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| Number | Title | Issue Date |
| 8049966 | External-cavity one-dimensional multi-wavelength beam combining of two-dimensional laser elements An external-cavity one-dimensional multi-wavelength beam combiner that performs wavelength beam combining along a stacking dimension of a laser stack formed of a plurality of laser arrays, each laser array configured to generate optical radiation having a unique wav... | 11/01/2011 |
| 8023193 | Illumination system An illumination system including at least one coherent light source, a light uniforming device and a lenticular sheet module is provided. The coherent light source is capable of emitting a coherent beam. The light uniforming device is disposed on a transmission path... | 09/20/2011 |
| 7916397 | Micro array lens using optical fiber An optical fiber micro array lens is provided along with an associated fabrication method. The micro array lens is fabricated from a mesh of optical fibers. The mesh includes a first plurality of cylindrical optical fibers. Each fiber from the first plurality has a ... | 03/29/2011 |
| 7821718 | Laser line generator A laser beam emission is collimated by optics. The collimated beam is shaped into an expanding planar laser beam by line generator optics. The expanding planar laser beam is collimated by other optics such that a beam having a generally rectangular cross-section is ... | 10/26/2010 |
| 7768706 | Optical fiber micro array lens An optical fiber micro array lens is provided along with an associated fabrication method. The micro array lens is fabricated from a mesh of optical fibers. The mesh includes a first plurality of cylindrical optical fibers. Each fiber from the first plurality has a ... | 08/03/2010 |
| 7706072 | Optical integrator, illumination optical device, photolithograph, photolithography, and method for fabricating device An optical integrator has characteristics to suppress influence of relative positioning error of a pair of optical members on an illuminance distribution and on a shape of an illumination field. The optical integrator is a wavefront splitting type optical integrator... | 04/27/2010 |
| 7483214 | Lens array sheet, transparent screen, and rear-projection display A lens array sheet, a transparent screen using the same, and a rear-projection display device are provided in which it is possible to control a perspective angle for the image in both a horizontal direction and a vertical direction without causing a problem in that ... | 01/27/2009 |
| 7394595 | Lenslet array for beam homogenization Apparatus for homogenizing a laser beam includes a lenslet array. In some embodiments, the lenslets have a negative power. The lenslet array may include from 16 to 36 effective lenslets in some embodiments, or any other suitable number in alternative embodiments. So... | 07/01/2008 |
| 7379160 | Optical integrator, illumination optical device, exposure apparatus, and exposure method An optical integrator having characteristics to reduce effects of manufacturing errors of many minute refraction surfaces integrally formed by, for example, etching on an illumination intensity distribution. An optical integrator (8) comprising an integrally ... | 05/27/2008 |
| 7362784 | Laser irradiation method, laser irradiation apparatus, and semiconductor device An object of the present invention is obtaining a semiconductor film with uniform characteristics by improving irradiation variations of the semiconductor film. The irradiation variations are generated due to scanning while irradiating with a linear laser beam of th... | 04/22/2008 |
| 7355794 | Lenslet array for beam homogenization Apparatus for homogenizing a laser beam includes a lenslet array. In some embodiments, the lenslets have a negative power. The lenslet array may include from 16 to 36 effective lenslets in some embodiments, or any other suitable number in alternative embodiments. So... | 04/08/2008 |
| 7336685 | Laser irradiation apparatus, laser irradiation method, and method for manufacturing a semiconductor device YAG laser can simultaneously emit a plurality of laser beams having different wavelengths from each other. By simultaneously irradiating the laser beams having different wavelengths from each other to a same region of a non-single crystal semiconductor film, an inte... | 02/26/2008 |
| 7279721 | Dual wavelength thermal flux laser anneal A thermal processing apparatus and method in which a first laser source, for example, a CO2 emitting at 10.6 μm is focused onto a silicon wafer as a line beam and a second laser source, for example, a GaAs laser bar emitting at 808 nm is focused onto the... | 10/09/2007 |
| 7268950 | Variable optical arrays and variable manufacturing methods The invention divides the lens focusing process into two or more surfaces that incorporate multiple curved axial optic elements on each surface. The axial optics may be manufactured by molding, machining, or by suspended film. If suspended film is used, then both si... | 09/11/2007 |
| 7242457 | Exposure apparatus and exposure method, and device manufacturing method using the same Disclosed is an exposure apparatus and method, and a device manufacturing method using the same. An exposure apparatus according to one preferred form of the invention includes an illumination optical system for illuminating an original with light from a light sourc... | 07/10/2007 |
| 7241027 | Illumination system providing light of Gaussian distribution, projection system, and method of forming color image An illumination system includes a light source, first and second cylindrical lens arrays, and a relay lens. The first cylindrical lens array includes a plurality of cylindrical lens cells which divide light emitted from the light source into a plurality of beams. Th... | 07/10/2007 |
| 7236239 | Illumination system and exposure apparatus Disclosed is an illumination system for illuminating a surface to be illuminated, with light from a light source, the illumination system including a first optical integrator having a plurality of lens groups, for forming a plurality of first secondary light sources... | 06/26/2007 |
| 7215475 | Lens array structure A lens array structure comprises two birefringent lens arrays arranged in series, both being capable of operating to direct incident light of one polarisation into a respective directional distribution and to have substantially no effect on incident light of a polar... | 05/08/2007 |
| 7206132 | Lenslet array for beam homogenization Apparatus for homogenizing a laser beam includes a lenslet array. In some embodiments, the lenslets have a negative power. The lenslet array may include from 16 to 36 effective lenslets in some embodiments, or any other suitable number in alternative embodiments. So... | 04/17/2007 |
| 7199930 | Light modulation element The present invention discloses a light modulation element, having a first optical surface and a second optical surface receiving an incident light, the light modulation element comprising: at least a transparent diffusion unit, for scattering the incident light, ea... | 04/03/2007 |
| 7187507 | Optical component and laser irradiation apparatus The present invention provides an optical component for fixing a lens comprising a base, a holder, and a fastener. The base has a concave side surface and at least one first hole. The holder has a cylindrical shape and has a second hole penetrating through a center ... | 03/06/2007 |
| 7187430 | Advanced illumination system for use in microlithography A system for microlithography comprises an illumination source; an illumination optical system including, in order from an objective side, (a) a first diffractive optical element that receives illumination from the illumination source, (b) a zoom lens, (c) a second ... | 03/06/2007 |
| 7142285 | Illumination system particularly for microlithography There is provided an illumination system for microlithography with wavelengths≦193 nm. The illumination system includes a primary light source, a first optical component, a second optical component, an image plane, and an exit pupil. The first optical component tr... | 11/28/2006 |
| 7126137 | Illumination system with field mirrors for producing uniform scanning energy This invention relates to an Ilumination system for scanning lithography especially for wavelengths≦193 nm, particularly EUV lithography, for the illumination of a slit, comprising at least one field mirror or at least one field lens and being characterized in tha... | 10/24/2006 |
| 7112477 | Beam homogenizer laser irradiation, apparatus, semiconductor device, and method of fabricating the semiconductor device An optical system (in FIGS. 1A and 1B) wherein a rectilinear laser beam of homogeneous energy distribution is defined for annealing a non-single crystalline semiconductor film (a surface to-be-irradiated 1108), is constructed of reflectors (1... | 09/26/2006 |
| 7109497 | Illumination system particularly for microlithography There is provided an illumination system, particularly for microlithography with wavelengths ≦193 nm. The illumination system includes a primary light source, a first optical component, a second optical component, an image plane, and an exit pupil. The first optic... | 09/19/2006 |
| 7109435 | Beam irradiator and laser anneal device According to the present invention, a laser annealing apparatus (10) includes a beam splitter (14) composed of first and second beam splitters (21, 22) disposed in parallel to each other to split one laser beam into four laser beams not interfer... | 09/19/2006 |
| 7095762 | Laser irradiation method, laser irradiation apparatus, and semiconductor device An object of the present invention is obtaining a semiconductor film with uniform characteristics by improving irradiation variations of the semiconductor film. The irradiation variations are generated due to scanning while irradiating with a linear laser beam of th... | 08/22/2006 |
| 7092415 | Laser optical apparatus There is provided a structure for reducing optical loss in an optical apparatus (homogenizer) for making the intensity distribution of a laser beam uniform. In a multi-cylindrical lens (a glass substrate having a multiplicity of cylindrical lenses formed ther... | 08/15/2006 |
| 7085062 | Apparatus for shaping a light beam The invention relates to an apparatus for shaping a light beam, having at least two optically functional boundary surfaces that are arranged one behind another in the propagation direction (z) of the light beam to be shaped, such that the light beam can pass through... | 08/01/2006 |
| 7079566 | Semiconductor laser apparatus capable of routing laser beams emitted from stacked-array laser diode to optical fiber with little loss A semiconductor laser apparatus according to an exemplary embodiment of the present invention is provided. For example, the apparatus may include a single or a plurality of stacked-array laser diodes, first beam compressors, and a separating optical device separatin... | 07/18/2006 |
| 7078651 | Thermal flux deposition by scanning A substrate is initially positioned in the reaction chamber. One or more gases are introduced into the reaction chamber. A predetermined speed for translating a line of radiation is determined. Continuous wave electromagnetic radiation is then emitted from a continu... | 07/18/2006 |
| 7079318 | Transmission screen and projection display A transmission screen has a refraction total reflection Fresnel lens plate, a stray light eliminating plate, and an image display plate. The stray light eliminating plate has a condensing lens array and black stripes. The array has unit lenses arranged at an inciden... | 07/18/2006 |
| 7079321 | Illumination system and method allowing for varying of both field height and pupil A method and system allow for changing (continuously or variably) both a field height and pupil of a beam that illuminates an object field. In one example, the object field can have a pattern generator (e.g., one or more reticles, spatial light modulators, or the li... | 07/18/2006 |
| 7071035 | Apparatus and method for laser radiation There is provided an improvement on homogeneity of annealing performed utilizing radiation of a laser beam on a silicon film having a large area. In a configuration wherein a linear laser beam is applied to a surface to be irradiated, optimization is carried out on ... | 07/04/2006 |
| 7054068 | Lens array sheet and transmission screen and rear projection type display A lens array sheet, a transparent screen using the same, and a rear-projection display device are provided in which it is possible to control a perspective angle for the image in both a horizontal direction and a vertical direction without causing a problem in that ... | 05/30/2006 |
| 7036944 | Retrochromic articles Retrochromic articles have a retrochromic pattern comprising first and second viewable retroreflective regions, wherein at least one viewable retroreflective region comprises a plurality of intrinsically retrochromic beads. Methods for making such articles are also ... | 05/02/2006 |
| 7038863 | Compact, wide-field-of-view imaging optical system An imaging optical system includes a first imaging structure having a first optical axis and a first field of view, wherein the first imaging structure forms an image on a common focal plane, and a second imaging structure having a second optical axis parallel to th... | 05/02/2006 |
| 7027228 | Arrangement and apparatus for optical beam transformation An arrangement for optical beam transformation, having at least one light source which can emit at least one light beam, with the at least one light beam having a greater divergence in a first direction (Y) than in a second direction (X) at right angles to it, a col... | 04/11/2006 |
| 7015450 | Detection apparatus for the optical detection of an object, method for operating a detection apparatus of this type and scanning apparatus and confocal microscope Detection apparatus for the optical detection of an object including detection means, which can detect the light emerging from the object, and also at least one imaging unit comprising first lens means having a plurality of lens elements arranged in the form of an a... | 03/21/2006 |
