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Class 356/124.5 - For optical transfer function


Subclass of Class 356 - Optics: measuring and testing
Definition: Subject matter including means to determine the ratio of
No. of patents: 106
Last issue date: 12/27/2011


1      
NumberTitleIssue Date
8085393Exposure apparatus inspection method and method for manufacturing semiconductor device
A mask pattern includes a first pattern having a line-and-space pattern extending in a first direction, a second pattern formed as a line-and-space pattern having a larger period than the first pattern and extending in the first direction, a third pattern having a l...
12/27/2011
7705976Method for recognizing patterns from assay results
A Fourier transform optical detection system for use with a test assay that has a sensitivity pattern, the detection system including a lens having a Fourier transform plane and detectors located in the Fourier transform plane positioned in an arrangement of a Fouri...
04/27/2010
7589830Method for testing a lens and positioning the lens relative to an image sensor
A method for testing and positioning a lens includes determining whether a modulation transfer function (MTF) value of the lens for an object at a first object distance is not less than a first required MTF value and whether another MTF value of the lens for an obje...
09/15/2009
7511803Method for displaying result of measurement of eccentricity
A method for displaying a result of measurement of eccentricity in an optical system is provided where an amount of eccentricity for each lens element's surface in a lens system can be displayed and where the amount of eccentricity displayed can be a magnified amoun...
03/31/2009
7440089Method of measuring decentering of lens
Disclosed is a measuring method which can measure the decentering of an axis by the measurement of a two-dimensional curved surface profile. This method has a first step of measuring a profile of a examined surface by a probe from a first reference position which is...
10/21/2008
7379170Apparatus and method for characterizing an image system in lithography projection tool
A system and method for characterizing an imaging system causes a diffraction image indicative of a test structure having a generalized line-grating to be formed and then extracts from a measurement of the diffraction image a lens transmittance function, a photoresi...
05/27/2008
7365838System and method for the measurement of optical distortions
An apparatus measures optical deviations caused by an aircraft canopy. In this apparatus, a light source generates a beam of light. A collimator, optically coupled to the light source, then collimates the beam of light. An optical assembly patterns the collimated be...
04/29/2008
7366358Method of and system for generating image signal
An original image including therein a predetermined periodic pattern is read out by sampling the original image at a frequency higher than a desired sampling frequency, and an initial image signal is thus obtained. The initial image signal is then re-sampled at the ...
04/29/2008
7349078Characterization of lenses
In accordance with one embodiment of the present invention, a method of characterizing a lens is provided. According to the method, an optical source such as a laser is configured to generate a collimated beam that is focused along an optical axis at a distance f
03/25/2008
7330609MTF measuring method and system
A method of measuring a modulation transfer function (MTF) includes detecting the center of a line spread function (LSF) image in order to calculate an MTF. For this purpose, an enlarged image of a portion of an image containing the LSF image is created, and binary-...
02/12/2008
7317309Wideband signal analyzing apparatus, wideband period jitter analyzing apparatus, and wideband skew analyzing apparatus
A wideband signal analyzing apparatus for analyzing an input signal includes frequency-shifting means for generating a plurality of intermediate frequency signals by shifting a frequency of the input signal as much as respectively different frequency-shifting amount...
01/08/2008
7289199Electronic imaging apparatus and microscope apparatus using the same
An electronic imaging apparatus includes a connecting section connected to an optical apparatus; an optical element having a preset transmittance with respect to light in a preset wavelength region, incident from the optical apparatus; and an electronic image sensor...
10/30/2007
7280191Lens meter
A lens meter that measures optical characteristics of lenses of an eyeglass unit and an inspection glass unit, including a glass unit support, light sources, light-projecting and -detecting optical systems, light detectors, and inspection glass frame adaptors for th...
10/09/2007
7280193Distinguishing mirror speckle from target images in weak signal applications
Apparatus, and a related method, for eliminating the effect of speckle images caused by surface imperfections in a primary mirror of a stellar coronagraph. Depending on their size, mirror imperfections can result in speckles in a field of view that also includes an ...
10/09/2007
7215361Method for automated testing of the modulation transfer function in image sensors
A method for automatically measuring the modulation transfer function of an imager is disclosed. A opaque mask is placed over selected columns and rows of the imager during fabrication. In the course of an automated process, photons are uniformly shone over the imag...
05/08/2007
7215447Method of optimal focusing for document scanner
A method of optimal focusing for a document scanner is disclosed. The scanner includes an optical module movable in a given scanning direction to perform scanning operation over an area of a document in a scan line by scan line manner by being driven by an optical m...
05/08/2007
7193196Methods and systems for evaluating optical systems
Systems and method for determining, based on a gray scale image, focus of an imaging system. A method of this invention includes the steps of: a) acquiring a gray scale image of a test target, b) binarizing the acquired gray scale image, c) analyzing the binarized a...
03/20/2007
7164471Electronic imaging apparatus and microscope apparatus using the same
An electronic imaging apparatus includes a connecting section connected to an optical apparatus; an optical element having a preset transmittance with respect to light in a preset wavelength region, incident from the optical apparatus; and an electronic image sensor...
01/16/2007
7133140Apparatus and measurement procedure for the fast, quantitative, non-contact topographic investigation of semiconductor wafers and other mirror like surfaces
Apparatus and process for fast, quantitative, non-contact topographic investigation of samples. Apparatus includes a light source, and a collimating concave mirror structured and arranged to produce a parallel beam and to direct the parallel beam to a sample to be i...
11/07/2006
7130051Telescope accessory
In an embodiment according to the present invention, a coronagraph for detecting reflective bodies external to a light source is provided. A first mirror for directing a beam of light onto an occulting mask is adjusted based on a data from a fiber optic sensor or a ...
10/31/2006
7119911Moiré deflectometer including non-mechanical, transparent, spatial light modulators for demonstrating two-axis rulings
A Moiré deflectometer includes at least three non-mechanical, transparent, spatial light modulators for demonstrating two sets of patterns on two parallel planes on two of the modulators thereby creating a Moiré fringe pattern and a method for using the same. More...
10/10/2006
7095885Method for measuring registration of overlapping material layers of an integrated circuit
A method and apparatus for measuring registration between two or more integrated circuit layers is disclosed. Images of actual operative circuitry of different layers of a semiconductor wafer, obtained by an optical technique or a scanning electron microscope, are d...
08/22/2006
7075633Method and system for measuring the imaging quality of an optical imaging system
An object pattern is imaged by an imaging system onto the image plane of the imaging system at a location where a reference pattern suited to the object pattern is situated in order to measure the imaging fidelity of an optical imaging system, for example, an eyegla...
07/11/2006
7075636Apparatus and methods for evaluating performance of endoscopy devices and systems
A test and measurement system to assess performance characteristics of an endoscope or other optically based diagnostic or treatment devices. The performance characteristics can include the photometric characteristics, the imaging characteristics and the physical ch...
07/11/2006
7071963Optical write-in head, image forming apparatus using the same, and method for inspecting the apparatus
An optical write-in head for obtaining a clear image even in printing at a relatively high recording density without generating strip-like irregularities in most cases. The optical write-in head applies light carrying image information to a photosensitive substance....
07/04/2006
7071966Method of aligning lens and sensor of camera
A method for aligning a lens of a camera with a sensor of the camera. The method includes positioning a test object a predetermined distance away from the lens of the camera, photographing the test object with the camera to produce image data, and outputting the ima...
07/04/2006
7068360Optical sampling waveform measuring apparatus
In order to provide an optical sampling waveform measuring apparatus which can measure an ultra-high speed optical signal accurately by using a stable, narrow pulse, and a low timing jitter sampling optical pulse, an optical sampling waveform measuring apparatus is ...
06/27/2006
7069167Frequency response measurement
A method of frequency response measurement for a sinusoidal test signal, such as a swept sinusoid signal, a multi-burst sinusoidal signal or the like, uses a complex sinusoid window at a particular frequency for correlation with the sinusoidal test signal. The resul...
06/27/2006
7057715Lithography tool test patterns and method
Test patterns and a method for evaluating and adjusting the resolution of an electron beam lithography tool. The test patterns include multiple feature patterns that are repeated throughout the test pattern. Each feature pattern can be interleaved with horizontal an...
06/06/2006
7046436Arrangement and method for polarization-optical interference contrast
The invention is directed to a method of differential interference contrast in which the object is illuminated by natural light and the light coming from the object is first polarized after passing through the objective. The observation is carried out with a shearin...
05/16/2006
7034949Systems and methods for wavefront measurement
A wavefront measuring system and method for detecting phase aberrations in wavefronts that are reflected from, transmitted through or internally reflected within objects sought to be measured, e.g., optical systems, the human eye, etc. includes placing a reticle in ...
04/25/2006
7031545Method and apparatus for automatically adjusting sharpening weighting value
A method of automatically adjusting sharpening weighting value in an image sharpening process is disclosed. The method utilizes scanning a correction board having a black reference region, a white reference region and a plurality of line pair regions to aid the calc...
04/18/2006
7022065Endoscope test device
The invention uses optics and precision mechanisms to quantitatively assess the performance of medical endoscopes. By viewing standardized optical targets under well-controlled conditions, the optical quality of endoscopes can be easily determined in much the same f...
04/04/2006
6989894Lens evaluation method and lens-evaluating apparatus
A lens evaluation method for calculating resolution evaluation value based on a detected luminance value in order to evaluate resolution of lens has a background luminance value acquiring step for acquiring a luminance value at a background part having no test patte...
01/24/2006
6980290Optical sampling waveform measuring apparatus
An optical sampling waveform measuring apparatus can measure waveform of a high-speed signal light P8 sensitively, accurately, and in high time resolution, Raman shift light which is generated from a light pulse having a narrower pulse width than the signal l...
12/27/2005
6975387Wavefront aberration measuring instrument, wavefront aberration measuring method, exposure apparatus, and method for manufacturing micro device
Before measuring a wavefront aberration of a projection optical system, an image formation position of an image of a pattern of a test reticle which is formed on a predetermined surface is detected by an AF sensor. Based on a result of this detection, the position o...
12/13/2005
6963399Method and apparatus for quantifying an “integrated index” of a material medium
An apparatus for and method of calculating an integrated index of a transparent, translucent or opaque material for a desired wavelength range, the method comprising measuring a filtered value of the material as a function of wavelength within the desired wavelength...
11/08/2005
6961121Method and system for evaluating optical disturbances occurring in a supersonic flow field
A method of evaluating optical disturbances occurring in a flow field around a solid body. The method includes performing a computational fluid dynamics (CFD) calculation to obtain a three-dimensional index-of-refraction field outside the solid body, and performing ...
11/01/2005
6934088Optical elements and methods for making thereof
Optical elements are made using micro-jet printing methods to precisely control the type, position and amount of polymer deposited onto a substrate. In preferred embodiments, the proportions of two or more different polymer compositions are varied over the course of...
08/23/2005
6900884Automatic measurement of the modulation transfer function of an optical system
A system and method are described for automatically determining the modulation transfer function (MTF) of an optical system. In accordance with exemplary embodiments of the present invention, optical information is collected from the optical system by imaging a bar ...
05/31/2005
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