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| Number | Title | Issue Date |
| 8144335 | Vibration-insensitive interferometer using high-speed camera and continuous phase scanning method The present invention relates to a vibration-insensitive interferometer using a high-speed camera and a continuous phase scanning method. The interferometer measures a measurement target by completely isolating influences of externally occurring vibrations from a fr... | 03/27/2012 |
| 8072610 | Polarization mirau interference microscope The conventional two plates with beamsplitter of the Mirau interferometer are replaced with two achromatic λ/4 retarders. The upper surface of the second retarder is coated with a 50 percent reflecting film, so that it also functions as a beamsplitter. The objectiv... | 12/06/2011 |
| 8009297 | Optical image measuring apparatus Provided is an optical image measuring apparatus capable of obtaining a high-accuracy image without being influenced by a movement of an object to be measured. Flash light is emitted from a xenon lamp (2) and converted into broad band light by an optical filt... | 08/30/2011 |
| 8004687 | Interferometric system with reduced vibration sensitivity and related method A source module (12) generates mutually orthogonally polarized beams of light as emanating from two spatially separated point sources (Sv, Sw) for use in a phase shifting interferometer. ... | 08/23/2011 |
| 7978337 | Interferometer utilizing polarization scanning In one aspect, the disclosure features methods that include using a microscope to direct light to a test object and to direct the light reflected from the test object to a detector, where the light includes components having orthogonal polarization states, varying a... | 07/12/2011 |
| 7940399 | Jones phase microscopy of transparent samples Methods for displaying anisotropic properties of an object. The object is illuminated with a first test beam characterized by a first polarization that, after traversing the object, is combined with a reference beam. The combined light of the first transmitted test ... | 05/10/2011 |
| 7808648 | Method and device for optical determination of physical properties of features, not much larger than the optical wavelength used, on a test sample A method and device for optical determination of physical properties of features, not much larger than the optical wavelength used, on a test sample are described. A beam is split into reference and illuminating beams having known polarization. The test sample is ex... | 10/05/2010 |
| 7626706 | Polarization interference microscope The present invention relates to a polarization interference microscope (1) for imaging objects (5). The polarization interference microscope (1) comprises a light source (2), an illumination beam path (6), an imaging beam path ( | 12/01/2009 |
| 7561279 | Scanning simultaneous phase-shifting interferometer An optical measuring apparatus for comprising, in combination, a polarization type interferometer including a polarization type beam splitter in which a polarized beam of light is split into orthogonally polarized reference and test beams, an array of detectors arra... | 07/14/2009 |
| 7551292 | Interferometric Height Measurement The invention relates to an interferometric method for measuring a height of a first region on a first surface, the first surface having first areas having first optical properties and second areas having second optical properties, the method comprising the steps of... | 06/23/2009 |
| 7551291 | Interferometric height measurement The invention relates to an interferometric method for measuring a height of a first region on a first surface, the first surface having first areas having first optical properties and second areas having second optical properties, the method comprising the steps of... | 06/23/2009 |
| 7545504 | Imaging systems using unpolarized light and related methods and controllers Optical imaging systems are provided including a light source and a depolarizer. The light source is provided in a source arm of the optical imaging system. A depolarizer is coupled to the light source in the source arm of the optical imaging system and is configure... | 06/09/2009 |
| 7499178 | Oblique incidence interferometer An oblique incidence interferometer is provided for applying a light at a certain angle from the normal to a measurement surface of a target to be measured and measuring a light reflected from the target. A beam splitter element and beam synthesizer element splits t... | 03/03/2009 |
| 7486402 | Optical image measuring apparatus An optical image measuring apparatus including a light emitting portion outputting light having different wavelengths intensity-modulating the light periodically, a polarizing plate converting a light to linearly polarized light, a half mirror dividing the light int... | 02/03/2009 |
| 7468798 | System and method for polarization characteristic measurement of optical systems via centroid analysis A method for irradiating onto a target optical system plural linearly polarized rays having different polarization directions, and for measuring a polarization characteristic of the target optical system including a birefringence amount R and a fast axis Φ includes... | 12/23/2008 |
| 7466426 | Phase shifting imaging module and method of imaging A phase shifting imaging module in a handheld imager is provided. The phase shifting imaging module includes a first beam splitter configured to split an image radiation beam into first and second image radiation beams. It also includes a first prism configured to a... | 12/16/2008 |
| 7453577 | Apparatus and method for inspecting a patterned part of a sample An inspection apparatus is disclosed having an radiation system configured to provide an radiation beam, a beamnsplitter configured to create, from the radiation beam, a first illumination beam and a second illumination beam directed to a planar reference part of a ... | 11/18/2008 |
| 7440112 | Method and an apparatus for shape measurement, and a frequency comb light generator A method and an apparatus for shape measurement that is able to observe the deep portion under a skin with high spatial resolution by using a frequency COMB light generator is provided. A frequency COMB light generator for generating multiple frequency COMBs with va... | 10/21/2008 |
| 7405830 | Vibration-insensitive interferometer The present invention relates to vibration-insensitive point-diffraction interferometry. For the purpose of obtaining high immunity to vibration, a single-mode optical fiber is used to generate the reference wave, by means of point diffraction, directly from a measu... | 07/29/2008 |
| 7397569 | Method and system for interferometric height measurement A system and method for interferometric height measurement. A first coherent light beam and a second coherent light beam is generated. At least the first coherent light beam is reflected from a first region into a first return beam and the second coherent light beam... | 07/08/2008 |
| 7379188 | Phase shift interferometer A phase shift interferometer (100) has an illuminating optical system (200) that emits a P-wave and an S-wave, a collimator lens (110), a reference half mirror (120), a pinhole plate (130) having a pinhole (131), and a phase... | 05/27/2008 |
| 7372578 | Optical image measuring apparatus Provided is an optical image measuring apparatus capable of effectively receiving interference light, particularly an alternating current component thereof using a smaller number of photo sensors. The optical image measuring apparatus includes a polarizing plate for... | 05/13/2008 |
| 7365858 | Systems and methods for phase measurements Preferred embodiments of the present invention are directed to systems for phase measurement which address the problem of phase noise using combinations of a number of strategies including, but not limited to, common-path interferometry, phase referencing, active st... | 04/29/2008 |
| 7357054 | Highly dynamic processing machine for lenses A highly dynamic lens processing machine with a machine bed having at least a first tool holder and one workpiece holder with an axis of rotation and including a workpiece spindle arranged thereon. The first tool holder includes at least one dynamic linear drive wit... | 04/15/2008 |
| 7349102 | Methods and apparatus for reducing error in interferometric imaging measurements Described is a fringe generator for an interferometric measurement system having improved fringe stability and reproducibility. The fringe generator includes a light source at a characteristic wavelength and a diffractive element to generate a pair of diffracted bea... | 03/25/2008 |
| 7339681 | Surface plasmon resonance microscope using common-path phase-shift interferometry The present invention integrates the surface plasmon resonance and common-path phase-shift interferometry techniques to develop a microscope for measuring the two-dimensional spatial phase variation caused by biomolecular interactions on a sensing chip without the n... | 03/04/2008 |
| 7339658 | Device and method for measuring surface topography and wave aberration of a lens system, in particular an eye A device and a method are used for measuring the surface topography and a wave aberration of a lens system. The device is fitted with a first measuring system containing a light source radiating a first light beam of a first wavelength, and a detector which captures... | 03/04/2008 |
| 7327464 | System and method for coherent optical inspection A system and method for coherent optical inspection are described. In one embodiment, an illuminating beam illuminates a sample, such as a semiconductor wafer, to generate a reflected beam. A reference beam then interferes with the reflected beam to generate an inte... | 02/05/2008 |
| 7324209 | Apparatus and method for ellipsometric measurements with high spatial resolution A method of detecting non-uniform ellipsometric properties of a substrate surface involving: directing a measurement beam onto a spot at a selected location on or in the substrate; for each orientation of a plurality of different orientations of the reference beam r... | 01/29/2008 |
| 7321430 | Vibration resistant interferometry Scanning interferometry data for a test object is provided, the data typically including intensity values for each of multiple scan positions for each of different spatial locations of the test object. The intensity values for each spatial location define an interfe... | 01/22/2008 |
| 7315381 | Monolithic quadrature detector A compact monolithic quadrature detector generates four signals from an input beam including orthogonally polarized object and reference beam components provided by an interferometer. The single input beam may be split into four output beams using a first beam split... | 01/01/2008 |
| 7312876 | Optical image measuring apparatus An optical image measuring apparatus capable of measuring an object to be measured which includes a birefringent layer in a short time is provided. The optical image measuring apparatus includes a broad-band light source, lenses for increasing a diameter of the ligh... | 12/25/2007 |
| 7304746 | Common-path point-diffraction phase-shifting interferometer A common-path, point-diffraction, phase-shifting interferometer uses a half wave plate having a diffractive element, such as pin hole. A coherent, polarized light source simultaneously generates a reference beam from the diffractive element and an object beam from r... | 12/04/2007 |
| 7292346 | Triangulation methods and systems for profiling surfaces through a thin film coating An optical system includes a photolithography system, a low coherence interferometer, and a detector. The photolithography system is configured to illuminate a portion of an object with a light pattern and has a reference surface. The low coherence interferometer ha... | 11/06/2007 |
| 7289224 | Low coherence grazing incidence interferometry for profiling and tilt sensing An optical system includes a photolithography system, a low coherence interferometer, and a detector. The photolithography system is configured to illuminate a portion of an object with a light pattern and has a reference surface. The low coherence interferometer ha... | 10/30/2007 |
| 7289223 | Method and apparatus for spatially resolved polarimetry A method and an apparatus for the spatially resolved polarimetric examination of an imaging beam pencil (1) generated by an associated pulsed radiation source (9). A first and a second photoelastic modulator (6a, 6b) and a p... | 10/30/2007 |
| 7289222 | Interferometer apparatus and method of processing a substrate having an optical surface A method of processing a substrate having an optical surface includes using an interferometer which includes optics for providing a beam of measuring light. The optics polarize the beam of measuring light such that a tangential polarization component continuously in... | 10/30/2007 |
| 7286239 | Laser scanner with amplitude and phase detection A method for optical evaluation of a sample includes scanning a beam of coherent radiation over the sample, whereby the radiation is scattered from the sample, while directing a portion of the scanning beam toward a diffraction grating so that the portion of the bea... | 10/23/2007 |
| 7286245 | Method and apparatus for determining the influencing of the state of polarization by an optical system; and an analyser A method and an apparatus for determining the influencing of the state of polarization of optical radiation by an optical system under test, wherein radiation with a defined entrance state of polarization is directed onto the optical system, the exit-side state of p... | 10/23/2007 |
| 7283250 | Measurement of object deformation with optical profiler An interferometric profiler is used to measure object motion by modifying the motion of the scanner so that the phase variation at each scanning step is kept within the acceptable limits of the algorithm used to calculate phase changes. The scanner motion is so mani... | 10/16/2007 |
