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| Number | Title | Issue Date |
| 7405414 | Method and apparatus for patterning a workpiece The present invention relates to a method for creating a pattern on a workpiece sensitive to electromagnetic radiation. Electromagnetic radiation is emitted onto a computer controlled reticle having a multitude of modulating elements (pixels). The pixels are arrange... | 07/29/2008 |
| 7397018 | Amplitude and phase controlled adaptive optics system An adaptive optics system is provided. The system includes a light source, a pair of deformable mirrors and a detection module. The light source is configured to provide an outgoing beam. The outgoing beam has an amplitude and a phase. The first deformable mirror is... | 07/08/2008 |
| 7385749 | Silicon acousto-optic modulator An acousto-optic modulator includes a (100), (010) or (001) single crystal silicon acousto-optic interaction medium, and at least one transducer for emitting an acoustic wave attached to the single crystal. The transducer has a first electrode layer disposed on one ... | 06/10/2008 |
| 7355677 | System and method for an improved illumination system in a lithographic apparatus An array of individually controllable elements for use in lithography in which each of the individually controllable elements is comprised of a planar reflector mounted on supports on a substrate by way of elongate hinges. ... | 04/08/2008 |
| 7349136 | Method and device for a display having transparent components integrated therein A display panel includes an array of interferometric modulators arranged over a transparent substrate and a transparent electrical device arranged between the array of interferometric modulators and the transparent substrate. The transparent electrical device may be... | 03/25/2008 |
| 7286764 | Reconfigurable modulator-based optical add-and-drop multiplexer An optical add and drop multiplexer system comprising a first module for providing a first signal; a second module for providing a second signal; and a modulator for receiving a channel of the first signal at a first location, the first location configured to actuat... | 10/23/2007 |
| 7283290 | Acousto-optic devices having highly apodized acoustic fields and methods of forming the same An acousto-optic (AO) device for generating a highly apodized acoustic wave field includes a piezoelectric transducer crystal for emitting an acoustic wave having a ground electrode disposed on one side of the piezoelectric crystal, and a patterned electrode layer d... | 10/16/2007 |
| 7248338 | Multi beam exposing device and exposing method using the same An exposing device including means which has a plurality of pixels and modulates, per pixel, an optical beam irradiated from a light source, for exposing a plotted image on an exposure surface by modulating, per pixel, the plurality of pixels of the modulating means... | 07/24/2007 |
| 7221495 | Thin film precursor stack for MEMS manufacturing This invention provides a precursor film stack for use in the production of MEMS devices. The precursor film stack comprises a carrier substrate, a first layer formed on the carrier substrate, a second layer of an insulator material formed on the first layer, and a ... | 05/22/2007 |
| 7215457 | Apparatus and methods for modulating refractive index An iono-refractive structure that includes one or more ion insertion layers having a real portion and an imaginary portion of the dielectric constant is provided. While both the real portion and the imaginary portion of the dielectric constant change, the change in ... | 05/08/2007 |
| 7177081 | High contrast grating light valve type device A grating light valve has with a plurality of spaced reflective ribbons are spatially arranged over a substrate with reflective surfaces. The grating light valve is configured to optimized the conditions for constructive and destructive interference with an incident... | 02/13/2007 |
| 7164520 | Packaging for an interferometric modulator A package is made of a transparent substrate having an interferometric modulator and a back plate. A non-hermetic seal joins the back plate to the substrate to form a package, and a desiccant resides inside the package. A method of packaging an interferometric modul... | 01/16/2007 |
| 7145709 | Apparatus and methods for modulating refractive index An iono-refractive structure that includes one or more ion insertion layers having a real portion and an imaginary portion of the dielectric constant is provided. While both the real portion and the imaginary portion of the dielectric constant change, the change in ... | 12/05/2006 |
| 7141279 | Transmissive or reflective liquid crystal display and novel process for its manufacture This invention relates to a liquid crystal display with improved contrast ratio, switching performance, reflectivity at the Dmin state and structural integrity, and methods for its manufacture. ... | 11/28/2006 |
| 7126738 | Visible spectrum modulator arrays Light in the visible spectrum is modulated using an array of modulation elements, and control circuitry connected to the array for controlling each of the modulation elements independently, each of the modulation elements having a surface which is caused to exhibit ... | 10/24/2006 |
| 7092000 | Pulse light pattern writer Apparatus far transmitting information at a data rate, such as for recording an image on a photosensitive surface, including a pulsed light source that produces pulsed light having a pulsed repetition rate and a modulator that asynchronously modulates the pulsed lig... | 08/15/2006 |
| 7068947 | Multi wavelength communication apparatus A communication apparatus for use with a light source providing a light beam having a wavelength λ. The apparatus comprises at least one optical modulator adapted to modulate the light beam to a modulated light signal which comprises at least two additional spectra... | 06/27/2006 |
| 7068372 | MEMS interferometer-based reconfigurable optical add-and-drop multiplexor The interferometer comprises a beam splitter, a mirror and a phase modulator. The beam splitter splits a signal into a first portion and a second portion. The mirror reflects the first portion. The first portion includes an optical path length, which is fixed. The p... | 06/27/2006 |
| 7057799 | Tuning a narrow band filter for telecommunication applications with an acoustic optical tunable filter An optical tunable filter that includes a thin-film filter for band-passing at least two bands of wavelengths. The tunable filter further includes a tunable band-passing device tunable over the at least two bands for tuning to a tunable pass-band spectrally overlapp... | 06/06/2006 |
| 7057819 | High contrast tilting ribbon blazed grating The light modulator includes elongated elements and a support structure coupled to the elongated elements. Each element includes one or more lengthwise slits within an active optical area, and a light reflective planar surface with the light reflective planar surfac... | 06/06/2006 |
| 7054515 | Diffractive light modulator-based dynamic equalizer with integrated spectral monitor An integrated device of the present invention comprises free-space optics, a bi-directional multiplexor/de-multiplexor, a diffractive light modulator, a beam splitter, an optical performance monitor, and a controller. The free-space optics collimate, transform and i... | 05/30/2006 |
| 7049164 | Microelectronic mechanical system and methods The current invention provides for encapsulated release structures, intermediates thereof and methods for their fabrication. The multi-layer structure has a capping layer, that preferably comprises silicon oxide and/or silicon nitride, and which is formed over an et... | 05/23/2006 |
| 7042611 | Pre-deflected bias ribbons A modulator for and a method of modulating an incident beam of light including means for supporting a plurality of active elements and a plurality of bias elements, each active and bias element including a light reflective planar surface with the light reflective pl... | 05/09/2006 |
| 7027202 | Silicon substrate as a light modulator sacrificial layer An optical MEM device is fabricated with a patterned device layer formed on a silicon wafer. Preferably, the patterned device layer is patterned with plurality of ribbons and/or access trenches. The central portion of the ribbon is released from the silicon wafer us... | 04/11/2006 |
| 7016580 | Grating- and polymer-based optical attenuators and modulators Among other things, the present invention provides optical attenuators and modulators, especially variable optical attenuators and modulators, and materials and methods for their fabrication. In particular, the invention provides optical attenuators and modulators t... | 03/21/2006 |
| 7009750 | Apparatus and methods for modulating refractive index An iono-refractive structure that includes one or more ion insertion layers having a real portion and an imaginary portion of the dielectric constant is provided. While both the real portion and the imaginary portion of the dielectric constant change, the change in ... | 03/07/2006 |
| 7006715 | Optical modulator of clock modulation type A first optical waveguide, a second optical waveguide, a first electrode, and a second electrode are integrated on a substrate. An optical modulator is provided with a clock signal generator for generating an RZ signal by applying a clock signal to either the first ... | 02/28/2006 |
| 7002695 | Dual-spot phase-sensitive detection Apparatus for optical assessment of a sample includes a radiation source, adapted to generate a beam of coherent radiation, and traveling lens optics, adapted to focus the beam so as to generate first and second spots on a surface of the sample and to scan the spots... | 02/21/2006 |
| 6992810 | High fill ratio reflective spatial light modulator with hidden hinge A micro mirror array having a hidden hinge that is useful, for example, in a reflective spatial light modulator. In one embodiment, the micro mirror array includes spacer support walls, a hinge, a mirror plate and a reflective surface on the upper surface of the mir... | 01/31/2006 |
| 6990260 | Extended intensity-based optical sensor An extended optical sensor comprises a plurality of equally spaced intensity-based point sensors connected in parallel such that the optical path lengths are the same within the extended sensor enclosure. The input to the extended sensor is a single optical fiber as... | 01/24/2006 |
| 6965464 | Optical processor Method and apparatus are disclosed for optical packet decoding, waveform generation and wavelength multiplexing/demultiplexing using a programmed holographic structure. A configurable programmed holographic structure is disclosed. A configurable programmed holograph... | 11/15/2005 |
| 6956878 | Method and apparatus for reducing laser speckle using polarization averaging A method and apparatus for reducing speckle uses polarization averaging. A polarizing beam splitter divides a first polarized laser output into a second polarized laser output and a third polarized laser output. A plurality of mirrors creates an optical path differe... | 10/18/2005 |
| 6956995 | Optical communication arrangement An arrangement for optical communication comprises an optical coupler, an opto-electronic board, and an optical fiber. The optical fiber comprises a first refraction surface, a second refraction surface, and an internal reflector. The first refraction surface has a ... | 10/18/2005 |
| 6947613 | Wavelength selective switch and equalizer A device comprising a light modulator including a plurality of elements wherein each element is selectively operable such that the plurality of elements are dynamically configurable to combine selected ones of a plurality of grating periods such that selected portio... | 09/20/2005 |
| 6943898 | Apparatus and method for dual spot inspection of repetitive patterns Apparatus for optical assessment of a sample includes a radiation source, adapted to generate a beam of coherent radiation, and traveling lens optics, adapted to focus the beam so as to generate first and second spots on a surface of the sample and to scan the spots... | 09/13/2005 |
| 6934070 | Chirped optical MEM device A light modulator comprises a series of ribbons divided by a series of gaps. Sequences of consecutive ribbons and gaps are grouped together to form a plurality of pixels that are configured to process a respective plurality of wavelengths. The spacing from center-li... | 08/23/2005 |
| 6928207 | Apparatus for selectively blocking WDM channels An apparatus for selective blocking WDM channels comprises a light modulator, a diffraction grating, and a transform lens. The light modulator comprises an array of pixels. Each pixel of the light modulator is selectively operable to direct light into a first mode a... | 08/09/2005 |
| 6927891 | Tilt-able grating plane for improved crosstalk in 1×N blaze switches A light modulator includes elongated elements arranged parallel to each other. Each elongated element includes a light reflective planar surface with the light reflective planar surfaces configured in a first grating plane. A support structure is coupled to the elon... | 08/09/2005 |
| 6922272 | Method and apparatus for leveling thermal stress variations in multi-layer MEMS devices A MEMS device such as a grating light valve™ light modulator is athermalized such that the force required to deflect the movable portion of the MEMS device remains constant over a range of temperatures. In MEMS embodiments directed to a grating light valve™ ligh... | 07/26/2005 |
| 6908201 | Micro-support structures A MEM device in accordance with the invention comprises one or more movable micro-structures which are preferably ribbon structures or cantilever structures. The ribbon structures or cantilever structures are preferably coupled to a substrate structure through one o... | 06/21/2005 |
