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| Number | Title | Issue Date |
| 8125617 | Apparatus and method for manufacturing semiconductor device An apparatus for manufacturing a semiconductor device and a method for manufacturing a semiconductor device using the apparatus may be provided. The manufacturing apparatus may include a liquid supplying portion for forming a liquid film, and a gas supplying unit th... | 02/28/2012 |
| 8089615 | Substrate holding apparatus, exposure apparatus, exposing method, and device fabricating method A substrate holding apparatus includes a base part and a support part that is formed on the base part and supports a rear surface of the substrate. A first circumferential wall is formed on the base part, has a first upper surface that opposes the rear surface of th... | 01/03/2012 |
| 7889323 | Wafer stage and related method There are provided a wafer stage and methods for chucking a wafer using the same. The wafer stage includes a wafer chuck adapted to hold a wafer; lift pins adapted to pass through the wafer chuck, move vertically, and support the wafer; and an air expulsion unit ada... | 02/15/2011 |
| 7738081 | Lithographic apparatus and device manufacturing method utilizing a flat panel display handler with conveyor device and substrate handler A lithographic apparatus can include an illumination system that conditions a radiation beam, a patterning device that modulates the radiation beam, a substrate table that supports a substrate, and a projection system that projects the modulated radiation beam onto ... | 06/15/2010 |
| 7413586 | In-tool and out-of-tool protection of extreme ultraviolet (EUV) reticles A reticle carrier for an Extreme Ultraviolet (EUV) reticle may include nested grids of electret fibers to provide active protection from contamination without a power supply. The reticle carrier may include in-line sensors for in-situ monitoring of contamination. Gr... | 08/19/2008 |
| 7384036 | Sheet handling device for wide format sheets A sheet handling device for wide format sheets including a sheet support plate having a top surface containing suction holes which are connected to at least one suction chamber, the at least one suction chamber being divided into compartments that are connected, tho... | 06/10/2008 |
| 7361911 | Lithographic apparatus and device manufacturing method A device manufacturing method includes projecting a patterned beam of radiation through an optics compartment and a channel that provides an open connection between the optics compartment and a substrate compartment onto a substrate, maintaining an ionized flush gas... | 04/22/2008 |
| 7352268 | High intensity radial field magnetic actuator At least one set of two magnets is provided, at least one of the magnets having an outer magnet portion, a middle magnet portion, and an inner magnet portion. The outer magnet portion has a magnetization pointing in an at least partially axial direction. The middle ... | 04/01/2008 |
| 7352436 | Lithographic apparatus, projection apparatus and device manufacturing method A control system to control a position of a substrate table for a lithographic apparatus, including: a first detection device to generate a position signal representative of the position of the projection system, a second detection device to generate a projection sy... | 04/01/2008 |
| 7327438 | Lithographic apparatus and method of a manufacturing device A lithographic projection apparatus having a radiation system for providing a projection beam of radiation; a support structure for supporting a patterning device, the patterning device serving to pattern the projection beam according to a desired pattern; a substra... | 02/05/2008 |
| 7327437 | Lithographic apparatus and device manufacturing method A lithographic apparatus includes an illumination system configured to condition a radiation beam, a patterning device support constructed to support a patterning device being capable of imparting the radiation beam with a pattern in its cross-section to form a patt... | 02/05/2008 |
| 7319283 | Moving apparatus, exposure apparatus, and device manufacturing method A moving apparatus includes a first actuator having a movable element and a stator, and a second actuator for driving the stator. The second actuator drives the stator in a direction to suppress rotation of the stator which accompanies movement of the movable elemen... | 01/15/2008 |
| 7310130 | Lithographic apparatus and position measuring method In a lithographic apparatus, a measurement of the position of an object in an ambient space by an object position measuring system which is influenced by pressure variations in the ambient space, is corrected by an accurate measurement of the pressure in the ambient... | 12/18/2007 |
| 7307697 | Adaptive shape substrate support system The present method and system features an active compliant pin chuck to hold a substrate, having opposed first and second surfaces, and compensates for non-planarity in one of the surfaces of the substrate. To that end, the support system includes a chuck having a p... | 12/11/2007 |
| 7266137 | Laser gas replenishment method Output beam parameters of a gas discharge laser are stabilized by maintaining a molecular fluorine component at a predetermined partial pressure using a gas supply unit and a processor. The molecular fluorine is subject to depletion within the discharge chamber. Gas... | 09/04/2007 |
| 7264235 | Active damping apparatus, exposure apparatus and device manufacturing method An active damping apparatus for damping vibration due to driving of a stage and/or counter-mass mounted on an isolation table in an exposure device for the manufacture of semiconductor devices has a setting unit for selecting the stage and/or the counter-mass to dri... | 09/04/2007 |
| 7263240 | Method, system, and software for improving signal quality using pyramidal decomposition A method, system, and software are disclosed for improving the quality of a signal. A base signal is recursively decomposed for a desired number of pyramid levels. The decomposed signal from the lowest level is modified to generate a preprocessed signal. The preproc... | 08/28/2007 |
| 7256866 | Lithographic apparatus and device manufacturing method To enable high acceleration and high moving speed of a pattern support or a substrate table of a lithographic apparatus, one of the pattern support and the substrate table is supported by an actuator for relatively large displacements, whereas an actuator for accura... | 08/14/2007 |
| 7252448 | Platen Embodiments of a platen are shown and described. ... | 08/07/2007 |
| 7253419 | Apertured plate support mechanism and charged-particle beam instrument equipped therewith An apertured plate support mechanism used in an electron beam lithography machine. The apertured plate is held to a plate holder. The plate support mechanism has the plate holder for holding the apertured plate and a holder support for supporting the plate holder. T... | 08/07/2007 |
| 7253880 | Lithographic apparatus and device manufacturing method A lithographic apparatus includes an illumination system configured to provide a beam of radiation and projection system configured to project the radiation beam onto a target portion of a substrate. At least one of the illumination system and the projection system ... | 08/07/2007 |
| 7245350 | Exposure apparatus An exposure apparatus includes a vacuum chamber, a load-lock chamber disposed between the vacuum chamber and outside the exposure apparatus, a reticle cassette configured to hold a reticle, a conveying unit configured to convey the reticle cassette between the vacuu... | 07/17/2007 |
| 7236233 | Assembly of a reticle holder and a reticle An assembly for use in a lithographic apparatus is disclosed. The assembly includes a reticle, and a reticle holder. The reticle holder is adjustable between a form closed reticle blocking state and a reticle releasing state. The reticle holder is arranged to (1) pr... | 06/26/2007 |
| 7230964 | Lithography laser with beam delivery and beam pointing control The present invention provides a modular high repetition rate ultraviolet gas discharge laser light source with a beam delivery to a production line machine. The system includes an enclosed and purged beam path with beam pointing control for delivery the laser beam ... | 06/12/2007 |
| 7230681 | Method and apparatus for immersion lithography An apparatus for holding a wafer and a method for immersion lithography. The apparatus, including a wafer chuck having a central circular vacuum platen, an outer region, and a circular groove centered on the vacuum platen, a top surface of the vacuum platen recessed... | 06/12/2007 |
| 7227619 | Lithographic apparatus and device manufacturing method A burl plate for use in immersion lithography has a higher burl density in a peripheral portion than in a medial portion so that when a higher pressure differential is applied in the peripheral portion the compression of the burls in the peripheral portion is substa... | 06/05/2007 |
| 7224443 | Imprint lithography substrate processing tool for modulating shapes of substrates The present invention is directed to a chucking system to modulate substrates so as to properly shape and position the same with respect to a wafer upon which a pattern is to be formed with the substrate. The chucking system includes a chuck body having first and se... | 05/29/2007 |
| 7198141 | Shock absorbing apparatus in a positioning apparatus A shock absorbing apparatus in a positioning apparatus including a stage apparatus is disclosed. The positioning apparatus includes a main body apparatus for mounting the stage apparatus thereto, and a chamber for maintaining a region, in which the stage apparatus i... | 04/03/2007 |
| 7187106 | Positioning mechanism, exposure apparatus and device manufacturing method The present invention provides a positioning mechanism and an exposure apparatus that can be used in a vacuum ambience and has a damping function with small degassing and small dust creation. A positioning mechanism according to the present invention, when used with... | 03/06/2007 |
| 7165492 | Method and apparatus to clamp and release flexible plates onto an imaging cylinder A clamping device, a cylinder including a clamping device, and a method for clamping a plate onto the outer surface of the cylinder. The clamping device includes a base body extending in the axial direction and fixed to, or incorporated into the cylinder. The clampi... | 01/23/2007 |
| 7164511 | Distinguishing positive and negative films system and method A system and method for scanning a photographic film using a scanner automatedly identifies the film as either a positive or negative and controls the scanner settings to perform the scan accordingly. The method includes performing a pre-scan of the film, sampling a... | 01/16/2007 |
| 7161662 | Lithographic apparatus, device manufacturing method, and device manufactured thereby A lithographic projection apparatus includes a radiation system for providing a beam of radiation, and a substrate holder. The substrate holder includes a plurality of protrusions for providing a substantially flat plane of support for supporting a substrate in a be... | 01/09/2007 |
| 7158211 | Lithographic apparatus and device manufacturing method A table configured to support a substrate has one or more projections which support the substrate. In an embodiment, the table also has a raised perimeter defining a space which is configured to be filled with a liquid. A pump is configured to remove liquid from the... | 01/02/2007 |
| 7150456 | Sheet transport drum for a machine processing printing-material sheets A machine processing printing-material sheets contains a first sheet transport drum and a second sheet transport drum disposed immediately after the first sheet transport drum in a sheet transport direction. The first sheet transport drum has gripper systems which d... | 12/19/2006 |
| 7145642 | Wafer support device and a wafer support method A wafer support device having a fixed base, a guiding device, a movable base disposed so as to move in a vertical direction with respect to the fixed base by the guiding device, a first pressing device pressing the movable base, a θ stage rotatably disposed on the ... | 12/05/2006 |
| 7145270 | Driving unit, exposure apparatus using the same, and device fabrication method A driving unit includes an actuator for actuating a target and a magnetic dampener for controlling a vibration of the target, wherein the driving unit controls the vibration of the target, which is generated by the actuation of the actuator, by using the magnetic da... | 12/05/2006 |
| 7139065 | Stage base, stage apparatus, exposure apparatus and device manufacturing method A stage base includes a plate which supports a stage. The plate has a first structure and a second structure, and the first and second structures are coupled. The stage base further includes a component which is arranged on the plate and has a cooling unit, a coolan... | 11/21/2006 |
| 7130016 | Exposure apparatus and device manufacturing method An exposure apparatus includes a plurality of chambers which respectively have openings and are connected to each other to be able to communicate with each other through the openings, and a suppressing system which suppresses a gas from flowing into at least one of ... | 10/31/2006 |
| 7124686 | Apparatus for clamping and holding a printing plate on an exposure drum In the field of electronic reproduction technology, an apparatus for clamping and holding a printing plate on the surface of an exposure drum in a printing plate exposer includes a clamping apparatus for the front edge of the printing plate. The clamping apparatus h... | 10/24/2006 |
| 7126689 | Exposure method, exposure apparatus, and method for producing device An exposure apparatus for exposing a substrate with an exposure light beam passing through a mask comprises a movable stage for moving the substrate, a stage chamber for accommodating the movable stage, a transport system for transporting the substrate into the stag... | 10/24/2006 |
