Class 356/239.3 - Patterned surface

Subclass of Class 356 - Optics: measuring and testing
Definition: Inspection of transparent or translucent material further
No. of patents: 34
Last issue date: 11/16/2010

Number	Title	Issue Date
7834996	Inspection apparatus and method An optical plate having an exit pupil array or a lens array aligned at a predetermined pitch is disposed at the front of a display. A test pattern is supplied to the display to light a pixel corresponding to the predetermined pitch. A first optical element transmits...	11/16/2010
7385689	Method and apparatus for inspecting substrate pattern A method of inspecting an inspection pattern using a statistical inference function is disclosed. The inference function is generated in relation to optical reference signal data and reference pattern characteristic data for a plurality of reference patterns formed ...	06/10/2008
7339664	System and method for inspecting a light-management film and method of making the light-management film A method of inspecting a light-management film comprises reflecting light from an overhead light source off a first side of the light-management film and examining the light-management film for defects; directing transmission light from a backlight source through a ...	03/04/2008
7289655	Device for inspecting illumination optical device and method for inspecting illumination optical device The invention provides a device to inspect an illumination optical device and a method to inspect an illumination optical device that make it possible to efficiently inspect illumination optical devices and to control manufacturing cost. A lens array inspecting devi...	10/30/2007
7215418	Inspection of transparent substrates for defects Methods, apparatus and systems for the detection of defects in transparent substrates such as glass sheets are disclosed. The methods, apparatus and systems are capable of detecting optical path length variations in transparent substrates smaller than 100 nm. ...	05/08/2007
7193697	Apparatus for feature detection An apparatus for feature detection of a test object includes at least one light source module and at least one image capturing unit. The light source module provides light to illuminate a test region of the test object, and includes a substrate, a set of light-emitt...	03/20/2007
7142295	Inspection of transparent substrates for defects Methods, apparatus and systems for the detection of defects in transparent substrates such as glass sheets are disclosed. The methods, apparatus and systems are capable of detecting optical path length variations in transparent substrates smaller than 100 nm. ...	11/28/2006
7084966	Optical measurement of device features using lenslet array illumination The properties of features formed in a substrate are measured. Lenslet array illumination is used to illuminate regions of a substrate so that the features of interest occupy a greater proportion of the illuminated area. The signal-to-noise ratio of the measurement ...	08/01/2006
7057157	Photosensor device and disk inspection apparatus using it A photosensor device is provided which includes a light-applying fiber to apply an inspection light to a subject to be inspected; a light-receiving fiber to receive a reflected light from the subject to be inspected; a laser beam source to emit the inspection light ...	06/06/2006
7042577	Architectures for high-resolution photomask phase metrology We disclose several instrument architectures for the measurement of arbitrary phase retardation on advanced lithography photomasks. These architectures combine traditional interferometric techniques with high-magnification UV microscopy. Features are interrogated us...	05/09/2006
6904164	Method of inspecting accuracy in stitching pattern elements A method of quickly and accurately inspecting the stitching accuracy at which regions of a lithographic pattern are stitched at boundaries. The numerous regions of the lithographic pattern are exposed or delineated, one at a time. Inspected regions are scanned with ...	06/07/2005
6788403	Checking machine for checking tape automated bonding region of display module A checking machine for being used in a fabricating process of a display module and checking a position of a tape automated bonding (TAB) region is provided. The checking machine includes a main holder having an inclined panel positioned at an inclination β relative...	09/07/2004
6750465	Device for evaluating diffractive authenticity features An apparatus for evaluating distinguishing authenticity features comprising diffraction elements on a document which is illuminated by an illumination source. The distinguishing authenticity element which is to be examined, diffracts the beam of the illuminating sou...	06/15/2004
6686602	Patterned wafer inspection using spatial filtering Apparatus for spatial filtering includes a Fourier lens, adapted to collect radiation emitted from a point and to separate the collected radiation into spatial components in a Fourier plane of the lens, and a programmable spatial filter, positioned at the...	02/03/2004
6674522	Efficient phase defect detection system and method The ability to inspect photomasks for errors or defects in phase-shifters is greatly enhanced using optical techniques based on multiple modified radiation collection techniques. In particular, the apparatus and methods of the invention allows for errors ...	01/06/2004
6636632	Image processor and image processing method An image processor wherein, with respect to pixels included in a pattern image and in a plural directions from a selected pixel among pixels, a number of same kind of pixels which consecutively continues from the selected pixel is counted. A processing re...	10/21/2003
6598663	Method for detecting density gradients The present invention includes molding additives and molded materials. This invention also includes machines or electronic apparatus using these aspects of the invention. The present invention also includes methods and processes for making and using these...	07/29/2003
6532300	Method of automatically analyzing patterns There is disclosed a method of automatically analyzing many repeating patterns. One typical pattern is first selected. On the typical pattern, analysis points, analysis methods and analysis conditions are determined. On the other patterns, automatic analy...	03/11/2003
6441911	Measuring instrument and method for measuring patterns on substrates of various thicknesses A measuring instrument and a method for measuring patterns on substrates of various thicknesses are described. The measuring instrument comprises an X-Y carriage in which an opening is defined by a peripheral rim. An illumination optical system and multip...	08/27/2002
6411376	Method and apparatus for measuring the direction and position of rotating bodies An apparatus and method for measuring in real time the rotational or linear position, direction or velocity of a rotating or linear moving body, particularly an encoded optical disk or strip attached to such rotating or linear moving body. A position meas...	06/25/2002
6184976	Apparatus and method for measuring an aerial image using transmitted light and reflected light Apparatus and method for measuring an aerial image whereby influences of various defects existing on patterns formed on a photomask as well as the surface of the photomask substrate can be inspected. The aerial image measuring apparatus includes an optica...	02/06/2001
6130747	Method of measuring aberrations of lens A method of measuring the aberrations of a projection lens is disclosed. In this method, a photo-mask is irradiated with an illumination beam through an illumination optics, an inspection mark which comprises a periodic pattern on the photo-mask is imaged...	10/10/2000
5966212	High-speed, high-resolution, large area inspection using multiple optical fourier transform cells A system includes multiple optical Fourier transform cells which simultaneously scan a device under test. The illuminated area for each Fourier transform cell is small to provide high resolution, while the number of cells is large to cover a relatively wi...	10/12/1999
5757480	Method for laser alignment in mask repair A laser mask repair uses an alignment process comprising the step of normalized pattern matching between a search area encircling a matrix of contact holes including a defective contact hole and reference area encircling a similar matrix of contact holes ...	05/26/1998
5751841	Method and apparatus for scanning bank notes The invention relates to a method of and apparatus for optically scanning bank notes, the method including the steps of transmitting the bank notes along a transport path, illuminating each of the bank notes from one side of the transport path and forming...	05/12/1998
5602645	Pattern evaluation apparatus and a method of pattern evaluation The present invention provides a pattern evaluating device including light irradiating means for irradiating the rays of light from a light source upon an object, an objective lens through which the light having penetrated through the object passes, an ap...	02/11/1997
5563702	Automated photomask inspection apparatus and method A method and apparatus for inspecting patterned transmissive substrates, such as photomasks, for unwanted particles and features occurring on the transmissive, opaque portions and at the transition regions of the opaque and transmissive portions of the su...	10/08/1996
5555315	Pinhole inspection device and method An inspection device and method that closely approximates a visual inspection technique for evaluating the quality of a sample. A mask image generation section generates a master image from an image signal of a known good sample. The image signal is used ...	09/10/1996
5548401	Photomask inspecting method and apparatus In a photomask inspecting method, a photomask is inspected on the basis of the difference between the polarized state of elliptical light produced upon superposition of two linearly polarized light beams having orthogonal polarization directions and passi...	08/20/1996
5497234	Inspection apparatus An inspection apparatus has a light source for irradiating lights to a sample. An optical element comprising of an achromatic lens converges the lights transmitted through or reflected by the sample to thereby form an image behind the back focal plane. An...	03/05/1996
4465350	Method and device for inspecting micromask patterns Inspection of micromask patterns occurs by both moving an inspecting laser beam relative to a micromask and varying the intensity of said beam in the same manner that occurs during pattern generation. The pattern modulates the inspecting laser beam by one...	08/14/1984
4299443	Apparatus for detecting the defects of a pattern with directional characteristics using a filter having arm sections of curved shape An apparatus for detecting the defects composed of non-linear components of a subject pattern, includes a laser source for illuminating the subject pattern by a laser beam, a Fourier-transform lens for projecting an information light from the pattern thro...	11/10/1981
4218142	Mask analysis Masks used in the production of integrated circuits are analyzed and tested by a scanning spot from a laser beam comparing the position signal of the scan from a mask against a data base representing another mask which may be selected at random. Apparatus...	08/19/1980
4153336	Optimized spatial filter for defect detection An apparatus for detecting the defects composed of non-linear components of a subject pattern, includes a laser source for illuminating the subject pattern by a laser beam, a Fourier-transform lens for projecting an information light from the pattern thro...	05/08/1979

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Class 356/239.3 - Patterned surface