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Class 356/398 - With object being compared and light beam moved relative to each other (e.g., scanning)


Subclass of Class 356 - Optics: measuring and testing
Definition: Subject matter including means to scan or sweep a configuration
No. of patents: 159
Last issue date: 10/07/2008


1        
NumberTitleIssue Date
7433032Method and apparatus for inspecting defects in multiple regions with different parameters
In a method of inspecting defects, a first actual region of an actual object is inspected based on a first characteristic parameter as an inspection condition. A point where an inspection region of the actual object is changed into a second actual region from the fi...
10/07/2008
7403872Method and system for inspecting manufactured parts and sorting the inspected parts
A method and system are provided for inspecting manufactured parts such as cartridges and cartridge cases and sorting the inspected parts. The system includes an illumination assembly for evenly illuminating a plurality of annular, exterior side surfaces of a part w...
07/22/2008
7394531Apparatus and method for automatic optical inspection
An automated optical inspection system, comprising at least one camera having a field of view; and at least one image scanning module comprising a plurality of objective modules arranged to have fields of view covering a portion of an article during inspection, and ...
07/01/2008
7365837Vision inspection apparatus using a full reflection mirror
The present invention relates to a vision inspection apparatus and method using total reflection mirrors. The present invention provides a vision inspection apparatus using the total reflection mirrors comprising; a board position control module for fixing a printed...
04/29/2008
7355689Automatic optical inspection using multiple objectives
Apparatus and techniques for automated optical inspection (AOI) utilizing image scanning modules with multiple objectives for each camera are provided. A scanning mechanism includes optical components to sequentially steer optical signals from each of the multiple o...
04/08/2008
7345271Optoelectric sensing device with common deflection device
The invention relates to an optoelectronic detection device, especially a laser scanner, comprising a transmitting device for transmitting preferably pulsed electromagnetic radiation, also comprising at least one receiving device which is associated with the transmi...
03/18/2008
7317522Verification of non-recurring defects in pattern inspection
A system and method for verifying defects in electrical circuit patterns including supplying a plurality of like electrical circuit patterns to a defect verification assembly after identification of candidate defects at an automated inspection assembly; verifying se...
01/08/2008
7315383Scanning 3D measurement technique using structured lighting and high-speed CMOS imager
A method for 3 dimensional scanning using a light source for projecting a source of illumination configured to be non-uniform or having a predetermined pattern is disclosed. A CMOS sensor having randomly accessible rows of pixels, and an associated lens system, is m...
01/01/2008
7268774Tracking motion of a writing instrument
Motion of a writing instrument is tracked from sensors located in the vicinity. The signals generated from the sensors are processed and used in a wide variety of ways. ...
09/11/2007
7266235Pattern inspection method and apparatus
A pattern inspection method in which an image can be detected without an image detection error caused by an adverse effect to be given by such factors as ions implanted in a wafer, pattern connection/non-connection, and pattern edge formation. A digital image of an ...
09/04/2007
7231833Board deflection metrology using photoelectric amplifiers
Manufacturers test printed circuit boards (PCB) to ensure that all components have been soldered to the correctly. Some tests cause the boards to deflect, which can damage component-to-board interfaces (i.e., solder joints) or components. Embodiments of the present ...
06/19/2007
7225051Closed-loop feedback for maximizing Cpk in progressive forming operations
A method and system for maximizing process capability in a progressive forming operation. The method compensates for deviations introduced by unformed components, and uses closed loop feedback to compensate for deviations introduced by forming tools. Fiducial featur...
05/29/2007
7181414Electronic toll collection system for toll road
An ETC (electronic toll collection) system includes an antenna having a predetermined directivity for providing a limited radio-communication service zone. A vehicle sensor operates for detecting a vehicle which reaches a predetermined position in the limited radio-...
02/20/2007
7180586System for detection of wafer defects
Fast on-line electro-optical detection of wafer defects by illuminating with a short light pulse from a repetitively pulsed laser, a section of the wafer while it is moved across the field of view of an imaging system, and imaging the moving wafer onto a focal plane...
02/20/2007
7167194Printing a code on a product
A method for printing is described. The method includes providing a printing system for printing a code on a product moving in a direction. The code is constructed from a plurality of pixels in a first data set indicating the positions of the pixels and generates a ...
01/23/2007
7133550Pattern inspection method and apparatus
A pattern inspection method in which an image can be detected without an image detection error caused by an adverse effect to be given by such factors as ions implanted in a wafer, pattern connection/non-connection, and pattern edge formation. A digital image of an ...
11/07/2006
7130039Simultaneous multi-spot inspection and imaging
A compact and versatile multi-spot inspection imaging system employs an objective for focusing an array of radiation beams to a surface and a second reflective or refractive objective having a large numerical aperture for collecting scattered radiation from the arra...
10/31/2006
7126681Closed region defect detection system
A method and apparatus for inspecting specimens or patterned transmissive substrates, such as photomasks, for unwanted particles and features, particularly those associated with contacts, including irregularly shaped contacts. A specimen is illuminated by a laser th...
10/24/2006
7123354Optical position measuring device
An optical position measuring arrangement that includes an incremental measuring graduation and a scanning unit, which can be moved in relation to the incremental measuring graduation along a measuring direction and by which position-dependent incremental signals ar...
10/17/2006
7110036Systems and methods for identifying a lens used in a vision system
Systems and methods for identifying an interchangeable lens in a vision system having a controllable light source, a camera, and the lens to be identified. Light provided by the light source is transferred to the camera by the lens to be identified. The amount of li...
09/19/2006
7046352Surface inspection system and method using summed light analysis of an inspection surface
The present invention discloses methods of conducting surface inspections using summed light. One method includes the steps of measuring summed light intensity values for the substrate, generating comparison values for the substrate, and then comparing the measured ...
05/16/2006
7035449Method for applying a defect finder mark to a backend photomask making process
A back-end method for photomask making generally includes the steps of inspecting a photomask and repairing each defect on the photomask. The step of inspecting the photomask preferably comprises a defect finder mark implementation routine. In general, when inspecti...
04/25/2006
7034272Method and apparatus for evaluating integrated circuit packages having three dimensional features
The present invention provides for methods and an apparatus for evaluating objects having three dimensional features. One method involves using both two dimensional data sets to improve the processing of three dimensional data sets. The two dimensional data set can ...
04/25/2006
7012420Measuring device to record values, in particular angles or linear segments
A measuring device for the recording of values, in particular angles or linear values, includes a measured value processor and a sensor arrangement, which supplies two phase-shifted signals. Connected in series to the sensor arrangement is an adjustment unit, which ...
03/14/2006
7004302Turntable
A turntable for the treatment of container for fillable goods with receiving places (1) for the container and with at least one treatment unit for the container received in the receiving places (1). In such a generic turntable the arrangement of severa...
02/28/2006
6956694Broad spectrum ultraviolet inspection systems employing catadioptric imaging
An ultraviolet (UV) catadioptric imaging system, with broad spectrum correction of primary and residual, longitudinal and lateral, chromatic aberrations for wavelengths extending into the deep UV (as short as about 0.16 μm), comprises a focusing lens group with mul...
10/18/2005
6940891High precision optical imaging systems and related systems
This disclosure describes the design and construction of high-precision off-axis optical imaging systems. The disclosure also describes the design and construction of high-precision mounting structures for rigidly holding optical elements in an optical imaging syste...
09/06/2005
6926452Mounting information-collecting device, connector, and mounting information-collecting method
There are disclosed a mounting information-collecting device which is capable of collecting mounting information concerning mounted statuses of circuit boards with high accuracy and efficiency, as well as a connector and a mounting information-collecting method ther...
08/09/2005
6922903Method and apparatus for measuring bent workpieces
A method and device for determining the length (b) of at least one of two legs (13, 14), of a workpiece (12) bent toward each other at a bending angle (β) requires location of the workpiece (12) in a defined position. The position of the bendin...
08/02/2005
6853454Optical analysis systems
A system for optical detection of kinetic samples. The system includes a dual set of detectors linked to a single processor. The time of signal integration is different for each detector, allowing one detector to have a higher sensitivity by integrating over a longe...
02/08/2005
6707543Mounting information-collecting device, connector, and mounting information-collecting method
There are disclosed a mounting information-collecting device which is capable of collecting mounting information concerning mounted statuses of circuit boards with high accuracy and efficiency, as well as a connector and a mounting information-collecting method ther...
03/16/2004
6602716Method and device for referencing fluorescence intensity signals
A method and device for fluorimetric determination of a biological, chemical or physical parameter of a sample utilize at least two different luminescent materials, the first of which is sensitive to the parameter, at least with respect to luminescence in...
08/05/2003
6597445Apparatus for deciding position of seam of golf ball
A seam position deciding apparatus (1) comprises a light source (3), a camera (5) and a computer (7). The computer (7) has operating means (for example, a CPU) and storage means (for example, an RAM) provided therein. Rays are irradiated from the light so...
07/22/2003
6480272System and method for in-situ particle contamination measurement using shadowgrams
A system (100) for determining particle contamination on optical surfaces (112, 114, 116) includes a detector array (118) and a non-coherent light source (110) that illuminates the detector array with non-coherent light reflected or refracted by the optic...
11/12/2002
6406849Interrogating multi-featured arrays
A method, apparatus for executing the method, and computer program products for use in such an apparatus. The method includes scanning an interrogating light across multiple sites on an array package including an addressable array of multiple features of ...
06/18/2002
6403950Method of producing a carrier frequency modulated signal
A method for generating a carrier frequency-modulated signal for the evaluation of n>2 photoelectric measurement signals which are generated by imaging a structured surface onto a spatial frequency filter and are phase-shifted with respect to one another ...
06/11/2002
6396949Machine vision methods for image segmentation using multiple images
Machine vision methods for segmenting an image include the steps of generating a first image of the background of an object, generating a second image of the object and background, and subtracting the second image from the first image. The methods are cha...
05/28/2002
6396942Method and apparatus for locating ball grid array packages from two-dimensional image data
A ball grid array inspection and location method and apparatus includes a raw feature finding processor which uses a feature finding algorithm to find ball features (irrespective of number) and generate a list of raw features as an X and Y location for ea...
05/28/2002
6363166Automated photomask inspection apparatus
An automated photomask inspection apparatus including an XY state (12) for transporting a substrate (14) under test in a serpentine path in an XY plane, an optical system (16) comprising a laser (30), a transmission light detector (34), a reflected light ...
03/26/2002
6304321Vehicle classification and axle counting sensor system and method
A vehicle detection and classification sensor provides accurate 3D profiling and classification of highway vehicles for speeds up to 100 mph. A scanning time-of-flight laser rangefinder is used to measure the distance to the highway from a fixed point abo...
10/16/2001
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