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Class 356/485 - For dimensional measurement (e.g., thickness gap, alignment, profile)


Subclass of Class 356 - Optics: measuring and testing
Definition: Measuring and testing using light beams of different frequency
No. of patents: 118
Last issue date: 07/12/2011


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NumberTitleIssue Date
7978336Three wavelength quantitative imaging systems
An optical system includes more than two optical interferometers that generate interference phenomena between optical waves to measure a plurality of distances, a plurality of thicknesses, and a plurality of indices of refraction of a sample. An electromagnetic dete...
07/12/2011
7907285Scattered light measuring device
Measurement of Brillouin scattered light is enabled without an optical receiver having a wide reception band. A scattered light measuring device includes a continuous wave light source that generates continuous wave light, an optical pulse generator that converts th...
03/15/2011
7894074Laser doppler vibrometer employing active frequency feedback
A laser Doppler vibrometer for vibration measurement that employs active feedback to cancel the effect of large vibration excursions at low frequencies, obviating the need to unwrap phase data. The Doppler shift of a reflective vibrating test object is sensed interf...
02/22/2011
7777891Elasticity and viscosity measuring apparatus
Brillouin scattered light is used to measure the distribution of elasticity and viscosity in a measurement object without contact and in a noninvasive and simpler manner. Measuring light emitted from a light source is directed from a light probe onto a measurement o...
08/17/2010
7688451Heterodyne interferometer having an optical modulator
A heterodyne interferometer having two interferometer arms and one optical modulator for changing the frequency of a radiation conducted via one interferometer arm and having a control device for setting the frequency change of the radiation and a detector device fo...
03/30/2010
7612888Method and apparatus for measuring heterodyne optical interference utilizing adjustable polarizing plate
A method and an apparatus for measuring optical heterodyne interference in which a reference light and a measurement light differing in frequency is generated. The measurement light is S- or P-polarization light which is irradiated on a target through a polarization...
11/03/2009
7545503Self referencing heterodyne reflectometer and method for implementing
The present invention is directed to a self referencing heterodyne reflectometer system and method for obtaining highly accurate phase shift information from heterodyned optical signals, without the availability of a reference wafer for calibrations. The self refere...
06/09/2009
7492465Method for determining optimal resist thickness
In an example embodiment, there is a method (600) for determining an approximately optimal resist thickness comprising providing a first substrate coated with a resist film having a first thickness using a first coat program, (605, 610). The first thic...
02/17/2009
7423761Light source apparatus and optical tomography imaging apparatus
A light source apparatus is equipped with at least three light sources each having a predetermined wavelength interval and different central wavelengths. At least one multiplexing means having wavelength selectivity, for multiplexing light emitted from each of a fir...
09/09/2008
7382465Optical vibrometer
A vibrometer system for determining the vibration spectrum of an object under examination. The vibrometer includes a bundle of optical fibers arranged in an array, wherein a majority of the fibers in the array are arranged to receive light reflected from the object ...
06/03/2008
7372577Monolithic, spatially-separated, common path interferometer
Spatially-separated heterodyne interferometer architecture is combined with monolithic glass construction techniques to provide a monolithic, spatially-separated, common-path interferometer. The monolithic interferometer includes multiple optical components bonded t...
05/13/2008
7372575Optical tomographic apparatus
An optical tomographic apparatus is provided and includes a light source portion, an interferometer, and a signal processing portion. The light source portion including two low coherent light sources capable of simultaneously emitting light having wavelength bands d...
05/13/2008
7359599Optical near-field generator and near-field optical recording and reproduction apparatus
Decrease in optical near-field intensity is prevented when an light propagating medium made of a high refractive index material, such as a waveguide or a lens, is combined with a scatterer for producing optical near-field. Near the optical near-field generating elem...
04/15/2008
7349072Lithographic apparatus and device manufacturing method
Embodiments of the invention include an interferometer measurement system in which at least one reflective surface is arranged such that, in use, the beam path of interferometer radiation of the interferometer measurement system incident on the at least one reflecti...
03/25/2008
7339682Heterodyne reflectometer for film thickness monitoring and method for implementing
The present invention is directed to a heterodyne reflectometer system and method for obtaining highly accurate phase shift information from heterodyned optical signals, from which extremely accurate film depths can be calculated. A linearly polarized light comprise...
03/04/2008
7336371Apparatus and method for measuring the wavefront of an optical system
A device and a method for wavefront measurement of an optical system (7), in particular by an interferometric measurement technique. A dynamic range correction element (12, 12a) is arranged in the beam path upstream of the detector arrangement (...
02/26/2008
7332700Photomultiplier tube with dynode modulation for photon-counting
In a photomultiplier tube (PMT) device having a plurality of dynodes provided between a cathode and an anode, a cancellation circuit provides two different modulation signals to the PMT to cancel the effects of the modulation signals upon the output of the PMT. For ...
02/19/2008
7317194Microscope for performing multiple frequency fluorometric measurements
An optical imager, such as a microscope for performing multiple frequency fluorometric measurements comprising a light source, such as a laser source is disclosed. The system is used to excite a sample into the fluorescent state. Light from the excited sample is col...
01/08/2008
7292347Dual laser high precision interferometer
An absolute distance measuring device based on laser interferometry may combine coarse, intermediate, and highest resolution measurement techniques to find the absolute distance to a sample surface with high resolution. The device may provide at least two laser wave...
11/06/2007
7268887Overlapping common-path interferometers for two-sided measurement
Two common-path interferometers share a measuring cavity for measuring opposite sides of opaque test parts. Interference patterns are formed between one side of the test parts and the reference surface of a first of the two interferometers, between the other side of...
09/11/2007
7256894Method and apparatus for performing second harmonic optical coherence tomography
The invention is an apparatus and method for second harmonic optical coherence tomography of a sample comprising a laser coupled to an interferometer which has a reference arm and in a sample arm. A nonlinear crystal in the reference arm generates a second harmonic ...
08/14/2007
7247345Optical film thickness controlling method and apparatus, dielectric multilayer film and manufacturing apparatus thereof
A method of controlling film thickness of dielectric multilayer film with high precision, an optical film thickness controlling apparatus and a dielectric multilayer film manufacturing apparatus that can control the film thickness. An optical film thickness controll...
07/24/2007
7245384Sample inclination measuring method
A sample inclination measuring method rotates, by a predetermined angle with respect to an interferometer apparatus, a columnar member having a leading end face in a planar form while the columnar member is held by a clamping apparatus, detects a relative angle betw...
07/17/2007
7242481Laser vibrometry with coherent detection
An optical system provides information about tangential vibration components of a surface at remote location. The optical system includes a light source assembly that emits first and second beams, each having one or more wavelengths and one or two polarizations. The...
07/10/2007
7239397Device for high-accuracy measurement of dimensional changes
Thermal expansion characteristics of test materials of ultra-low thermal expansion material are measured with a test beam that is split into a test material-measuring portion and an instrument-measuring portion. Both measuring portions propagate through common porti...
07/03/2007
7230754Neutral white-light filter device
A substantially neutral filter across the white-light spectrum is obtained by minimizing the wavelength-dependent effects of filtering components and of reflective coatings on surfaces. The incoming light is captured by a first prism and directed toward the interfac...
06/12/2007
7224468En-face functional imaging using multiple wavelengths
Methods and apparatus for en-face imaging using multiple wavelengths are described. In general, an imaging system receives light reflected from a sample under test and distinguishes between reflected light at a first wavelength and reflected light at a second wavele...
05/29/2007
7193720Optical vibration imager
A remote sensor capable of imaging vibrations at many simultaneous points using high-speed imaging cameras is disclosed. The preferred embodiment operates in heterodyne detection mode using a single camera to capture signals to recover multi-pixel vibrations. One al...
03/20/2007
7193721Systems using polarization-manipulating retroreflectors
Measurement systems that separate polarization components can use retroreflectors to preserve or transform polarization and avoid unwanted mixing of the polarization components. A suitable retroreflector can include a coated cube corner reflector with retardation pl...
03/20/2007
7158240Measurement device and method
Apparatus for determining the thickness of a configuration having flat, parallel surfaces that are transparent, or nearly so, to pre-specified types of energy. Embodiments comprise a mechanism for illuminating a front surface with an energy source and mechanisms for...
01/02/2007
7142147Method and apparatus for detecting, locating, and identifying microwave transmitters and receivers at distant locations
Methods and apparatuses for detecting, locating, and identifying microwave transmitters and receivers at distant locations are disclosed. First and second electromagnetic beams at first and second frequencies, respectively, are transmitted in first and second direct...
11/28/2006
7119907Low coherent interference fringe analysis method
In a low coherent interference fringe analysis method, a light intensity distribution of interference fringes formed by object light and reference light in a sample is represented by a light intensity distribution function using an envelope function. Subsequently, p...
10/10/2006
7116412Angle detection optical system, angle detection apparatus, optical signal switch system and information recording and reproduction system
A reflective surface for detection is provided in an object being detected. Laser light condensed by a condensing lens is emitted from a laser light source and angle detection is performed by performing angle detection of the reflected light. The reflected light is ...
10/03/2006
7116429Determining thickness of slabs of materials by inventors
A method and apparatus for determining the thickness of slabs of materials using an interferometer. ...
10/03/2006
7092102Measuring device for detecting the dimensions of test samples
A measuring device for detecting dimensions of bores has a light source emitting a light beam and a beamsplitter for splitting the light beam into a reference beam and a measuring beam. A reference mirror is arranged downstream of the beam splitter. The measuring be...
08/15/2006
7079260Optical profile determining apparatus and associated methods including the use of a plurality of wavelengths in the reference beam and a plurality of wavelengths in a reflective transit beam
An optical profile determining apparatus includes an optical detector and an optical source. The optical source generates a transmit beam including a plurality of wavelengths, and generates a reference beam including the plurality of wavelengths. Optical elements di...
07/18/2006
7061622Aspects of basic OCT engine technologies for high speed optical coherence tomography and light source and other improvements in optical coherence tomography
An optical coherence tomography (OCT) system including an interferometer provides illuminating light along a first optical path to a sample and an optical delay line and collects light from the sample along a second optical path remitted at several scattering angles...
06/13/2006
7057735Method for measuring the optical and physical thickness of optically transparent objects
A method and apparatus for measuring the optical thickness and absolute physical thickness of an optically transparent object utilizes a reflective interferometric process. A broadband optical signal is directed toward the object to be measured, and a pair of signal...
06/06/2006
7057742Frequency-scanning interferometer with non-specular reference surface
A frequency-scanning interferometer is modified to include a diffuse reference surface. An illuminating system produces an expanding measuring beam, portions of which reflect from a test object surface and the diffuse reference surface on converging paths to an imag...
06/06/2006
7046330Exposure apparatus
An exposure apparatus for printing, by exposure, a pattern of an original onto a substrate includes a housing tightly filled with a predetermined ambience and for accommodating therein at least a portion of an exposure light optical axis, and a detection system havi...
05/16/2006
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