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| Number | Title | Issue Date |
| 7940386 | Scatterometry target employing non-periodic defect features to enhance or optimize target sensitivity to a parameter of interest Embodiments of the invention include a target having a lattice of many periodically spaced and uniformly configured metrology features arranged in an array pattern over a target region. The lattice includes at least one defect region in the lattice, the defect regio... | 05/10/2011 |
| 7692782 | Method for fabricating haze noise standards comprising nano-structures on an insulating thin layer Method for the fabrication of Haze noise standards having, respectively, an insulating thin layer and a plurality of nano-structures of hemi-spherical form on the insulating thin layer, with the respective standards being fabricated by: the formation on at least one... | 04/06/2010 |
| 7499158 | Positionable calibration target for a digital printer or image scanner A structure for calibrating an image sensor or other photosensor includes a baffle for passage of a sheet therethrough. A photosensor is disposed to receive light reflected from a sheet passing through the baffle. A selectably-positionable target member has a target... | 03/03/2009 |
| 7388659 | Particle inspection apparatus and method, exposure apparatus, and device manufacturing method An inspection apparatus for inspecting a surface of an object for a particle. The apparatus includes an irradiator configured to irradiate the surface with inspection light, a first detector configured to detect light scattered at the surface, a shield configured to... | 06/17/2008 |
| 7385701 | Standard plane sample and optical characteristic measurement system A standard plane sample which supplies an optical characteristic measuring device with reference data. The standard plane sample including a sample portion that is measured by the optical characteristic measuring device to supply measurement data, and a recording me... | 06/10/2008 |
| 7372016 | Calibration standard for a dual beam (FIB/SEM) machine Calibration of measurements of features made with a system having a micromachining tool and an analytical tool is disclosed. The measurements can be calibrated with a standard having a calibrated feature with one or more known dimensions. The standard may have one o... | 05/13/2008 |
| 7361941 | Calibration standards and methods Parameters of a metrology tool may be determined by measuring a dimension of a feature on a calibration standard with the tool and using the measured dimension and a known traceable value of the dimension to determine a value for the parameter. If the dimension of t... | 04/22/2008 |
| 7316700 | Self optimizing lancing device with adaptation means to temporal variations in cutaneous properties A lancing device, an embodiment of which controls the advancement and retraction of a lancet by monitoring the position of the lancet in conjunction with a lancet controller which incorporates a feedback loop for modulating the lancet driver to follow a predetermine... | 01/08/2008 |
| 7301638 | Dimensional calibration standards A calibration standard, for calibrating lateral or angular dimensional measurement systems, is provided. The standard may include a first substrate spaced from a second substrate. The standard may be cross-sectioned in a direction substantially perpendicular or subs... | 11/27/2007 |
| 7230690 | Color measurement feature for information handling system enclosure A method and apparatus for ensuring consistency of color and cosmetic appearance of injection molded parts used in the fabrication of enclosures for information handling systems. A sample of polymer material having a texture and color in accordance with a predetermi... | 06/12/2007 |
| 7224450 | Method and apparatus for position-dependent optical metrology calibration A calibration method suitable for highly precise and highly accurate surface metrology measurements is described. In preferred embodiments, an optical inspection tool including a movable optics system is characterized in terms of position and wavelength dependent qu... | 05/29/2007 |
| 7215419 | Method and apparatus for position-dependent optical metrology calibration A calibration method suitable for highly precise and highly accurate surface metrology measurements is described. In preferred embodiments, an optical inspection tool including a movable optics system is characterized in terms of position and wavelength dependent qu... | 05/08/2007 |
| 7215807 | Nondestructive inspection method and apparatus The present invention relates to a method for inspecting a crack in a metal surface or the like, and, particularly, to an inspection method and apparatus for nondestructive inspection such as liquid penetrant inspection and magnetic particle testing. The present inv... | 05/08/2007 |
| 7188776 | Method and device for personalizing luminescent marks of authenticity A method and device for personalizing the luminescent authenticity features on data carrier, in particular plastic cards. The luminescent authenticity feature being applied to or incorporated in a composite card and the authenticity feature is personalized with a hi... | 03/13/2007 |
| 7184138 | Spatial filter for sample inspection system Spatial filtering is disclosed that improves the signal to noise ration of a sample inspection system of the type having a detector and collection optics that receive radiation scattered from a point on a sample surface and direct the scattered radiation toward the ... | 02/27/2007 |
| 7126083 | Chip scale marker and method of calibrating marking position A chip scale marker including a laser system, a wafer holder supporting a wafer to be processed, and a camera moving above the wafer holder by being connected to an X-Y stage and monitoring the wafer supported on a center hole of the wafer holder, the chip scale mar... | 10/24/2006 |
| 7106432 | Surface inspection system and method for using photo detector array to detect defects in inspection surface A dark field surface inspection tool of the invention includes an illumination source for directing a light beam onto a work piece. The tool includes a scanning element for enabling selected inspection points on the work piece to be scanned by the light beam. During... | 09/12/2006 |
| 7095496 | Method and apparatus for position-dependent optical metrology calibration A calibration method suitable for highly precise and highly accurate surface metrology measurements is described. In preferred embodiments, an optical inspection tool including a movable optics system is characterized in terms of position and wavelength dependent qu... | 08/22/2006 |
| 7084965 | Arrangement and method for inspecting unpatterned wafers The invention concerns an arrangement (1) for inspecting preferably unpatterned wafers, and comprises: a first optical inspection device (2) for examining reference wafers (R), which operates using image data processing methods and thereby recognizes d... | 08/01/2006 |
| 7072035 | Verification device for optical clinical assay systems A device and method for verifying correct performance of an optical clinical assay system is provided. ... | 07/04/2006 |
| 7064820 | Surface inspection method and surface inspection system A surface inspection method in a surface inspection system which comprises a photodetection unit and a photodetection polarizing angle changing means, comprising the step of receiving a scattered reflection light from a substrate surface where standard particles are... | 06/20/2006 |
| 7027146 | Methods for forming a calibration standard and calibration standards for inspection systems Methods for forming calibration standards for an inspection system and calibration standards are provided. One method includes scanning a first and a second specimen with an optical system. Master standard particles having a lateral dimension traceable to a national... | 04/11/2006 |
| 7003515 | Consumer item matching method and system A method of determining at least one match item corresponding to a source item. A database of multiple items such as songs is created. Each song is also represented by an n-dimensional database vector in which each element corresponding to one of n musical character... | 02/21/2006 |
| 6975391 | Method and apparatus for non-destructive testing Using an image signal acquired by picking up a sample to be inspected by a color video camera, penetrant inspection and magnetic-particle inspection, which are non-destructive inspections, are carried out so that deficiency candidates, including a pseudo deficiency,... | 12/13/2005 |
| 6956649 | Spectroscopic system and method using a ceramic optical reference A ceramic reference in conjunction with a spectrometer, a metallized ceramic material, and a method of utilizing a ceramic material as a reference in the ultraviolet, visible, near-infrared, or infrared spectral regions are presented. The preferred embodiments utili... | 10/18/2005 |
| 6950181 | Optical wafer presence sensor system A wafer presence optical sensor system comprises a transfer chamber adapted to receive a wafer, an optical sensor comprising means emitting a sensing beam and means receiving a beam reflected from the wafer to ascertain wafer presence in the chamber, and means to re... | 09/27/2005 |
| 6941792 | Surface inspection system A surface inspection system, comprising a calibration wafer where particles of known specifications are spread, a wafer transport unit having a transport robot, a surface inspection unit, and a calibration wafer accommodation unit for accommodating the calibration w... | 09/13/2005 |
| 6936834 | Method and apparatus for determining stone cells in paper or pulp Disclosed is a method and apparatus for determining stone cells within a sample of wood pulp or paper. According to the instant invention a portion of the sample is irradiated with light at a predetermined wavelength or within a predetermined range of wavelengths. T... | 08/30/2005 |
| 6937349 | Systems and methods for absolute positioning using repeated quasi-random pattern An absolute 2D position-sensing device is usable to measure the position of a first element with respect to a second element. A 2D absolute scale includes an integrated 2D absolute scale pattern extending over the 2D scale area along each measuring axis of the scale... | 08/30/2005 |
| 6903888 | Detection of defects embedded in servo pattern on stamper by using scattered light Defects of a hard disk drive servo pattern stamper are detected by comparing a scattered light beam pattern against the known servo pattern. A magnetic field is applied to stamper and the beam is linearly polarized. Variations in the physical offset of the beam, its... | 06/07/2005 |
| 6862096 | Defect detection system Scattered radiation from a sample surface is collected by means of a collector that collects radiation substantially symmetrically about a line normal to the surface. The collected radiation is directed to channels at different azimuthal angles so that information r... | 03/01/2005 |
| 6798527 | Three-dimensional shape-measuring system An object of the present invention is to provide a method for accurately measuring a three-dimensional shape of a measuring subject independent of the surface shape of the measuring subject, and another object thereof is to shorten the time from the measurements of ... | 09/28/2004 |
| 6704102 | Calibration artifact and method of using the same A calibration artifact and a method of calibrating a machine vision measurement system. The calibration artifact includes a substrate and a number of concentric rings on one surface of the substrate. Each ring is of a different pre-defined size. The chang... | 03/09/2004 |
| 6646737 | Submicron dimensional calibration standards and methods of manufacture and use A calibration standard which may be used to calibrate lateral dimensional measurement systems is provided. The calibration standard may include a first substrate spaced from a second substrate. In addition, the calibration standard may include at least on... | 11/11/2003 |
| 6646736 | Method for calibrating equipment for detecting impurities in transparent material Equipment for detecting impurities in transparent material comprising a light source to illuminate the material, a camera to detect light transmitted through the material and signal-processing apparatus for processing and analysing signals from the camera... | 11/11/2003 |
| 6490033 | Method of thin film process control and calibration standard for optical profilometry step height measurement A method of calibrating an interferometer system and a multilayer thin film used for calibrating the interferometer system. The method including measuring the step height of a gold step with the interferometer system, the multilayer thin film comprising a... | 12/03/2002 |
| 6445447 | Near field optical certifying head for disc asperity mapping An optical certifying head flies above a disc surface within an evanescent decay length of the disc surface. A light beam is focused through an objective lens, and further focused through a SIL. The SIL-focused light is coupled to the disc surface through... | 09/03/2002 |
| 6333785 | Standard for calibrating and checking a surface inspection device and method for the production thereof The invention relates to a reproducible standard for calibrating and checking the bright-field channel of a surface inspection device used for examining the flat surface of a sample and to a method for producing said standard whereby a microstructure is p... | 12/25/2001 |
| 6274396 | Method of manufacturing calibration wafers for determining in-line defect scan tool sensitivity Methods of manufacturing calibration wafers by forming a first layer of a material on a layer of a substrate material. In a first embodiment, calibration spheres are deposited on the first layer of material followed by an etch process that removes exposed... | 08/14/2001 |
| 6191851 | Apparatus and method for calibrating downward viewing image acquisition systems The present invention is an apparatus and method for calibrating a downward viewing image acquisition system. The apparatus comprises a calibration panel with calibrative material of known reflectivity. The calibrative material coats the panel surface or ... | 02/20/2001 |
