U.S. patents available from 1976 to present.
U.S. patent applications available from 2005 to present.

Icon_funbox Did You Know...

...that a workman who left the soap mixing machine on too long was responsible for making Ivory Soap? He was so embarrassed by his mistake that he threw the mess in a stream. Imagine his dismay when the evidence of his error floated to the surface! Result: Ivory soap, the soap that floats.

Newsletter  PatentStorm News

Make the Most of Our Site

See this month's Top Inventors and Most Cited Patents.

Stay on top of the latest innovations by subscribing to an RSS feed.

Registered users: Manage your profile.

 

Class 356/334 - With diffraction grating means


Subclass of Class 356 - Optics: measuring and testing
Definition: Subject matter wherein the dispersive element is a diffraction
No. of patents: 305
Last issue date: 01/17/2012


1                
NumberTitleIssue Date
8098374Highly sensitive spectroscopic unit
The invention is directed to a highly sensitive spectrum analysis unit with a diffraction grating, wherein a parallel light bundle having a wavelength range impinges on a diffraction grating which splits the different wavelengths into spectra by diffraction in first...
01/17/2012
7561266Calibrated spectroscopy instrument and method
A calibrated spectroscopy instrument and a method for calibrating a spectroscopy instrument are disclosed. The spectroscopy instrument includes a monochromator having a drive mechanism comprising a pair of spur gears for rotating a diffraction grating of the monochr...
07/14/2009
7480048Monochromator employing single grating volume holograms and method of use
The present invention is directed to a monochromator device which uses single grating volume holograms. The holograms collect light of varying wavelengths such as polychromatic light, and separate one particular wavelength of interest. A wide wavelength spectrum can...
01/20/2009
7427932Compressive sampling and signal inference
An optical signal is copressively sampled using an imaging system. The imaging system is created from a plurality of subimaging systems. Each subimaging system comprises a subaperture and a plurality of sensors. The optical signal is collected at each subaperture of...
09/23/2008
7382498Two-channel imaging spectrometer utilizing shared objective, collimating, and imaging optics
A two-channel spectrometer has a shared objective and a pair of slits at a common image plane. Each of the slits receives a portion of the output beam of the shared objective and is optimized for transmitting different wavelengths. A shared double-pass reflective tr...
06/03/2008
7372056LPP EUV plasma source material target delivery system
An EUV light generation system and method is disclosed that may comprise a droplet generator producing plasma source material target droplets traveling toward the vicinity of a plasma source material target irradiation site; a drive laser; a drive laser focusing opt...
05/13/2008
7365842Light scanning type confocal microscope
A light scanning type confocal microscope includes a light source unit that projects an excitation light beam, a scanning optical system that scans the excitation light beam, an objective lens that applies the excitation light beam to a sample, a separation optical ...
04/29/2008
7365349EUV light source collector lifetime improvements
An apparatus and method for cleaning a plasma source material compound from a plasma produced EUV light source collector optic which may comprise reacting the plasma source material compound with hydrogen to form a hydride of the plasma source material from the plas...
04/29/2008
7365328Dispersive near-infrared spectrometer with automatic wavelength calibration
A dispersive, diffraction grating, NIR spectrometer that automatically calibrates the wavelength scale of the instrument without the need for external wavelength calibration materials is shown. The device shows: 1) a low power He—Ne laser at right angles to the so...
04/29/2008
7355191Systems and methods for cleaning a chamber window of an EUV light source
Systems and methods are disclosed for cleaning a chamber window of an extreme ultraviolet (EUV) light source. The window may have an inside surface facing a chamber interior and an opposed outside surface and the light source may generate debris by plasma formation....
04/08/2008
7345760Grating monochromator/spectrograph
A monochromator for use in a spectrograph admits light from an aperture to a primary reflector (preferably an off-axis parabolic mirror) which collimates the input light with low aberration and directs it to a diffraction grating. The component wavelengths of the in...
03/18/2008
7336354Spectrophotometer
A spectrophotometer having an optical system for directing a beam of substantially monochromatic excitation light to a liquid sample contained in a well (3) of a well plate for interaction with the sample for absorption or emission measurements to analyse the...
02/26/2008
7317536Spectral bandwidth metrology for high repetition rate gas discharge lasers
A bandwidth meter apparatus and method for measuring the bandwidth of a spectrum of light emitted from a laser input to the bandwidth meter which may comprise an optical bandwidth monitor providing a first output representative of a first parameter which is indicati...
01/08/2008
7317179Systems and methods to shape laser light as a homogeneous line beam for interaction with a film deposited on a substrate
Systems and methods are disclosed for shaping and homogenizing a laser beam for interaction with a film. The shaping and homogenizing system may include a lens array and a lens that is positioned to receive laser light from the lens array and produce a respective el...
01/08/2008
7289208Low profile spectrometer and Raman analyzer utilizing the same
A spectrometer comprising a collimating element for receiving input light and collimating the same, a dispersive optical element for receiving light from the collimating element and dispersing the same and a focusing element for receiving light from the dispersive o...
10/30/2007
7283231Compressive sampling and signal inference
A transmission mask or cooled aperture is used in spectroscopy to compressively sample an optical signal. The locations of transmissive and opaque elements of the mask are determined by a transmission function. The optical signal transmitted by the mask is detected ...
10/16/2007
7280206Method and apparatus to improve the dynamic range of optical devices using spatial apodization
Devices and methods for processing multi-wavelength light beams and the single-wavelength components of such light beams are disclosed. In accordance with some embodiments, a spectral filter includes collimating and focusing optical elements, an apodizing filter, a ...
10/09/2007
7277188Systems and methods for implementing an interaction between a laser shaped as a line beam and a film deposited on a substrate
Systems and methods are disclosed for focusing a beam for an interaction with a film deposited on a substrate wherein the focused beam defines a short axis and a long axis. In one aspect, the system may include a detecting system to analyze light reflected from the ...
10/02/2007
7271898Method and system for remote sensing of optical instruments and analysis thereof
A sensor is provided for analyzing an object at a focal point of a lens. The sensor includes a focused radiant energy source directed at the lens. The focused radiant energy source transmits a first beam of energy to the lens, vaporizing a portion of the object at t...
09/18/2007
7265827Double grating three dimensional spectrograph with multi-directional diffraction
A spectrograph with a first concave spectrographic diffraction grating is positioned to receive light from an input light source. The first concave spectrographic diffraction grating is configured to provide a diffracted light output dispersing the components of the...
09/04/2007
7259904Coarse spectrometer with a grating
A quasi-monochromatic light beam carrier for a particular telecommunication channel is likely to experience drift because of age, temperature, or other factors, and may cause the centroid wavelength of the carrier to shift. Temperature adjustments by wavelength lock...
08/21/2007
7253897Optical spectrum analyzer
An optical spectrum analyzer (OSA) 10 sequentially or selectively samples (or filters) a spectral band(s) 11 of light from a broadband optical input signal 12 and measures predetermined optical parameters of the optical signal (e.g., spectral pr...
08/07/2007
7251028Scanning spectrum analyzer
A system for spectral analysis of a multi-wavelength signal is disclosed. The illustrative embodiment of the present invention, like the prior art, uses a grating or prism to disperse the spectral components of a multi-wavelength signal, and then uses a reciprocatin...
07/31/2007
7248667Illumination system with a grating element
An illumination system, particularly for wavelengths ≦100 nm, with an object plane and a field plane, comprises a grating element and a physical diaphragm in a diaphragm plane, which is arranged downstream to the grating element in the beam path from the object pl...
07/24/2007
7233394Compact spectrometer
The present invention is directed to method and apparatus for measuring the spectral characteristics of an object from a formed object generated input signal. The method comprises the steps of directing the input signal onto a diffraction grating. Diffracted signals...
06/19/2007
7221452Tunable optical filter, optical apparatus for use therewith and method utilizing same
An apparatus for filtering an input beam of light to produce an output beam of light is provided. The apparatus facilitates tuning an input beam of light to a desired wavelength by directing the input beam of light, via a mirror, onto a diffractive optical element a...
05/22/2007
7217941Systems and methods for deflecting plasma-generated ions to prevent the ions from reaching an internal component of an EUV light source
A system is disclosed for protecting an internal EUV light source component from ions generated at a plasma formation site. In one aspect, the system may comprise a plurality of foil plates and an arrangement for generating a magnetic field to deflect ions into one ...
05/15/2007
7216045Selection of wavelengths for integrated circuit optical metrology
Specific wavelengths to use in optical metrology of an integrated circuit can be selected using one or more selection criteria and termination criteria. Wavelengths are selected using the selection criteria, and the selection of wavelengths is iterated until the ter...
05/08/2007
7215422Assembly and method for wavelength calibration in an echelle spectrometer
A spectrometer assembly (10) is disclosed. The assembly includes a light source (11) with a continuous spectrum. A pre-monochromator (2) generates a spectrum with a relatively small linear dispersion from which a spectral portion is selectable, ...
05/08/2007
7209230Hand-held spectra-reflectometer
The present invention is directed to apparatus and method for measuring the spectral characteristics of an object surface. The apparatus comprises a light source for generating an input signal comprising a plurality of wavelengths of energy and a diffraction grating...
04/24/2007
7196791Optical detection device
A diffractive optical element device for use in spectroscopy, where broadband light is emitted from a light source (31) towards the optical element (24) and from there is transmitted to at least one detector (29; 29′). The optical element has ...
03/27/2007
7196342Systems and methods for reducing the influence of plasma-generated debris on the internal components of an EUV light source
Systems and methods are disclosed for reducing the influence of plasma generated debris on internal components of an EUV light source. In one aspect, an EUV meteorology monitor is provided which may have a heater to heat an internal multi-layer filtering mirror to a...
03/27/2007
7193707Small sized wide wave-range spectroscope
The present invention provides a small sized wide wave-range spectroscope with a simple structure which requires a short time to measure light for measurement over a wide wavelength spectrum. The small sized wide wave-range spectroscope has a collimator (43) ...
03/20/2007
7180083EUV light source collector erosion mitigation
An EUV light source collector erosion mitigation system and method is disclosed which may comprise a collector comprising a multilayered mirror collector comprising a collector outer surface composed of a capping material subject to removal due to a removing interac...
02/20/2007
7158228Holographic imaging spectrometer
A holographic imaging spectrometer, apparatus, and/or method enables the projection of a two-dimensional (2D) slice (having spectral information) of a four-dimensional (4D) probing object. A 4D probing source object is illuminated to emit an optical field. A hologra...
01/02/2007
7141806EUV light source collector erosion mitigation
An EUV light source collector erosion mitigation method and apparatus for a collector comprising a multilayered mirror collector comprising a collector outer surface composed of a capping material subject to removal due to a removing interaction with materials creat...
11/28/2006
7126684Spectroscope confocal optical system using the same, and scanning microscope
A spectroscope is provided with a point light source which emits a dispersed light having a plurality of wavelengths, a first optical system which collimates the dispersed light which is emitted from the point light source into an approximate parallel light flux, a ...
10/24/2006
7116418Spectral imaging apparatus and methods
Spectral imaging apparatus and methods are disclosed. In one embodiment, a spectral imaging apparatus includes a spectral imaging apparatus includes a diffraction grating having one or more entrance apertures formed therein, a collecting reflecting element for refle...
10/03/2006
7116848Optical spectrum analyzer using a diffraction grating and multi-pass optics
A polarization independent optical spectrum analyzer comprises a diffraction grating, input and output slit means and polarization-maintaining multi-pass optics for directing a light beam to and fro across the diffraction grating while maintaining its linear state o...
10/03/2006
7092088Field multiplexed dispersive imaging spectrometer
A field multiplexed dispersive imaging spectrometer (20). The novel system includes foreoptics (22) for receiving incoming electromagnetic energy, a disperser (24) disposed to receive energy from the foreoptics (22), and a focal plane arr...
08/15/2006
1                
 
Sign InRegister
Username  
Password   
forgot password?