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| Number | Title | Issue Date |
| 8179534 | Fixed wavelength absolute distance interferometer A fixed wavelength absolute distance interferometer including a first interferometer comprising a first light source transmitting a first light beam having a wavelength W toward a measurement target, a wavefront radius detector configured to provide a first measurem... | 05/15/2012 |
| 8125647 | Charged particle beam apparatus and displacement detecting circuit An object of this invention is to provide a charged particle beam apparatus that can easily evaluate the stability of a position that is irradiated with a charged particle beam. To achieve the above object, this invention includes a detector that scans a char... | 02/28/2012 |
| 8072609 | Enhanced sensitivity vibrometer An enhanced sensitivity laser vibrometer with increased output signal strength and more sensitive surface vibration detection, is provided by using a reflective mirror assembly to repeatedly bounce the sensing laser beam against the acoustic pressure-sensing diaphra... | 12/06/2011 |
| 7920272 | Chirped coherent laser radar system and method A laser radar system using collocated laser beams to unambiguously detects a range of a target and a range rate at which the target is moving relative to the laser radar system. Another aspect of various embodiments of the invention may relate to a laser radar syste... | 04/05/2011 |
| 7898669 | Absolute distance measurement method and system using optical frequency generator The present invention relates to absolute distance measurement method and system using an optical frequency generator. The absolute distance measurement method using the optical frequency generator includes (a) generating a plurality of different stabilized waveleng... | 03/01/2011 |
| 7880894 | Vibration detection device and vibration detector A vibration detection device that includes a light source that emits a laser beam; an interferometer, which includes two vibrating bodies that are capable of reflecting the laser beam, that splits the laser beam to cause interference patterns; and a detector that de... | 02/01/2011 |
| 7876449 | Laser interferometer A laser interferometer includes: a laser source for emitting a laser beam while stabilizing a center wavelength of the laser beam by modulating the laser beam using a modulation signal of a predetermined frequency; and a reference mirror and a measurement mirror for... | 01/25/2011 |
| 7852487 | Heterodyne interferometer device for optically measuring an object A device for the optic measuring of an object (1), including a signal processing unit (2) as well as an interferometer with a light source (3) and with at least one detector (4a, 4d). The interferometer is embodied su... | 12/14/2010 |
| 7764384 | Swept frequency laser metrology system A swept frequency laser ranging system having sub-micron accuracy that employs multiple common-path heterodyne interferometers, one coupled to a calibrated delay-line for use as an absolute reference for the ranging system. An exemplary embodiment uses two laser het... | 07/27/2010 |
| 7701587 | Position sensing apparatus, and position sensing method An apparatus for sensing the position of an object includes an irradiation portion for irradiating the object with continuous electromagnetic radiation, a detection portion for detecting electromagnetic radiation reflected by the object, and an output portion for su... | 04/20/2010 |
| 7639366 | Position-measuring device for determining the position of two objects movable with respect to each other along a measuring direction, and method for forming a reference pulse for such a position-measuring device A position-measuring device for determining the positions of two objects movable with respect to each other along a measuring direction includes a first radiation source for emitting an electromagnetic beam of rays, a beam splitter, which splits each beam of rays em... | 12/29/2009 |
| 7576868 | Cyclic error compensation in interferometry systems A first portion of a beam including a first frequency component is directed along a first path. A second portion of the beam is frequency shifted to generate a shifted beam that includes a second frequency component different from the first frequency component and o... | 08/18/2009 |
| 7535578 | Lithographic apparatus and interferometer system A lithographic apparatus is presented that includes a substrate holder configured to hold a substrate, an illuminator configured to condition a beam of radiation, a support structure configured to support a patterning device that imparts a desired pattern to the bea... | 05/19/2009 |
| 7511824 | Chirped coherent laser radar system and method A laser radar system using collocated laser beams to unambiguously detects a range of a target and a range rate at which the target is moving relative to the laser radar system. Another aspect of various embodiments of the invention may relate to a laser radar syste... | 03/31/2009 |
| 7477398 | Multi-beam heterodyne laser doppler vibrometer A multi-beam heterodyne vibrometer for analyzing vibration of an object includes an optical system and a combining element. The optical system generates a plurality of object beams and a plurality of reference beams where one of the plurality of beams has a frequenc... | 01/13/2009 |
| 7436519 | System and method for interferometer non-linearity compensation A method for non-linearity compensating interferometer position data generated from a measurement signal includes generating a first set of non-linearity parameters based on received digital position values. The method includes sensing whether a low velocity conditi... | 10/14/2008 |
| 7420689 | Method for determining the refractive index during interferometric length measurement and interferometric arrangement therefor The aim of the invention is to determine the refractive index and/or compensation of the influence of the refractive index during interferometric length measurement with the aid of an interferometer (13, 13′) impinged upon by at least two measuring beams (v... | 09/02/2008 |
| 7372577 | Monolithic, spatially-separated, common path interferometer Spatially-separated heterodyne interferometer architecture is combined with monolithic glass construction techniques to provide a monolithic, spatially-separated, common-path interferometer. The monolithic interferometer includes multiple optical components bonded t... | 05/13/2008 |
| 7372575 | Optical tomographic apparatus An optical tomographic apparatus is provided and includes a light source portion, an interferometer, and a signal processing portion. The light source portion including two low coherent light sources capable of simultaneously emitting light having wavelength bands d... | 05/13/2008 |
| 7370532 | RF communications method and system for laser ultrasonic testing A system including a processor, a high-energy density system linked to the processor, and a communicator linked to the processor. The communicator comprehensively integrates a plurality of hardware and software functions associated with operating the high-energy den... | 05/13/2008 |
| 7365857 | Precompensation of polarization errors in heterodyne interferometry Apparatus and methods for adjusting the polarizations of the components of an input beam to reduce leakage caused by imperfections in an interferometer are disclosed. The apparatus includes an interferometer positioned to receive an input beam that includes two comp... | 04/29/2008 |
| 7360703 | Laser scanning system for object monitoring A laser scanner is located in a fixed position to have line-of-sight access to key features of monitored objects. The scanner rapidly scans pre-programmed points corresponding to the positions of retroreflecting targets affixed to the key features of the objects. Th... | 04/22/2008 |
| 7362445 | Active control and detection of two nearly orthogonal polarizations in a fiber for heterodyne interferometry A polarization control system includes a light source that generates two light beams with different polarization states and optical frequencies. A polarization state modulator changes the polarization states of the two light beams. A first detector path generates a ... | 04/22/2008 |
| 7333185 | Optical velocimeter, displacement information measurement device and conveying and processing device There is provided an optical velocimeter for achieving miniaturization and lower power consumption thereof and for accurately detecting two-dimensional travel velocity of a measured object. This optical velocimeter includes a light-emitting element, a diffraction gr... | 02/19/2008 |
| 7333213 | Confocal microscopy An improved confocal microscope system is provided which images sections of tissue utilizing heterodyne detection. The system has a synthesized light source for producing a single beam of light of multiple, different wavelengths using multiple laser sources. The bea... | 02/19/2008 |
| 7330274 | Compensation for geometric effects of beam misalignments in plane mirror interferometers Techniques for compensating for geometric effects of beam misalignment in plane mirror interferometers are disclosed. ... | 02/12/2008 |
| 7324712 | Quality factor The present invention concerns the discrimination of good measurement results measured by a computer vision system from bad results. By the method of the invention, values calculated from the observation vectors of several measuring devices can be discriminated into... | 01/29/2008 |
| 7317538 | Optical two-dimensional velocity and/or movement detector In an optical movement information detector, light emitted from a laser diode (1) is split into a first beam (10), a second beam (11) and a third beam (12) by beam splitters (2a, 2b). The first, second and thir... | 01/08/2008 |
| 7292347 | Dual laser high precision interferometer An absolute distance measuring device based on laser interferometry may combine coarse, intermediate, and highest resolution measurement techniques to find the absolute distance to a sample surface with high resolution. The device may provide at least two laser wave... | 11/06/2007 |
| 7286240 | Compensation for geometric effects of beam misalignments in plane mirror interferometer metrology systems In one aspect, the invention features a method, including using an interferometer in an interferometry system to produce an output beam comprising a phase related to an optical path difference between a path of a first beam and a path of a second beam, wherein the f... | 10/23/2007 |
| 7283254 | Apparatus for shifting reference distance of laser displacement sensor An apparatus for shifting a reference distance of a laser displacement sensor is capable of extending the measuring range in a laser displacement sensor having a fixed reference distance and a fixed measurement range by smoothly changing the traveling path of the la... | 10/16/2007 |
| 7268888 | Compensation of refractivity perturbations in an interferometer path In general, in one aspect, the invention features a method that includes directing a first measurement beam along a first path contacting a measurement object to determine a first interferometric phase related to a position of a measurement object, directing a secon... | 09/11/2007 |
| 7265366 | Lithographic apparatus and device manufacturing method A lithographic apparatus includes a radiation source configured to provide radiation to an illumination system, the radiation source configured to provide radiation in a first wavelength range and in a second wavelength range, the second wavelength range being diffe... | 09/04/2007 |
| 7257334 | Device to detect or generate optical signals The present invention relates to a device for detecting or generating and modulating optical signals, and having an angular dispersive element arranged to change angles of the optical signals or carrier and/or reference rays brought to interference. ... | 08/14/2007 |
| 7256693 | Detector device The present invention relates to a detector device and, more particularly, to a detector device comprising a self-diagnosis means for monitoring the correct performance or otherwise of the device. During testing, the device, which normally operates using the Doppler... | 08/14/2007 |
| 7244623 | Method of manufacturing semiconductor device and apparatus of automatically adjusting semiconductor pattern A method of manufacturing a semiconductor device and an apparatus of automatically adjusting a semiconductor pattern can precisely correct a difference in the shape or position of a pattern exposed or formed in two exposure steps. A pattern measuring unit measures a... | 07/17/2007 |
| 7242481 | Laser vibrometry with coherent detection An optical system provides information about tangential vibration components of a surface at remote location. The optical system includes a light source assembly that emits first and second beams, each having one or more wavelengths and one or two polarizations. The... | 07/10/2007 |
| 7242480 | Low coherence interferometry for detecting and characterizing plaques A method for determining a characteristic of tissue in a biological sample comprising: directing light at the biological sample at a first depth and receiving that light reflected from the biological; directing the light at a reflecting device and receiving that lig... | 07/10/2007 |
| 7236252 | System and apparatus for measuring displacements in electro-active materials A device designed to apply uniaxial pressure to the surface of an electro-active material while simultaneously applying a current to the material under controlled temperature conditions and then measuring the displacement of the material by means of a laser interfer... | 06/26/2007 |
| 7215413 | Chirped synthetic wave laser radar apparatus and methods Chirped synthetic wave laser radar apparatus and methods are disclosed. In one embodiment, a system includes a laser source, a controller operatively coupled to the laser source and adapted to frequency-modulate first and second laser outputs, and an optical assembl... | 05/08/2007 |
