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Class 356/314 - Including sputtering


Subclass of Class 356 - Optics: measuring and testing
Definition: Subject matter wherein sample material is removed, as though
No. of patents: 24
Last issue date: 10/09/2007


NumberTitleIssue Date
7280202Ingredient analysis method and ingredient analysis apparatus
In an ingredient analysis method and an ingredient analysis apparatus in accordance with the present invention, high-frequency power is supplied from a power source 4 while helium gas is supplied to an atmospheric pressure plasma source 2 disposed near...
10/09/2007
6930297Image sensing device and distance measuring device using the image sensing device
A first and a second sensor array 21 and 22 arranged at the approximate image forming plane of a pair of optical systems, and a third sensor array 23 arranged at a spacing h from the first and second sensor arrays 21 and 22. The im...
08/16/2005
6784989Process and apparatus for real-time determination of a solid sample composition as a function of the depth within the sample
Process and apparatus for real-time determination of a solid sample composition as a function of the depth within the sample. The process comprises: forming a glow discharge (16) of atoms sputtered from an exposed area (17) of the sample (13) an...
08/31/2004
6545756Method for the thermionic atomization of a sample and device for realizing the same
The present invention pertains to the construction of analytic instruments and can be used for analyzing natural and industrial water, biological samples, geological samples and air. The purpose of this invention is to reduce substantially the power used ...
04/08/2003
6411379Method and apparatus for the localization of element concentrations in a continuous casting
In order to localize element concentrations in the edge areas of a horizontally manufactured continuous casting of alloyed non-ferrous metals, a longitudinal section is removed from the continuous casting. At least one strip of surface layer is then remov...
06/25/2002
5920400Method and device for determining the purity and/or pressure of gases for electric lamps
According to the method the intensity of at least one pressure-independent (impurity detection) or pressure-dependent (gas pressure determination) spectral line is measured selectively. Indirect detection utilizes the intensity of spectral lines whose wav...
07/06/1999
5896196Plasma mixing glow discharge device for analytical applications
An instrument for analyzing a sample has an enclosure that forms a chamber containing an anode which divides the chamber into a discharge region and an analysis region. A gas inlet and outlet are provided to introduce and exhaust a rare gas into the disch...
04/20/1999
5646726Atmospheric seal for glow discharge analytical instrument
This invention provides a gas atmosphere surrounding a seal between the face of a glow discharge lamp assembly and the sample surface to eliminate the possibility of the introduction of atmospheric gases into the glow discharge lamp. A groove concentric w...
07/08/1997
5408315Glow discharge analytical instrument for performing excitation and analyzation on the same side of a sample
A non-conductive isolator for supporting a sample to be analyzed by radio frequency energy induced glow discharge techniques has a conductive ring for coupling a source of radio frequency energy to the same surface of a sample which is in direct contact w...
04/18/1995
5086226Device for radio frequency powered glow discharge spectrometry with external sample mount geometry
A method and apparatus for analyzing solid sample materials mounted externally to the apparatus is provided wherein a low pressure glow discharge is initiated by applying a radio frequency potential to an integral, continuous solid sample and an electrica...
02/04/1992
5054921Doppler-free spectroscopy
A substantially Doppler-free spectrum of an element in a sputtered vapor is obtained by generating the sputtered vapor of the sample in a sputtering cell containing a rare gas and obtaining a saturated absorption spectrum for the vapor. The vapor is sputt...
10/08/1991
5028133Process and device for analysis of nonconductive surfaces
Process of analysis of surfaces by luminescent discharge spectrometry. The current used for the creation of the discharge between the anode (3) and the cathode (20) is a high-frequency current arriving on the nonconductive sample (21) to be analyzed and b...
07/02/1991
5015097Method for inspecting filled state of via-holes filled with fillers and apparatus for carrying out the method
A method for inspecting the filled state of a plurality of via-holes which pass through a non-conductive circuit board and are filled with a conductive substance and an apparatus for carrying out the method are disclosed. The surface of the circuit board ...
05/14/1991
4925306Ion bombardment furnace for atomic spectroscopy
A magnetron glow discharge plasma device is utilized as a furnace for vaporization, atomization and excitation of analytical solution samples of trace elements for atomic emission spectroscopy. The apparatus includes a sample deposited on the glow dischar...
05/15/1990
4874947Focused ion beam imaging and process control
Ion beam machining apparatus which uses a focused ion beam to sputter particles from a target is disclosed. The beam is scanned over the target and photons emitted in response to the incidence of the beam on the target are analyzed to identify the differe...
10/17/1989
4830492Glow-discharge lamp and its application
The present invention relates to a glow-discharge lamp comprising: a chamber body, provided with one or more gas supply and evacuation openings made of insulated material; a gas inner chamber, which expands toward an anode, is bordered on the sides by the...
05/16/1989
4824249Systems for the direct analysis of solid samples by atomic emission spectroscopy
An analysis system for directly analyzing solid samples by atomic emission spectroscopy wherein the system includes an atomic spectral lamp (1) of the type which enables a solid sample to be analyzed to be demountably located as a cathode of the lamp (1),...
04/25/1989
4812040Hollow cathode plasma plume
Sample material is sputtered from an orifice in a disc mounted in a hollow cathode. A plasma plume is ejected from the orifice and the material sputtered from the smaple is transported directly into the base of the plasma plume. Collisions with particles ...
03/14/1989
4366418Spectral source, particularly for atomic absorption spectrometry
A spectral source comprises a lamp containing an anode and a cathode in an inert gas. The cathode has a hollow portion therein, and a opening at its side wall. The anode is positioned to face the opening of the cathode. The anode and cathode are different...
12/28/1982
4253038Light source excited by high frequency for Zeeman effect atomic absorption analysis
A light source is disclosed which can be used in atomic absorption analysis using the Zeeman effect. In operation, an external magnetic field is applied to the hollow cathode of the light source to cause the Zeeman-splitting of an emission line from the c...
02/24/1981
4198589Spectral source, particularly for atomic absorption spectrometry
A spectral source comprises a lamp containing an anode and a cathode in an inert gas. The anode and cathode are different in shape and connected to a high-frequency power source to produce a high-frequency discharge between the anode and cathode to cause ...
04/15/1980
4158790High intensity atomic spectral lamp with interchangeable cathode
A high intensity atomic spectral lamp having a first set of electrodes including a primary cathode consisting of or comprising a selected element adapted to produce a primary electric discharge which gives rise to an atomic vapor of said element by cathod...
06/19/1979
4128336Spectroscopic apparatus and method
This invention relates to an apparatus and a method for spectroscopically analyzing substances, by fluorescent or resonant detection. An atomic cloud of a reference element is generated by cathodic sputtering and irradiated with radiation emitted from a s...
12/05/1978
4097781Atomic spectrum light source device
An anode and a cathode are disposed in an opposing relation in a tubing in which an inactive gas is enclosed to form a discharge lamp by which an atomic spectrum is emitted. The cathode contains atomic spectrum emitting elements also serving to form the m...
06/27/1978
 
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