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| Number | Title | Issue Date |
| 7936447 | Lithographic apparatus and device manufacturing method A masking apparatus for preventing irradiation of an outer region of a substrate during lithography is disclosed. The masking apparatus includes a mask that includes a plurality of discrete segments arranged to form a continuous ring shaped mask positioned between a... | 05/03/2011 |
| 7777863 | Lithographic apparatus with mask to prevent exposure of peripheral exposure region of substrate A substrate table for a lithographic apparatus includes a mask constructed and arranged to prevent exposure of a peripheral exposure region of a substrate on the substrate table. The mask is attached to a moveable carrier. The moveable carrier has a range of movemen... | 08/17/2010 |
| 7697118 | Semiconductor device manufacturing method and apparatus used in the semiconductor device manufacturing method A semiconductor device manufacturing method includes forming circuit devices and a plurality of electrode pads within a semiconductor chip formation region. The method also includes forming, on the main surface of the semiconductor wafer, an insulating film which ex... | 04/13/2010 |
| 7659965 | High throughput wafer stage design for optical lithography exposure apparatus An optical lithography exposure apparatus which may be a stepper or a scanner, provides a wafer chuck that retains a wafer and at least one opaque exposure shield that extends over a discrete peripheral edge portion of the wafer thereby preventing illumination from ... | 02/09/2010 |
| 7411659 | Crop device for framing A sheet includes a plurality of incisions that define a plurality of frames. The frames are arranged in a geometric pattern to facilitate selection of an appropriate frame for cropping an image displayed on photographic media. The frames are connected to each other ... | 08/12/2008 |
| 7349070 | Multiple level photolithography A method is provided for performing photolithography on a substrate which has a first region on a lower level and a second region on an upper level, wherein a first pattern area exists within said first region, a second pattern area exists within said second region,... | 03/25/2008 |
| 7317560 | Image reading apparatus and image forming apparatus using the same In an image reading apparatus that can read a reflection original and transparent original, a film holder for holding the transparent original is provided to be pivotal to the left or right about a shaft as the center. After the transparent original is set such that... | 01/08/2008 |
| 7315032 | Lithographic apparatus and a device manufacturing method A lithographic apparatus including an illumination system configured to provide a beam of radiation; a support configured to support a patterning device, the patterning configured to impart the projection beam with a pattern in its cross-section; a substrate table c... | 01/01/2008 |
| 7268504 | Stator position feedback controller Stator position feedback controller. A first position monitoring device responds to the position of a stator supported for relative motion by a machine base. A second position monitoring device responds to the position of a carriage with respect to the machine base.... | 09/11/2007 |
| 7236233 | Assembly of a reticle holder and a reticle An assembly for use in a lithographic apparatus is disclosed. The assembly includes a reticle, and a reticle holder. The reticle holder is adjustable between a form closed reticle blocking state and a reticle releasing state. The reticle holder is arranged to (1) pr... | 06/26/2007 |
| 7166395 | Method and system of processing stamps A method and system of processing stamps comprising providing a template containing openings, each opening corresponding with an image to be imprinted on a material, whereby the openings are sized to align such material with the images. ... | 01/23/2007 |
| 7138918 | System for sorting waste A system for disposing of medical waste is generally configured to sort waste items into a plurality of disposable containers according to applicable rules and regulations governing the handling and/or disposal of such items. In some embodiments, a system comprises ... | 11/21/2006 |
| 7123150 | Waste container identification system A system for disposing of medical waste is generally configured to sort waste items into a plurality of disposable containers according to applicable rules and regulations governing the handling and/or disposal of such items. In some embodiments, a system comprises ... | 10/17/2006 |
| 7102127 | Mechanized retractable pellicles and methods of use Apparatus and methods to protect a photomask that is used for semiconductor photolithography at wavelengths outside the visible spectrum include a pellicle that is readily retracted during exposure or to provide access to the photomask. The pellicle can be transpare... | 09/05/2006 |
| 7064808 | Substrate carrier and method for making a substrate carrier A carrier for carrying a lithographic substrate or a lithographic patterning means. The carrier comprises a first member provided with an open hollow structure that is open to at least one side of the member. The carrier further comprises a second member connected t... | 06/20/2006 |
| 6944964 | Adjustable template A template includes a base on which a plurality of wings are slidably mounted to move with respect to each other. The base also includes locks for locking the wings in positions. Levels, tape measures and markings are also on the base to assist with placement of the... | 09/20/2005 |
| 6947185 | Scanner having a document cover with a flap door hinged thereto A scanner has a platen supported by a housing. The platen is adapted to abut a media to be scanned. A document cover is adapted to sandwich the media against the platen. The document cover is hinged to the housing by at least one first hinge. The document cover has ... | 09/20/2005 |
| 6935715 | Method of ink jet printing with improved end of page printing A print medium is printed on with a printhead of an ink jet printer. The print medium is advanced in an advance direction a predetermined amount. The print medium is printed on with the printhead in an area corresponding to the predetermined amount. A determination ... | 08/30/2005 |
| 6882126 | Holder mover for a stage assembly A stage assembly (10) for moving and positioning a device (26) includes a device table (20), a device holder (24) that retains the device (26), and a stage mover assembly (14). The stage assembly (10) includes one or ... | 04/19/2005 |
| 6631244 | Film carrier and film handling device using same A film handling apparatus having a carrier, wherein the carrier is provided with a film size sensor disposed near a film entrance opening, a transport path capable of changing a transport width while maintaining a constant center position, a mask provided... | 10/07/2003 |
| 6619359 | Pellicle mounting apparatus The invention features an apparatus for mounting a pellicle to a reticle. The apparatus includes: a base; a first holder coupled to the base and including two edges positioned to support a first object below its center of gravity and secure the first obje... | 09/16/2003 |
| 6583858 | Substrate holder for lithographic apparatus An intermediate substrate holder for use in a lithographic projection apparatus, which holder can itself be held by a standard substrate holder in the lithographic projection apparatus and in turn can hold a non-standard substrate. The intermediate substr... | 06/24/2003 |
| 6556281 | Flexible piezoelectric chuck and method of using the same A flexible chuck for supporting a substrate during lithographic processing is described. This flexible chuck includes an electrode layer, a piezoelectric layer disposed on the electrode layer, and a substrate support layer disposed above the piezoelectric... | 04/29/2003 |
| 6509957 | Stage device and exposure apparatus A stage device includes a first stationary member, a second stationary member, a moving member and positioning devices. The first stationary member extends in a first direction. The second stationary member extends in the first direction and is spaced apa... | 01/21/2003 |
| 6480260 | Mask clamping apparatus, e.g. for a lithographic apparatus An apparatus for supporting a mask comprises a pair of members. The mask held against each member by a vacuum arrangement which prevents relative motion between the mask and members. The members are compliant such that they accommodate flatness variations... | 11/12/2002 |
| 6438458 | Substrate conveying system in semiconductor manufacturing apparatus A substrate conveying system wherein, at a substrate transfer position of a conveyance robot, a robot arm is moved upwardly at a normal speed from its lowermost position, and wherein the movement speed is changed to a lower speed at a predetermined positi... | 08/20/2002 |
| 6404483 | Substrate handler for use in lithographic projection apparatus A pre-aligner receives wafers from a wafer carrier or process track and performs preparatory steps such as centering of the wafer. The prepared wafer is transferred to the wafer table using a robot arm that is isolated from the pre-aligner and the wafer t... | 06/11/2002 |
| 6377339 | Document imaging system incorporating a selectively opaque/transparent liquid crystal platen A method and apparatus for document imaging is disclosed. The apparatus uses a flatbed scanner with a selectively opaque/transparent liquid crystal platen. The platen is divided into controllable segments defined by an electrode pattern formed within the ... | 04/23/2002 |
| 6342944 | Vertical alignment table mechanism A vertical alignment table mechanism 21 for a board 25 to form a printed wiring board has a vertical support wall 43, and an alignment table 33 disposed in vertical attitude opposite to the front surface of the support wall 43, having an opening in which ... | 01/29/2002 |
| 6337735 | Exposure apparatus for photoengraving stamps An exposure apparatus for photoengraving stamps includes a light-proof cabinet having a flash light therein and a drawer adapted to be drawn out therefrom. A clamp is carried on the drawer for holding the stamp. The clamp includes a base fixed to the draw... | 01/08/2002 |
| 6320650 | Positioning apparatus for image capturing apparatus A method and apparatus for capturing an image. The apparatus includes a support platen for receiving a document having a front image bearing side and a back side co-extensive with the front side. An image capture element is disposed below the platen for c... | 11/20/2001 |
| 6317197 | Mask pellicle remove tool A mask pellicle removal apparatus for separating a mask pellicle from a glass reticle to which it is bonded by prying against its releasable bond. The apparatus includes a table support for nesting the glass reticle and for supporting a manually operated ... | 11/13/2001 |
| 6295119 | Scanning type exposure apparatus with multiple field diaphragms for providing consistent exposure A scanning exposure apparatus of the scan-and-stitch type for stitching and forming a plurality of pattern images while partially superimposing them on a photosensitive substrate along a direction perpendicular to a scanning direction. The apparatus inclu... | 09/25/2001 |
| 6278511 | Method and apparatus for stacking and drying cut imaged media A conventional imagesetting system includes an imagesetter for transferring an image onto media, a wet chemical processor for processing the imaged media, an enclosed dryer section for drying the media by circulating air thereabout, and extraction rollers... | 08/21/2001 |
| 6184972 | Substrate transport apparatus, substrate holding apparatus and substrate processing apparatus Spoke shaped (petal shaped) through holes or cavities are provided at the center or a substrate holder which attaches and holds a substrate over substantially the entire surface, to allow vertical movement of a center-up member having a plurality of radia... | 02/06/2001 |
| 6081346 | Digital image forming apparatus The present invention allows formation of an image having an excellent finish quality by using an extremely simple and low-cost structure. Linearly polarized light transmitted through each of liquid crystal cells of a liquid crystal panel is made into cir... | 06/27/2000 |
| 6072563 | Printer apparatus for simultaneously printing multiple images Printer throughput is increased in a printer that prints sequential images on a film strip onto a matching strip of photosensitive printing paper. A film gate supports two or more images on the film strip. An illuminator provides light to the images in th... | 06/06/2000 |
| 6040096 | Mask substrate, projection exposure apparatus equipped with the mask substrate, and a pattern formation method utilizing the projection exposure apparatus In order to reduce mask pattern transfer error caused by expansion of the mask substrate during transferring the circuit pattern onto the photosensitive substrate, a mask substrate is loosely supported on a plurality of mounts on the mask stage so that th... | 03/21/2000 |
| 6018382 | Photo printer and paper mask device A paper mask device can alternatively hold a first paper mask or a second paper mask. The first paper mask has a mask aperture to which a lith film with appropriate lettering is attached. The second paper mask has a mask aperture for making an index print... | 01/25/2000 |
| 5953107 | Mask pellicle remove tool A mask pellicle removal methods for separating a mask pellicle from a glass reticle to which it is bonded by prying against its releasable bond. The methods includes a table support for nesting the glass reticle and for supporting a manually operated pryi... | 09/14/1999 |
