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| Number | Title | Issue Date |
| 8049878 | Systems and methods for detecting defects in ceramic filter bodies Systems (50) and methods are disclosed for detecting defects (DEF1-DEF5) in a ceramic filter body (10) having a honeycomb structure (12) that defined multiple channels (20). Plugs (30) are used to seal select channel ... | 11/01/2011 |
| 7701570 | Collimated light method and system for detecting defects in honeycombs A system and method for detecting defective cells in honeycomb bodies which includes a light source which launches and couples light into cells at a first end face of the honeycomb body, and a projection medium which receives the light at a second end face of the ho... | 04/20/2010 |
| 7679738 | Method of inspecting a body having fine-gap grooves and method of repairing the body A molding die has through holes composed of feed holes and slit grooves for producing honeycomb structure bodies. The slit groove is formed in at least a part of each through hole. In a method of inspecting the molding die, a light is irradiated into the feed holes ... | 03/16/2010 |
| 7542135 | Device for inspecting countersunk holes The invention is a non contact laser inspection self centering device to inspect the counter sink portion of a counter sunk fastener hole on a surface. In detail, the self centering and seating device includes a combination laser transmitter and receiver for transmi... | 06/02/2009 |
| 7528944 | Methods and systems for detecting pinholes in a film formed on a wafer or for monitoring a thermal process tool Methods and systems for detecting pinholes in a film formed on a wafer or for monitoring a thermal process tool are provided. One method for detecting pinholes in a film formed on a wafer includes generating output responsive to light from the wafer using an inspect... | 05/05/2009 |
| 7433031 | Defect review system with 2D scanning and a ring detector A defect review system includes a stage, a light source, a turning mirror, and a ring of collectors. The stage supports and moves an article for inspection, the article having a surface. The light source provides light. The turning mirror turns the light toward the ... | 10/07/2008 |
| 7423746 | Circuit-pattern inspecting apparatus and method A circuit pattern inspection apparatus and inspection method facilitate the creation of a recipe and the confirmation of a defect. The apparatus and method employ a dialogue-based operation for the creation of a recipe and the confirmation of a defect. Input items (... | 09/09/2008 |
| 7414715 | Systems, circuits and methods for extending the detection range of an inspection system by avoiding detector saturation Inspection systems, circuits and methods are provided to enhance defect detection by addressing anode saturation as a limiting factor of the measurement detection range of a photomultiplier tube (PMT) detector. In accordance with one embodiment of the invention, a m... | 08/19/2008 |
| 7369252 | Process control monitors for interferometric modulators Process control monitors are disclosed that are produced using at least some of the same process steps used to manufacture a MEMS device. Analysis of the process control monitors can provide information regarding properties of the MEMS device and components or sub-c... | 05/06/2008 |
| 7363817 | System and technique for detecting the presence of foreign material Systems and techniques for detecting the presence of foreign material in food utilizing optical backlighting and/or ultrasonic inspection are presented. In optical backlighting, a substantially monochromatic light source optically backlights a food stream with sourc... | 04/29/2008 |
| 7366340 | Method and system for optically determining perpendicularity of end surface of part formed from parallel channels A method and system for inspecting a honeycomb structure having a plurality of parallel channels includes aligning the honeycomb structure with an image sensing device such that the channels of the honeycomb structure are tilted with respect to the parallel channels... | 04/29/2008 |
| 7355700 | Automated inspection system and method An automated system for illuminating and inspecting the inner surface areas of tubular samples, especially stents, is disclosed. The system comprises rotatable means for receiving the sample to be inspected; at least one fluorescent surface area arranged in the imme... | 04/08/2008 |
| 7321421 | Apparatus and methods for scanning conoscopic holography measurements Apparatus and methods for scanning conoscopic holography measurements are disclosed. In one embodiment, a system includes a conoscopic holography sensor, a beam directing assembly, and a control assembly. The beam directing assembly is adapted to adjustably direct a... | 01/22/2008 |
| 7301621 | Method and device for non-destructive analysis of perforations in a material Method for fabricating and inspecting small holes in a material are disclosed. The method includes directing light onto the material and through the holes formed in the material, and then collecting the light passing through the holes in the material onto a detector... | 11/27/2007 |
| 7283224 | Face lighting for edge location in catalytic converter inspection A method and system for inspecting an object having a planar face with surface variations such as catalytic converters. Light sources are placed above the planar face of the object for lighting the face of the object. At least one obscuration is positioned proximate... | 10/16/2007 |
| 7184140 | Device for optically measuring boreholes A device for optically measuring bores in components, preferably injection bores in fuel injection valves, having a light source and an optical measuring instrument for optically detecting the geometry of the bore. The light source illuminates an opal solid body, wh... | 02/27/2007 |
| 7173692 | Device and method for optically inspecting operating holes formed in heads of screws Image inspection is used to inspect defective or non-defective screw heads. An inspection device includes an inspecting portion for positioning and holding a screw, with a head, with the head up, a CCD camera provided right over the inspecting portion, an annular li... | 02/06/2007 |
| 7154080 | System and method for detecting the efficacy of machined parts The present invention relates to a system and method for detecting the efficacy of machined parts, and particularly to an automated system and method that detects whether tooling features (e.g., holes) are properly formed and aligned in work pieces during the machin... | 12/26/2006 |
| 7148960 | Method and device for non-destructive analysis of perforations in a material Method for fabricating and inspecting small holes in a material are disclosed. The method includes directing light onto the material and through the holes formed in the material, and then collecting the light passing through the holes in the material onto a detector... | 12/12/2006 |
| 7095495 | Fluorescent inspection of airfoil cooling holes A system and method are provided for inspecting cooling holes of a completed, lasered, and deburred turbine airfoil. The cooling holes are covered with a very porous tape before placing the turbine airfoil into an air fixture that has a metered amount of fluorescent... | 08/22/2006 |
| 7088443 | System for detecting anomalies and/or features of a surface A cylindrical mirror or lens is used to focus an input collimated beam of light onto a line on the surface to be inspected, where the line is substantially in the plane of incidence of the focused beam. An image of the beam is projected onto an array of charge-coupl... | 08/08/2006 |
| 7061599 | Protective film for base substrates of multi-layered board and method and apparatus for inspecting base substrates An inspection apparatus for a base substrate of a multi-layered board irradiates light to the base substrate of a multilayered board to which a protective film is attached. An image of a surface, to which the protective film is attached, is picturized by a camera, s... | 06/13/2006 |
| 7061603 | Method for inspecting exposure apparatus Light emitted from an illumination optical system is guided to a photomask where a pattern is formed of an optical member including a light transmission pattern as a diffraction grating pattern, in which a light transmission part and a opaque part are repeated in a ... | 06/13/2006 |
| 7043109 | Method of in-wafer testing of monolithic photonic integrated circuits (PICs) formed in a semiconductor wafer A method of in-wafer testing is provided for a monolithic photonic integrated circuit (PIC) formed in a semiconductor wafer where each such in-wafer circuit comprises two or more integrated electro-optic components, one of each in tandem forming a signal channel in ... | 05/09/2006 |
| 7043072 | Method for examining foreign matters in through holes Provided herein are a method and an apparatus for examining foreign matters in through holes, which can quickly conduct an examination of foreign matter in through holes with low costs and high accuracy. Light passing through a plurality of through holes having a un... | 05/09/2006 |
| 7027167 | Depth and concentration estimation A method of estimating dimensions of an opening (36) in a body (26) comprises filling the opening (36) with a fluid that absorbs an electromagnetic radiation (40). The radiation (40) is transmitted through the body (26) and ... | 04/11/2006 |
| 7025933 | Microarray dispensing with real-time verification and inspection A microarrayer for spotting solution onto a receiving surface in an automated microarray dispensing device. Elements of the present invention include: at least one dispense head for spotting the receiving surface, at least one light source capable of illuminating th... | 04/11/2006 |
| 6992771 | Systems and techniques for detecting the presence of foreign material Systems and techniques for detecting the presence of foreign material in food utilizing optical backlighting and/or ultrasonic inspection are presented. In optical backlighting, a substantially monochromatic light source optically backlights a food stream with sourc... | 01/31/2006 |
| 6985228 | Multiple beam ellipsometer An ellipsometric apparatus provides two impinging focused probe beams directed to reflect off the sample along two mutually distinct and preferably substantially perpendicular directions. A rotating stage rotates sections of the wafer into the travel area defined by... | 01/10/2006 |
| 6982785 | Apparatus for determining radiation beam alignment This invention provides a radiation directing device, including a screen having a mirrored surface interrupted by one or more pin holes that pass through the screen, the pin holes having an elliptical shape. The invention further provides an apparatus, including (a)... | 01/03/2006 |
| 6963396 | Light hole inspection system for engine component A hole inspection system having a light source emitting light over its length and a multi-axes machine having a camera mounted thereon. After the light source is inserted into a cavity intersecting the complex holes, a control commands the multi-axes machine to move... | 11/08/2005 |
| 6906795 | Method and apparatus for examining foreign matters in through holes A method and an apparatus for examining foreign matters in through holes includes a light source provided on one side and a line sensor camera provided on the other sides, whereby the light source and sensor camera cooperate to inspect a work piece having a pluralit... | 06/14/2005 |
| 6891612 | Optical inspection device that detects holes in an object to be inspected An optical inspection device (1) that detects holes in an object to be inspected (11), comprising: a light source (41) that illuminates the object to be inspected by emitting illumination light from light-emitting points (41a) that... | 05/10/2005 |
| 6882413 | Rotating head ellipsometer An ellipsometric apparatus provides a rotating focused probe beam directed to impinge a sample in any direction. A rotating stage rotates the wafer into a linear travel range defined by a single linear axis of a single linear stage. As a result, an entire wafer is a... | 04/19/2005 |
| 6862089 | Methods for managing examination of foreign matters in through holes A method for managing an apparatus for examination of foreign matters in through holes is provided which can readily judge the presence or absence of a change in the examination conditions in the apparatus for examining foreign matters in through holes, and efficien... | 03/01/2005 |
| 6836560 | Advanced phase shift inspection method A method and apparatus for inspecting patterned transmissive substrates, such as photomasks, for unwanted particles and features occurring on the transmissive as well as pattern defects. A transmissive substrate is illuminated by a laser through an optical system co... | 12/28/2004 |
| 6829380 | Optimization of OPC design factors utilizing an advanced algorithm on a low voltage CD-SEM system A system for evaluating optical proximity corrected (OPC) designs is provided. The system includes an analysis system for performing measurements relating to a segment of a feature. The analysis system is configured to determine a first image for the segment of the ... | 12/07/2004 |
| 6819418 | Illuminating apparatus for testing A cost effective and small illuminating apparatus for testing includes an illuminant having a predetermined illumination angle, a first lens for converging light from the illuminant and converting the light into collimated light, and a second lens for converging lig... | 11/16/2004 |
| 6816252 | Apparatus for determining an overlay error and critical dimensions in a semiconductor structure by means of scatterometry An apparatus for obtaining information on critical dimensions and overlay accuracy of features in a semiconductor structure comprises a light source, a detector and an optical means defining a first optical path and a second optical path. The first optical path and ... | 11/09/2004 |
| 6798512 | Multiple beam ellipsometer An ellipsometric apparatus provides two impinging focused probe beams directed to reflect off the sample along two mutually distinct and preferably substantially perpendicular directions. A rotating stage rotates sections of the wafer into the travel area defined by... | 09/28/2004 |
