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| Number | Title | Issue Date |
| 8154717 | Optical apparatus for defect inspection An optical apparatus for defect inspection having an illuminating optical system for irradiating illumination light beams on the surface of a specimen to form a beam spot and a detection optical system for detecting a reflection light ray originating from the beam s... | 04/10/2012 |
| 8107065 | Method and apparatus for detecting defects A method and apparatus for detecting defects are provided for detecting harmful defects or foreign matter with high sensitivity on an object to be inspected with a transparent film, such as an oxide film, by reducing noise due to a circuit pattern. The apparatus for... | 01/31/2012 |
| 8094298 | Method for detecting particles and defects and inspection equipment thereof A method and equipment which includes an illustrated-spot illumination-distribution data table for storing an illumination distribution within an illustrated spot and which calculates a coordinate position for a particle or a defect and the diameter of the particle ... | 01/10/2012 |
| 8009286 | Surface inspecting method and device A light source section outputs optical flux having two types of wavelength, which are a short wavelength and a long wavelength, while the intensity is made variable. The output from the first light intensity detecting section in irradiating the optical flux having a... | 08/30/2011 |
| 7973921 | Dynamic illumination in optical inspection systems An optical inspection system or tool can be configured to inspect objects using dynamic illumination where one or more characteristics of the illumination is/are adjusted to meet the inspection needs of different areas. For example, the illumination intensity may be... | 07/05/2011 |
| 7973922 | Optical inspection method and optical inspection apparatus An optical inspection apparatus irradiates a light beam onto the outer surface of an object to be inspected, in the form of an illumination spot having an illumination intensity which is higher in the outer peripheral part of the object to be inspected than in the i... | 07/05/2011 |
| 7952701 | Surface inspection method and inspecting device using the same If an illuminance of a measurement spot is limited in order to prevent heat damage on an article to be inspected, since detection sensitivity and a detection speed are in a relation of trade-off, it is difficult to improve one of them without sacrificing the other o... | 05/31/2011 |
| 7940384 | Systems and methods for blocking specular reflection and suppressing modulation from periodic features on a specimen Systems and methods for blocking specular reflection and suppressing modulation from periodic features on a specimen are provided. One inspection system configured to block specular reflection and suppress modulation in an image of a specimen includes an illuminatio... | 05/10/2011 |
| 7898653 | Foreign matter inspection apparatus Selection with alignment marks of an optimal template, its identification and similarity judgment are conducted by a calculation function of a correlation value provided to a foreign matter inspection apparatus. In other words, the foreign matter inspection apparatu... | 03/01/2011 |
| 7898654 | Equipment and method for detecting foreign matters A foreign matter detector and a foreign matter detecting method are provided, with which foreign matter detection performance can be improved. The foreign matter detector comprises: a means for irradiating first inspection light and second inspection light to an ins... | 03/01/2011 |
| 7872742 | Surface inspection method and surface inspection apparatus A surface inspection apparatus capable of acquiring scattered light intensity distribution information for each scattering azimuth angle, and detecting foreign matters and defects with high sensitivity. A concave mirror for condensation and another concave mirror fo... | 01/18/2011 |
| 7787115 | Optical apparatus for defect inspection An optical apparatus for defect inspection having an illuminating optical system for irradiating illumination light beams on the surface of a specimen to form a beam spot and a detection optical system for detecting a reflection light ray originating from the beam s... | 08/31/2010 |
| 7777876 | Inspection method and inspection device An inspection method and an inspection device, or apparatus each capable of conducting composition analysis of a defect detected by elastic or stokes scattered light, an inspection surface or defect on the surface of the inspection surface, or a defect on the surfac... | 08/17/2010 |
| 7768636 | Belt inspecting apparatus A belt inspecting apparatus applies illuminating light beams (R, G, B) through light guides to a flat inner portion, a flat outer portion, flat side portions, and curved portions of a metal belt. The illuminating light beams, which are reflected by the metal belt, a... | 08/03/2010 |
| 7751037 | Method and apparatus for detecting defects A method and apparatus for detecting defects are provided for detecting harmful defects or foreign matter with high sensitivity on an object to be inspected with a transparent film, such as an oxide film, by reducing noise due to a circuit pattern. The apparatus for... | 07/06/2010 |
| 7724360 | Method and apparatus for inspecting foreign particle defects The invention relates to a device production process for forming a circuit pattern on a substrate such as semiconductor device. To enable a stable inspection of a minute foreign particle and a pattern defect occurring in manufacture of a device at a high speed and w... | 05/25/2010 |
| 7724359 | Method of making electronic entities Many electronic entities such as integrated circuits and discrete power devices have contact pads formed from successively deposited layers of nickel and a second metal such as gold. The resulting pad structure is used to make external electrical connection such as ... | 05/25/2010 |
| 7715000 | Particle detection system, and lithographic apparatus provided with such particle detection system A lithographic apparatus has an illumination system that conditions a beam of radiation. A patterning support supports a patterning device, which serves to impart the beam of radiation with a pattern in its cross-section. A substrate support holds a substrate. A pro... | 05/11/2010 |
| 7705978 | Method and apparatus for inspection of multi-junction solar cells A technique for providing high-contrast images of defects in solar cells and solar panels, by illuminating each cell under inspection with broadband infrared radiation, and then forming an image of radiation that is secularly reflected from the cell. Multi-junction ... | 04/27/2010 |
| 7671980 | Surface inspection method and surface inspection apparatus A surface inspection apparatus capable of acquiring scattered light intensity distribution information for each scattering azimuth angle, and detecting foreign matters and defects with high sensitivity. A concave mirror for condensation and another concave mirror fo... | 03/02/2010 |
| 7619729 | Method for detecting particles and defects and inspection equipment thereof A method and equipment which includes an illustrated-spot illumination-distribution data table for storing an illumination distribution within an illustrated spot and which calculates a coordinate position for a particle or a defect and the diameter of the particle ... | 11/17/2009 |
| 7602482 | Optical inspection method and optical inspection apparatus An optical inspection apparatus irradiates a light beam onto the outer surface of an object to be inspected, in the form of an illumination spot having an illumination intensity which is higher in the outer peripheral part of the object to be inspected than in the i... | 10/13/2009 |
| 7567343 | Method and apparatus for detecting defects on a wafer As circuit patterns become finer in recent years, improvement in detection sensitivity of defects is required. To answer this, sensitivity is being enhanced using a laser with a wavelength of the UV band as the laser for irradiation. A pulse oscillation laser is oft... | 07/28/2009 |
| 7557913 | Optical apparatus for defect inspection An optical apparatus for defect inspection having an illuminating optical system for irradiating illumination light beams on the surface of a specimen to form a beam spot and a detection optical system for detecting a reflection light ray originating from the beam s... | 07/07/2009 |
| 7542134 | System, method and apparatus for in-situ substrate inspection A system for inspecting a substrate includes a camera and a light source. The camera is oriented toward a field of view. The field of view encompasses at least a first portion of a first surface of the substrate. The light source is oriented toward the field of view... | 06/02/2009 |
| 7538866 | Optical sensor and method for optically inspecting surfaces In one aspect, an optical sensor is used to detect defects, which can appear on smooth surfaces, is provided. The sensor includes a telecentric laser scanner and a detection unit. The scanner includes a laser for the approximately perpendicular illumination of a smo... | 05/26/2009 |
| 7528942 | Method and apparatus for detecting defects A method and apparatus for detecting defects are provided for detecting harmful defects or foreign matter with high sensitivity on an object to be inspected with a transparent film, such as an oxide film, by reducing noise due to a circuit pattern. The apparatus for... | 05/05/2009 |
| 7477373 | Surface inspection method and surface inspection device A surface inspection method for projecting a laser beam to an inspection surface and for scanning and detecting foreign objects or the like on the inspection surface, comprising a step of being had a required number of detecting regions by a photodetector against a ... | 01/13/2009 |
| 7466404 | Technique for diagnosing and screening optical interconnect light sources A method for testing a substrate by using a photoemission microscope is provided which includes providing the substrate and applying a reverse bias voltage to the substrate. The method further includes detecting light emissions from a top surface of the substrate an... | 12/16/2008 |
| 7443500 | Apparatus for scattered light inspection of optical elements An apparatus for scattered light inspection of optical elements, having a light-generating unit (2) for generating light that is irradiated onto the optical element (9) respectively to be inspected, and a detector (4) for detecting scattered lig... | 10/28/2008 |
| 7440092 | Method and apparatus for detecting defects A method and apparatus for detecting a defect in which image signals of a same area of a sample are obtained by imaging the sample under different optical conditions, and the obtained image signals are analyzed and optical conditions are selected which modify a cont... | 10/21/2008 |
| 7433033 | Inspection method and apparatus using same The invention relates to a method and device of inspecting contamination particles on an object comprising a patterned structure. The device includes a radiation system for directing a radiation beam to the object. The object is configured to scatter the beam. The d... | 10/07/2008 |
| 7433031 | Defect review system with 2D scanning and a ring detector A defect review system includes a stage, a light source, a turning mirror, and a ring of collectors. The stage supports and moves an article for inspection, the article having a surface. The light source provides light. The turning mirror turns the light toward the ... | 10/07/2008 |
| 7424902 | In-process vision detection of flaw and FOD characteristics An inspection system (9) includes an idler wheel (61) that is coupled to a fabrication system (8) and is in contact with a backing layer (65) of an applied material (64). A rotation sensor (63) monitors the idler wheel (6... | 09/16/2008 |
| 7424828 | Device for detecting a cracked substrate A substrate detection system is disclosed to include a conveyer that delivers the substrates, a sensor that detects the length of each substrate being delivered by the conveyer over the top side of the sensor, and a processor that compares the detection length value... | 09/16/2008 |
| 7403279 | Information recording medium examining apparatus and method In an examining apparatus, an electron gun irradiates an intended position of an information recording medium with an electron beam. A stage holds the information recording medium such that the information recording medium can be moved along a rotation direction and... | 07/22/2008 |
| 7397555 | System, method and apparatus for in-situ substrate inspection A system for inspecting a substrate includes a camera and a light source. The camera is oriented toward a field of view. The field of view encompasses at least a first portion of a first surface of the substrate. The light source is oriented toward the field of view... | 07/08/2008 |
| 7394535 | Optical metrology using a photonic nanojet An inspection area on a semiconductor wafer can be examined using a photonic nanojet. The photonic nanojet, an optical intensity pattern induced at a shadow-side surface of a dielectric microsphere, is generated. The inspection area is scanned with the photonic nano... | 07/01/2008 |
| 7388659 | Particle inspection apparatus and method, exposure apparatus, and device manufacturing method An inspection apparatus for inspecting a surface of an object for a particle. The apparatus includes an irradiator configured to irradiate the surface with inspection light, a first detector configured to detect light scattered at the surface, a shield configured to... | 06/17/2008 |
| 7383156 | Apparatus for inspecting wafer surface, method for inspecting wafer surface, apparatus for judging defective wafer, method for judging defective wafer, and apparatus for processing information on wafer surface It is possible to inspect scratches and staining on a wafer surface on the basis of an LPD map obtained from a particle counter 11, by providing a means 21 for detecting aggregation of clustered point defects (LPD) from two-dimensional distribution inf... | 06/03/2008 |
