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Class 356/517 - For refractive indexing


Subclass of Class 356 - Optics: measuring and testing
Definition: Measuring and testing by light interference wherein the
No. of patents: 203
Last issue date: 12/13/2011


1            
NumberTitleIssue Date
8077325Methods, systems and computer program products for characterizing structures based on interferometric phase data
Structure profiles from optical interferometric data can be identified by obtaining a plurality of broadband interferometric optical profiles of a structure as a function of structure depth in an axial direction. Each of the plurality of interferometric optical prof...
12/13/2011
7835013Interferometric detection system and method
Disclosed are improved optical detection systems and methods comprising interferometric detection systems, methods for determining a characteristic property of a fluid, methods for calculating a shift between at least two signals, computer program products encoded i...
11/16/2010
7812967Microscopy method and microscope
The present invention provides a microscopy method and a microscope, which enable microscopic observation of desired information of a specimen with an extremely high S/N ratio in a short period of time without increasing intensity of a light sources. The method of t...
10/12/2010
7777894Immersion photolithography monitoring
A method and apparatus are provided for monitoring an immersion photolithography process, the method including supplying an immersion fluid having an initial refractive index, performing photolithography using the supplied immersion fluid, recovering the used immers...
08/17/2010
7460245Apparatus and method for measurement and compensation of atmospheric turbulence effects in wavefront interferometry
A method of operating a wavefront interferometry system that generates an array of interference signals that contains information about relative wavefronts of measurement and reference beams, the method involving: from the array of interference signals, computing a ...
12/02/2008
7428055Interferometer-based real time early fouling detection system and method
A interferometer-based fouling detection system and method are described. The system may include a fiber optic cable, a light source in communication with the fiber optic cable, at least one photo detector in communication with the fiber optic cable, and at least on...
09/23/2008
7422891Label-free high-throughput optical technique for detecting biomolecular interactions
Methods and compositions are provided for detecting biomolecular interactions. The use of labels is not required and the methods can be performed in a high-throughput manner. The invention also provides optical devices useful as narrow band filters. ...
09/09/2008
7420689Method for determining the refractive index during interferometric length measurement and interferometric arrangement therefor
The aim of the invention is to determine the refractive index and/or compensation of the influence of the refractive index during interferometric length measurement with the aid of an interferometer (13, 13′) impinged upon by at least two measuring beams (v...
09/02/2008
7420682Sensor device for interference and plasmon-waveguide/interference spectroscopy
Methods for measuring a property of a sample material present at an interface of an emerging medium in a spectroscopic device include a sensor (10) featuring at least one dielectric member (14) disposed upon a entrant medium (12), with the diele...
09/02/2008
7403292Fluid analysis element and fluid analysis apparatus
A fluid analysis element includes: a semi transmissive/semi reflective first reflector; a transmissive apertured member, having a plurality of apertures, with diameters sufficiently smaller than the wavelength of measuring light, formed therein for holding a fluid s...
07/22/2008
7388669Method of generating interferometric information
The present invention provides methods for generating interferometric information. Interferometric information from refractively scanned interferometers can contain errors due to wavelength-dependent refractive indices. The wavelength-dependent refractive indices of...
06/17/2008
7388676Image processing apparatus and refractive index distribution measuring apparatus
An image processing apparatus is disclosed which can produce refractive index distribution data with high accuracy without limiting directions in which transmitted wavefronts are measured. The image processing apparatus has a simulating section which simulates a tra...
06/17/2008
7368280Detection of biospecific interactions using amplified differential time domain spectroscopy signal
A method for detecting specific associations between a tethered molecule and an untethered target molecule. The method comprises (1) selecting a tethered molecule; (2) alternately impinging THz radiation onto the tethered molecule and onto a sample including the tet...
05/06/2008
7352435Lithographic apparatus and device manufacturing method
In an immersion lithography apparatus or device manufacturing method, the position of focus of the projected image is changed during imaging to increase focus latitude. In an embodiment, the focus may be varied using the liquid supply system of the immersion lithogr...
04/01/2008
7333211Method for determining a qualitative characteristic of an interferometric component
The present invention relates to a method for determining a qualitative characteristic of an interferometric component (eg a planar waveguide structure) or a process for determining a qualitative characteristic of a stimulus of interest to which the interferometric ...
02/19/2008
7330276Optical interference substrate, target detecting substrate, target detecting apparatus, and target detecting process
Provided are target detection substrate for target detecting apparatuses capable of detecting various targets such as pathogens, biological substances and toxic substances without using a costly measuring apparatus; which can detect these targets with a low measurem...
02/12/2008
7292349Method for biomolecular sensing and system thereof
A sensing system and method for biomolecular sensing. The system includes: a receptor for the at least one target, the receptor including a substrate and a transparent coating on the substrate having front and back surfaces; a light source positioned to direct at le...
11/06/2007
7286243Beam profile complex reflectance system and method for thin film and critical dimension measurements
Device and method for measuring complex reflectance using a light source for generating a light beam with known polarization state, a lens for focusing the beam onto a sample surface such that various rays within the focused beam create a spread of angles of inciden...
10/23/2007
7277180Optical connection for interferometry
A method including: (i) directing a beam to an interferometer head using an optical connection, the beam including a first beam component having a first polarization and a first frequency and a second beam component having a second polarization different from the fi...
10/02/2007
7272976Pressure sensor
A pressure gauge includes a diaphragm having a substantially rigid outer portion and a displaceable inner portion that displaces in response to a pressure difference between first and second sides of the diaphragm. The pressure gauge further includes a sensor locate...
09/25/2007
7267797Nanofabricated photon tunneling based sensor
A system and method for detecting changes in the refractive index of a fluid in a small test volume. A change in the refractive index can indicate a change in the chemical composition of the fluid. The test volume has a depth comparable to or less than the wavelengt...
09/11/2007
7268888Compensation of refractivity perturbations in an interferometer path
In general, in one aspect, the invention features a method that includes directing a first measurement beam along a first path contacting a measurement object to determine a first interferometric phase related to a position of a measurement object, directing a secon...
09/11/2007
7268930Optical modulator
An optical modulator used for optically modulating electromagnetic energy. The optical modulator comprises a substrate and three substantially planar reflectors arranged substantially mutually orthogonal to each other. The planar reflectors comprise a base reflector...
09/11/2007
7254429Method and apparatus for monitoring glucose levels in a biological tissue
In accordance with the invention, a low coherence interferometer is used to non-invasively monitor the concentration of glucose in blood by shining a light over a surface area of human or animal tissue, continuously scanning the light over a two dimensional area of ...
08/07/2007
7251493Mobile terminals and methods for determining a location based on acceleration information
An acceleration measurement circuit is calibrated based on wireless communication signals that are received by a mobile terminal. A location of the mobile terminal is then determined using the calibrated acceleration measurement circuit. ...
07/31/2007
7247345Optical film thickness controlling method and apparatus, dielectric multilayer film and manufacturing apparatus thereof
A method of controlling film thickness of dielectric multilayer film with high precision, an optical film thickness controlling apparatus and a dielectric multilayer film manufacturing apparatus that can control the film thickness. An optical film thickness controll...
07/24/2007
7215457Apparatus and methods for modulating refractive index
An iono-refractive structure that includes one or more ion insertion layers having a real portion and an imaginary portion of the dielectric constant is provided. While both the real portion and the imaginary portion of the dielectric constant change, the change in ...
05/08/2007
7206078Non-destructive testing system using a laser beam
A noninvasive testing system using a method of testing a device under test by providing a beam of light from a light source having a first wavelength, and in a first beam instance imposing the beam of light on a test device when the test device has a first state of ...
04/17/2007
7199884Thin thickness measurement method and apparatus
Techniques for non-contacting thickness or caliper measurements of moving webs or sheets employ a sensor device that includes a first sensor head and a second sensor head that are spaced apart to define a path through which the moving web travels. The sensor device ...
04/03/2007
7190458Use of scanning beam for differential evaluation of adjacent regions for change in reflectivity
A semiconductor wafer having two regions of different dopant concentration profiles is evaluated by performing two (or more) measurements in the two regions, and comparing measurements from the two regions to obtain a reflectivity change measure indicative of a diff...
03/13/2007
7187178Method for determining the voltage sensitivity of the distance between the mirrors of a fabry-perot interferometer
A method for determining the voltage sensitivity of the distance between the mirrors of a Fabry-Perot interferometer in a measuring device, which is intended to measure a predefined gas (CO2), of which at least one absorption maximum or minimum is known. At least tw...
03/06/2007
7180603Reduction of thermal non-cyclic error effects in interferometers
In general, in one aspect, the invention features an interferometer assembly for use in a lithography tool used for fabricating integrated circuits on a wafer, wherein the lithography tool includes a support structure and a stage for positioning the wafer relative t...
02/20/2007
7164480Compensation for effects of mismatch in indices of refraction at a substrate-medium interface in non-confocal, confocal, and interferometric confocal microscopy
An interferometric microscope for making interferometric measurements of locations within an object that is in a medium, there being a mismatch between indices of refraction of said object and said medium, the microscope including a source for generating an input be...
01/16/2007
7158896Real time immersion medium control using scatterometry
Systems and/or methods are disclosed for measuring and/or controlling an amount of impurity that is dissolved within an immersion medium employed with immersion lithography. The impurity can be photoresist from a photoresist layer coated upon a substrate surface. A ...
01/02/2007
7153595Transparent substrate having a stack of thin metallic reflection layers
A glass pane is provided with a multilayer system having metallic reflection and a high thermal resistance. The multilayer system comprises a dielectric base layer, a metal layer having a high reflection, made of chromium or a metal alloy containing at least 45 wt %...
12/26/2006
7145709Apparatus and methods for modulating refractive index
An iono-refractive structure that includes one or more ion insertion layers having a real portion and an imaginary portion of the dielectric constant is provided. While both the real portion and the imaginary portion of the dielectric constant change, the change in ...
12/05/2006
7136163Differential evaluation of adjacent regions for change in reflectivity
A semiconductor wafer having two regions of different dopant concentration profiles is evaluated by performing two (or more) measurements in the two regions, and comparing measurements from the two regions to obtain a reflectivity change measure indicative of a diff...
11/14/2006
7130060Refractive index determination by micro interferometric reflection detection
A method and an apparatus for absolute refractive index measurements are disclosed, wherein a beam of spatially coherent laser light is directed perpendicularly on to a side of a capillary tube (12) and back reflected light is detected (16) over a rang...
10/31/2006
7106443Optical signal-to-noise monitor having increased coherence
Methods and apparatus for rapid, accurate OSNR measurements by directly measuring the spectrally-resolved State of Polarization (SOP) variation across each DWDM channel and using a polarization controller to deterministically extinguish the signal across narrow freq...
09/12/2006
7105354Analyzer
An analyzer characterized by comprising a chip and a detector, wherein the chip is an organic polymer member having a fine capillary through which a fluid sample or a fluid sample and a fluid reagent flow and can perform a chemical reaction on the sample in the capi...
09/12/2006
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