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| Number | Title | Issue Date |
| 8174679 | Illumination optical system, exposure apparatus, and device fabrication method The present invention provides an illumination optical system which illuminates a surface to be illuminated with light from a light source, the illumination optical system including a plurality of illumination systems configured to form predetermined illumination re... | 05/08/2012 |
| 8089614 | Device for changing pitch between light beam axes, and substrate exposure apparatus A parallel glass which is a prism having a parallelogram-shaped cross section in an x-y direction, and parallel glasses which are prisms having a parallelogram-shaped cross section in the x-y direction and each include grooves formed in one surface in a z direction ... | 01/03/2012 |
| 7911586 | Lithographic apparatus and device manufacturing method Provided is a method and system for facilitating use of a plurality of individually controllable elements to modulate the intensity of radiation received at each focusing element of an array of focusing elements to control the intensity of the radiation in the areas... | 03/22/2011 |
| 7868999 | Lithographic apparatus, source, source controller and control method A lithographic apparatus is disclosed that has a plurality of control circuits, each control circuit arranged to be connected to an associated radiation source of a plurality of radiation sources configured to generate pulses of radiation for projection onto a subst... | 01/11/2011 |
| 7817249 | Exposure method and apparatus, and device producing method using two light beams to correct non-rotationally symmetric aberration An exposure method which includes illuminating a first object formed with a pattern to be transferred with a first light beam to expose a second object with the first light beam through the first object and a projection optical system; and irradiating the first obje... | 10/19/2010 |
| 7714988 | System and method for absorbance modulation lithography A lithography system is disclosed that provides an array of areas of imaging electromagnetic energy that are directed toward a recording medium. The reversible contrast-enhancement material is disposed between the recording medium and the array of areas of imaging e... | 05/11/2010 |
| 7705967 | Exposure system In an exposure system for substrate members which bear a photosensitive coating on a substrate surface, comprising a machine frame, a substrate carrier bearing the substrate member and an exposure device, wherein the substrate member and the exposure device can be m... | 04/27/2010 |
| 7551262 | Exposure apparatus having a position detecting system and a wavelength detector An exposure apparatus has a projection optical system for projecting a pattern of a reticle onto a wafer, a wafer stage to hold and to move the wafer, and a position detecting system to detect a position of the wafer in an optical-axis direction. The position detect... | 06/23/2009 |
| 7522266 | Lithographic apparatus and device manufacturing method Provided is a method and system for facilitating use of a plurality of individually controllable elements to modulate the intensity of radiation received at each focusing element of an array of focusing elements to control the intensity of the radiation in the areas... | 04/21/2009 |
| 7432492 | Image reading apparatus capable of reading infrared and visible images An image reading apparatus includes a light source with a first luminescent portion that outputs light with a first wavelength range and a second luminescent portion that outputs light with a second wavelength range, the wavelength ranges being different from each o... | 10/07/2008 |
| 7400699 | Illumination system with raster elements of different sizes There is provided an illumination system for lithography with wavelengths of ≦193 mn. The system comprises a first optical element, which is divided into first raster elements and lies in a first plane. The first plane defines an x-direction and a y-direction, the... | 07/15/2008 |
| 7359035 | Digital exposure apparatus for a color enlarging photoprinter A digital exposure apparatus for a color enlarging photo printer is disclosed, in which an exposure unit comprising a Liquid Crystal on Silicon, a polarization splitting prism, a condenser lens, a light source, and a digital enlarging objecting lens, wherein the opt... | 04/15/2008 |
| 7312850 | Lithographic apparatus, illumination system, and optical element for rotating an intensity distribution A lithographic projection apparatus includes an illumination system having a reflective integrator with a rectangular cross-section. An optical element is provided to redistribute an intensity distribution exiting the reflective integrator. ... | 12/25/2007 |
| 7303308 | Lighting apparatus Lighting apparatus for an image-gathering device, includes a light frame supporting a plurality of light emitting diode lamps configured to emit light at a tungsten balanced colour temperature, and a focussing frame comprising a plurality of light focussing lenses c... | 12/04/2007 |
| 7277158 | Lithographic apparatus and device manufacturing method A lithographic projection apparatus includes an illumination system configured to provide a beam of radiation; a support configured to support a patterning device, the patterning device configured to impart the beam of radiation with a pattern in its cross section; ... | 10/02/2007 |
| 7265772 | Beam illumination system and method for producing printing plates Images are transferred to printing plates by illuminating light-responsive materials with patterns corresponding to the images to be printed. The present invention provides for the transferring of an image by the combined flux from two or more beams of light. Partic... | 09/04/2007 |
| 7206652 | Method and system for intelligent automated reticle management A method, system, and program storage device for implementing the method of controlling a manufacturing system, wherein the method comprises providing a plurality of workpieces to be processed on a processing tool, the plurality of workpieces located at processing s... | 04/17/2007 |
| 7190383 | Misalignment detector and image forming apparatus A misalignment detector includes a light source, a synthesizing unit, a focusing unit, an image sensor, and a misalignment calculator. The light source, the synthesizing unit, the focusing unit, and the image sensor are arranged in such a manner that light illuminat... | 03/13/2007 |
| 7161661 | Lithographic apparatus and device manufacturing method In one embodiment, a pulse-to-pulse dose reproducibility of a radiation system for use in maskless lithography is improved by providing a plurality of lasers and combining the radiation beams produced by each to form a single projection beam of radiation. ... | 01/09/2007 |
| 7154582 | Exposure apparatus and method An exposure apparatus for projecting a pattern of a reticle onto an object to be exposed with first light having a wavelength of 20 nm or smaller, said exposure apparatus comprising a projection optical system for projecting the pattern onto the object, and a positi... | 12/26/2006 |
| 7145165 | Tunable laser fluid sensor A sensitive fluid sensor for detecting fluids and particularly trace fluids. The sensor may be adjustable for detecting fluids of various absorption lines. To effect such adjustment, a tunable laser may be used. The laser may be an edge emitting diode, a VCSEL or ot... | 12/05/2006 |
| 7133118 | Lithographic apparatus and device manufacturing method Provided is a method and system for facilitating use of a plurality of individually controllable elements to modulate the intensity of radiation received at each focusing element of an array of focusing elements to control the intensity of the radiation in the areas... | 11/07/2006 |
| 7133022 | Apparatus for image projection The invention is directed to a solid-state projection device incorporating a light source, modulator, and control circuitry on a single chip. For example, projection device may include several sets of VCSELs, each associated with a set of MEMs mirrors and coupled to... | 11/07/2006 |
| 7119923 | Apparatus and method for image processing There is provided an image processing apparatus including an image correcting amount computing unit for computing a proper amount of image correction based on image data of an image of an original delivered from an image input unit; an image processing unit for perf... | 10/10/2006 |
| 7115353 | Computer screen imaging system for the preparation of print screens A system and method for generating a master screen for a silk screen imaging process. Photo activated emulsion is applied to a printing screen and the emulsion is exposed according to a digitized pattern using a light emitting diode (LED) source. The LED source in o... | 10/03/2006 |
| 7102661 | Positional correction for apparatus having a plurality of drawing systems An apparatus for forming an image by use of a plurality of light beams, which are simultaneously modulated according to image signals and joined together on a photoconductive surface to form the image. The apparatus includes a photoconductive drum having a photocond... | 09/05/2006 |
| 7098993 | Exposure device for exposing a photosensitive material in accordance with image data An inexpensive and highly productive exposure device for directly scanning and exposing a photosensitive material sensitive to at least a UV region, based on digital data. As a motor controller moves an exposure head at a fixed speed in Y direction, image data is re... | 08/29/2006 |
| 7065238 | Defect inspection method and defect inspection equipment Transforming optical images of a portion including a normal conductor pattern having a surface roughness, a portion subjected to an inspection, and a reference portion to images of electric charges and picking up these as electric signals by an image pick-up device,... | 06/20/2006 |
| 7055992 | Corner mounted indirect lighting fixture A corner mounted indirect lighting fixture which is to be mounted flush against the vertical walls of a corner of a house or building. The lighting fixture has a fixture housing which has a hook mounted on its exterior surface which is to engage with an engaging edg... | 06/06/2006 |
| 7050623 | Method and apparatus for component recognition Adjustment of image pickup conditions through alternative selection of two cameras different in resolution, adjustment of image lightness of a to-be-recognized component based on component information of the component, and performing control allows an image of the c... | 05/23/2006 |
| 7038763 | Kit of parts for assembling an optical element, method of assembling an optical element, optical element, lithographic apparatus, and device manufacturing method A kit of parts for assembling an optical element for use in a lithographic apparatus includes a large number of different small pieces which direct light into respective regions of the pupil plane of the radiation system and/or change the polarization state of incid... | 05/02/2006 |
| 7023527 | Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus A scanning projection exposure apparatus transfers a pattern of a mask onto a photosensitive substrate while moving the photosensitive substrate along a scanning direction. The scanning projection exposure apparatus can include an illumination optical system optical... | 04/04/2006 |
| 7023472 | Camera calibration using off-axis illumination and vignetting effects An imaging device is calibrated using a flat, featureless surface and uniform illumination, relying on the effect of off-axis illumination and vignetting on the reduction of light into the camera at off-axis angles. The effect of the tilt of the camera is also consi... | 04/04/2006 |
| 7023523 | Exposure system and exposure method Exposure systems are disclosed having a configuration in which a field stop is positioned in proximity to a reflection-type mask, but that satisfactorily minimize adverse effects on the image-forming performance of the projection-optical system. The systems transfer... | 04/04/2006 |
| 7021541 | Original illuminating apparatus and image reader having the same The invention aims at obtaining an original illuminating apparatus and an image reader having the same with which “the reflection” phenomenon is reduced, and much quantity of light for illumination is obtained in an area to be read of an original to thereby be a... | 04/04/2006 |
| 7012629 | Temperature compensating image recording device An image recording device, wherein deviation of an image-recording start position, which results from a difference in the amount of expansion and contraction based on temperature changes between a printing plate precursor, a rotating support, a mechanism for moving ... | 03/14/2006 |
| 7006668 | Image processing method and image processing apparatus On the basis of a discrimination parameter for discriminating more detailed brightness in an image, the brightness of the image is discriminated, and the optimum degree of correction component is set for the image, thereby performing a more faithful reproduction of ... | 02/28/2006 |
| 7002727 | Optical materials in packaging micromirror devices A method for packaging micromirror array devices is disclosed herein. The method enhances illumination on micromirror array devices by applying a selected optical material between a package lid and glass substrate of the micromirror array device, the selected optica... | 02/21/2006 |
| 6956596 | Method for correcting the beam intensity in an image recording apparatus using a multi-channel light modulator In an image recording apparatus 1 which records an image on a recording medium 9 by moving an optical head 10 while rotating the recording medium 9 held by a holding drum 7, a photodetector 2 having a plurality of photodetec... | 10/18/2005 |
| 6937383 | Emissive image display apparatus A large screen emissive display operating at atmospheric pressure includes pixels, the red, green, and blue subpixels of which are excited by UV laser light scanned onto the subpixels by a pixel activation mechanism. The pixel activation mechanism includes three gra... | 08/30/2005 |
