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| Number | Title | Issue Date |
| 8184301 | Surface alignment and positioning method and apparatus A method and apparatus for aligning and positioning a surface such that the optical and/or cylinder axis of the surface is precisely aligned with a fixture for the purpose of assembly or further mechanical operations such as machining and polishing. According to ano... | 05/22/2012 |
| 8174707 | Optical element positioning apparatus An optical element positioning apparatus of the present invention includes a moving unit including an optical element 2, a drive mechanism 100 configured to drive the moving unit, a position measuring sensor 130 configured to measure a position ... | 05/08/2012 |
| 8169623 | Optical apparatus and method for measuring the attitude of an object in outer space An optical apparatus and method for measuring the attitude of an object in outer space includes an optical system having an aperture to receive optical radiation and a focal plane to image the optical radiation and an aperture-sharing element attached to the optical... | 05/01/2012 |
| 8164759 | Imaging microoptics for measuring the position of an aerial image An imaging microoptics, which is compact and robust, includes at least one aspherical member and has a folded beam path. The imaging microoptics provides a magnification |β′| of >800 by magnitude. Furthermore, a system for positioning a wafer with respect to a pr... | 04/24/2012 |
| 8159683 | Reflective piano keyboard scanner A scanner for a keyboard device having a reflective surface for each key has a sensor associated with each key that includes an LED and a photo-transistor. The LED is turned ON for a first measurement, followed by a second measurement with the LED turned off, and a ... | 04/17/2012 |
| 8159682 | Lens system A fragmented lens system for creating an invisible light pattern useful to computer vision systems is disclosed. Random or semi-random dot patterns generated by the present system allow a computer to uniquely identify each patch of a pattern projected by a correspon... | 04/17/2012 |
| 8159681 | Measuring device for determining the relative offset between two components A measuring device for determining the relative offset between two components in a z-direction includes two measuring members. A first measuring member is affixable on a first component, and the second measuring member is affixable on a second component. Furthermore... | 04/17/2012 |
| 8154735 | Apparatus for measuring quasi-static error of rotation driving shaft In an apparatus for measuring a quasi-static error of a rotation driving shaft, a positional error and an angular error in each of X, Y, and Z axis directions during rotation of a driving shaft is measured by means of a single measurement apparatus. In the apparatus... | 04/10/2012 |
| 8144340 | Surface sensing device with optical sensor A surface sensing device for use in position determining apparatus has an elongate stylus with a tip for scanning the surface of a workpiece to be measured. Lateral displacements of the stylus tip are detected by a light beam which passes along the stylus from a lig... | 03/27/2012 |
| 8144339 | Method and system for positioning by using optical speckle A method and system for positioning by using optical speckle are disclosed in this invention. A highly coherent laser light irradiates a positioning template in advance to record optical speckles caused by interference by scattered light beams from the positioning t... | 03/27/2012 |
| 8139231 | Machine vision technique for manufacturing semiconductor wafers A vision system is provided to determine a positional relationship between a photovoltaic device wafer on a platen and a printing element, such as a printing screen, on a remote side of the photovoltaic device wafer from the platen. A source emits ultraviolet light ... | 03/20/2012 |
| 8134717 | Dimensional detection system and associated method An improved dimensional detection system is portable and can be used to characterize a workpiece. The dimensional detection system employs as few as a single focused light source and as few as a single camera along with a calibration data set to convert the illumina... | 03/13/2012 |
| 8125652 | Wafer center finding with charge-coupled devices A device for handling a substantially circular wafer is provided. The device includes an interior accessible through a plurality of entrances, and a plurality of sensors consisting of two sensors for each one of the plurality of entrances, each sensor capable of det... | 02/28/2012 |
| 8125651 | Substrate detection device and substrate conveyance apparatus An object is to provide a substrate conveyance apparatus and a substrate detection device capable of improving flexibility in arrangement layout. The substrate detection device includes a projector 41 for projecting inspection light 40 so as to ... | 02/28/2012 |
| 8115938 | Method of providing alignment marks, device manufacturing method and lithographic apparatus A method of providing a set of alignment marks on a substrate including the following steps. Exposing a first pattern on at least one exposure area of a layer of a substrate, the first pattern comprising a repetitive set of elements having a first element size. Expo... | 02/14/2012 |
| 8111407 | Displacement sensor A displacement is accurately measured at high speed to a measurement object having various surface states. In a displacement sensor including a confocal optical system in which an objective lens is moved along an optical axis, light emitted from a laser diode is for... | 02/07/2012 |
| 8111406 | Surface position detecting apparatus, surface position detecting method, exposure apparatus, and device manufacturing method A surface position detecting apparatus which detects position information of a predetermined surface in an object, comprising a first optical system which projects light from an oblique direction to the predetermined surface; a second optical system which receive th... | 02/07/2012 |
| 8107087 | Dimple position detection device and dimple position detection method for disk drive suspension A dimple position detection device for detecting a position of a dimple formed on a load beam is provided with an illumination device, imaging device, and image processing section. The illumination device directs illumination light toward the dimple. The imaging dev... | 01/31/2012 |
| 8107088 | Displacement sensor This invention provides a displacement measurement device, a displacement measurement method, and a thickness measurement device capable of easily ensuring a conjugate relationship between the light source and the diaphragm and capable of accurately measuring the ch... | 01/31/2012 |
| 8102540 | Coriolis flow sensor with optically reflective motion sensor A Coriolis flow sensor with at least one vibrating flow tube through which a medium flows, includes elements for exciting the tube, and optical detection element for determining the movements of one or several points of the tube based on the principle of reflection ... | 01/24/2012 |
| 8102539 | Method for measuring a gap between a multibladed rotatable member and a surrounding housing A method for measuring the gap between a multibladed rotatable member and a surrounding housing in a gas turbine engine. In accordance with the method, a blade is removed from the rotatable member and replaced by a distance measuring clearance probe. The distance fr... | 01/24/2012 |
| 8098383 | Method for detecting the space orientation and position of an object The invention relates to a method for the optical detection of the position and orientation of an object by means of an optical device comprising at least one parallelogram fastened to said object, the optical device comprising optical means and electronic analysis ... | 01/17/2012 |
| 8098384 | Coplanarity-testing machine Provided is a coplanarity-testing machine. The coplanarity-testing machine includes a working stage, an illuminant, an image picking-up processor, a frequency converter, a double-cross lines generator, a linear module and a display. The linear module includes a test... | 01/17/2012 |
| 8089638 | Stage with displacement magnification mechanism for measuring The present invention relates to a stage with a displacement measuring means capable of measuring a displacement, and more particularly, to a stage provided with a displacement magnification means capable of magnifying a displacement so as to precisely measure a min... | 01/03/2012 |
| 8089637 | Apparatus for detecting a sample An apparatus for effectively detecting and calibrating a sample of examination system. The apparatus has an optical-electronic assembly for detection of the sample initiated with a light projected to the sample and an elastic supporting assembly for providing motion... | 01/03/2012 |
| 8085410 | Projected scanning laser device and method for locating small objects A projection laser scanner and method used to locate otherwise difficult-to-see items inadvertently dropped onto relatively flat surface areas, such as but not limited to floors, countertops, and tabletops, which uses a laser beam with a broad field of view to illum... | 12/27/2011 |
| 8077327 | Method for controlling a machine tool and apparatus therefor Relative movement in X, Y and Z axis directions is made between a main spindle and a table 6 for application in a machine tool in which a work is machined. An emitting element 12 for irradiating laser beam 11 and a photosensitive element 13 | 12/13/2011 |
| 8072614 | Method of locating an object in 3-D Methods and devices for calculating the position of a movable device are disclosed. The device may include multiple optical detectors (ODs) and the movable device may include light sources. Optics may be above the ODs. A controller may calculate the position of the ... | 12/06/2011 |
| 8064070 | Methods and apparatus for an integral local substrate center finder for I/O and chamber slit valves Systems and apparatus are provided for locating the center of a substrate. The invention includes a frame, mounted between a slit valve assembly and a transfer chamber wall in substrate processing equipment; at least one emitter, housed in the frame, and adapted to ... | 11/22/2011 |
| 8049902 | Mobile vehicle A mobile vehicle provided with moving means and a moving control device automatically travels while detecting an advance distance and a turning angle by means of one optical displacement sensor. The mobile vehicle comprises a moving unit (2) for moving a body... | 11/01/2011 |
| RE42880 | Strobe light and laser beam detection for laser receiver A laser receiver detects a thin beam of laser light and distinguishes between the beam of laser light and an omni-directional pulse of light from a strobe by the use of an additional photo-detector. The device takes into account the possibility that the additional p... | 11/01/2011 |
| 8045182 | Location detection apparatus A location detection apparatus is disclosed that includes: a light source; a light output side reflector having a reflecting surface for reflecting light from the light source to a space; a rotation mechanism for rotating the light output side reflector; a first lig... | 10/25/2011 |
| 8040528 | Method for target tracking, and associated target A method for determining rotational position of a target in a target tracking System is disclosed. The target comprises a plurality of light emitting elements arranged circumferentially around the target. The target tracking System further comprises a tracker unit c... | 10/18/2011 |
| 8040529 | Displacement sensor A focused image is taken around the focal point by a confocal displacement meter. In a measurement apparatus, a confocal displacement meter system OPT-A includes a laser diode 1, a collimator lens 4, an objective lens 6, a half mirror 3, ... | 10/18/2011 |
| 8014003 | Body metric differential measurement device A method of measuring a metric of a measurement area of interest on a subject comprises contacting a part of the subject on a rest of a measurement apparatus that comprises an arm, a base attached to or formed on the arm, and a displacement sensor attached to the ar... | 09/06/2011 |
| 8009299 | Method for beam calibration and usage of a calibration body The invention relates to a method of calibration of the beam position of a corpuscular beam. A calibration body with structures is used, wherein the structures have a structure period PS in the plain section and within each structure there is a position L... | 08/30/2011 |
| 7995216 | Control of the positional relationship between a sample collection instrument and a surface to be analyzed during a sampling procedure with image analysis A system and method utilizes an image analysis approach for controlling the collection instrument-to-surface distance in a sampling system for use, for example, with mass spectrometric detection. Such an approach involves the capturing of an image of the collection ... | 08/09/2011 |
| 7995217 | High-resolution encoder array A position sensing apparatus and method, motion control system, and integrated circuit are provided that include a plurality of sensors and a tracking processor. The plurality of sensors includes a linear array of sensors that sense a plurality of features of an obj... | 08/09/2011 |
| 7995215 | Process for monitoring the functioning and/or adjustment of an optoelectronic sensor arrangement, as well as an optoelectronic sensor arrangement Monitoring the functioning and/or adjustment of an optoelectronic sensor arrangement (10) exhibiting at least two optical transmitters (S1, S2, S3), to each of which a laterally-resolving optical receiver is assigned, such that each of th... | 08/09/2011 |
| 7990550 | Method and system for determining position and orientation of an object The invention relates to a positioning method for determining the position and orientation of a mobile unit having a receiver (3′), whereby the receiver (3′) is detected by a scanner (2′), said scanner (2′) determining at least th... | 08/02/2011 |
