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| Number | Title | Issue Date |
| 8068235 | Systems and methods for multi-function coherent imaging Systems and methods are provided for multi-function coherent imaging comprising directing a first coherent radiation beam and a second coherent radiation beam towards a detector, where the second coherent radiation beam is spatially offset, angularly offset, or spat... | 11/29/2011 |
| 8018602 | Metrology of optics with high aberrations Disclosed herein is an interferometry device and associated method and computerized media for testing optical components including those with high aberrations, comprising: situating an optical component under test between a source of a spherical test wavefront and a... | 09/13/2011 |
| 7990543 | Surface characterization based on optical phase shifting interferometry Apparatus, techniques and systems for implementing an optical interferometer to measure surfaces, including mapping of instantaneous curvature or in-plane and out-of-plane displacement field gradients of a sample surface based on obtaining and processing four optica... | 08/02/2011 |
| 7952725 | Surface shape measurement apparatus and exposure apparatus A surface shape measurement apparatus is configured to measure a surface shape of an object to be measured, and includes a beam splitter configured to split white light from a light source into two light beams, a pair of prisms each configured to increase an inciden... | 05/31/2011 |
| 7948637 | Error compensation in phase shifting interferometry In certain aspects, disclosed methods include combining reference light reflected from a reference surface with test light reflected from a test surface to form combined light, the test and reference light being derived from a common source, sinusoidally varying a p... | 05/24/2011 |
| 7894076 | Electro-optical measurement of hysteresis in interferometric modulators Disclosed herein are methods and apparatus for testing interferometric modulators. The interferometric modulators may be tested by applying a time-varying voltage stimulus and measuring the resulting reflectivity from the modulators. ... | 02/22/2011 |
| 7859683 | Fast three-dimensional shape measuring apparatus and method Disclosed herein is an apparatus for measuring the shape of a 3D object using an interferometer. The apparatus includes a light source unit, a beam splitter, a reference mirror, an actuator, an image pickup device, and a control unit. The light source unit emits lig... | 12/28/2010 |
| 7847954 | Measuring the shape and thickness variation of a wafer with high slopes A system with two unequal path interferometers, with a first flat, a second flat, and a cavity between the first and second flats, a holder to receive an object in the cavity such that an optical path remains open between the first and second flats, and a motor coup... | 12/07/2010 |
| 7791737 | Method and apparatus for interferometrically measuring the shape of a test object Electromagnetic illumination radiation is produced and provided as an input wave. The input wave passes through a diffractive optical element and leaves as an incoming measuring wave, the wave front of the input wave being transformed such that the wave front of the... | 09/07/2010 |
| 7773232 | Apparatus and method for determining trench parameters An apparatus includes an evaluating unit and a peak detection unit. The peak detection unit is configured to determine at least one peak parameter of a peak in a Fourier transformed reflection spectrum of infrared radiation reflected off a sample that may comprise t... | 08/10/2010 |
| 7751064 | Interference objective for annular test surfaces An apparatus including: an interferometric objective comprising a beam splitter surface configured to separate input light into test light and reference light, and a reference surface configured to receive the reference light and direct it back to the beam splitter ... | 07/06/2010 |
| 7746478 | Method for interferometrically measuring an optical property of a test piece and a device suited for carrying out this method The invention relates to a method for interferometrically measuring large optics. A combination of a method known as stitching technique, during which the sub-interferograms are determined on partial surfaces of measuring area and are joined in a software-controlled... | 06/29/2010 |
| 7733500 | Wavefront sensor with optical path difference compensation In a wavefront sensor, an optical wavefront to be measured is split into a first optical path and a second optical path. A wavefront W1 in the first optical path is transmitted through a first compensation member 7, and a wavefront W2 in the sec... | 06/08/2010 |
| 7728988 | Method and apparatus for testing conic optical surfaces According to one aspect, a part has two reflective surfaces, one being a conic surface portion having an axis with a focus thereon, and the other being part of a spherical surface with a centerpoint at the focus. According to a different aspect, a method includes fa... | 06/01/2010 |
| 7659993 | Method and device for wave-front sensing A method for sensing a wave-front of specimen light scattered from an illuminated area in a specimen (10) includes the steps of focusing illumination light into the specimen (10), directing specimen light scattered in the specimen (10) to a dete... | 02/09/2010 |
| 7639369 | Multi-object wavefront sensor with spatial filtering The present invention relates to an adaptive optics sensor intended for simultaneous detection of several wavefronts on a common camera target. The sensor is intended for use in connection with multi-conjugate adaptive optics (MCAO), where several wavefront measurem... | 12/29/2009 |
| 7636168 | Interferometry method and system including spectral decomposition In general, in one aspect, the disclosure features a method that includes directing measurement light to reflect from a measurement surface and combining the reflected measurement light with reference light, where the measurement light and reference light are derive... | 12/22/2009 |
| 7609389 | Measurement apparatus for measuring surface map A measurement apparatus for measuring a surface map comprises an image sensor, an optical system including a reference surface and arranged to form an interferogram of a reflected wavefront from a test surface and that from the reference surface on an image sensing ... | 10/27/2009 |
| 7609388 | Spatial wavefront analysis and 3D measurement A method of wavefront (100) analysis including applying a transform to the wavefront, applying a plurality of different phase changes (110, 112, 114) to the transformed wavefront (108), obtaining a plurality of intensity maps (130, 132, 134 | 10/27/2009 |
| 7602502 | Methods of testing and manufacturing optical elements A method of manufacturing an optical element having an optical surface of a non-rotationally symmetric shape is described. Measuring light is generated using an interferometer optics, wherein the interferometer optics has at least one diffractive component having a ... | 10/13/2009 |
| 7583389 | Geometric measurement system and method of measuring a geometric characteristic of an object A geometric measurement system is adapted to precisely measure one or more surfaces of objects such as corneas, molds, contact lenses in molds, contact lenses, or other objects in a fixture. The geometric measurement system can employ one or more of three possible m... | 09/01/2009 |
| 7580135 | Chromatic compensation in Fizeau interferometer The focus of the collimating lens in the optical train of a Fizeau interferometer is adjusted to change the power of the test beam illuminating the transmission sphere. As a result, the rays can be made sufficiently perpendicular to the reference surface to eliminat... | 08/25/2009 |
| 7557932 | Characterization of micromirror array devices using interferometers The invention provides a method and apparatus for evaluating the quality of microelectromechanical devices having deformable and deflectable members using resonation techniques. Specifically, product quality characterized in terms of uniformity of the deformable and... | 07/07/2009 |
| 7554672 | Phase-diversity wavefront sensor A measuring apparatus provides data relating to the shape of an input radiation wavefront, the wavefront shape being describable at a pre-determined location in an optical system. The apparatus includes an aberration device which provides an aberration to the input ... | 06/30/2009 |
| 7545511 | Transmitted wavefront metrology of optics with high aberrations Disclosed herein is an interferometry device and associated method and computerized media for testing optical components including those with high aberrations, comprising: situating an optical component under test between a source of a spherical test wavefront and a... | 06/09/2009 |
| 7538890 | Wavefront-measuring interferometer apparatus, and light beam measurement apparatus and method thereof The light beam measurement apparatus comprises a beam splitter that divides a light beam emitted from a light source unit into two luminous fluxes, a semi-transmitting/reflecting surface that reflects part of one of the divided luminous fluxes back in the opposite d... | 05/26/2009 |
| 7522289 | System and method for height profile measurement of reflecting objects The present invention provides an interferometric method and system to measure the height profile of reflecting objects with respect of a reference surface. The method comprises obtaining an image of the object along a specular reflection axis, wherein the image cor... | 04/21/2009 |
| 7511827 | Interferometer and method of calibrating the interferometer An interferometer comprises a wavelength-variable light source. A reference light and a measurement light are synthesized, and the synthesized light is split into a plurality of split lights. A certain phase difference is provided between the split lights through ph... | 03/31/2009 |
| 7505144 | Copper CMP flatness monitor using grazing incidence interferometry A system and method for in-line inspection of specimens such as semiconductor wafers is provided. The system provides scanning of sections of specimens having predetermined standardized characteristics using a diffraction grating that widens and passes nth order (n>... | 03/17/2009 |
| 7495773 | In situ determination of pixel mapping in interferometry Interferometric methods and apparatus by which the map between pixel positions and corresponding part locations are determined in situ. The part under test, which is assumed to be a rigid body, is precisely moved from a base position to at least one other position i... | 02/24/2009 |
| 7492469 | Interferometry systems and methods using spatial carrier fringes In general, in one aspect, the invention features an apparatus that includes an interferometer having a main cavity and an auxiliary reference surface, the main cavity including a partially reflective surface defining a primary reference surface and a test surface. ... | 02/17/2009 |
| 7483149 | Optical measuring device for measuring curved surfaces An optical measuring device for measuring curved surfaces of a measured object. The curved surface to be measured may at least partially have the internal or external shape of a conical or cylindrical surface or of a saddle surface. The measuring device has a system... | 01/27/2009 |
| 7471398 | Method for measuring contour variations A method for measuring a contour variation of a measuring area on an object. The method includes the steps of: irradiating the measuring area with a light beam, wherein reflection or transmission of the beam occurs; splitting the transmitted or reflected beam; combi... | 12/30/2008 |
| 7456976 | Statistical method of generating a synthetic hologram from measured data Multiwavelength interferometric images have the phase and/or frequency of the illuminating light corrected by statistically analyzing the data, and adjusting the phase and/or frequency until a statistical measure reaches a criterion. ... | 11/25/2008 |
| 7446882 | Interferometer for determining characteristics of an object surface Disclosed is a system including: (i) an interferometer configured to direct test electromagnetic radiation to a test surface and reference electromagnetic radiation to a reference surface and subsequently combine the electromagnetic radiation to form an interference... | 11/04/2008 |
| 7443514 | Diffractive null corrector employing a spatial light modulator The present invention is directed to a system and method for using a spatial light modulator (SLM) to perform a null test of an (aspheric) optical surface. In an embodiment, such a system includes an interferometer, an optical element, and an SLM. The interferometer... | 10/28/2008 |
| 7440115 | System and methods for wavefront measurement A method and apparatus for characterizing an object with a wavefront from the object is disclosed. In one embodiment, the apparatus includes: a reticle positioned in a path of the wavefront, the reticle comprising two superimposed linear grating patterns; at least o... | 10/21/2008 |
| 7440114 | Off-axis paraboloid interferometric mirror with off focus illumination An off axis paraboloid mirror is used to provide object illumination in an interferometric imaging system. The light from an object illumination light source diverges from a point apart from the focus point of the paraboloid, proceeds to the parabolic mirror surface... | 10/21/2008 |
| 7436520 | Method of calibrating an interferometer optics and of processing an optical element having an optical surface A method of calibrating an interferometer apparatus uses a calibrating element having a plurality of structures comprising at least one of projections and indentations formed on a surface of the calibrating element at predetermined positions to generate interference... | 10/14/2008 |
| 7437077 | Wavefront sensing system employing active updating of reference positions and subaperture locations on wavefront sensor A free-space adaptive optical laser communication system having signal transmission and reception channels at all terminals in the communication system, wherein wavefront sensing and wavefront correction mechanisms are employed along signal transmission and receptio... | 10/14/2008 |
