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| Number | Title | Issue Date |
| 7907319 | Method and device for modulating light with optical compensation An interferometric modulator (Imod) cavity has a reflector and an induced absorber. A direct view reflective flat panel display may include an array of the modulators. Adjacent spacers of different thicknesses are fabricated on a substrate by a lift-off technique us... | 03/15/2011 |
| 7884988 | Supplemental reset pulse A micromechanical device and system utilizing a supplemental reset pulse to ensure deflectable members deflect to the desired position. After loading data into a micromechanical device, a reset pulse is used to position the deflectable member to a position indicated... | 02/08/2011 |
| 7884989 | White interferometric modulators and methods for forming the same An iterferometric modulator array is configured to reflect a broad band spectrum of optical wavelengths by arranging a reflector and a partially transparent substrate in a non-parallel relationship. ... | 02/08/2011 |
| 7706042 | MEMS device and interconnects for same A microelectromechanical systems device having an electrical interconnect connected to at least one of an electrode and a movable layer within the device. At least a portion of the electrical interconnect is formed from the same material as a movable layer of the de... | 04/27/2010 |
| 7663794 | Methods and devices for inhibiting tilting of a movable element in a MEMS device Interferometric modulators having a separable modulator architecture are disclosed having a reflective layer suspended from a flexible layer over a cavity. The interferometric modulators have one or more anti-tilt members that inhibit undesirable movement of the ref... | 02/16/2010 |
| 7643195 | Mirror device A mirror device comprises: an electrode placed on a substrate; a hinge which is connected to the electrode and which has a flat part at an end part on a side opposite to the electrode; and a mirror placed on the flat part, wherein a protrusion part formed on the fla... | 01/05/2010 |
| 7630112 | Image display apparatus An image display apparatus includes first and second actuators that cause a mirror (movable part) to oscillate about first and second axes intersecting with each other. The first actuator is driven based on a drive signal having a frequency component around a resona... | 12/08/2009 |
| 7554711 | MEMS devices with stiction bumps An interferometric modulator comprising a substrate, a movable membrane and one or more stiction bumps disposed between the substrate and the movable membrane. The stiction bumps are configured to mitigate stiction between the substrate and the movable membrane.... | 06/30/2009 |
| 7551339 | Optical scanning apparatus, optical writing apparatus, image forming apparatus, and method of driving vibration mirror An optical scanning apparatus includes a vibration mirror having a mirror surface that reflects an optical beam. A pair of torsion beams swingably support the mirror. The mirror is vibrated in a sealed space whose pressure is adjusted such that a characteristic of t... | 06/23/2009 |
| 7532377 | Movable micro-electromechanical device Improvements in an interferometric modulator that has a cavity defined by two walls. ... | 05/12/2009 |
| 7532378 | Laser irradiation apparatus, method of laser irradiation, and method for manufacturing semiconductor device A laser irradiation apparatus and a method of laser irradiation which can improve use efficiency of a laser beam, eliminate an influence of stray light at a DMD, and form an irradiation pattern with a homogeneous beam spot are provided. The laser irradiation apparat... | 05/12/2009 |
| 7529011 | Deflector mirror with regions of different flexural rigidity A deflector mirror is disclosed that includes a mirror substrate configured to vibrate in a reciprocating manner on beams as a torsional rotary shaft so as to deflect a light beam emitted from a light source. The mirror substrate includes multiple regions in each of... | 05/05/2009 |
| 7518774 | Optical deflector and optical instrument using the same An optical deflector includes an oscillating system and a driving system for driving the oscillating system, the oscillating system including a first oscillator, a first torsion spring, a second oscillator, a second torsion spring and a supporting member, the first ... | 04/14/2009 |
| 7515323 | Actuator, optical scanner and image forming apparatus An actuator includes: a mass portion; a vibrating part having a pair of elastic portions supporting the mass portion; at least one pair of beam portions supporting the vibrating part; a piezoelectric element bonded on each of the beam portions; voltage applying mean... | 04/07/2009 |
| 7474452 | Micro-oscillating member, light-deflector, and image-forming apparatus The present invention provides a resonance type micro-oscillating member capable of retraining a fluctuation of angular velocity, and specifically provides a micro-oscillating member, which is a nested micro-oscillating member, wherein there exist a reference oscill... | 01/06/2009 |
| 7468824 | Imaging apparatus including optical scanning device with deflecting mirror module, and method of deflecting with the mirror module A module configured to deflect light in an image forming apparatus. A torsion bar supports a mirror and defines a rotational axis of the mirror. A controller is configured to apply electronic pulses to at least one driving device to oscillate the mirror in the modul... | 12/23/2008 |
| 7468825 | Spatial optical modulator with passivation layer Disclosed is an optical modulator including: a substrate; an insulation layer disposed on the substrate; a ribbon layer, a center portion of which is spaced apart from the insulation layer by a predetermined gap; a piezoelectric element that is disposed on the ribbo... | 12/23/2008 |
| 7457023 | Manufacturing a mirror plate or other operational structure having superior flatness by laser milling for use with torsional hinged devices A multilevel mirror plate suitable for use with a torsional hinged mirror assembly is laser milled to provide a more effective truss structure in less time and at a reduced cost. ... | 11/25/2008 |
| 7446921 | Image forming apparatus An image forming apparatus detects a oscillating state of a oscillation system with a oscillation detector and controls oscillation of the oscillation system such that the oscillation system oscillates a reflective member in a balanced steady state by adjusting a dr... | 11/04/2008 |
| 7446919 | Piezoelectric actuated scanning mirror A scanning mirror useful in laser projection devices (LPDs) is provided. The scanning mirror is comprised of a substantially planar member having a movable reflective region and a base region coupled together by a split hinge. A foundation is coupled to the base reg... | 11/04/2008 |
| 7446920 | Optical deflector and optical instrument using the same An optical deflector arranged to be relatively stably driven regardless of any environmental disturbance such as temperature, includes an oscillating system 160 having plural natural oscillation modes of different frequencies, a driving unit for driving the o... | 11/04/2008 |
| 7443569 | Micro-electro-mechanical-system two dimensional mirror with articulated suspension structures for high fill factor arrays The invention provides a micro-electro-mechanical-system (MEMS) mirror device, comprising: a mirror having a 2-dimensional rotational T-shaped hinge at a first end, and having a flexible connection at a second end opposite the first end. The invention also provides ... | 10/28/2008 |
| 7443586 | Display device using single-panel diffractive light modulator Disclosed herein is a display device using a single-panel diffractive light modulator. The display device includes a light source unit, a condensing unit, an illumination unit, a diffractive light modulator, a projection unit, a filter unit, and a distortion correct... | 10/28/2008 |
| 7436566 | Oscillating device, optical deflector and method of controlling the same An oscillating device such as an optical deflector, by which a resonance frequency of an oscillating system can be adjusted and controlled. In one preferred embodiment, the oscillating device includes an oscillating system, a stationary member for holding the oscill... | 10/14/2008 |
| 7436567 | Optical scanner and scanning type projector An optical scanner is provided with a mirror section; a movable frame positioned to surround the mirror section and to support the mirror section with a pair of torsion bars to hold the mirror section therebetween; a stationary frame to surround the movable frame an... | 10/14/2008 |
| 7436573 | Electrical connections in microelectromechanical devices A micromirror device and a method of making the same are disclosed herein. The micromirror device comprises a mirror plate, hinge, and post each having an electrically conductive layer. One of the hinge, mirror plate, and post further comprises an electrically insul... | 10/14/2008 |
| 7436572 | Micromirrors and hinge structures for micromirror arrays in projection displays A spatial light modulator is disclosed, along with methods for making such a modulator. The spatial light modulator comprises an array of micromirrors each having a hinge and a micromirror plate held via a hinge on a substrate, the micromirror plate being attached t... | 10/14/2008 |
| 7423798 | Addressing circuit and method for bi-directional micro-mirror array A control substrate of spatial light modulator for a bi-directional micro mirror array includes a plurality of unit cells, each includes a common electrode at a fixed constant potential and an addressing electrode under the mirror plate on opposite sides of a pivot ... | 09/09/2008 |
| 7423795 | Optical deflector and optical instrument using the same An optical deflector includes an oscillating system and a driving system for driving the oscillating system, the oscillating system including a first oscillator, a first torsion spring, a second oscillator, a second torsion spring and a supporting member, the first ... | 09/09/2008 |
| 7423794 | Device and method for stacked multi-level uncoupled electrostatic actuators A multi-level decoupled micro-actuator device comprising a first level substrate (410), a second level frame (420) stacked on said first level substrate (410), a third level frame (430) stacked on said second level frame (420).... | 09/09/2008 |
| 7420135 | Micro electro-mechanical system switch and method of manufacturing the same A micro electro-mechanical system (MEMS) switch and a method for manufacturing the same are provided. The MEMS switch includes a substrate; signal lines formed on the substrate; main electrodes spaced apart by a distance and formed over the substrate; an actuating b... | 09/02/2008 |
| 7420724 | Scanner apparatus having electromagnetic radiation devices coupled to MEMS actuators A disclosed scanner apparatus includes a member having spaced apart proximal and distal portions. An electromagnetic radiation device is configured to direct electromagnetic radiation therefrom and is moveably coupled to the distal portion of the member. The electro... | 09/02/2008 |
| 7417783 | Mirror and mirror layer for optical modulator and method Described herein are systems, devices, and methods relating to packaging electronic devices, for example, microelectromechanical systems (MEMS) devices, including optical modulators such as interferometric optical modulators. The interferometric modulator disclosed ... | 08/26/2008 |
| 7417780 | Vibration mirror, optical scanning device, and image forming using the same, method for making the same, and method for scanning image A vibration mirror is reciprocatively vibrated by an electrostatic force to reflect an incident light beam. The vibration mirror comprises a reflection means for reflecting the incident light beam; a reflection means holding substrate for holding the reflection mean... | 08/26/2008 |
| 7417779 | Single piece torsional hinged device with central spines and perimeter ridges to reduce flexing A torsional hinged device having an optical surface, such as a mirror or refractive surface, formed from a single piece of silicon with reduced flexing. In addition to central spines to prevent or reduce flexing of the tips of the optical surface, the device may als... | 08/26/2008 |
| 7414503 | Torsional hinged device with improved coupling between a magnet mounted to said device and an electrical coil A pivoting device such as a MEMS mirror provides improved coupling between a permanent magnet on the device and an adjacent electrical coil that may provide a drive force or position sensing. The improved coupling is obtained by forming a cavity in the coil structur... | 08/19/2008 |
| 7411713 | Yokeless hidden hinge digital micromirror device with double binge layer A micromirror array 110 fabricated on a semiconductor substrate 11. The array 110 is comprised of four operating layers 12, 13, 14, 15. An addressing layer 12 is fabricated on the substrate. A raised electrode layer 13 is sp... | 08/12/2008 |
| 7411722 | Display system incorporating bilinear electromechanical grating device A line scanned display system includes at least three different colors of illumination provided by one or more light sources, and at least one directional illumination optical system for directing the three different colors of illumination. Also in the system is a b... | 08/12/2008 |
| 7411717 | Micromirror device A spatial light modulator comprises an array of micromirror devices each of which has a reflective and deflectable mirror plates. The mirror plates are moved between an ON and OFF state during operation, wherein the OFF state is a state wherein the mirror plate is n... | 08/12/2008 |
| 7408690 | Actuator, optical scanner, and image forming apparatus An actuator includes a frame-shaped first mass portion; a supporting portion that supports the first mass portion and takes the shape of a frame so as to surround a perimeter of the first mass portion; a pair of first elastic portions coupling between the first mass... | 08/05/2008 |
