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| Number | Title | Issue Date |
| 8189183 | Optical inspection apparatus An optical inspection apparatus capable of adjusting an incident angle of a detected light beam and adjusting a detecting angle for detecting the detected light beam. A driving mechanism is used to actuate two arms having a light source and a detector disposed there... | 05/29/2012 |
| 8184281 | Methods for determining inconsistency characteristics of a composite structure Methods for determining an inconsistency characteristic of a composite structure, such as inconsistency density-per-unit area. In one implementation, a method is disclosed for determining an inconsistency characteristic of a composite structure. The method involves ... | 05/22/2012 |
| 8179523 | Photomask mounting/housing device and resist inspection method and resist inspection apparatus using same A resist inspection apparatus is provided which has a configuration in which a reticle is separated from a pellicle. A reticle cassette is made up of two pieces of plate members. A hollowed portion with a shape allowing the reticle to be inserted into the plate memb... | 05/15/2012 |
| 8174689 | Apparatus for inspecting defects of honeycomb structure According to an apparatus for inspecting defects of a honeycomb structure that is provided with a current plate and an air current formation means (air source and a header tube), fine defects or defects taking place in the vicinity of an outer periphery of the honey... | 05/08/2012 |
| 8149394 | Crack detection system A crack detection system and a method for detecting cracks in a loaded engineering structure are provided. The system and method include a light source coupled and optical fibers that are led through the structure. The optical fibers have diameters below 75 μm. The... | 04/03/2012 |
| 8134698 | Dynamic range extension in surface inspection systems In one embodiment, a surface analyzer system comprises a radiation targeting assembly to target a radiation beam onto a surface; and a scattered radiation collecting assembly that collects radiation scattered from the surface. The radiation targeting assembly genera... | 03/13/2012 |
| 8134700 | Systems and methods for inspection of stents A system and method for inspecting stents can involve an inspection camera to take an image of the stent and a computer system for analyzing the image to determine the presence of any coating defects. The determination can be made by masking out a portion of the ste... | 03/13/2012 |
| 8134699 | Illumination system for optical inspection Apparatus for generating optical radiation includes a laser, which is configured to operate in multiple transverse modes simultaneously so as to generate an input beam, which is characterized by a first speckle contrast. The transverse modes of the input beam are op... | 03/13/2012 |
| 8125632 | Fabrication method of semiconductor integrated circuit device In the fabrication of a semiconductor integrated circuit device, a 2D-3D inspection technique for solder printed on a substrate is provided which permits easy preparation of data and easy visual confirmation of a defective portion. In a substrate inspecting step, fi... | 02/28/2012 |
| 8111389 | Method of inspecting defects in circuit pattern of substrate Disclosed herein is a method of inspecting defects in a circuit pattern of a substrate. At least one laser beam radiation unit for radiating a laser beam onto an inspection target circuit pattern of a substrate in a non-contact manner is prepared. A probe beam radia... | 02/07/2012 |
| 8107063 | Transparent article An inspection method of transparent articles wherein presence or absence of optical inhomogeneities within the transparent articles can be accurately inspected is provided. In an inspection method of transparent articles used in photolithography, for inspecting whet... | 01/31/2012 |
| 8102520 | Methods and systems for inspection and/or identification of pellet-shaped articles A conveyer mechanism may include one or more composition inspection units provided along the intended product transport path. The product's composition, e.g., its ink composition, is compared with a predetermined standard, to determine whether the product is accepta... | 01/24/2012 |
| 8094295 | Inspection method and inspection apparatus The present invention provides an inspection apparatus and inspection method. The inspection apparatus includes a stage mechanism for supporting an object under inspection. A spatial filter is provided in the detection optical system to inspect the object. A printer... | 01/10/2012 |
| 8081307 | Systems and methods for the inspection of stents A system and method for inspecting stents can involve an inspection camera to take an image of the stent and a computer system for analyzing the image to determine the presence of any coating defects. The determination can be made by masking out a portion of the ste... | 12/20/2011 |
| 8077305 | Imaging semiconductor structures using solid state illumination The invention consists of a camera, light sources, lenses and software algorithms that are used to image and inspect semiconductor structures, including through infrared radiation. The use of various configurations of solid state lighting and software algorithms enh... | 12/13/2011 |
| 8077307 | Illumination system for optical inspection Apparatus for optical inspection includes an illumination assembly, including multiple parallel rows of light sources for emitting light and illumination optics associated with each row for directing the light onto an object under inspection. The multiple parallel r... | 12/13/2011 |
| 8077306 | Defect inspection apparatus A high speed defect inspection apparatus has a high-speed detector that includes a plurality of image sensors. The image sensors are arranged with gaps between them in the pixel direction to form two lines. The image sensors are arranged in a zigzag pattern so that ... | 12/13/2011 |
| 8072589 | System and method for photoemission-based defect detection An IREM image of an IC is obtained. The emission intensity at each emission site is measured/calculated and is compared to reference intensity. The calculated intensity may be plotted against reference intensities. In general, the majority of the plotted intensities... | 12/06/2011 |
| 8072590 | Laser system for pellet-shaped articles A pellet-shaped article inspection unit is structured for use with a conveyer mechanism having a plurality of carrier bars, each carrier bar being structured to convey a plurality of pellet-shaped articles along a predetermined path. The article inspection unit incl... | 12/06/2011 |
| 8054458 | Optical device for detecting live insect infestation The disclosure relates to a detection device for detecting movement of a live insect located within a seed or grain. The device may include a light source with a masking arrangement to block stray light. It may also include a detection region sized to contain at lea... | 11/08/2011 |
| 8045144 | Apparatus and method for the inspection of the surface of a component An apparatus for inspection of a surface of a component includes a probing device (21) which is coupled to a traversing device (50) and has at least one probe carrier (22, 23), to which at least one inspection mechanism is fitted. In order to en... | 10/25/2011 |
| 8023110 | Priori crack detection in solar photovoltaic wafers by detecting bending at edges of wafers Methods and systems for determining the quality of a substrate are disclosed. One or more substrates may be examined to determine whether bending is present at the edge of a substrate. The substrate may be accepted if it is determined that bending is not present at ... | 09/20/2011 |
| 8009285 | Photomask mounting/housing device and resist inspection method and resist inspection apparatus using same A resist inspection apparatus is provided which has a configuration in which a reticle is separated from a pellicle. A reticle cassette is made up of two pieces of plate members. A hollowed portion with a shape allowing the reticle to be inserted into the plate memb... | 08/30/2011 |
| 7990529 | Detection circuit and foreign matter inspection apparatus for semiconductor wafer In a foreign matter inspection apparatus for a semiconductor wafer, a PMT which detects reflection light, an amplifier which amplifies a signal detected by the PMT and in which response characteristics of amplification are controlled by a control signal, an A/D conv... | 08/02/2011 |
| 7986402 | Three dimensional profile inspecting apparatus A three-dimensional profile inspecting apparatus includes at least two optical inspecting apparatuses and a tilt angle adjusting mechanism. The tilt angle adjusting mechanism is equipped with the at least two optical inspecting apparatuses so as to adjust the tilt a... | 07/26/2011 |
| 7986403 | Foreign substance inspection apparatus A foreign substance inspection apparatus includes an irradiating unit and first and second detecting units. The irradiating unit is configured to emit irradiating light to be obliquely incident on a surface to be inspected to form a linear irradiation region on the ... | 07/26/2011 |
| 7973918 | Apparatus and method for pattern inspection A pattern inspection apparatus includes a pulsed light source configured to emit pulsed light; a stage configured to mount thereon an inspection target object with a pattern formed thereon; a time delay integration (TDI) sensor configured to detect, a plurality of t... | 07/05/2011 |
| 7961307 | Angular spectrum tailoring in solid immersion microscopy for circuit analysis A structure for locating a fault in a semiconductor chip. The chip includes a substrate on a dielectric interconnect. A first electrical response image of the chip, which includes a spot representing the fault, is overlayed on a first reflection image for monochroma... | 06/14/2011 |
| 7948617 | Optical multiwavelength window contamination monitor for optical control sensors and systems A foreign-particle detection system for use with an optical instrument having a transmissive window with a first side and a second side includes a radiation source to emit a radiation signal, a diffusing reflector to diffusively spread the radiation signal emitted b... | 05/24/2011 |
| 7940382 | Method for inspecting defect of hollow fiber porous membrane, defect inspection equipment and production method A method for inspecting a defect of a hollow fiber porous membrane having substantially uniform, continuous inner hollow portions comprises steps for introducing a part of the hollow fiber porous membrane into an irradiation chamber, for irradiating the hollow fiber... | 05/10/2011 |
| 7916286 | Defect detection through image comparison using relative measures Inspection of objects such as semiconductor wafers can include comparisons of shapes between inspection and reference images. As part of the inspection process, relative values may be assigned to pixels within each image based on comparison of such pixels to neighbo... | 03/29/2011 |
| 7916287 | Surface inspection method and surface inspection apparatus Light from a light source becomes two illumination beams by a beam splitter. The beams are irradiated onto a semiconductor wafer from two mutually substantially orthogonal azimuthal angles having substantially equal elevation angles to form illumination spots. When ... | 03/29/2011 |
| 7907269 | Scattered light separation An apparatus for detecting top scattered light from a substrate. A source directs a light onto a position on the substrate. The light thereby reflects off in a specular beam, scatters off the top surface, and scatters off a bottom surface of the substrate. An object... | 03/15/2011 |
| 7907268 | Surface inspection method and surface inspection device A surface inspection method inspects a surface of a wafer having a repeated pattern formed by double patterning. The method includes: a first step (S121) which applies an inspection light to a surface of a wafer; a second step (S122) which detects a di... | 03/15/2011 |
| 7903244 | Method for inspecting defect and apparatus for inspecting defect The present invention is an apparatus for inspecting foreign particles/defects, comprises an illumination optical system, a detection optical system, a shielding unit which is provided in said detection optical system to selectively shield diffracted light pattern c... | 03/08/2011 |
| 7898650 | Inspection method for transparent article An inspection method of transparent articles wherein presence or absence of optical inhomogeneities within the transparent articles can be accurately inspected is provided. In an inspection method of transparent articles used in photolithography, for inspecti... | 03/01/2011 |
| 7889333 | Visual inspection system for ceramic balls A visual inspection system for ceramic balls inspects flaws in the surface of ceramic balls, and includes an oil tank holding oil, a rotation device for rotating a ceramic ball targeted for inspection that is immersed in the oil in the oil tank, so that detection of... | 02/15/2011 |
| 7884929 | Blade breakage and abrasion detecting device The present invention provides a blade breakage and abrasion detecting device comprising: a detecting unit including a light-emitting unit which is provided close to a side of a blade to emit a round shape light toward the blade, and a light receiving unit which is ... | 02/08/2011 |
| 7880873 | Droplet discharge device A pattern formation device is for forming a pattern on a substrate includes first and second foreign matter detection sensors. Each of the first and second foreign matter detection sensors includes a light projecting unit and a light receiving unit disposed across a... | 02/01/2011 |
| 7872741 | Method and apparatus for scatterfield microscopical measurement A method and an apparatus are disclosed for scatterfield microscopical measurement. The method integrates a scatterometer and a bright-field microscope for enabling the measurement precision to be better than the optical diffraction limit. With the aforesaid method ... | 01/18/2011 |
