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Class 356/600 - SURFACE ROUGHNESS


Subclass of Class 356 - Optics: measuring and testing
Definition: Subject matter for measuring irregularity of a surface.
No. of patents: 361
Last issue date: 05/29/2012


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NumberTitleIssue Date
8189205Surface inspection tool and surface inspection method
An object of the present invention is to provide a surface inspection tool in which a flat inspection range capable of measuring surface roughness of a wafer with patterns with high accuracy and in a nondestructive manner can be searched without visual search. In or...
05/29/2012
8159679Apparatus for measuring carriageway surface properties
An apparatus for measuring surface properties of a carriageway or road, comprising a platform arranged to move over the carriageway, the platform carrying a light source arranged to illuminate the carriageway, and a detector arranged to receive light returning from ...
04/17/2012
8144337Inspecting method and inspecting apparatus for substrate surface
To inspect a substrate such as a semiconductor substrate for surface roughness at high precision. The surface roughness of the substrate is measured in each frequency band of the surface roughness by applying a light to the substrate surface and detecting a s...
03/27/2012
8111405Automatic scan and mark apparatus
An automatic scan and mark apparatus has a machine tool, a location detection module, a laser detector, an ink jet and a control computer. The machine tool has a movable module and a stage. The stage mounts and holds a specimen having a scraped surface. The control ...
02/07/2012
8045179Bright and dark field scatterometry systems for line roughness metrology
Line edge roughness or line width roughness of a feature on a sample may be determined from incident radiation scattered from the feature. An amount of ordered scattered radiation characterized by a discrete diffraction order is determined and a diffuse scattered ra...
10/25/2011
8018603Paper type determination device
A paper type determination device of the invention drives plural light emitting points different from one another and having sequentially increasing distances from a reference point to emit light in such a manner that each is identified for irradiating one surface o...
09/13/2011
7884948Surface inspection tool and surface inspection method
An object of the present invention is to provide a surface inspection tool in which a flat inspection range capable of measuring surface roughness of a wafer with patterns with high accuracy and in a nondestructive manner can be searched without visual search. In or...
02/08/2011
7733502Roughness evaluation method and system
A roughness evaluation method for evaluating a roughness of lines formed on a substrate includes a measuring step of irradiating light onto a plurality of locations of the substrate and measuring a state of reflected light by a scatterometry; and an analyzing step o...
06/08/2010
7710582Laser processing apparatus and laser processing method for cutting and removing a part of a surface region of a substrate
Before applying a processing laser beam to a surface of a substrate through a film of liquid, distance M2 between a reference point on an axis of a first laser displacement meter and the surface of the substrate is measured to correct distance M1 betwe...
05/04/2010
7679756Device for a goniometric examination of optical properties of surfaces
A device for examining the optical properties of surfaces includes at least one first radiation device emitting radiation to a surface to be examined at least at a first predetermined spatial angle, at least one first detector for capturing the radiation emitted to ...
03/16/2010
7659994Apparatus for the determination of surface properties
A device for determining properties of surfaces having at least one first radiation device having at least one radiation source emitting radiation, having at least one first radiation detector having a first radiation detector element which captures at least a porti...
02/09/2010
7630086Surface finish roughness measurement
A method comprises generating a data set comprising first surface roughness data from a first orientation and second surface roughness data from a second orientation and determining a roughness bias parameter from the first surface roughness data and the second surf...
12/08/2009
7626709Device for examining the optical properties of surfaces
A device for examining the optical properties of surfaces includes at least one first radiation device which emits radiation to a surface to be examined at a first predetermined spatial angle, at least one first detector device for capturing the radiation emitted to...
12/01/2009
7593115Determining a length of a carrier line deployed into a well based on an optical signal
A component is deployed into a well on a carrier line having an optical cable. An optical signal is transmitted into the optical cable, and a travel time of the optical signal in the optical cable is determined. A profile of a characteristic along the optical cable ...
09/22/2009
7557933Measuring probe, sample surface measuring apparatus and sample surface measuring method
A measurement probe 1 for measuring a surface of sample S comprises a base section 10, a head section 30 having a probe tip 31, and a support structure section 15 which supports the head section 30 with the base section 1...
07/07/2009
7548323Displacement and flatness measurements by use of a laser with diffractive optic beam shaping and a multiple point sensor array using the back reflection of an illuminating laser beam
A laser beam system for measuring an aspect of a surface wherein a laser beam is reshaped into a corrected shaped laser beam having a corrected energy profile and subsequently reshaped into a measurement shaped laser beam having an measurement energy profile shaped ...
06/16/2009
7538892Method and apparatus for examining end faces of light guides
In order to provide light guides, in particular in the form of glass rod portions, with improved end faces, the invention provides a method for examining glass rods, in particular light guides, in which the glass rods are arranged in front of two cameras, the camera...
05/26/2009
7528964Method and apparatus for examining surfaces containing effect pigments
The present invention describes a method for an apparatus for examining surface properties. Properties of effect pigments are to be examined in particular. A surface (9) to be examined is examined at different emission and reception angles and any curvature o...
05/05/2009
7440118Apparatus and method for color filter inspection
The present invention provides an apparatus and method for detecting flatness and/or unevenness of a surface of an overcoat layer on a colored pixel layer of a color filter with a high degree of accuracy. The apparatus includes: a light source 34, placed almo...
10/21/2008
7433055Device for the examination of optical properties of surfaces
A device for examining the optical properties of surfaces includes at least one first radiation device which emits radiation to a surface to be examined at a first predetermined spatial angle; at least one first detector device for capturing the radiation emitted to...
10/07/2008
7430052Method for correlating the line width roughness of gratings and method for measurement
A method for correlating line width roughness of gratings first performs a step (a) generating a characteristic curve of a predetermined grating having a known line width, and a step (b) performing a comparing process to select a matching spectrum from a plurality o...
09/30/2008
7428060Optimization of diffraction order selection for two-dimensional structures
The number of diffraction orders to use in generating simulated diffraction signals for a two-dimensional structure in optical metrology is selected by generating a first simulated diffraction signal using a first number of diffraction orders and a hypothetical prof...
09/23/2008
7427747Optical image pickup apparatus for imaging living body tissue
A control portion of an optical image pickup apparatus includes a scan driver, a lock-in amplifier, and an A/D converter. The scan driver outputs a predetermined drive signal to a Y-scanning mirror and an X-scanning mirror and scans the Y-scanning mirror and the X-s...
09/23/2008
7417722System and method for controlling light scattered from a workpiece surface in a surface inspection system
A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a proc...
08/26/2008
7405835High-accuracy pattern shape evaluating method and apparatus
A quantity (or dispersion value) of a distribution of edge position due to random noise is expected to be reduced statistically to 1/N when N edge position data items are averaged. Using this property, the single page image is averaged in a vertical direction with v...
07/29/2008
7397565Device and method for obtaining appearance information
A device has first and second units that lights an object at first or second incident angles; a unit that generates image signals according to the intensity of the received light; units that guides diffusely and specularly reflected light from the object to the imag...
07/08/2008
7394531Apparatus and method for automatic optical inspection
An automated optical inspection system, comprising at least one camera having a field of view; and at least one image scanning module comprising a plurality of objective modules arranged to have fields of view covering a portion of an article during inspection, and ...
07/01/2008
7391518Device and method for the determination of the quality of surfaces
The present invention relates to a device and method for making quantified determinations of the quality of surfaces and wherein the device comprises an optical system with a first optical means and a second optical means as well as a control and evaluation means an...
06/24/2008
7369253Systems and methods for measuring sample surface flatness of continuously moving samples
Measurement of sample surface flatness of a continuously moving sample. A conveyor continuously conveys a sample beneath a grating disposed at a non-zero angle with respect to the plane of conveyance. The relative distance between the sample and the angled grating c...
05/06/2008
7365889System and method for transparency optimization
One embodiment pertains to analyzing a document that is to be printed on a transparency, determining whether the document formatting is optimized for transparency printing, and alerting a user if the document formatting is not optimized for transparency printing. An...
04/29/2008
7366637Form measuring instrument
A form measuring instrument comprising: a roughness sensor placed on the table, and for outputting measurement data that includes information on the cross-sectional shape; a relative movement mechanism for relatively moving the table and the roughness sensor such th...
04/29/2008
7363181Straightness correcting method for surface texture measuring instrument, and surface texture measuring instrument
A surface texture measuring instrument is provided that is capable of performing a correction operation depending on the rotation angle position of a detector even when the detector is rotated for measurement. ...
04/22/2008
7362450Specular surface flaw detection
An apparatus and a method for detecting low frequency specular surface flaws on coated substrates is disclosed. A method for detecting low frequency specular surface flaws may comprise: impinging visible electromagnetic radiation or light from an electromagnetic rad...
04/22/2008
7355711Method for detecting an end-point for polishing a material
An optical surface analysis system for scanning the surface of a (silicon) wafer and detect if any residual material is still on the wafer surface in order to determine an appropriate end-point in a polishing process. An Optical Surface Analyzer (OSA), of the presen...
04/08/2008
7349082Particle detection device, lithographic apparatus and device manufacturing method
To enable differentiation between a particle and a ghost particle, a detector system is presented. The detector system is configured to output at least two detector signals corresponding to an intensity of radiation being incident on the detector system. If radiatio...
03/25/2008
7349096Scatterometer and a method for observing a surface
A scatterometer comprising light source means (11) for providing an incident light beam (8) at different angles in the direction of a sample (5) to be analyzed, and a concave screen (1,2) for receiving the reflection (19) of the in...
03/25/2008
7341502Methods and systems for planarizing workpieces, e.g., microelectronic workpieces
Planarizing workpieces, e.g., microelectronic workpieces, can employ a process indicator which is adapted to change an optical property in response to a planarizing condition. This process indicator may, for example, change color in response to reaching a particular...
03/11/2008
7336376Measuring pyramid size on a textured surface
A method for measuring pyramid size of pyramids outwardly extending on a textured surface of an object, which method involves emitting from a light source a light beam along a first direction onto a region of the textured surface, measuring an intensity of light rec...
02/26/2008
7336810Skin evaluation method and image simulation method
A skin beauty evaluation method for imaging an object such as human face to obtain digital image data, extracting data on a mirror reflection light component of each pixel from the digital image data and evaluating the skin sheen and skin beauty by using this. A sim...
02/26/2008
7335280Method and equipment in the measurement of the flatness of the flow surface of the headbox of a paper machine
A method in the measurement of the flatness of the flow surface of a headbox of a paper machine is disclosed. The flatness is determined by placing a measuring tool on the flat surface formed by the flow surface and measuring the position of the measuring tool at ea...
02/26/2008
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