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Class 356/505 - Gap


Subclass of Class 356 - Optics: measuring and testing
Definition: Dimensional measurement including an arrangement for measuring
No. of patents: 67
Last issue date: 12/29/2009


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NumberTitleIssue Date
7639368Tracking algorithm for linear array signal processor for Fabry-Perot cross-correlation pattern and method of using same
An algorithm and method for calculating an interferometric gap is disclosed that comprises providing an interferometric sensor having a first gap and an interferometric correlation element having a second gap placed in series with the first gap. A correlation burst ...
12/29/2009
7515278Tracking algorithm for linear array signal processor for Fabry-Perot cross-correlation pattern and method of using same
An algorithm and method for calculating an interferometric gap is disclosed that comprises providing an interferometric sensor having a first gap and an interferometric correlation element having a second gap placed in series with the first gap. A correlation burst ...
04/07/2009
7505143Dynamic reference plane compensation
In one embodiment, a method of dynamic reference plane compensation, comprises impinging radiation from a first radiation source onto a surface of an object; generating an uncompensated measurement signal from radiation reflected from a first location on the surface...
03/17/2009
7440117Highly-sensitive displacement-measuring optical device
Micron-scale displacement measurement devices having enhanced performance characteristics are disclosed. One embodiment of a micron-scale displacement measurement device includes a phase-sensitive reflective diffraction grating for reflecting a first portion of an i...
10/21/2008
7355720Optical displacement sensor
An optical displacement sensor is disclosed which uses a vertical-cavity surface-emitting laser (VCSEL) coupled to an optical cavity formed by a moveable membrane and an output mirror of the VCSEL. This arrangement renders the lasing characteristics of the VCSEL sen...
04/08/2008
7323216Method and an arrangement for preparation of optical fibers
The invention relates to a method and an arrangement for applying a coating on an end of an optical fiber by dipping said end into a unsolidified coating liquid. In a first sequence, the fiber end is moved towards the surface (18) of the liquid by a gripping ...
01/29/2008
7283571Method and system for performing wavelength locking of an optical transmission source
A system for locking the operating wavelength of an optical transmission source, the system including: a pattern of nanostructures being optically coupled to the optical transmission source and adapted to perform notch filtering; at least one photodetector optically...
10/16/2007
7247843Long-range gap detection with interferometric sensitivity using spatial phase of interference patterns
An apparatus and method measures the gap between one substantially planar object, such as a mask, and a second planar object, such as a substrate. A gapping mark is used for measuring a gap between the first and second plates. The gapping mark includes a first grati...
07/24/2007
7221442Method and apparatus for aligning equipment in a steel mill
An alignment device for aligning guiding apparatus with the main axis of a rolling mill comprising a camera and a video display communicating with the camera. The camera is mounted in the steel mill at the position of the guiding apparatus and the camera is moved un...
05/22/2007
7210858Optical connector with memory function
An optical connector with memory function comprises memory function for storing respective identification information in order to readily and exactly perform separate control of respective control steps and further to obtain convenient handling of connectors. The op...
05/01/2007
7196800Semiconductor die analysis as a function of optical reflections from the die
A light reflected from a semiconductor die is used for enhanced control of substrate removal from the die. According to an example embodiment of the present invention, light reflected from a semiconductor die as it is undergoing substrate removal is used to detect t...
03/27/2007
7184368Optical displacement sensor element
The invention relates an optical displacement sensor element comprising two essentially flat surfaces (1,2) being separated by a cavity defined by a spacer (5) and the surfaces (1,2), the distance between the surfaces being variable, wherein a f...
02/27/2007
7139446Compact fiber optic geometry for a counter-chirp FMCW coherent laser radar
This disclosure presents a non-contact precision optical device, including methods for measuring distances to an arbitrary target and various configuration geometries, for using polarization maintaining (PM) optical fiber components in a polarization diplexing schem...
11/21/2006
7116430Highly-sensitive displacement-measuring optical device
The present invention relates to micron-scale displacement measurement devices. A first embodiment is a device that includes a substrate and a rigid structure suspended above the substrate to form a backside cavity. Formed in the rigid structure is a reflective diff...
10/03/2006
7110122Interferometer calibration methods and apparatus
A method for calibrating an interferometer uses an actuator adapted to control an optical gap in response to application of an electrical signal. The interferometer is illuminated with a beam of light having a predetermined substantially monochromatic wavelength, or...
09/19/2006
7070405Alignment systems for imprint lithography
Described are systems for patterning a substrate by imprint lithography. Imprint lithography systems include an imprint head configured to hold a template in a spaced relation to a substrate. The imprint lithography system is configured to dispense an activating lig...
07/04/2006
7016052Apparatus for measuring characteristics of a hole and associated method
The apparatus and method of the present invention provide a quick, simple and accurate manner in which to measure the dimensions or characteristics of a hole without contacting the hole. The apparatus and method of the present invention also automatically detect dif...
03/21/2006
7013064Freespace tunable optoelectronic device and method
A tunable optoelectronic device comprising: a resonant grating filter exhibiting at least one filtering characteristic as electromagnetic radiation impinges thereupon; at least one dielectric material coupling said radiation onto said resonant grating filter and mov...
03/14/2006
7003890Wall reflectors for aligning laser beams and methods of using them
Wall reflectors work in conjunction with devices that emit wall laser beams, for assisting the attachment on a wall of items such as pictures. The wall reflectors are constructed to be attached on the wall, and to provide surfaces for reflecting the laser light beam...
02/28/2006
6941016Method for finding contours in an image of an object
A method is provided for robustly and efficiently identifying contours in an image of an object. Features are extracted from an image, typically using a Sobel edge detector or a set of large oriented filters, and are locally chained to form contour segments of parti...
09/06/2005
6930763Three dimensional sensor laser noise reduction method
A method for improving the accuracy of measurements made in non-contact gauging an object utilizing a detector to observe a laser line projected onto a surface of the object. A combination of detector lens f-number adjustments, surface scatter statistics, and laser ...
08/16/2005
6741335Optical translation measurement
A method for determining the relative motion of a surface with respect to a measurement device including placing a partially transmitting object, which is part of the measuring device, adjacent to the surface; illuminating the surface with incident illumination, whi...
05/25/2004
6657756Method and apparatus for increasing the effective efficiency of holograms
A method is disclosed for reconstructing an image from a total internal reflection hologram that includes the steps of arranging the hologram in relation to the first face of a coupling body, generating a substantially collimated illumination beam, direct...
12/02/2003
6657218Method and apparatus for measuring gap, method and apparatus for measuring shape and method for manufacturing liquid crystal device
A gap measuring method characterized by comprising the steps of: applying a plurality of color lights to a member provided with a gap, to produce color interference fringes; obtaining respective intensities of the color lights in the images of the interfe...
12/02/2003
6643025Microinterferometer for distance measurements
Several embodiments of a microinterferometer are disclosed. A first embodiment of a microinterferometer for measuring the absolute distance to an object surface includes a substrate. The microinterferometer also includes a phase-sensitive, reflective diff...
11/04/2003
6633387Method and apparatus for measuring opposite surfaces
An interference optical system (18) leads parallel beam to a pair of opposed test surface (M1, M2). It then leads, from the test surfaces via different optical paths (C1, C2), interference fringe images formed by radiation of the parallel beam to the test...
10/14/2003
6580511System for monitoring sealing wear
A system for determining at least one condition of a seal including an optical fiber for transmitting light from a light source. The optical fiber is embedded in the seal and operatively coupled to an interferometric system. The interferometric system is ...
06/17/2003
6577402Sensor and method for measuring changes in environmental conditions
A sensor has an interferometer which measures a change in an applied environmental condition relative to a reference environmental condition. The interferometer is operated under the applied environmental condition to generate an interference spectrum. In...
06/10/2003
6522411Optical gap measuring apparatus and method having two-dimensional grating mark with chirp in one direction
An apparatus and method of measuring the gap between one substantially planar object, such as a mask, and a second planar object, such as a substrate. The invention achieves a high degree of sensitivity, accuracy, capture range, and reliability, through a...
02/18/2003
6426796Fiber optic wall shear stress sensor
A fiber optic wall shear stress sensor is presented. The sensor comprises a floating head supported by a physical arrangement. At least one optical fiber is positioned in an operable relationship to the floating head wherein an interferometric region is f...
07/30/2002
6424407Optical translation measurement
A method for determining the relative motion of a surface with respect to a measurement device comprising: illuminating the surface with incident illumination; detecting illumination reflected from the surface to form at least one detected signal; and det...
07/23/2002
6320659Clearance measuring device and method for exposure
A position of an image or shadow of a clearance measuring mark projected onto a plate with respect to a position of clearance measuring mark on a photomask is sensed as image data by a CCD camera and subjected to an image process by a processor. Based on ...
11/20/2001
6292262Method and device to measure the gap between variable-position elements
Device and method to measure the gap between substantially static elements with a variable reciprocal position, used to adjust the reciprocal position of said elements to obtain a desired transit gap, comprising visual recording means connected to a proce...
09/18/2001
6246482Optical translation measurement
A method for determining the relative motion of a surface with respect to a measurement device comprising: illuminating the surface with incident illumination such that illumination is reflected from portions of the surface; placing a partially reflecting obje...
06/12/2001
6005666Apparatus for and method of optical inspection in total internal reflection holographic imaging system
Apparatus for and a method of optical inspection in a total internal reflection holographic imaging system. Multi wavelength laser beams are directed onto a prism supporting a first substrate containing pre-recorded hologram which is to be imaged onto a r...
12/21/1999
5912736Optical reflection methods and apparatus for aligning communication system components
Measuring and setting techniques for relative component orientations and separations is accomplished by projecting a coherent light beam into one end of a gap formed between facing surfaces of adjacent components. This light beam projection causes a corre...
06/15/1999
5870195Method and system for determining the distance between optical fibres
With the objective of simplifying the splicing of optical fibres and obtaining a very high degree of accuracy in the positional setting of the fibre ends prior to splicing the ends together fully automatically, the relative positions of the fibre ends are...
02/09/1999
5808742Optical alignment apparatus having multiple parallel alignment marks
Alignment marks on first and second plates include a plurality of periodic gratings. A grating on a first plate has a period or pitch p1 paired up with a grating on the second plate that has a slightly different period p2. A grating ...
09/15/1998
5636020Zone analysis system and method for optimizing the performance of an inspection system for determining disparity between two surfaces
A zone analysis system and method (211) optimize speed and minimize adverse effects resulting from noise in an inspection system (90) for measuring disparity between two surfaces. In particular, the zone analysis system and method (211) can be implemented...
06/03/1997
5626991Manufacture of flat panel displays
A method of forming e.g. pixel elements on a flat panel display for use as a flat screen for a TV or a computer display includes forming a volume holographic image on a recording medium (21) by interference between an object beam (OB) of coherent light af...
05/06/1997
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