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Class 356/624 - Focus


Subclass of Class 356 - Optics: measuring and testing
Definition: Subject matter wherein the position of an object is obtained
No. of patents: 151
Last issue date: 10/26/2010


1        
NumberTitleIssue Date
7821652System and method for focusing discrete points on an under-measured object
A method for focusing discrete points on an under-measured object is provided. The method includes: (a) receiving an image of the object, selecting measurement points on the image, and obtaining X, Y coordinate values of the measurement points; (b) searching a solid...
10/26/2010
7646495System and computer readable medium for pre-focus of digital slides
Methods and apparatus are provided for computing focus information prior to scanning digital microscope slides with a line scan camera. The methods include a point-focus procedure that works by moving the slide to the desired measurement location, moving the objecti...
01/12/2010
7486409Displacement sensor
In a sensor head, parallel rays or approximately parallel rays are generated by a pair of condenser lenses that reciprocate according to vibrations of a collimate lens and a tuning fork, and go out from a light port. To the light port, a lens holder in which an obje...
02/03/2009
7428062Measuring apparatus for work held by chuck table, and laser beam machining apparatus
An apparatus for measuring the height of a work held by a chuck table provided in a machining apparatus, including: a white light source for emitting a white beam of light; a chromatic aberration lens for condensing the white beam emitted from the white light source...
09/23/2008
7421195Apparatus for acquiring focussing information and method of acquiring focusing information
A storage unit is configured to store beforehand a table that shows a relation between spread parameters and command values supplied to a control unit to acquire a focused image of an object, and information that designates a command value corresponding to an inflec...
09/02/2008
7372016Calibration standard for a dual beam (FIB/SEM) machine
Calibration of measurements of features made with a system having a micromachining tool and an analytical tool is disclosed. The measurements can be calibrated with a standard having a calibrated feature with one or more known dimensions. The standard may have one o...
05/13/2008
7361941Calibration standards and methods
Parameters of a metrology tool may be determined by measuring a dimension of a feature on a calibration standard with the tool and using the measured dimension and a known traceable value of the dimension to determine a value for the parameter. If the dimension of t...
04/22/2008
7355729Apparatus and method for measuring a thickness of a substrate
An apparatus and method of measuring the thickness of a substrate. A first light is reflected from a standard sample having a known thickness. The light is concentrated through the light-focusing lens. The first light is converted into a first electrical signal by a...
04/08/2008
7349078Characterization of lenses
In accordance with one embodiment of the present invention, a method of characterizing a lens is provided. According to the method, an optical source such as a laser is configured to generate a collimated beam that is focused along an optical axis at a distance f
03/25/2008
7348538Methods and systems for detecting proximity of an object
Methods and systems for detecting a proximity of an object are provided. The method includes receiving a first beam of radiation from a first field of view directed onto a first detector and a second beam of radiation from a second field of view directed onto a seco...
03/25/2008
7345772Optical triangulation device and method of measuring a variable of a web using the device
Device and method of measuring a position of an irregular surface. The method includes projecting a spot along a first axis onto the irregular surface, focusing an image of the spot along a second axis onto a detector, wherein the second axis is non-coaxially arrang...
03/18/2008
7339684Proximity detector
Apparatus for detecting proximity between a first object (target object) and a second object (reference object), comprising a light source and a light detector adapted to receive resulting back-scattered light from the reference object when illuminated from the ligh...
03/04/2008
7337076Inspection system and apparatus
A method and system for identifying a defect or contamination on a surface of a sample. The system operates by detecting changes in work function across a surface via both vCPD and nvCPD. It utilizes a non-vibrating contact potential difference (nvCPD) sensor for im...
02/26/2008
7330278Optical displacement measurement device
An optical displacement measurement device for introducing light from a light source to an object through an optical system having an objective lens and for detecting light reflected from the object by a detection section to thereby measure a displacement of the obj...
02/12/2008
7323705Liquid level measurement
The present application relates to an apparatus and method for measuring liquid levels in small-volume wells. ...
01/29/2008
7321108Dynamic focusing method and apparatus
A method and apparatus for dynamically focusing an imaging mechanism on a moving target surface having a variable geometry is herein disclosed. Apparatus for focusing an imaging mechanism may include an objective, a prism, or another optical device that forms part o...
01/22/2008
7301638Dimensional calibration standards
A calibration standard, for calibrating lateral or angular dimensional measurement systems, is provided. The standard may include a first substrate spaced from a second substrate. The standard may be cross-sectioned in a direction substantially perpendicular or subs...
11/27/2007
7283235Optical device and inspection module
Optical device for representing a central image (10) of an object (1) and at least one lateral image (11, 12, 13, 14) of the same object (1), with the length of the real optical path of said central image (10) being different from ...
10/16/2007
7277188Systems and methods for implementing an interaction between a laser shaped as a line beam and a film deposited on a substrate
Systems and methods are disclosed for focusing a beam for an interaction with a film deposited on a substrate wherein the focused beam defines a short axis and a long axis. In one aspect, the system may include a detecting system to analyze light reflected from the ...
10/02/2007
7271919Confocal displacement sensor
A confocal displacement sensor is created in which, through a graduated arrangement of optical outputs relative to an imaging optic in the object area of displacement sensor, real images of the optical outputs can be created at different heights. A surface to be mea...
09/18/2007
7253384Focusing system using light source and image sensor
An apparatus comprising a movable optical element having an optical axis and including one or more focusing elements, an image sensor positioned along the optical axis and substantially normal thereto, and a radiation source attached to the movable optical element, ...
08/07/2007
7248360Polychronic laser scanning system and method of use
A system for laser scanning provides spectral flexibility needed for the spectroscopic monitoring of highly multiplexed samples, such as cellular and particle assays in whole blood or other suspensions. In accordance with embodiments of the present invention, the sy...
07/24/2007
7242485Displacement gauge and displacement measuring method
A displacement gauge comprises an objective lens 15 that projects light onto a measurement subject 16, an exciting portion that vibrates the objective lens 15 at a preset amplitude along an optical axis direction of light passing through the obj...
07/10/2007
7216065Reflecting surface design system, reflecting surface design method, recording medium, and computer program
A reflecting surface design system (50) has (1) first rendering means (54) for displaying a free-form surface (20) on which a plurality of segments (24), each of which is defined by a plurality of vertices (251 to 25
05/08/2007
7212338Arrangement for illumination and/or detection in a microscope
A laser scanning microscope comprises at least one selectively switchable micro-mirror arrangement (DMD) in the illumination beam path and/or detection beam path which is used for the wavelength selection of dispersively divided illumination and/or object light such...
05/01/2007
7202974Efficient under color removal
A method of performing color space conversion and under color removal. Pixelated data is first resampled (102) to an efficient word size—typically 8-bits wide. The RGB color format data words are then subtracted from a maximum intensity to yield CMY color f...
04/10/2007
7202953Scanning microscopic method having high axial resolution
The invention relates to a method for optically detecting at least one entity which is arranged on a substrate. The at least one entity is scanned with a measuring volume using at least one radiation source and a confocal optic. During a scanning process an auxiliar...
04/10/2007
7183759Optical probes with spacing sensors for the wafer level testing of optical and optoelectronic chips
This application describes, among others, wafer designs, testing systems and techniques for wafer-level optical testing by coupling probe light to/from the top of the wafer. During the optical testing, the vertical spacing between an optical probe and the wafer is s...
02/27/2007
7177018Multiplex illuminator and device reader for microcantilever array
A device reader having a multiplex illuminator, the illuminator, and methods for reading deflection of a large number of microcantilevers are provided. The illuminator includes a micro-optical subassembly for illuminating cantilevers (illuminator) that uses a plural...
02/13/2007
7169015Apparatus for optical inspection of wafers during processing
The present invention is aimed to provide a measurement system installable within a processing equipment and more specifically within the exit station of a polishing machine. The optical scheme of this system includes a spectrophotometric channel, an imaging channel...
01/30/2007
7145163Apparatus for detecting light-transmissive sheet-like body
Illuminating light emitted from a light source is led via a condenser lens, an optical fiber, a half-silvered mirror, and a condenser lens to a reflector. The reflector reflects the illuminating light to a CCD device through a telecentric optical system which compri...
12/05/2006
7142315Slit confocal autofocus system
A technique for focusing and maintaining the focus of an inspection or review system upon a specific layer of a multi-layered specimen is described. In one embodiment, a confocal autofocus system can be used to focus an optical inspection or review system upon the t...
11/28/2006
7136158Optical apparatus for laser scattering by objects having complex shapes
Apparatus for observing and measuring in realtime surface and subsurface characteristics of objects having complex shapes includes an optical fiber bundle having first and second opposed ends. The first end includes a linear array of fibers, where the ends of adjace...
11/14/2006
7115889Device and method for sensing the position of an edge of a product
According to one exemplary embodiment of the present invention, a method for sensing the position of an edge of a stock being feed to a printing press is provided. The method includes the steps of providing a light source, utilizing the light source to illuminate wi...
10/03/2006
7100430Dual stage instrument for scanning a specimen
A dual stage scanning instrument includes a sensor for sensing a parameter of a sample and coarse and fine stages for causing relative motion between the sensor and the sample. The coarse stage has a resolution of about 1 micrometer and the fine stage has a resoluti...
09/05/2006
7095944Distance measuring device and method for determining a distance
The invention relates to a distance measuring device and a suitable method for determining a distance which provides for continuous determination of the distance—which can therefore also be made discrete—and in addition is easy to handle and provides for a large...
08/22/2006
7084399Ion beam apparatus and sample processing method
For the sake of realizing high throughput and high processing position accuracy in an ion beam apparatus, two kinds of ion beams for processing are prepared of which one is a focusing ion beam for high image resolution and an edge processing ion beam of large beam c...
08/01/2006
7075663Optical device and a method for aiming and visually indicating a reading area
The invention relates to an optical device for aiming along an optical axis and visually indicating a reading area, comprising at least an illuminating assembling acting on a portion of the reading area along an optical emission path. The illuminating assembly compr...
07/11/2006
7072032Automatic tracking apparatus for reflector
The present invention comprises an illumination portion (11), a light receiving portion (12), disposed in the surveying machine body (8), having an image sensor (27) for receiving a reflection light image (MO) of the measurement light, ar...
07/04/2006
7068836System and method for mapping a surface
In accordance with a specific embodiment of the present invention, an image is projected upon a surface. The image can include a pattern having a plurality of individual shapes used to measure and map the surface. The plurality of individual shapes include features ...
06/27/2006
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