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| Number | Title | Issue Date |
| 7898670 | Distortion measurement imaging system A distortion measurement and inspection system is presented. In one embodiment, a vision system is implemented. The vision system performs dual focal plane imaging where simultaneous imaging of two focal planes is simultaneously performed on a sample substrate and a... | 03/01/2011 |
| 7710577 | Multiplexing spectrum interference optical coherence tomography The present invention achieves multiplexing spectrum interference optical coherence tomography capable of full-range OCT measurement that causes no delays in measurement time due to high-order scans and is also free from complex conjugated images. This multiplexing ... | 05/04/2010 |
| 7675628 | Synchronous frequency-shift mechanism in Fizeau interferometer An optical device for characterizing a test surface combines a Fizeau interferometer with a polarization frequency-shifting element. Two substantially collinear, orthogonally polarized beams having respective frequencies differing by a predetermined frequency shift ... | 03/09/2010 |
| 7623246 | Optical sensing devices with SPR sensors based on differential phase interrogation and measuring method using the same Disclosed is an optical sensing device, which comprises a light source emitting a light; a beam splitter; an SPR sensor unit comprising a sensing surface; and a detecting mechanism; and a converting unit converting the first beam and the second beam from the optical... | 11/24/2009 |
| 7609386 | Optical characteristic measuring apparatus An optical characteristic measuring apparatus includes: a light source section which sweeps wavelengths of a first input light and a second input light respectively, frequencies of the first and second input lights being different from each other and polarized state... | 10/27/2009 |
| 7538885 | Optical characteristic measuring apparatus An optical characteristic measuring apparatus includes: a light source section which sweeps wavelengths of a first input light and a second input light respectively, frequencies of the first and second input lights being different from each other and polarized state... | 05/26/2009 |
| 7471396 | Dual polarization interferometers for measuring opposite sides of a workpiece An optical interferometer (100) includes a first optical interferometer (200) disposed on a front surface side of a workpiece (W) and a second optical interferometer (300) disposed on a rear surface side of the workpiece (W). The first optical i... | 12/30/2008 |
| 7369251 | Full-field optical measurements of surface properties of panels, substrates and wafers Techniques and systems for using optical interferometers to obtain full-field optical measurements of surfaces, such as surfaces of flat panels, patterned surfaces of wafers and substrates. Applications of various shearing interferometers for measuring surfaces are ... | 05/06/2008 |
| 7365344 | Scanning fluorescent microscope A scanning fluorescent microscope includes a light source which irradiates a sample with an exciting light pulse, and a splitter which splits fluorescent photons emitted from the sample excited by the exciting light pulse, in at least first and second groups. The sc... | 04/29/2008 |
| 7349102 | Methods and apparatus for reducing error in interferometric imaging measurements Described is a fringe generator for an interferometric measurement system having improved fringe stability and reproducibility. The fringe generator includes a light source at a characteristic wavelength and a diffractive element to generate a pair of diffracted bea... | 03/25/2008 |
| 7342665 | System and method for control of paint thickness The invention is directed to a system and method for implementing process control for paint thickness using sonic NDE techniques. The system may, for example, generate ultrasound waves in a test object during the manufacturing process. A detector such as an interfer... | 03/11/2008 |
| 7339682 | Heterodyne reflectometer for film thickness monitoring and method for implementing The present invention is directed to a heterodyne reflectometer system and method for obtaining highly accurate phase shift information from heterodyned optical signals, from which extremely accurate film depths can be calculated. A linearly polarized light comprise... | 03/04/2008 |
| 7327469 | Method for compensating errors in interferometric surface metrology A method for determining a surface profile of an object is described. The method typically includes providing a surface profile (e.g., a height profile) of a test object measured by an interferometric profiler. Information related to field- and object orientation-de... | 02/05/2008 |
| 7324210 | Scanning interferometry for thin film thickness and surface measurements A method including: providing a low coherence scanning interferometry data for at least one spatial location of a sample having multiple interfaces, wherein the data is collected using a low coherence scanning interferometer having an illumination geometry and an il... | 01/29/2008 |
| 7317539 | Polarizing beam splitter device, interferometer module, lithographic apparatus, and device manufacturing method The invention relates to a polarizing beam splitter device, an interferometer module system, a lithographic apparatus, and a device manufacturing method. The polarizing beam splitter device includes an optical element and a polarizing beam splitter layer. The optica... | 01/08/2008 |
| 7310152 | Interferometer assemblies having reduced cyclic errors and system using the interferometer assemblies In general, in one aspect, the invention features apparatus that include an interferometer including a main assembly having two laterally displaced polarizing beam splitter interfaces, wherein the interfaces are positioned to receive two spatially separated beams an... | 12/18/2007 |
| 7298492 | Method and system for on-line measurement of thickness and birefringence of thin plastic films A system and method for analyzing the characteristics of a thin film is provided whereby the in-plane birefringence of thin films is determined by measuring the interference fringes in the transmission or reflection spectra using unpolarized light and light linearly... | 11/20/2007 |
| 7292349 | Method for biomolecular sensing and system thereof A sensing system and method for biomolecular sensing. The system includes: a receptor for the at least one target, the receptor including a substrate and a transparent coating on the substrate having front and back surfaces; a light source positioned to direct at le... | 11/06/2007 |
| 7286212 | Apparatus and method for measuring eccentricity of aspherical surface An apparatus for measuring the eccentricity of the aspherical surface has a light source unit; a condenser lens condensing light rays in the proximity of the center of paraxial curvature of a surface to be examined, of an aspherical lens; an angle changing means for... | 10/23/2007 |
| 7283254 | Apparatus for shifting reference distance of laser displacement sensor An apparatus for shifting a reference distance of a laser displacement sensor is capable of extending the measuring range in a laser displacement sensor having a fixed reference distance and a fixed measurement range by smoothly changing the traveling path of the la... | 10/16/2007 |
| 7268886 | Method and apparatus for simultaneously measuring displacement and angular variations Disclosed herein is a method and apparatus for simultaneously measuring a displacement and angular variations. The method and apparatus of the present invention allows light radiated from a single light source to be placed along a light axis so as to simultaneously ... | 09/11/2007 |
| 7268887 | Overlapping common-path interferometers for two-sided measurement Two common-path interferometers share a measuring cavity for measuring opposite sides of opaque test parts. Interference patterns are formed between one side of the test parts and the reference surface of a first of the two interferometers, between the other side of... | 09/11/2007 |
| 7259850 | Approach to improve ellipsometer modeling accuracy for solving material optical constants N & K A method of determining optical constants n and k for a film on a substrate is described. Optical measurements are preferably performed with an integrated optical measurement system comprising a reflectometer, spectral ellipsometer, and broadband spectrometer such a... | 08/21/2007 |
| 7239397 | Device for high-accuracy measurement of dimensional changes Thermal expansion characteristics of test materials of ultra-low thermal expansion material are measured with a test beam that is split into a test material-measuring portion and an instrument-measuring portion. Both measuring portions propagate through common porti... | 07/03/2007 |
| 7196797 | Differential interferometer with improved cyclic nonlinearity An interferometer system includes a plane mirror interferometer, a turning mirror, a retardation plate assembly having a retardation plate that can be adjusted and then fixed, and a retroreflector. A light beam travels in a path comprising the plane mirror interfero... | 03/27/2007 |
| 7193766 | Differential interferometric light modulator and image display device A light modulator incorporates a polarization sensitive prism and a novel MEMS ribbon device to impart a relative phase shift to polarization components of an incident light beam. A linear array of phase shifting elements in the MEMS device creates a linear image wh... | 03/20/2007 |
| 7190458 | Use of scanning beam for differential evaluation of adjacent regions for change in reflectivity A semiconductor wafer having two regions of different dopant concentration profiles is evaluated by performing two (or more) measurements in the two regions, and comparing measurements from the two regions to obtain a reflectivity change measure indicative of a diff... | 03/13/2007 |
| 7187449 | Light-receiving/emitting composite unit, method for manufacturing the same, and displacement detection device A displacement detection device having excellent stability with the lapse of time and suitable for reduction in size and weight includes: a light source for emitting light; polarizing light splitting unit for splitting the light emitted from the light source into tw... | 03/06/2007 |
| 7180599 | Polarization effect averaging In order to reduce polarization dependent error, the polarization state of incident light is set to at least two different states of polarization, and a first optical property is determined separately for each of said at least two states of polarization. Then, an av... | 02/20/2007 |
| 7173714 | Apparatus for parallel detection of the behaviour of mechanical micro-oscillators The invention concerns an apparatus for parallel detection of the behaviour of mechanical micro-oscillators interacting with the sample (21). The amplitude and the phase of resonance of micro-oscillators (12) are measured with optical means. The invent... | 02/06/2007 |
| 7136036 | Method and apparatus for uniform brightness in displays An analog display driver comprises a matrix array of flatness correction values used to compensate for variations in liquid crystal gap dimensions and at least a first digital-to-analog converter (DAC), wherein a variable voltage transfer function is applied to the ... | 11/14/2006 |
| 7136163 | Differential evaluation of adjacent regions for change in reflectivity A semiconductor wafer having two regions of different dopant concentration profiles is evaluated by performing two (or more) measurements in the two regions, and comparing measurements from the two regions to obtain a reflectivity change measure indicative of a diff... | 11/14/2006 |
| 7129508 | Compact VCSEL sensor with multiple sensing capabilities The invention includes also a sensor tat includes at least one laser, at least one detector, and at least one lens system that includes a sensor surface having three individual surfaces that are virtually the same, and an object surface having two individual surface... | 10/31/2006 |
| 7128714 | Non-contact waveform monitor A non-contact method and apparatus for continuously monitoring a physiological event in a human or animal, such as blood pressure, which involves utilizing a laser-based interferometer system to produce a waveform that is representative of continuous blood pressure ... | 10/31/2006 |
| 7126123 | Surface contamination detection method and apparatus A method and an apparatus for inspecting parts for surface contamination including the steps of covering the part with a film of water, and then scanning the wetted part with a infrared camera to preserve the reflected image of the reflected infrared light thereby d... | 10/24/2006 |
| 7116429 | Determining thickness of slabs of materials by inventors A method and apparatus for determining the thickness of slabs of materials using an interferometer. ... | 10/03/2006 |
| 7106457 | Achromatic shearing phase sensor for generating images indicative of measure(s) of alignment between segments of a segmented telescope's mirrors An achromatic shearing phase sensor generates an image indicative of at least one measure of alignment between two segments of a segmented telescope's mirrors. An optical grating receives at least a portion of irradiance originating at the segmented telescope in the... | 09/12/2006 |
| 7084983 | Interferometric confocal microscopy incorporating a pinhole array beam-splitter A confocal interferometry system for making interferometric measurements of an object, the system including an array of pinholes positioned to receive a source beam and, for each pinhole in the array of pinholes, separate the source beam into a corresponding referen... | 08/01/2006 |
| 7079255 | Optical coherence interferometry and coherence tomography with spatially partially coherent light sources An airbag cover is defined by a predetermined breaking line which is introduced into a shaped flat material in a recessed manner. The recesses are achieved by removing material by means of laser radiation. According to the invention, the flat material is provided wi... | 07/18/2006 |
| 7064841 | Method and arrangement for topographically characterizing a surface of a hard disk with distortion due to disk modes removed An arrangement and method of measuring head-media spacing modulation (HMS_Wq) removes the portion of out-of-plane motion caused by disk modes from the dynamic measurements of hard disk surface topography. Employing time-domain measurement techniques, circumferential... | 06/20/2006 |
