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| Number | Title | Issue Date |
| 7978327 | Molecularity measurement instrument and molecularity measurement method There is provided a molecularity measurement instrument capable of working out the number of molecules in a sample by comparing a measured value of a light quantity with a theoretical light quantity per a single molecule, and a molecularity measurement method using ... | 07/12/2011 |
| 7746473 | Full spectrum adaptive filtering (FSAF) for low open area endpoint detection A method for precise endpoint detection during etch processing of a substrate based on adaptive filtering of the optical emission spectrum (OES) data, even in low open area etching, is provided. Endpoint detection performed in this manner offers the benefits of incr... | 06/29/2010 |
| 7738103 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method for determining a parameter of a target pattern In a method for determining a structure parameter of a target pattern, a first series of calibration spectra are determined from at least one reference pattern, each spectra being determined using a different known value of at least one structure parameter of the re... | 06/15/2010 |
| 7728976 | Determining photoresist parameters using optical metrology To generate a simulated diffraction signal, one or more values of one or more photoresist parameters, which characterize behavior of photoresist when the photoresist undergoes processing steps in a wafer application, are obtained. One or more values of one or more p... | 06/01/2010 |
| 7710565 | Method of correcting systematic error in a metrology system A method for correcting systematic errors in an optical measurement tool in which a first diffraction spectrum is measured from a standard substrate including a layer having a known refractive index and a known extinction coefficient by exposing the standard substra... | 05/04/2010 |
| 7630078 | Calibrating implantable optical sensors A measurement light detector detects light transmitted by a light source of an implantable system that is scattered back into an implantable housing, and produces a measurement signal indicative of the intensity of the light detected by the measurement light detecto... | 12/08/2009 |
| 7426031 | Method and apparatus for inspecting target defects on a wafer A defect inspecting apparatus includes a first support unit supporting a standard sample having standard defects, a second support unit supporting a wafer having target defects, a light source irradiating an incident light to the standard sample or the wafer, a ligh... | 09/16/2008 |
| 7203344 | Biometric imaging system and method A method and system of obtaining a ten-print plain impression fingerprint includes scanning a print image, processing the scanned image, separating the processed image into individual fingerprint images, and determining how many print images have been scanned. The m... | 04/10/2007 |
| 6970806 | Method and system for testing articles of manufacture A data processor automatically analyzes test data after a small subset of the lot of IC packages has been tested for determining whether a rescreen condition has occurred in real-time. When the rescreen condition has occurred, a warning is provided in real-time shor... | 11/29/2005 |
| 6960416 | Method and apparatus for controlling etch processes during fabrication of semiconductor devices A method for controlling etch processes during fabrication of semiconductor devices comprises tests and measurements performed on non-product and product substrates to define an N-parameter CD control graph that is used to calculate a process time for trimming a pat... | 11/01/2005 |
| 6842241 | Method for checking the operation of an optical measuring device and checking device A method for checking the operation of a laboratory instrument used in biochemistry by means of an individual test plate (10) by comparing measured values of sample units (20, 21) placed in the wells (12) of the frame plate (11) to previo... | 01/11/2005 |
| 6674572 | Confocal microscopic device An autofocus for a confocal microscope is realized by means of a confocal microscope arrangement comprising an illumination arrangement for illuminating an object in a raster pattern, first means for generating a first wavelength-selective splitting of th... | 01/06/2004 |
| 6635405 | Print quality test structure for lithographic device manufacturing Disclosed is a print quality test structure for devices manufactured by lithography. The test structure allows for visual inspection of the print quality of the device. The test structure decouples the effects of overexposure, underexposure and focus so t... | 10/21/2003 |
| 6597453 | Computer joystick The present invention provides a computer joystick which will convert movements of its control stick into digital signals. The computer joystick comprises a housing with an opening on its top, a control stick, and two optical sensing devices for detecting... | 07/22/2003 |
| 6501549 | Method of measuring chemical concentration based on spatial separation and resolution of luminescence A method and associated apparatus for measuring chemical concentration in a liquid sample based on spatial separation and resolution of light is disclosed. The method is preferably applied to sensitive, quantitative, luminescence-based biosensors which re... | 12/31/2002 |
| 6449385 | Device for image inspection A device for inspecting a printed image of a product of a printing press, comprising an image detecting device that furnishes actual image data of the product, and a comparison circuit comparing the actual image data with master image data from a defect-f... | 09/10/2002 |
| 6433878 | Method and apparatus for the determination of mask rules using scatterometry A method and apparatus for determining optical mask corrections for photolithography. A plurality of grating patterns is printed onto a wafer utilizing a photomask having at least one grating. Each grating pattern within the plurality of grating patterns ... | 08/13/2002 |
| 6381013 | Test slide for microscopes and method for the production of such a slide A test slide for the calibration, characterization, standardization, use and study of photon and electron microscopes. The slide is created by forming patterns with specific types of geometries on suitable substrates and these slides provide a standard fo... | 04/30/2002 |
| 6379848 | Reticle for use in photolithography and methods for inspecting and making same A method for inspecting a reticle to evaluate the degree of corner rounding of a feature of a test pattern includes placing a reticle having a photomask formed thereon under a microscope. The photomask has a pattern corresponding to features of a semicond... | 04/30/2002 |
| 6222630 | Measuring and compensating for warp in the inspection of printed circuit board assemblies A system for inspecting potentially warped printed circuit board assemblies is disclosed. The system includes an inspection head with an axial, centrally located camera, and a laser disposed at an angle off the central axis. The central camera and the ang... | 04/24/2001 |
| 6175417 | Method and apparatus for detecting defects in the manufacture of an electronic device The invention provides a unique method and apparatus for detecting defects in an electronic device. In one preferred embodiment, the electronic device is a semiconductor integrated circuit (IC), particularly one of a plurality of IC dies fabricated on a w... | 01/16/2001 |
| 6128088 | Visibility range measuring apparatus for motor vehicle A visibility range measuring apparatus for detecting visibility range in a passive fashion without suffering erroneous operation even in the case of such a situation that a plurality of visibility range measuring apparatuses exist within a coverage thereo... | 10/03/2000 |
| 6049740 | Printed circuit board testing system with page scanner A method for verification of components installed on a printed circuit board includes the step of capturing an image of an entire printed circuit board and components mounted thereon using a scanning device. After it has been determined that a printed cir... | 04/11/2000 |
| 6023335 | Optoelectronic sensor The invention relates to an optoelectronic sensor comprising a light transmitter for the transmission of light signals into a monitored region, and also a light receiver for the reception of light signals transmitted by the light transmitter, wherein an e... | 02/08/2000 |
| 5864405 | Inspection apparatus of electronic component Terminal groups (2a), (2b), (2c) and (2d) extending in respective directions, of an IC (1 ) disposed on a stage (11 ) are reflected by first mirrors (31a), (31b), (31c) and (31d) down toward second mirrors (32a), (32b), (32c) and (32d). The terminal group... | 01/26/1999 |
| 5831721 | Method and apparatus for measuring particle size distribution in fluids Methods and apparatus utilizing back scattered laser light measurement techniques for the measurement of particle size distribution in a fluid are disclosed. Such methods and apparatus are particularly suited for but not limited to the measurement of sub-... | 11/03/1998 |
| 5694479 | Process for measuring the optical quality of a glass product For evaluating the optical quality of a glass product utilizing a projection technique, a camera and a computer, the image observed is compared with a reference image reconstructed by means of a convolution window which is displaced over the entire projec... | 12/02/1997 |
| 5650855 | Off-axis joint tranform correlator The off-axis joint transform correlator improves on the extant on-axis jo transform correlator by eliminating the requirement for a second laser frequency and the means for blocking the first laser frequency from propagating beyond a given point in the c... | 07/22/1997 |
| 5606411 | Inspecting method for disk used in photo film cassette A photo film cassette has a spool core (13) about which the photo film is wound in a roll form. A flexible disk (16, 17) is secured to each of two ends of the spool core, for regulating each of edges of the photo film. Material of the disk being thermopla... | 02/25/1997 |
| 5606410 | Method for controlling the surface state of one face of a solid and the associated device A method and apparatus for checking the surface state of one face (2) of a solid (1) in order to locate shape defects which may be present therein. The observation of the face to be checked takes place by means of photography using a large field video cam... | 02/25/1997 |
| 5351834 | Monitoring of printed sheets A printed sheet constituting a reference is scanned to form an image of a predetermined part of the sheet, and this reference image is stored in a microprocessor. Additional printed sheets which are to undergo further processing are subsequently similarly... | 10/04/1994 |
| 5093797 | Apparatus for inspecting packaged electronic device A printed circuit board inspecting apparatus, in which image data of a packaged circuit board under inspection obtained by picking up the image of the circuit board are processed through predetermined processing procedure for examining packaged states of ... | 03/03/1992 |
| 5083458 | Method and apparatus for recording loaded running tooth contact patterns on large reduction gears Method for recording loaded running tooth contact patterns on navy or marine large reduction gears comprising the steps of providing a pair of meshing gears having transversely spaced teeth with surfaces subject to wear, coating the surfaces of as least o... | 01/28/1992 |
| 5052797 | Copy viewer A copy viewer having a support stand for holding material to be copied in a viewing position and a "see-through" display device for displaying copied material directly over the material to be copied.... | 10/01/1991 |
| 5043589 | Semiconductor device inspection apparatus using a plurality of reflective elements An improved optical inspection apparatus, especially suited for inspecting semiconductor devices using a single camera. A highly polished mirrored stage is provided with a light source extending upwardly therethrough and providing a pedestal upon which th... | 08/27/1991 |
| 4855928 | Wire bonding device A wire bonding device including a camera for producing image signals corresponding to a field of view including an object having plural target patterns on which wire bonding is to be performed, a displacement device for altering the field view of the came... | 08/08/1989 |
| 4814624 | Method and apparatus for measuring the position of an object boundary The position of the boundary of an object is measured by forming an optical image of the part of the object of interest as the object part is moved past the end of a thin optical fibre. A photodetector receives the light from the fibre and applies an outp... | 03/21/1989 |
| 4798459 | Ophthalmic lens centering device An opthalmic lens centering device comprises a frame on which is a translucent first support plate which receives an opthalmic lens to be centered. There is a frosted screen at the base of the first support plate. A projector system above the first suppor... | 01/17/1989 |
| 4595289 | Inspection system utilizing dark-field illumination Integrated-circuit wafers and the lithographic masks and reticles used in their fabrication must be inspected for defects. Conventional systems accomplish such inspection by bright-field illumination and comparison of corresponding portions of two suppose... | 06/17/1986 |
| 4471448 | Method and apparatus for aligning an optical system A complex optical system may be aligned by means of a technique in which an analytical model of the system is utilized which is assumed to be capable of essentially optimal performance. A physical example of the same system design is then assembled and a ... | 09/11/1984 |
