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| Number | Title | Issue Date |
| 8072593 | Method and apparatus for illuminating material for automated inspection A lighting configuration that is a combination of far dark field lighting and a modified dark stripe lighting is disclosed. The novel combination provides a more robust detection of flaws on, e.g. a moving web of transparent film, than either would provide alone or ... | 12/06/2011 |
| 7894053 | Inspection apparatus An inspection apparatus includes a stage allowing an inspection subject to be mounted thereonto, an illumination unit for emitting diffused light to the inspection subject, an imaging unit disposed to face the illumination unit with the inspection subject interposed... | 02/22/2011 |
| 7821630 | Device for monitoring a turret in a cryomagnet A device for monitoring blockage of a turret in a cryomagnet, at least one monitoring unit that functionally interacts with a state of the inside of the turret of a cryomagnet is provided to monitor the inside of the turret. ... | 10/26/2010 |
| 7576852 | Semiconductor wafer inspection device and method The surface of an epitaxial wafer is inspected using an optical scattering method. The intensities of light scattered with a narrow scattering angle and light scattered with a wide scattering angle reflected from laser light scatterers (LLS) on the wafer surface are... | 08/18/2009 |
| 7511807 | Method and apparatus for detection of inclusion in glass Inclusions in a transparent panel (5) are detected by placing a light transmissive interface (3) in contact with the panel (5), and transmitting a beam of light (1) through interface (3) into panel (5). Within the panel (... | 03/31/2009 |
| 7443499 | Method for measuring the sagging of a glass panel A method for measuring the sagging of a glass panel in the process of bending the glass panel on a ring mould. The method includes measuring the sagging at a glass panel's measuring point and the measurement data is applied to control progress of the bending process... | 10/28/2008 |
| 7427767 | Apparatus for identifying the condition of a conveyor belt An apparatus for identifying the condition of a conveyor belt (6) has a capturing device (12) which can be used to capture two-dimensional images (B) of successive belt sections (15) of the conveyor belt (6) during operation of the convey... | 09/23/2008 |
| 7417725 | Illumination method and device for detecting surface defects and/or material shortage on the neck ring of a container In an optical method for determining surface defects and/or material shortage on the neck ring (3) of a container having an axis of symmetry (X) comprises illuminating the surface(s) of the neck ring (3) of the container with an incident light beam, a ... | 08/26/2008 |
| 7408633 | Apparatus and method for inspecting film defect There is disclosed a defect inspection apparatus, wherein a light source projects a linear light onto a transparent film to inspect, so that a light receiver receives light beams transmitted through the film. The light receiver is placed to look down the film, with ... | 08/05/2008 |
| 7408646 | Method and apparatus for determining local variation of the reflection or transmission behavior over a mask surface A focused light beam is directed onto a surface patch of a mask and decomposed into partial beams by diffraction at a structure formed on the surface of the mask. Detectors are set such that the intensity of at least two orders of diffraction can be measured. The me... | 08/05/2008 |
| 7368707 | Radiation detector including means for indicating satisfactory operation A radiation detector, comprising a sensitive volume filled with a counter gas; an anode and a cathode each in communication with the counter gas; a voltage supply for maintaining a potential difference between the anode and the cathode, said potential difference bei... | 05/06/2008 |
| 7289655 | Device for inspecting illumination optical device and method for inspecting illumination optical device The invention provides a device to inspect an illumination optical device and a method to inspect an illumination optical device that make it possible to efficiently inspect illumination optical devices and to control manufacturing cost. A lens array inspecting devi... | 10/30/2007 |
| 7283227 | Oblique transmission illumination inspection system and method for inspecting a glass sheet An oblique illumination inspection system and method are described herein that are used to identify a defect (e.g., inclusion, onclusion, scratch, stain, blister, cord or other imperfection associated with a surface discontinuity or material non-homogeneity) on or w... | 10/16/2007 |
| 7271950 | Apparatus and method for optimizing a pellicle for off-axis transmission of light An apparatus and method for optimizing a pellicle for off-axis transmission are disclosed. A pellicle includes a thin film optimized for transmission of off-axis incident light at a desired angle. The pellicle further includes an optical thickness greater than a des... | 09/18/2007 |
| 7256884 | Particle detecting system and method of detecting particles using the same There is provided a particle detector system and to detect particles on target including reticle and pellicle. The system includes a light transmitting device adapted to transmit light beam to a target through an electrowetting microlens, a light receiving device ad... | 08/14/2007 |
| 7245378 | Measuring laser light transmissivity in a to-be-welded region of a work piece Methods for measuring laser light transmissivity of a specific position in a work piece prior to the work piece undergoing laser welding at the specific position with a laser beam having a specific welding wavelength. To obtain a baseline measurement reading, a lase... | 07/17/2007 |
| 7215418 | Inspection of transparent substrates for defects Methods, apparatus and systems for the detection of defects in transparent substrates such as glass sheets are disclosed. The methods, apparatus and systems are capable of detecting optical path length variations in transparent substrates smaller than 100 nm. ... | 05/08/2007 |
| 7184138 | Spatial filter for sample inspection system Spatial filtering is disclosed that improves the signal to noise ration of a sample inspection system of the type having a detector and collection optics that receive radiation scattered from a point on a sample surface and direct the scattered radiation toward the ... | 02/27/2007 |
| 7177025 | Measuring specular reflectance of a sample Apparatus (10) for measuring absolute specular reflectance of a surface of a sample (22) includes a sample holder (12), a light source (18) for transmitting an incident light beam (16) onto a surface of the sample (22) and a... | 02/13/2007 |
| 7164475 | High throughput brightfield/darkfield wafer inspection system using advanced optical techniques The broadband brightfield/darkfield wafer inspection system provided receives broadband brightfield illumination information via a defect detector, which signals for initiation of darkfield illumination. The defect detector forms a two dimensional histogram of the d... | 01/16/2007 |
| 7142295 | Inspection of transparent substrates for defects Methods, apparatus and systems for the detection of defects in transparent substrates such as glass sheets are disclosed. The methods, apparatus and systems are capable of detecting optical path length variations in transparent substrates smaller than 100 nm. ... | 11/28/2006 |
| 7122819 | Method and apparatus for imager die package quality testing An apparatus and method of detecting a defect in an imager die package. The method comprises the steps of exposing the imager die package to light at a first angle, exposing the imager die package to light at a second angle, outputting electrical signals based on th... | 10/17/2006 |
| 7078721 | Object detection apparatus for a vehicle An object detection apparatus for a vehicle includes a light emitter covered with an emission window, a light receptor covered with a reception window, a defect detection light emitter, a defect detection light receptor and a fracture detection circuit. The light em... | 07/18/2006 |
| 7046353 | Surface inspection system A surface inspection system for projecting a laser beam to a surface of a substrate and for detecting a foreign object by detecting scattered reflection light of the laser beam, comprising a light source unit having a plurality of light emitting sources for emitting... | 05/16/2006 |
| 7010462 | System and method for evaluating efficiency losses for turbine components A method and system of evaluating a turbine component comprises obtaining data relating to respective surface conditions at a plurality of different surface locations of the turbine component and calculating the total profile efficiency loss for the turbine componen... | 03/07/2006 |
| 7006233 | Method of detecting a distortion on a surface A method of detecting a distortion on a surface is described. A layer of liquid crystal material is formed on the surface with molecules of the material aligned in planes parallel to the surface. The molecules in each select plane have axes aligned with one another.... | 02/28/2006 |
| 6980296 | Measuring laser light transmissivity in a to-be-welded region of a work piece Methods for measuring laser light transmissivity of a specific position in a work piece prior to the work piece undergoing laser welding at the specific position with a laser beam having a specific welding wavelength. To obtain a baseline measurement reading, a lase... | 12/27/2005 |
| 6961127 | Device and method for optical inspection The invention relates to a method for optical inspection with a scanner which is arranged for detection and measurement of defects in or on a material which is inspected. The inspection takes place in successive sweeps essentially in the transverse direction of the ... | 11/01/2005 |
| 6937753 | Automated wafer defect inspection system and a process of performing such inspection An automated defect inspection system has been invented and is used on patterned wafers, whole wafers, broken wafers, partial wafers, sawn wafers such as on film frames, JEDEC trays, Auer boats, die in gel or waffle packs, MCMs, etc. and is specifically intended and... | 08/30/2005 |
| 6927378 | Apparatus and method for monitoring of cathode ray tube panel manufacturing to reduce CRT cost and improve performance and yield A monitoring apparatus and method for measuring light output gradient of a faceplate panel includes a top plate having a center detector and a plurality of corner detectors mounted along a major surface thereof. Lenses are optically coupled to a respective detector,... | 08/09/2005 |
| 6882414 | Broadband infrared spectral surface spectroscopy The system has a single pulse spectrum capability for sensing the presence of contamination on a surface to be interrogated. The system includes a narrow frequency bandwidth visible pulse and broadband infrared pulse that are directed to the surface. An output wavel... | 04/19/2005 |
| 6833554 | Laser-induced defect detection system and method Detecting a defect in the sample is accomplished by photoacousticly exciting acoustic longitudinal, surface Rayleigh, and shear waves at a first point on a near surface of a sample; photoacoustically detecting acoustic waves at a second point spaced from the excitat... | 12/21/2004 |
| 6781684 | Workpiece levitation using alternating positive and negative pressure flows A support structure utilizes a combination of positive pressure openings and negative pressure openings to precisely position a workpiece, such as a sheet of float glass. The positive pressure openings are supply openings that direct a flow of fluid, such as air, on... | 08/24/2004 |
| 6727995 | Gate oxide thickness measurement and control using scatterometry A system for regulating gate oxide layer formation is provided. The system includes one or more light sources, each light source directing light to one or more gate oxide layers being deposited and/or formed on a wafer. Light reflected from the gate oxide layers is ... | 04/27/2004 |
| 6721046 | Monitoring of concentration of nitrogen in nitrided gate oxides, and gate oxide interfaces A system for regulating nitrided gate oxide layer formation is provided. The system includes one or more light sources, each light source directing light to one or more nitrided gate oxide layers being deposited and/or formed on a wafer. Light reflected from the nit... | 04/13/2004 |
| 6686602 | Patterned wafer inspection using spatial filtering Apparatus for spatial filtering includes a Fourier lens, adapted to collect radiation emitted from a point and to separate the collected radiation into spatial components in a Fourier plane of the lens, and a programmable spatial filter, positioned at the... | 02/03/2004 |
| 6618136 | Method and apparatus for visually inspecting transparent body and translucent body A system and method of visually inspecting a transparent body and a translucent body comprises applying light to a reverse surface of an object to be inspected by a transmission light source, and applying light, at a low angle, to at least one of an obver... | 09/09/2003 |
| 6563126 | Ultraviolet light permeable filter for flaw detection light and method for detection of flaws An ultraviolet light permeable filter for an ultraviolet detection light is equipped on a filter glass surface with a dielectric multi-film layer which allows a visible radiation of wave length from 694 nm to 780 nm to reflect on the layer. The 694 nm to ... | 05/13/2003 |
| 6509967 | Method for detecting optical errors in large surface panels The invention relates to a method for detecting optical errors, especially in refractive power, in large surface panels made of transparent material such as glass, by evaluating an observed image. The steps of the inventive method include: projection of a... | 01/21/2003 |
| 6508990 | Substrate treating method and apparatus A substrate treating method and apparatus which can perform in-situ monitoring of surface state of a semiconductor substrate. The substrate treating apparatus comprises substrate treating means for subjecting the substrate to a required treatment, means f... | 01/21/2003 |
