafer. The exposure system in the present invention includes a beam-splitter, a reticle, a reticle optical group, where the reticle optical group is placed between the reticle and th... | 01/08/2008 |
| 7312463 | Projection optical system, exposure apparatus, and exposure method A catadioptric projection optical system for forming a reduced image of a first surface (R) on a second surface (W) is a relatively compact projection optical system having excellent imaging performance as well corrected for various aberrations, such as chromatic ab... | 12/25/2007 |
| 7309870 | Projection optical system, exposure apparatus, and exposure method A catadioptric projection optical system for forming a reduced image of a first surface (R) on a second surface (W) is a relatively compact projection optical system having excellent imaging performance as well corrected for various aberrations, such as chromatic ab... | 12/18/2007 |
| 7253970 | Reflective optical system A lens arrangement is presented. The lens arrangement comprises a first element having a concave reflective surface and defining an optical axis of the lens arrangement, and a second substantially flat and at least partially reflective element spaced-apart from the ... | 08/07/2007 |
| 7247874 | Device for detecting information contained in a phosphor layer Device for detecting information which is contained in a phosphor layer, with multiple individual radiation sources for emitting stimulation light incident upon the phosphor layer along a stimulation line and suitable for stimulating emission light in the phosphor l... | 07/24/2007 |
| 7237915 | Catadioptric projection system for 157 nm lithography A photolithographic reduction projection catadioptric objective includes a first optical group G1 including an even number of at least four mirrors M1–M6; and a second at least substantially dioptric optical group G2 imageward than the ... | 07/03/2007 |
| 7230774 | Image display device and adjustment for alignment An image display device comprises an optical imaging arrangement for providing image information to illumination light and for transmitting the light as an optical image signal; a display for receiving the optical image signal and for displaying an image based on th... | 06/12/2007 |
| 7227705 | Wide-angle optical system A wide-angle optical system (2, 40) having an objective (4, 42) and a mirror system, including a curved mirror (6, 46) for projecting a wide-angle image through the objective (4, 42) onto a detector (10, 44). At least one mirror ( | 06/05/2007 |
| 7224520 | Compact fast catadioptric imager A compact, optically fast catadioptric imager. In one embodiment, the catadioptric imager of this invention includes a first group of optical elements optically disposed to receive electromagnetic radiation from an object and having positive optical power, a second ... | 05/29/2007 |
| 7224460 | Mapping-measurement apparatus A mapping-measurement apparatus includes a light illumination unit, a photodetector for detecting, through an aperture, reflection light or transmission light from a sample, and adjustable scanning mirrors on the illumination and detection sides of the sample, each ... | 05/29/2007 |
| 7199862 | Beam-splitter optics design that maintains an unflipped (unmirrored) image for a catadioptric lithographic system The present invention is a catadioptric system having a reticle optical group, a beam splitter, an aspheric mirror, a baffle plate, a folding mirror and a semiconductor wafer optical group. The reticle optical group, the beam splitter and the semiconductor wafer opt... | 04/03/2007 |
| 7199946 | Systems configured to provide illumination of a specimen during inspection Systems configured to provide illumination of a specimen during inspection are provided. One system includes catoptric elements configured to direct light from a light source to a line across the specimen at an oblique angle of incidence. The catoptric elements incl... | 04/03/2007 |
| 7180542 | Imaging lens device and digital camera having the imaging lens device Imaging lens device has a zoom lens system and an image sensor. The zoom lens system has a first reflecting surface, a first movable lens unit, an aperture stop, a second reflecting surface, a second movable lens unit. A first reflecting surface bends a first optica... | 02/20/2007 |
| 7177104 | Image-taking optical system An image-taking optical system for forming an optical image of an object on the light-receiving surface of an image sensor includes a plurality of optical blocks. The optical blocks each have a prism unit provided with a curved surface and an optical unit composed o... | 02/13/2007 |
| 7167584 | Device for acquiring a three-dimensional shape by optoelectronic process The invention concerns a device for acquiring the three-dimensional shape of an object (10) by opto-electronic process, comprising a chromatic system (18) for illuminating the object (10) and for picking up the light reflected or backscattered b... | 01/23/2007 |
| 7158215 | Large field of view protection optical system with aberration correctability for flat panel displays An exposure system for manufacturing flat panel displays (FPDs) includes a reticle stage adapted to support a reticle. A substrate stage is adapted to support a substrate. A reflective optical system is adapted adapted to image the reticle onto the substrate. The re... | 01/02/2007 |
| 7154678 | Projection objective having adjacently mounted aspheric lens surfaces A projection objective has at least five lens groups (G1 to G5) and has several lens surfaces. At least two aspheric lens surfaces are arranged so as to be mutually adjacent. These mutually adjacently arranged lens surfaces are characterized as a doubl... | 12/26/2006 |
| 7133217 | Image-taking optical system and image input apparatus An image-taking optical system according to the present invention for forming an image of a two-dimensional object on an image-taking surface comprises a plurality of reflecting surfaces which reflect light from the two-dimensional object sequentially and guides the... | 11/07/2006 |
| 7130114 | Catoptric optical system There is provided a compact, strong and high-performance catoptric optical system. This catoptric optical system has plural optical curved reflective surfaces. A gap between a pair of reflective surfaces, through which light incident upon said catoptric projection o... | 10/31/2006 |
| 7123420 | Imaging optical system A luminous flux, from one conjugate surface (A), having an opening angle of at least 10° sequentially passes through a first optical system (30) having a luminous flux convergent action in the vicinity of its reference axis and a second optical system (31... | 10/17/2006 |
| 7116496 | High NA large-field unit-magnification projection optical system An optical system for projection photolithography is disclosed. The optical system is a modified Dyson system capable of imaging a large field over both a narrow and a broad spectral range. The optical system includes a positive lens group having a positive subgroup... | 10/03/2006 |
| 7092168 | Projection optical system and projection exposure apparatus A catadioptric projection optical system for projecting an image of an object onto an image plane through two intermediate image formations. The catadioptric projection optical system includes a first optical system, for receiving light from the object, including a ... | 08/15/2006 |
| 7088526 | Lens collimator and method of producing optical signals with reduced aberrations A lens collimator according to the present invention includes a plurality of lens elements bonded together. The lens elements, preferably three, each include spherical surfaces and are generally concentrically disposed relative to each other. The lens elements are a... | 08/08/2006 |
| 7088506 | Compact spotting scope with side focus control A compact spotting scope includes a housing with an outer surface having a grasping region sized and shaped to fit in the palm of a user's hand so that the spotting scope can be held at eye level with one hand in an ergonomic arm and wrist position for steady suppor... | 08/08/2006 |
| 7079314 | Catadioptric optical system and exposure apparatus equipped with the same A catadioptric optical system comprising a first imaging optical system for forming an intermediate image of a first plane surface, a second imaging optical system for forming a final image of the first plane surface onto a second plane surface which is substantiall... | 07/18/2006 |
| 7075726 | Projection optical system and projection exposure apparatus A projection optical system projects an image of an object onto an image plane, and includes a first imaging optical system for forming an image of the object, and a second imaging optical system for re-imaging the image upon the image plane, wherein the first and s... | 07/11/2006 |
| 7072102 | Methods for reducing polarization aberration in optical systems An optical system includes multiple cubic crystalline optical elements and one or more uniaxial birefringent elements in which the crystal lattices of the cubic crystalline optical elements are oriented with respect to each other to reduce the effects of intrinsic b... | 07/04/2006 |
| 7027219 | Method and system for mirror telescope configuration The invention provides a telescope system for inputting an image and presenting the image to a user. The telescope system includes a first array of flat mirrors including a plurality of first mirrors, the image, being light information, incident upon and reflected b... | 04/11/2006 |
| 6995918 | Projection optical system and projection exposure apparatus A projection optical system for projecting an image of an object onto an image plane. The projection optical system includes a first imaging optical system for forming an image of the object in which the first imaging optical system includes a first mirror for refle... | 02/07/2006 |
| 6995930 | Catadioptric projection objective with geometric beam splitting A projection exposure lens has an object plane, optical elements for separating beams, a concave mirror, an image plane, a first lens system arranged between the object plane and the optical elements for separating beams, a second double pass lens system arranged be... | 02/07/2006 |
| 6972830 | Beam-splitter optics design that maintains an unflipped (unmirrored) image for a catadioptric lithographic system The present invention is a catadioptric system having a reticle optical group, a beam splitter, an aspheric mirror, a baffle plate, a folding mirror and a semiconductor wafer optical group. The reticle optical group, the beam splitter and the semiconductor wafer opt... | 12/06/2005 |
| 6956694 | Broad spectrum ultraviolet inspection systems employing catadioptric imaging An ultraviolet (UV) catadioptric imaging system, with broad spectrum correction of primary and residual, longitudinal and lateral, chromatic aberrations for wavelengths extending into the deep UV (as short as about 0.16 μm), comprises a focusing lens group with mul... | 10/18/2005 |
| 6950240 | Imaging optical system A luminous flux, from one conjugate surface (A), having an opening angle of at least 10° sequentially passes through a first optical system (30) having a luminous flux convergent action in the vicinity of its reference axis and a second optical system (31... | 09/27/2005 |
| 6947221 | Imaging optical system A luminous flux, from one conjugate surface (A), having an opening angle of at least 10° sequentially passes through a first optical system (30) having a luminous flux convergent action in the vicinity of its reference axis and a second optical system (31... | 09/20/2005 |
| 6917478 | Scanning head lens assembly An optical head assembly, method, and procedure which generates and then precisely positions multiple light beams onto a target. The system diffracts an input light source into a multiple light beam pattern, or initially generates a multiple light beam pattern, in w... | 07/12/2005 |
