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| Number | Title | Issue Date |
| 7933023 | Displacement detection apparatus, displacement measurement apparatus and fixed point detection apparatus A displacement detection apparatus includes a light source for emitting light and an extinction ratio conversion element which raises an extinction ratio of the light to 20 dB or more. A condenser lens condenses the light having the increased extinction ratio and a ... | 04/26/2011 |
| 7738112 | Displacement detection apparatus, polarization beam splitter, and diffraction grating A displacement detection apparatus, polarization beam splitter, and diffraction grating are provided. A displacement detection apparatus configured to detect a displacement includes a light source, a reflective diffraction grating configured to receive the two polar... | 06/15/2010 |
| 7471397 | Position-measuring device In a position-measuring device for recording the relative position of a scanning unit and a measuring graduation that is movable with respect to the latter in at least one measuring direction, the scanning unit includes a plurality of grating structures as well as a... | 12/30/2008 |
| 7443518 | Measuring instrument, in particular for transmission measurement in vacuum system A measuring instrument, in particular for transmission measurement with transparent substrates, comprises a measuring head with a light emitting element for emitting a light beam and a light receiver element for recording an incident light beam, and a retro-reflecto... | 10/28/2008 |
| 7428059 | Measurement method and apparatus, exposure apparatus, and device manufacturing method A measurement method measures a wavefront aberration of a target optical system using an interference pattern formed by lights from first and second image side slits. The first image side slit has a width equal to or smaller than a diffraction limit of the target op... | 09/23/2008 |
| 7375820 | Interference measuring apparatus for detecting a plurality of stable phase difference signals Interference measuring apparatus having an optical system for dividing a coherent light beam into two light beams, and causing the divided two light beams to pass along discrete optical paths. The light beams are made into linearly polarized light beams orthogonal t... | 05/20/2008 |
| 7368731 | Method and apparatus which enable high resolution particle beam profile measurement The PSF for a metrology array for high resolution particle beam profile measurement has been improved by improving five major elements of the metrology array. While improvement in each of the five elements provides and improved PSF, a combination of all five of the ... | 05/06/2008 |
| 7349101 | Lithographic apparatus, overlay detector, device manufacturing method, and device manufactured thereby A device according to one embodiment of the invention may be applied to measure the overlay (e.g. as a machine performance number) quickly and over an expanded range of locations (possibly everywhere) on a wafer. One method using such a device includes measuring the... | 03/25/2008 |
| 7336367 | Light-receiving/emitting composite unit, method for manufacturing the same, and displacement detection device A displacement detection device having excellent stability with the lapse of time and suitable for reduction in size and weight includes: a light source for emitting light; polarizing light splitting unit for splitting the light emitted from the light source into tw... | 02/26/2008 |
| 7333216 | Apparatus for wavefront detection An apparatus for wavefront detection includes a wavefront source for the production of a wavefront, an optical system transforming the wavefront, a diffraction grating through which the transformed wavefront passes, and a spatially resolving detector following the d... | 02/19/2008 |
| 7304749 | Point diffraction interferometer and exposure apparatus and method using the same A point diffraction interferometer measures optical performance of a target optical system based on a light intensity distribution of an interference fringe through an interference between a wave front that passes the target optical system and a reference wave front... | 12/04/2007 |
| 7286245 | Method and apparatus for determining the influencing of the state of polarization by an optical system; and an analyser A method and an apparatus for determining the influencing of the state of polarization of optical radiation by an optical system under test, wherein radiation with a defined entrance state of polarization is directed onto the optical system, the exit-side state of p... | 10/23/2007 |
| 7277182 | Apparatus for polarization-specific examination, optical imaging system, and calibration method A device for polarization-specific examination of an optical system having a detector part that has polarization detector means for recording the exit state of polarization of radiation emerging from the optical system. Also, an associated optical imaging system, an... | 10/02/2007 |
| 7265339 | Encoder interpolation apparatus An interpolating detector for generating a position signal indicating a change in the relative position of a code pattern that includes alternating light and dark stripes is disclosed. The interpolating detector includes a photodiode array, an interpolation function... | 09/04/2007 |
| 7202979 | Optical rotational position information detecting apparatus An apparatus for optically detecting rotational position information of a rotating object, includes a light source, a detector which is located at a position to receive scattered light from the rotating object when the rotating object is irradiated with a light beam... | 04/10/2007 |
| 7187449 | Light-receiving/emitting composite unit, method for manufacturing the same, and displacement detection device A displacement detection device having excellent stability with the lapse of time and suitable for reduction in size and weight includes: a light source for emitting light; polarizing light splitting unit for splitting the light emitted from the light source into tw... | 03/06/2007 |
| 7187451 | Apparatus for measuring two-dimensional displacement An apparatus for measuring a two-dimensional displacement is disclosed and includes a laser light source, a collimator lens, a beam splitter, a plurality of staggered conjugate optic lens and a plurality of interference optical dephasing modules. The laser light sou... | 03/06/2007 |
| 7161683 | Polarization-dependent grating interferometer for measuring optical profile depth and spectral properties of a sample The present invention relates to a spectrally dispersive interferometric optical apparatus having a light source, generating a phase shift, measuring the intensity of the interference signals, selectively measuring the intensity of the interference signal and determ... | 01/09/2007 |
| 7158237 | Interferometric measuring device and projection exposure installation comprising such measuring device A measuring device for interferometric measurement of an optical imaging system that is provided for projecting a useful pattern, provided on a mask, into the image plane of the imaging system, includes a wavefront source for generating at least one wavefront traver... | 01/02/2007 |
| 7129698 | Method and device for preparing a sensor signal of a position sensor for transmission to an evaluation unit The present invention is based on the finding that the evaluation of the sensor signals of a position sensor with a mechanical period or, in general terms, the cooperation between position sensors and evaluation units, can be improved by eliminating divergence betwe... | 10/31/2006 |
| 7126495 | Linear electric encoder with facing transmitter and receiver A capacitive motion encoder, for sensing the position of a moving object relative to a stationary object, includes at least one stationary element, coupled to the stationary object and a moving element, coupled to the moving object and in proximity to the stationary... | 10/24/2006 |
| 7061624 | Grating interference type optical encoder Provided is a grating interference type optical encoder including a scale board, a diffraction grating located on the scale board, a light receiving element, an illumination optical system for emitting a coherent light fluxes to the diffraction grating on the scale ... | 06/13/2006 |
| 7046368 | Position measuring arrangement A position measuring arrangement for determining a relative position between a first object and a second object. The arrangement includes a light source having a single-mode laser light source that generates radiation and a signal generator that receives the radiati... | 05/16/2006 |
| 7034947 | Compact interference measuring apparatus for detecting the magnitude and direction of positional deviation Interference measuring apparatus for detecting a plurality of different interference phase signals. The apparatus has a light dividing member for dividing linearly polarized light beams superposed one upon another into a plurality of light beams. The apparatus also ... | 04/25/2006 |
| 7031691 | Low-noise amplifier circuit and a method for amplifying low-power signals in a low-noise manner The invention relates to a low-noise amplifier circuit and a method for amplifying low-power signals in a low-noise manner. Said signals are supplied to the inputs of several amplifiers (20 . . . 29) which are arranged in parallel. The output signals of said ... | 04/18/2006 |
| 7020950 | Disc balancing device A disc balancing device and a method thereof. The disc balancing device includes a disc assembly having a driving source, and a disc rotatably disposed at the driving source, a displacement measurement unit measuring vibration in the rotation of the disc assembly, a... | 04/04/2006 |
| 7019282 | Optical encoder An optical encoder includes a scale having an optical grating formed thereon, a plurality of light-receiving devices, a light-emitting device, and a position-information detecting unit. The plurality of light-receiving devices is movable with respect to the scale. T... | 03/28/2006 |
| 7019842 | Position measuring device A position measuring device for detecting the relative position of a scanning unit and a scale. The position measuring device includes a scale and a scanning unit that is displaced with respect to the scale in a measuring direction. The scanning unit includes a scan... | 03/28/2006 |
| 6995836 | Angle measuring system An angle measuring system for the contactless determination of an angle between a first object and a second object which can be moved with respect to each other, the angle measuring system including a first component having a light source and connected to a first ob... | 02/07/2006 |
| 6980303 | Light-emitting/receiving combined unit and displacement sensors using the same The present invention provides a light emitting/receiving composite unit (1) for emitting and receiving lights, which includes a light source (3), an optical splitting unit (4) for splitting returning lights to the composite unit (1) into... | 12/27/2005 |
| 6975387 | Wavefront aberration measuring instrument, wavefront aberration measuring method, exposure apparatus, and method for manufacturing micro device Before measuring a wavefront aberration of a projection optical system, an image formation position of an image of a pattern of a test reticle which is formed on a predetermined surface is detected by an AF sensor. Based on a result of this detection, the position o... | 12/13/2005 |
| 6970255 | Encoder measurement based on layer thickness An encoder includes a layer on the scale that has a thickness that varies as a function of position along the length of the scale. The position of the sensor head with respect to the scale may be determined by measuring the thickness of the layer or index of refract... | 11/29/2005 |
| 6956654 | Displacement measuring device with interference grating A displacement measuring device allows a plurality of light beams to be incident at positions on a scale or diffracted at points on a scale grating, which are farther spaced away from each other than the diameter of the light beams on the scale grating, and makes an... | 10/18/2005 |
| 6806962 | Tilted interferometer The invention comprises methods and apparatus for reducing sub-harmonic cyclic errors by rotating by a small angle an interferometer or elements thereof. The rotation of the interferometer or selective elements thereof introduces a corresponding small angle between ... | 10/19/2004 |
| 6775008 | Opto-electronic scale reading apparatus A scale (10) is illuminated by a light source (18). After interaction with an index grating (12), fringes (F) are formed in a Talbot plane and analyzed by an analyzer grating (14). To decrease the sensitivity to changes in the ride height... | 08/10/2004 |
| 6771377 | Optical displacement sensing device with reduced sensitivity to misalignment An optical displacement sensing device is provided for determining the relative displacement of a diffraction scale grating that may have a grating pitch less than the wavelength of the light of the sensing device. The sensing device includes a split light beam inpu... | 08/03/2004 |
| 6679609 | Laser beam irradiation device A laser beam irradiation device, comprising a light source for emitting a laser beam, a cylindrical lens, an optical system for entering the laser beam to the cylindrical lens perpendicularly with respect to a center line of the cylindrical lens, and a lu... | 01/20/2004 |
| 6639683 | Interferometric sensor and method to detect optical fields A method and device is capable of amplitude, phase, polarization shear, wavelength, and diversity measurement along a common path by using a sampling device to get a sparse sampled optical field. The sampled field is fed to a diversity generator device. T... | 10/28/2003 |
| 6631047 | Interference device, position detecting device, positioning device and information recording apparatus using the same An apparatus having a first system for forming a composite light beam of two light beams to be made to interfere with each other, a splitting member for amplitude-splitting the composite light beam into three or more split light beams in the same area, an... | 10/07/2003 |
| 6618218 | Displacement detecting apparatus and information recording apparatus An apparatus for detecting the relative displacement of a surface to be detected, and an apparatus and method for recording information on a hard disc of a hard disk drive using such a detecting apparatus, the detecting apparatus comprising an interferenc... | 09/09/2003 |
