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Class 356/604 - Pattern is series of non-intersecting lines


Subclass of Class 356 - Optics: measuring and testing
Definition: Subject matter wherein the projected pattern is a series
No. of patents: 156
Last issue date: 03/27/2012


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NumberTitleIssue Date
8144338Pattern measurement apparatus and pattern measurement method
A pattern measurement method includes: acquiring sectional shapes of a first pattern corresponding to process parameters, respectively; using the acquired sectional shapes to calculate predicted spectral waveforms which would be obtained when light is applied to the...
03/27/2012
7623250Enhanced shape characterization device and method
The shape and orientation of rigid or nearly rigid moveable bodies are determined using a shape characterization. Sensors capture a plurality of representations of different perspectives of the body that are analyzed to determine a bounding volume of the body. The s...
11/24/2009
7602507Sensor for measuring the surface of an object
The invention relates to a sensor for measuring the surface of an object, having a contrasting unit (3) for projecting a pattern onto the surface of the object, and having a camera (4) for recording of the pattern projected onto the surface of the obje...
10/13/2009
7595894Profilometry apparatus and method of operation
A profilometry apparatus is provided. The profilometry apparatus includes a fringe projection device configured to project a fringe pattern on an object and an optical unit configured to capture an image of a distorted fringe pattern modulated by the object. The pro...
09/29/2009
7502125Measuring technology and computer numerical control technology
A measuring apparatus of this invention comprises: a projector; a camera; a generator that generates, from a photographed image of a fringe pattern projected by the projector at a time of calibration onto each of surfaces, first tuples, each including coordinates of...
03/10/2009
7474415Measurement method of three-dimensional profiles and reconstruction system thereof using subpixel localization with color gratings and picture-in-picture switching on single display
The present invention is a measurement method of three-dimensional profiles and a reconstruction system thereof using subpixel localization with color gratings and picture-in-picture switching on a single display, wherein the measurement method includes: 1. Preparat...
01/06/2009
7463367Estimating overlay error and optical aberrations
Aberration marks, which may be used in conjunction with lenses in optical photolithography systems, may assist in estimating overlay errors and optical aberrations. Aberration marks may include an inner polygon pattern and an outer polygon pattern, wherein each of t...
12/09/2008
7436525Three-dimensional shape measuring method, three-dimensional shape measuring apparatus, and focus adjusting method
An operation of projecting slit light onto an object to be measured and receiving light reflected thereon, and an operation of acquiring a two-dimensional image concerning the object to be measured are repeated a certain number of times by changing a focal length. A...
10/14/2008
7388678Method and device for three-dimensionally detecting objects and the use of this device and method
In order to determine three-dimensional coordinates of a surface (2) of an object (3) to be detected, the changes in color of a color pattern (5), which is projected by a projector (4) onto the surface (2), are to be encoded by usi...
06/17/2008
7388677Optical metrology optimization for repetitive structures
The top-view profiles of repeating structures in a wafer are characterized and parameters to represent variations in the top-view profile of the repeating structures are selected. An optical metrology model is developed that includes the selected top-view profile pa...
06/17/2008
7385709Microscopy imaging apparatus and method for generating an image
A method and a microscopy imaging apparatus for generating an optically sectioned image of a specimen are provided. The method comprises the steps of: illuminating the specimen with a modulating, spatially periodic illumination pattern; imaging said specimen on a co...
06/10/2008
7382471Non-contact apparatus and method for measuring surface profile
Embodiments of the invention provide a non-contact method for measuring the surface profile of an object that can include generating a point-type optical signal and projecting it on a rotatable precision optical grating, generating a rotating pattern of light and da...
06/03/2008
7372580Three-dimensional shape detecting device, three-dimensional shape detecting system, and three-dimensional shape detecting program
In a three-dimensional shape detecting system comprising a three-dimensional shape detecting device and an external calculating device, the three-dimensional shape detecting device includes: projection means which projects pattern light onto a subject; image data ob...
05/13/2008
7369253Systems and methods for measuring sample surface flatness of continuously moving samples
Measurement of sample surface flatness of a continuously moving sample. A conveyor continuously conveys a sample beneath a grating disposed at a non-zero angle with respect to the plane of conveyance. The relative distance between the sample and the angled grating c...
05/06/2008
7340107Shadow-free 3D and 2D measurement system and method
A shadow-free 3D and 2D measurement system combining, in one FMI set-up, a Moiré 3D lighting with other simultaneous external illuminations (for example a coaxial one or another). The reconstructed image combines the advantages of these different illuminations. The...
03/04/2008
7336374Methods and apparatus for generating a mask
A method for generating a mask for use with a light measurement system that includes a light source for projecting light onto a surface of an object, and an imaging system for receiving light reflected from the surface of the object. The method includes determining ...
02/26/2008
7336816Method and apparatus for measuring shape of bumps
The present invention provides a bump shape measuring apparatus comprising an illumination optical system which illuminates bumps arranged on a board with illumination light of a low tilt angle to a surface of the board; a detection optical system where reflected li...
02/26/2008
7336375Wireless methods and systems for three-dimensional non-contact shape sensing
Systems for acquiring an approximation of the surface geometry of a 3-dimensional object include a self-powered wireless, non-contact optical scanner, the location and orientation of which may be tracked with respect to an object coordinate system, and a processor c...
02/26/2008
7336814Method and apparatus for machine-vision
A system and method facilitate machine-vision, for example three-dimensional pose estimation for target objects, using one or more images sensors to acquire images of the target object at one or more positions, and to identify features of the target object in the re...
02/26/2008
7326292Quality evaluation method for single crystal ingot
The inventive quality evaluation method for a single crystal ingot generally includes a step of determining cropping and sampling positions and a step of evaluating a sample. The step of determining cropping and sampling positions includes: (a) inputting basic infor...
02/05/2008
7316869Mounting a pellicle to a frame
A pellicle membrane is mounted between an outer frame and an inner frame. At least one of the frames is attached to the reticle without using conventional adhesives. The pellicle and reticle may be used in a lithography system. The pellicle allows radiation to pass ...
01/08/2008
7317464Pulse width modulated spatial light modulators with offset pulses
In some embodiments, a display system includes a spatial light modulator including at least one pixel, a pixel source including pixel data corresponding to the pixel, a memory circuit connected to the pixel source and configured to store a pixel value corresponding ...
01/08/2008
7317542Method and device for optically measuring the surface shape and for the optical surface inspection of moving strips in rolling and processing installations
The invention relates to a method and a device for optically measuring the surface shape and for the optical surface inspection of moving elongated bodies, according to which surface shape measurement and surface inspection are integrated. A projector applies a line...
01/08/2008
RE39978Scanning phase measuring method and system for an object at a vision station
A method and system are provided including an optical head which moves relative to an object at a vision station to scan a projected pattern of imagable electromagnetic radiation across the surface of an object to be inspected at a relatively constant linear rate to...
01/01/2008
7315383Scanning 3D measurement technique using structured lighting and high-speed CMOS imager
A method for 3 dimensional scanning using a light source for projecting a source of illumination configured to be non-uniform or having a predetermined pattern is disclosed. A CMOS sensor having randomly accessible rows of pixels, and an associated lens system, is m...
01/01/2008
7310154Shape measurement system
An image capturing apparatus for capturing an image of an object. The image capturing apparatus includes a correspondence detector which detects a correspondence of characteristic points of an object based upon captured images of the object. A motion detector detect...
12/18/2007
7303111Lightweight bondhead assembly
A bondhead assembly having a bond body for mounting a bonding tool, a support structure that is configured to be drivable for moving the bondhead assembly to different locations and flexural elements arranged substantially along at least one plane which couple the b...
12/04/2007
7289230Wireless substrate-like sensor
A wireless substrate-like sensor is provided to facilitate alignment and calibration of semiconductor processing systems. The wireless substrate-like sensor includes an optical image acquisition system that acquires one or more images of targets placed within the se...
10/30/2007
7286246Method and apparatus for non-contact three-dimensional surface measurement
A non-contact three-dimensional surface measurement method is provided in which a grating pattern projected onto an object being measured, while the phase of the pattern is being shifted, is observed in a different direction from a projection direction to analyze th...
10/23/2007
7283255Wireless substrate-like sensor
A wireless substrate-like sensor is provided to facilitate alignment and calibration of semiconductor processing systems. The wireless substrate-like sensor includes an optical image acquisition system that acquires one or more images of targets placed within the se...
10/16/2007
7274470Optical 3D digitizer with enlarged no-ambiguity zone
An optical 3D digitizer with an enlarged non-ambiguity zone, comprising a structured light projector for projecting a fringe pattern over a target area, the fringe pattern having a shiftable position over the target area is disclosed. First and second cameras having...
09/25/2007
7268893Optical projection system
There is provided an optical projection system for projecting an image onto an object that is being manufactured and/or inspected. The system includes an image-projecting device, a target-locating device for determining the orientation of the image-projecting device...
09/11/2007
7256897Three-dimensional measurement apparatus and three-dimensional measurement method
There is provided an apparatus and method for three-dimensional measurements by shining an object to be measured with plural laser beams while scanning. Even if the optical intensity of laser beams is weak, light disturbance is accurately separated to perform real-t...
08/14/2007
7256884Particle detecting system and method of detecting particles using the same
There is provided a particle detector system and to detect particles on target including reticle and pellicle. The system includes a light transmitting device adapted to transmit light beam to a target through an electrowetting microlens, a light receiving device ad...
08/14/2007
7245387Three-dimensional measuring instrument
For measuring the three-dimensional shape of an object of measurement using a phase shift method, a three-dimensional shortening the measurement time. A printed state inspection device 1 includes a printed circuit board K printed with cream solder H, an illum...
07/17/2007
7242484Apparatus and methods for surface contour measurement
Apparatus and methods of measuring three-dimensional position information of a onto a surface of an object including two sources of radiation separated by a distance, each source having a spectral distribution, and being coherent with respect to the other of the sou...
07/10/2007
7236256Range finder and method
A linearly polarized light projector system projects linearly polarized light onto a subject. While polarizing filters are used for removing light specular-reflected on the subject, a reflected image after removal of the specular-reflected light is captured by image...
06/26/2007
7230701Compact spectroscopic ellipsometer
The invention concerns an ellipsometer comprising: a source (2) capable of emitting a broadband ray (4), a polarizer (10) for producing a polarised incident beam (12) adapted to illuminate a sample (16) according to at least a sele...
06/12/2007
7227165System and method for classification of timber
The present invention provides a system and a method to grade a piece of wood and simultaneously to classify this piece of wood by allowing an examination of four longitudinal faces thereof, so as to determine optimal specifications for a subsequent use thereof such...
06/05/2007
7224472Operation lamp with camera system for 3D referencing
The invention relates to a system for the combined shadow-free illumination of a pre-definable area and for referencing three-dimensional spatial co-ordinates, and to an active or passive referencing system, each in particular for referencing surgical or medical ins...
05/29/2007
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