Class 356/488 - Having wavefront division (e.g., by diffraction)

Subclass of Class 356 - Optics: measuring and testing
Definition: Polarization wherein the beams to be combined are obtained
No. of patents: 35
Last issue date: 10/28/2008

Number	Title	Issue Date
7443518	Measuring instrument, in particular for transmission measurement in vacuum system A measuring instrument, in particular for transmission measurement with transparent substrates, comprises a measuring head with a light emitting element for emitting a light beam and a light receiver element for recording an incident light beam, and a retro-reflecto...	10/28/2008
7359046	Method and apparatus for wafer-level measurement of volume holographic gratings The invention describes a system for the measurement of volume holograms on a wafer scale that permits high-resolution and high throughput measurement of grating parameters. The invention uses a collimated beam of a fixed wavelength light source that is transmitted ...	04/15/2008
7291832	Optical encoders for position measurements Systems and methods are disclosed for providing position measurement information. For example, in accordance with one embodiment of the present invention, a multiple-pitch grating is disclosed which is adapted to receive one or more laser beams and provide an output...	11/06/2007
7274464	Position measuring device A position measuring device for detecting the spatial position of a movable element in relation to a base body, the device including a linear measuring device that measures a distance between a movable element and a base body and an angle-measuring apparatus that me...	09/25/2007
7262851	Method and apparatus for detecting relative positional deviation between two objects Disclosed is a method and apparatus for detecting a relative positional deviation between first and second objects. In one preferred form of the invention, the detecting method includes the steps of (i) providing the first and second objects with diffraction grating...	08/28/2007
7236244	Alignment target to be measured with multiple polarization states An alignment target includes periodic patterns on two elements. The periodic patterns are aligned when the two elements are properly aligned. By measuring the two periodic patterns at multiple polarization states and comparing the resulting intensities of the polari...	06/26/2007
7110103	Apparatus for and method of aligning a structure An apparatus for determining the orientation and/or position of a structure comprises a light source (28) for generating a light beam. A structure (31) is mounted in the optical path of the light beam such that the position and/or orientation of the st...	09/19/2006
7068371	Methods and apparatus for aligning a wafer in which multiple light beams are used to scan alignment marks A wafer, having alignment marks formed thereon, is aligned by radiating a first light beam onto the alignment marks so as to generate a first diffracted light beam. The first diffracted light beam is sensed at a first position. A second light beam is radiated onto t...	06/27/2006
7046368	Position measuring arrangement A position measuring arrangement for determining a relative position between a first object and a second object. The arrangement includes a light source having a single-mode laser light source that generates radiation and a signal generator that receives the radiati...	05/16/2006
7045769	Optical encoders for position measurements Systems and methods are disclosed for providing position measurement information. For example, in accordance with one embodiment of the present invention, a multiple-pitch grating is employed to receive one or more laser beams and provide an output laser beam encode...	05/16/2006
7009710	Direct combination of fiber optic light beams An interferometer includes a source of a heterodyne beam including frequency components having frequency components with orthogonal linear polarizations. A beam splitter separates frequency components of the heterodyne beams, and one or more AOMs increase the freque...	03/07/2006
6674519	Optical phase front measurement unit An adaptive optics system configured as an optical phase front measurement system which provides for relatively high resolution sampling as in holographic techniques but without the need for a reference beam. The optical phase front measurement system inc...	01/06/2004
6304318	Lithography system and method of manufacturing devices using the lithography system A lithography system for exposing a photosensitive member includes a photosensitive member placement unit, and an interference optical system. The interference optical system produces interference fringes on the photosensitive member so that the interfere...	10/16/2001
6204926	Methods and system for optically correlating ultrashort optical waveforms The invention features methods and systems for optical correlation of ultrashort optical waveforms, e.g., pulses. The optical waveform passes through a diffractive optic, e.g., a mask or grating, to generate multiple sub-beams corresponding to different d...	03/20/2001
5818588	Displacement measuring method and apparatus using plural light beam beat frequency signals A displacement measuring method for measuring displacement of an object to be examined is disclosed, wherein light which contains two components having a small difference in frequency is separated into a first light of a firs wavelength and a second light...	10/06/1998
5751426	Positional deviation measuring device and method for measuring the positional deviation between a plurality of diffraction gratings formed on the same object A device and method for measuring the positional deviation between a plurality of diffraction gratings formed on the same object include an illumination optical system for illuminating the plurality of diffraction gratings with a light beam, the illuminat...	05/12/1998
5682239	Apparatus for detecting positional deviation of diffraction gratings on a substrate by utilizing optical heterodyne interference of light beams incident on the gratings from first and second light emitters Apparatus for detecting a positional deviation of two diffraction gratings of each of first and second pairs of diffraction gratings formed on a substrate, by utilizing an optical heterodyne interference method. The apparatus includes a first light emitte...	10/28/1997
5625453	System and method for detecting the relative positional deviation between diffraction gratings and for measuring the width of a line constituting a diffraction grating A deviation detecting system for detecting a relative positional deviation between first and second diffraction gratings, includes a light source, an illuminating device for projecting first and second light beams from the light source, having different d...	04/29/1997
5541729	Measuring apparatus utilizing diffraction of reflected and transmitted light In measuring apparatus for detecting relative displacement of a diffraction grating, a light beam is separated in an optical unit such as polarizing beam splitter into a reflected light beam and a transmitted light beam which beams are projected onto the ...	07/30/1996
5498878	Method and apparatus for detecting positional deviation by using diffraction gratings with a compensation delay determining unit A method and apparatus for measuring relative positional deviation between first and second diffraction gratings formed on an object is disclosed, wherein, in detection of a signal corresponding to the relative positional deviation between the first and s...	03/12/1996
5448357	Position detecting system for detecting a position of an object by detecting beat signals produced through interference of diffraction light A position detecting system is disclosed wherein lights being mutually coherent and having first and second frequencies, respectively, different from each other are produced, and the light of the first frequency is divided into a first light and a second ...	09/05/1995
5436724	Apparatus for measuring relative movement using a diffraction grating having an orthogonally polarized input beam An apparatus for measuring relative movement by the use of a diffraction grating includes a light beam generating portion generating a light beam including light wave components having planes of polarization orthogonal to each other, an interference optic...	07/25/1995
5404220	Measuring method and measuring apparatus for determining the relative displacement of a diffraction grating with respect to a plurality of beams A method and an apparatus for measuring a very small displacement of an object. The first and second beat signals are produced by light beams of different frequencies diffracted by a diffraction grating. The phase difference between the first and second b...	04/04/1995
5369486	Position detector for detecting the position of an object using a diffraction grating positioned at an angle A position detector includes a diffraction grating provided on the surface of an object, an illumination system for illuminating the diffraction grating, a detection system for detecting diffracted light diffracted from the diffraction grating, and a proc...	11/29/1994
5327222	Displacement information detecting apparatus A displacement information measuring apparatus comprising light emitting source for emitting two light fluxes, acoustic optical device for giving a predetermined frequency difference to the two light fluxes from the light emitting source, optical system h...	07/05/1994
5164789	Method and apparatus for measuring minute displacement by subject light diffracted and reflected from a grating to heterodyne interference The present invention resides in method and apparatus for measuring a minute displacement, comprising applying a light of a first wavelength at a predetermined angle to a diffraction grating formed on an object whose position is to be detected, subjecting...	11/17/1992
5141317	Method of optoelectronically measuring distances and angles A method for optoelectronically measuring distances and/or angles is suggested. A first and second beam (13, 14 and 61, 63) are directed onto the surface 12 of an object 10 to be measured at pregiven angles (଱ and (ଲ) which are diffracted at a...	08/25/1992
5118932	Shaft rotation rate sensor with a diffraction grating producing a velocity-related beat frequency A shaft rotation rate sensor for turbine engines. A reflective radial grating on the surface of the turbine shaft is employed in conjunction with an electromagnetic wave source and beam combining elements to mix two beams of frequency f and f&#b1;Ɗf, whe...	06/02/1992
5050993	Diffraction encoded position measuring apparatus When a lightwave passes through a transmission grating, diffracted beams appear at the output or opposite side of the grating that are effectively Doppler shifted in frequency (phase) whereby a detector system can compare the phase of the zero order and h...	09/24/1991
5000572	Distance measuring system A device for measuring a moving distance of two relatively moving objects includes a first diffraction grating provided on one of the two objects and disposed along the relatively moving direction of the two objects, and a measuring portion provided on th...	03/19/1991
4815850	Relative-displacement measurement method A relative displacement among a plurality of objects is measured with a high degree of accuracy by utilizing diffraction and interference phenomena of waves through diffraction gratings formed on the objects. Forming diffraction gratings on a plurality of...	03/28/1989
4772119	Device for detecting a magnification error in an optical imaging system A device is described for detecting a magnification error in an optical imaging system comprising a lens system (L1, L2) which is telecentric at one side. Two gratings (RG1, RG2) arranged in the object plane (MA...	09/20/1988
4710026	Position detection apparatus An apparatus includes a means for providing a predetermined frequency difference between two light beams and generating an optical beat with respect to interference between first and second diffracted light beams from a diffraction grating formed on a sub...	12/01/1987
3930734	Process and apparatus for sensing magnitude and direction of lateral displacement Process and apparatus therefor for sensing the magnitude and direction of lateral displacement of at least one line or slit element of an article which comprises producing two coherent light beams of the same intensity, one of the beams having a different...	01/06/1976

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Class 356/488 - Having wavefront division (e.g., by diffraction)