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| Number | Title | Issue Date |
| 8054522 | Oscillating mirror having a plurality of eigenmodes Geometric-waveform oscillator for processing light, the geometric waveform oscillator including a plurality of masses, at least one force producing element, and a plurality of elastic elements, each of the force producing elements being coupled with a respective one... | 11/08/2011 |
| 7660025 | Reflective unit using electroactive polymer and flexible display employing the reflective unit Provided are a reflective unit using an electroactive polymer and a flexible display. The reflective unit includes: an electroactive polymer layer which becomes strained when a voltage is applied thereto by an electrode; a light reflecting unit reflecting external l... | 02/09/2010 |
| 7623283 | Actuator An actuator includes a movable plate, at least one elastic member supporting the movable plate to allow the movable plate to rock, a support holding the elastic member, a wiring layer extending on the elastic member, and a protective film covering the wiring layer. ... | 11/24/2009 |
| 7609432 | Nanowire-based device and method of making same A nanoelectromechanical (NEM) device and a method of making same employ a laterally extending nanowire. The nanowire is grown in place from a vertical side of a vertically extending support block that is provided on a horizontal surface of a substrate. The nanowire ... | 10/27/2009 |
| 7605964 | Array of micromirrors with non-fixed underlying structures The present invention discloses an array of micromirrors with non-fixed underlying structures which can be oriented to have principal rotational axis with no structural and mechanical interference and with no electrical conflict. The micromirror array in the present... | 10/20/2009 |
| 7538927 | MEMS mirror with short vertical comb teeth and long in-plane comb teeth A process for constructing a micro-electro-mechanical system (MEMS) device includes etching the topside of a wafer to form a first support layer having short stationary comb teeth extending from one or more support pads. The backside of the wafer is etched to form a... | 05/26/2009 |
| 7477438 | Optical imaging system for imaging at least two planes of a light beam spaced apart in the beam direction An optical imaging system for imaging at least two planes of a light beam spaced apart in the beam direction, in particular of a laser light beam, onto a common target site, for example a detector, has at least one optically imaging element arranged in the beam path... | 01/13/2009 |
| 7457021 | Fiber based MEMS MEMS can be fabricated from fibers without the use of a matrix material. Devices can be built where fibers are attached only at a substrate edge (e.g. cantilevers, bridges). Motions can be controlled by adjusting the linkage between multiple fibers with weak couplin... | 11/25/2008 |
| 7457022 | Vibration type tilting device A vibration type tilting device, according to an embodiment of the invention, which comprises a mirror holder, supporting a mirror on one side, which tilts together with the mirror such that the mirror periodically tilts light on a light path in a minute angle; a ho... | 11/25/2008 |
| 7441897 | Optical imaging apparatus An optical imaging apparatus, in particular an ophthalmoscope or microscope or transillumination microscope, comprising a light source arrangement (20) and an illumination beam path (3) which is predetermined at least by an illumination lens arrangemen... | 10/28/2008 |
| 7426067 | Atomic layer deposition on micro-mechanical devices A micro-electromechanical device or MEMS having a conformal layer of material deposited by atomic layer deposition is discussed. The layer may provide physical protection to moving components of the device, may insulate electrical components of the device, may prese... | 09/16/2008 |
| 7426073 | Digital micromirror device and manufacturing method thereof Provided is a digital micromirror device (DMD). The DMD includes a first metal line, a second metal line, a third metal line, and a mirror. The first metal line is formed to have a predetermined line width and a predetermined thickness, and the second metal line is ... | 09/16/2008 |
| 7422928 | Process for fabricating a micro-electro-mechanical system with movable components A process for fabricating a micro-electro-mechanical system (MEMS) composed of fixed components fixedly supported on a lower substrate and movable components movably supported on the lower substrate. The process utilizes an upper substrate separate from the lower su... | 09/09/2008 |
| 7420729 | Small thin film movable element, small thin film movable element array and method of driving small thin film movable element A small thin film movable element comprises: a movable portion supported elastically deformably and having a movable electrode at least a portion of the movable portion; and a fixed electrode arranged to be opposed to the movable portion, wherein the movable portion... | 09/02/2008 |
| 7420725 | Device having a conductive light absorbing mask and method for fabricating same A system and method for an optical component that masks non-active portions of a display and provides an electrical path for one or more display circuits. In one embodiment an optical device includes a substrate, a plurality of optical elements on the substrate, eac... | 09/02/2008 |
| 7417778 | Light deflector, light deflection array, image forming apparatus, and image projection display apparatus A light deflector can be driven by a low voltage by reducing contact area with a plate shape member and other members. The light deflector can be driven by a low voltage by reducing a contact area with a plate shape member and other members. More particularly, a fri... | 08/26/2008 |
| 7417783 | Mirror and mirror layer for optical modulator and method Described herein are systems, devices, and methods relating to packaging electronic devices, for example, microelectromechanical systems (MEMS) devices, including optical modulators such as interferometric optical modulators. The interferometric modulator disclosed ... | 08/26/2008 |
| 7414503 | Torsional hinged device with improved coupling between a magnet mounted to said device and an electrical coil A pivoting device such as a MEMS mirror provides improved coupling between a permanent magnet on the device and an adjacent electrical coil that may provide a drive force or position sensing. The improved coupling is obtained by forming a cavity in the coil structur... | 08/19/2008 |
| 7411717 | Micromirror device A spatial light modulator comprises an array of micromirror devices each of which has a reflective and deflectable mirror plates. The mirror plates are moved between an ON and OFF state during operation, wherein the OFF state is a state wherein the mirror plate is n... | 08/12/2008 |
| 7411714 | Micromirror unit with torsion connector having nonconstant width A micromirror unit is provided which includes a frame, a mirror forming base upon which a mirror surface is formed, and a torsion connector which includes a first end connected to the mirror forming base and a second end connected to the frame. The torsion connector... | 08/12/2008 |
| 7408688 | Method for driving optical deflecting device array, optical deflecting device array, optical deflecting device, and image projection displaying apparatus A method for driving an optical deflecting device array is disclosed, including in a series of processes for the light deflection operation, at least, a state of a first stage writing and recording data for indicating an inclination direction of the plate member to ... | 08/05/2008 |
| 7405854 | Fibrous micro-composite material Fibrous micro-composite materials are formed from micro fibers. The fibrous micro-composite materials are utilized as the basis for a new class of MEMS. In addition to simple fiber composites and microlaminates, fibrous hollow and/or solid braids, can be used in str... | 07/29/2008 |
| 7404909 | Mirror including dielectric portions and a method of manufacturing the same The invention provides a method for manufacturing a microelectronic device and a microelectronic device. The method for manufacturing the microelectronic device, without limitation, may include forming a first mirror layer over and within one or more openings in a s... | 07/29/2008 |
| 7402255 | MEMS scanning mirror with trenched surface and I-beam like cross-section for reducing inertia and deformation A micro-electro-mechanical system (MEMS) device includes a mirror having a top surface with trenches, a beam connected to the mirror, rotational comb teeth connected to the beam, and one or more springs connecting the beam to a bonding pad. The mirror can have a bot... | 07/22/2008 |
| 7403321 | Optical microelectromechanical device An optical microelectromechanical systems (MEMS) device includes a transparent substrate with a plurality of discrete conductive lines, an dielectric layer disposed on the substrate and the conductive lines, reflective members and edge supporters. The reflective mem... | 07/22/2008 |
| 7400792 | Methods and apparatus to make substantially uniform losses in optical cross connects A method for cross connecting optical signals includes using a common beam steerer to direct a set of optical signals from a set of input ports to a set of output ports. The method further includes adjusting a curvature of the common beam steerer so that paths of th... | 07/15/2008 |
| 7394583 | Light-beam scanning device A light-beam scanning device includes a base plate having a torsion beam portion formed therein, and a mirror portion supported by the torsion beam portion and adapted to be oscillated. The light-beam scanning device includes one of a piezoelectric member, a magneto... | 07/01/2008 |
| 7393793 | Tunable-wavelength optical filter and method of manufacturing the same A method of manufacturing a tunable wavelength optical filter. The method includes steps of forming a first sacrificial oxide film for floating a lower mirror on a semiconductor substrate; sequentially laminating conductive silicon films and oxide films for defining... | 07/01/2008 |
| 7391553 | Low cost torsional hinge mirror package with non-rotating magnetic drive A torsional hinge structure for supporting a functional surface such as a mirror is disclosed. The structure includes at least one torsional hinge extending between a functional surface such as for example, a mirror and an anchor pad such that the torsional or the f... | 06/24/2008 |
| 7388706 | Photonic MEMS and structures An interference modulator (Imod) incorporates anti-reflection coatings and/or micro-fabricated supplemental lighting sources. An efficient drive scheme is provided for matrix addressed arrays of IMods or other micromechanical devices. An improved color scheme provid... | 06/17/2008 |
| 7388191 | Mirror positioning unit of laser scanning unit and laser scanning unit employing the same A mirror positioning structure of a reflection mirror for correcting skew and bow and a laser scanning unit employing the same are provided. The mirror positioning structure includes a mirror holder, a fixing member, and a positioning cap. The mirror holder has a re... | 06/17/2008 |
| 7385762 | Methods and devices for inhibiting tilting of a mirror in an interferometric modulator Interferometric modulators having a separable modulator architecture are disclosed having a reflective layer suspended from a flexible layer over a cavity. The interferometric modulators have one or more anti-tilt members that inhibit undesirable movement of the ref... | 06/10/2008 |
| 7385268 | Method for linearizing deflection of a MEMS device using binary electrodes and voltage modulation A micromechanical device comprising one or more electronically movable structure sets comprising for each set a first electrode supported on a substrate and a second electrode supported substantially parallel from said first electrode. Said second electrode is movab... | 06/10/2008 |
| 7385744 | Support structure for free-standing MEMS device and methods for forming the same A microelectromechanical (MEMS) device includes a functional layer including a first material and a deformable layer including a second material. The second material is different from the first material. The deformable layer is mechanically coupled to the functional... | 06/10/2008 |
| 7379230 | Electronically controlled stage lighting system A lighting system operating using a digital mirror as its operative device. The digital mirror is used to shape the light which is a passed through advanced optical devices in order to produce an output. ... | 05/27/2008 |
| 7378632 | Image display apparatus and image pickup apparatus using the same Provided is an image display apparatus, including: a light source for emitting a modulated light beam based on image information; a conversion optical system for converting the light beam from the light source into a convergent light beam; a scanning member for two-... | 05/27/2008 |
| 7379227 | Method and device for modulating light “Light in the visible spectrum is modulated using an array of modulation elements, and control circuitry connected to the array for controlling each of the modulation elements independently, each of the modulation elements having a surface which is caused to exhib... | 05/27/2008 |
| 7375867 | Transmissive electromechanical light valve and system An apparatus, system, and method for a transmissive electromechanical light valve including a gate pivotable between a first position to allow light to pass through a valvelet and a second position to prevent light from passing through the valvelet are disclosed her... | 05/20/2008 |
| 7375873 | Method of repairing micromirrors in spatial light modulators Disclosed herein is method of operating a device that comprises an array of micromirrors. The method comprises a process usable for repairing stuck micromirrors of the micromirror array during the operation. The reparation process applies, at the ON state, two conse... | 05/20/2008 |
| 7372613 | Method and device for multistate interferometric light modulation A multi-state light modulator comprises a first reflector. A first electrode is positioned at a distance from the first reflector. A second reflector is positioned between the first reflector and the first electrode. The second reflector is movable between an undriv... | 05/13/2008 |
