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| Number | Title | Issue Date |
| 8107078 | Detecting device and method for detecting unevenness of a glass substrate A detecting device of unevenness of a glass substrate includes a light source emitting a light; a polarizer polarizing the light; a standard cell including opposing outer surfaces, the glass substrate attached to one of the opposing outer surfaces, the polarized lig... | 01/31/2012 |
| 7911611 | Optical system of atomic oscillator and atomic oscillator An optical system of an atomic oscillator that regulates an oscillation frequency by using an optical absorption property by one of a double resonance method utilizing light and micro waves and a coherent population trapping (CPT) method utilizing a quantum interfer... | 03/22/2011 |
| 7619736 | Apparatus and method for obtaining sample information by detecting electromagnetic wave A sample information obtaining apparatus includes an electromagnetic wave generator; a sample holding unit which holds a sample to be tested and serves as a polarizer having a polarization axis which defines how an incident electromagnetic wave is to be divided acco... | 11/17/2009 |
| 7307722 | Polarization stabilization A polarization stabilizing device and method based on controlling the phase retardation of a pair of variable phase retarders with a controller such that the first of the variable retarders has its phase retardation switched between first and second values whenever ... | 12/11/2007 |
| 7248346 | Apparatus for defining orientation of an alignment layer in a pixel unit of an LCD device and the method thereof An apparatus for determining orientation of an alignment layer in a pixel unit of an LCD device is provided. The pixel unit includes a glass substrate having an outer surface provided with the alignment layer treated by photolithographic masking and rubbing operatio... | 07/24/2007 |
| 7196794 | Systems and methods for limiting power using photo-induced anisotropy Preferred embodiments of the present invention are directed at limiting power and controlling an output intensity of an optical system using photo-induced anisotropic materials. In a preferred embodiment, an azobenzene polymer film is used. The embodiments in accord... | 03/27/2007 |
| 7038771 | Backside contamination inspection device A system for simultaneously inspecting the frontsides and backsides of semiconductor wafers for defects is disclosed. The system rotates the semiconductor wafer while the frontside and backside surfaces are generally simultaneously optically scanned for defects. Rot... | 05/02/2006 |
| 7021542 | Imaging and illumination engine for an optical code reader An imaging and an illuminating engine is provided for an optical code reader to image and illuminate remote target indicia. The engine includes an image sensor for receiving reflected illumination from the remote indicia and at least two illumination assemblies for ... | 04/04/2006 |
| 7017817 | Apparatus for reading information code An information code reading apparatus comprises a case, an illuminating light source, and a light receiver. The case has an end portion at which a reading opening is formed. The illuminating light source is disposed within the case and configured to radiate illumina... | 03/28/2006 |
| 6915710 | Method and apparatus for correcting attenuation in an optical torque sensor An optical torque sensor comprises a radiation source emitting radiation of at least one wavelength. At least one sensor senses the emitted radiation and generates at least one intensity signal indicative of the intensity of the emitted radiation. At least one signa... | 07/12/2005 |
| 6885466 | Method for measuring thickness of oxide film In a process of manufacturing a semiconductor device, after a gate oxide film is formed, the thickness of the gate oxide film is measured by measuring an exposure period defined from a time at which the oxide film is formed to a time at which the thickness of the ox... | 04/26/2005 |
| 6859281 | Method for determining ion concentration and energy of shallow junction implants A method is disclosed for measuring the dose and energy level of ion implants forming a shallow junction in a semiconductor sample. In the method, two independent measurements of the sample are made. The first measurement monitors the response of the sample to perio... | 02/22/2005 |
| 6816260 | Fiber polarimeter, the use thereof, as well as polarimetric method A fiber polarimeter has one or more oblique fiber Bragg gratings disposed one behind the other in a fiber. The fiber Bragg gratings couple out portions of a light wave input to the fiber depending on its polarization. For more than one fiber Bragg grating a wave pla... | 11/09/2004 |
| 6665071 | Method for determining ion concentration and energy of shallow junction implants A method is disclosed for measuring the dose and energy level of ion implants forming a shallow junction in a semiconductor sample. In the method, two independent measurements of the sample are made. The first measurement monitors the response of the samp... | 12/16/2003 |
| 6661519 | Semiconductor impurity concentration testing apparatus and semiconductor impurity concentration testing method A semiconductor impurity concentration testing apparatus includes a terahertz pulse light source that irradiates terahertz pulse light on a semiconductor material, a light detector that detects transmitted pulse light having been transmitted through the s... | 12/09/2003 |
| 6532070 | Method for determining ion concentration and energy of shallow junction implants A method is disclosed for measuring the dose and energy level of ion implants forming a shallow junction in a semiconductor sample. In the method, two independent measurements of the sample are made. The first measurement monitors the response of the samp... | 03/11/2003 |
| 6455850 | On-site analyzer having spark emission spectrometer with even-wearing electrodes An apparatus (10) for analyzing lubricant oils and functional fluids includes an optical emission spectrometer (OES) (26) having a substantially continuously valued wavelength versus intensity output (140). The OES (26) analyzes light captured from a spar... | 09/24/2002 |
| 6330060 | Cloud condensation nucleus spectrometer A cloud condensation nucleus spectrometer having a streamwise segmented condensation nucleus growth column. The condensation nucleus growth column includes alternating hot and cold temperature-maintaining segments arranged next to one another. The tempera... | 12/11/2001 |
| 5955377 | Methods and kits for the amplification of thin film based assays Method for detecting an analyte of interest, comprising the steps of providing a detection device comprising a light reflective or transmissive substrate supporting one or more layers comprising an adhering attachment layer to which is affixed a receptive... | 09/21/1999 |
| 5926268 | System and method for stress detection in a molded container System and method for inspecting a container for defects. A first polarizer positioned between a light source and the container polarizes light provided by the light source for illuminating the container. A second polarizer positioned between the containe... | 07/20/1999 |
| 5894348 | Scribe mark reader A scribe mark reader (10) uses a source of circularly polarized light and a holographic beam-shaping optical element (40) to uniformly illuminate an area of a substrate (20) that includes a scribe mark (18). Light incident on the substrate at a scribe mar... | 04/13/1999 |
| 5870189 | Particle monitor and particle-free recessing system with particle monitor A particle monitor includes a light source for transmitting a light into a space over a wafer in wafer processing equipment to irradiate particles floating above the wafer for causing a scattered light; a photo-detector for detecting the scattered light t... | 02/09/1999 |
| 5808745 | Method for measuring a substitutional carbon concentration A silicon wafer measuring method includes: (a) a first step of measuring a light transmission characteristic (IOBS) of the pulled silicon wafer by utilizing parallel polarized light incident at the Brewster angle into the pulled silicon wafer, ... | 09/15/1998 |
| 5777743 | Scribe mark reader A scribe mark reader (10) uses a source of circularly polarized light and a holographic beam-shaping optical element (40) to uniformly illuminate an area of a substrate (20) that includes a scribe mark (18). Light incident on the substrate at a scribe mar... | 07/07/1998 |
| 5682231 | Device and method for determining contamination of a light permeable material utilizing the values of detected light below the saturation intensity of a sensor A device and method is provided for determining the degradation of oil after use of the same in an engine or the like. A test sample material is placed in a transparent container and various intensities of light are passed therethrough. A photovoltaic sen... | 10/28/1997 |
| 5666199 | Apparatus and process for detecting the presence of gel defects in oriented sheets or films based on polarization detection A gel defect detection system for the optical inspection of defects in oriented transparent and translucent sheet. The system utilizes two polarizing filters with adjustable orientations so that the transmission axis is from about 70 degrees to about 110 ... | 09/09/1997 |
| 5598266 | Device for detecting defects removed from fibrous material using optical inspection A device for detecting defects (2, 3) in fibrous materials (4, 22) includes members (16, 17) for squeezing the material against a film (1), a separating member (24) downstream of the squeezing members for separating the fibrous material from the film, and... | 01/28/1997 |
| 5561726 | Apparatus and method for connecting polarization sensitive devices A fiber optic apparatus for controlling the polarization state of light, for connecting polarization sensitive devices, and for providing a controlled variable attenuation in a fiber optic system. The center portion of a strand of optical fiber is placed ... | 10/01/1996 |
| 5548401 | Photomask inspecting method and apparatus In a photomask inspecting method, a photomask is inspected on the basis of the difference between the polarized state of elliptical light produced upon superposition of two linearly polarized light beams having orthogonal polarization directions and passi... | 08/20/1996 |
| 5457536 | Polarization modulation laser scanning microscopy A polarization-modulation scanning laser microscope includes a conventional laser scanning microscope, which has been improved by addition of: a polarization state generator; a polarization state analyzer; a photo-detector for receiving laser light transm... | 10/10/1995 |
| 5311283 | Fiber optic probe and method for detecting optically active materials The presence and concentration of an optically active constituent of a fluid medium is determined in-situ by immersing in the fluid medium a probe constructed to pass plane polarized light through the fluid medium in first and second passes so as to induc... | 05/10/1994 |
| 5287167 | Method for measuring interstitial oxygen concentration The invention related to a method for determining a silicon wafer in which the interstitial oxygen concentration of a pulled silicon wafer is calculated on the basis of a light transmission characteristic measured by utilizing parallel polarized light inc... | 02/15/1994 |
| 5210417 | Modulated high sensitivity infrared polarimeter A modulated Faraday rotation signal is produced by passing a linearly polarized laser beam through a semiconductor wafer sample in a modulated magnetic field that is induced in an electromagnet by a sine wave generator and driver coupled thereto. The rota... | 05/11/1993 |
| 5128797 | Non-mechanical optical path switching and its application to dual beam spectroscopy including gas filter correlation radiometry A non-mechanical optical switch is provided for alternately switching a monochromatic or quasi-monochromatic light beam along two optical paths. A polarizer polarizes light into a single, e.g., vertical component which is then rapidly modulated into verti... | 07/07/1992 |
| 5022765 | Nulling optical bridge for contactless measurement of changes in reflectivity and/or transmissivity A nulling optical bridge is disclosed herein for the measurement of the difference in the relative power of more than one light beam. The bridge can be used to precisely measure the change in reflectivity and/or transmissivity of a semiconductor device or... | 06/11/1991 |
| 4857738 | Absorption measurements of materials Two methods of determination of the chemical changes induced in a film of material such as photoresist that has been exposed to electromagnetic radiation. Two methods use measurement of polarized light reflected by the film mounted on a substrate to deter... | 08/15/1989 |
| 4523849 | Front lighted optical tooling method and apparatus An optical tooling method and apparatus uses a front lighted shadowgraphic technique to enhance visual contrast of reflected light. The apparatus includes an optical assembly including a fiducial mark, such as cross hairs, reflecting polarized light with ... | 06/18/1985 |
| 4035083 | Background correction in spectro-chemical analysis Various methods and apparatus are disclosed for providing a background corrected measure of the concentration of a sample element in absorption and emission spectro-chemical analysis using the principles of the Zeeman effect and certain other related effe... | 07/12/1977 |
| 4011014 | Polarization rotation analyzer A machine for testing polarization rotation by translucent specimens includes a standard spectrophotometer disposed for establishing and converging a pair of light beams from a single monochromatic source and provided with a recorder. A polarizer, a stati... | 03/08/1977 |
| 3985447 | Measurement of thin films by polarized light In order to measure the thickness and refractive index of a thin film on a substrate, such as a film of silicon dioxide on a substrate of silicon, a beam of substantially monochromatic polarized light is directed on the film. The reflected light is transm... | 10/12/1976 |
