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| Number | Title | Issue Date |
| 7324187 | Illumination system and exposure apparatus Disclosed is an illumination optical system and an exposure apparatus having the same, and specifically, as an aspect of the invention, an illumination optical system for illuminating a surface to be illuminated, that includes an aperture stop for defining an effect... | 01/29/2008 |
| 7274494 | Height adjustment structure A height adjustment structure for an image-scanning device. The scanning device has a guiding rod, an optical system and a document panel. The guiding rod and the document panel are fixed relative to each other. The optical system includes a box body and an axial ro... | 09/25/2007 |
| 7253575 | Industrial optical shutter A highly versatile optical shutter for industrial and scientific applications is disclosed. The has a aperture which defines a light path through the shutter, and a shutter vane or blade that is moved into and out of the light path using a precision, microprocessor ... | 08/07/2007 |
| 7242464 | Method for characterizing optical systems using holographic reticles Characterization of an optical system is quickly and easily obtained in a single acquisition step by obtaining image data within a volume of image space. A reticle and image plane are positioned obliquely with respect to each other such that a reticle having a plura... | 07/10/2007 |
| 7148952 | Lithographic apparatus and device manufacturing method The present invention provides a lithographic apparatus comprising an illumination system for providing a projection beam of radiation. The illumination system comprises at least one movable optical element (7), such that a projection beam of radiation (4 | 12/12/2006 |
| 7110152 | Virtual scanning from a scanned image preview An imaging system scanning device preview-scans an image and generates image data that is used to generate a scanned image preview. The scanned image preview is displayed in a viewing region of a user interface and represents the image in an electronic form. An imag... | 09/19/2006 |
| 7081948 | System for automated focus measuring of a lithography tool A system and method are used to calibrate a focus portion of an exposure section of a lithography tool. A wafer is exposed so that a resulted or formed patterned image is tilted with respect to the wafer. The tilting can be imposed based on controlling a wafer stage... | 07/25/2006 |
| 7065716 | Systems, methods and graphical user interfaces for previewing image capture device output results The user enters the desired image capture parameters to be used when capturing an electronic image of an original document into one or more portions of a preview graphical user interface. Then, either automatically, or upon selecting a preview function, a preview pa... | 06/20/2006 |
| 7061586 | Lithographic apparatus and device manufacturing method A detector, feedback and compensation system for use with a radiation distribution system for distributing the radiation from a radiation system to two or more arrays of individually controllable elements, each for patterning beams of radiation, which are subsequent... | 06/13/2006 |
| 7034949 | Systems and methods for wavefront measurement A wavefront measuring system and method for detecting phase aberrations in wavefronts that are reflected from, transmitted through or internally reflected within objects sought to be measured, e.g., optical systems, the human eye, etc. includes placing a reticle in ... | 04/25/2006 |
| 7033708 | Image focus monitor for alternating phase shift masks A focus monitor on an alternating phase shift mask may include sub-wavelength features which have a depth corresponding to an etch depth of primary features on the mask (e.g., a 180° etch depth), but which produce an effective phase shift of about 60° to 120°. | 04/25/2006 |
| 7018932 | Method for manufacturing a semiconductor device and apparatus for manufacturing a semiconductor device A method for manufacturing a semiconductor device including, forming a photosensitive-film on a substrate, carrying the substrate on which the photosensitive-film is formed, to an exposure device provided with a mask in which an on-mask-inspection-mark and an on-mas... | 03/28/2006 |
| 7016025 | Method and apparatus for characterization of optical systems Characterization of an optical system is quickly and easily obtained in a single acquisition step by obtaining image data within a volume of image space. A reticle and image plane are positioned obliquely with respect to each other such that a reticle having a plura... | 03/21/2006 |
| 6943903 | System and method for providing print preview/media selection This invention relates to a Web-based imaging system that provides a print preview. Such systems of this type, generally, allow the user to preview the print job prior to printing of the print job. In particular, if the media to be printed upon is non-white, the sys... | 09/13/2005 |
| 6920796 | Device used for detecting clamping force of processed object and method thereof A device used for detecting the clamping force of a processed object and a method thereof are proposed. The device comprises a detection unit, a basis component and a pressure detection component disposed on the basis component. The basis component having the pressu... | 07/26/2005 |
| 6912325 | Real time electronic registration of scanned documents The registration and skew information of a document about to be scanned are detected prior to capturing the entire image of the document. Two sensors, a fixed distance apart, are used to detect the document skew. A third sensor is used to detect the edge position of... | 06/28/2005 |
| 6885429 | System and method for automated focus measuring of a lithography tool A system and method are used to calibrate a focus portion of an exposure section of a lithography tool. A wafer is exposed so that a resulted or formed patterned image is tilted with respect to the wafer. The tilting can be imposed based on controlling a wafer stage... | 04/26/2005 |
| 6795165 | Focus inspection device and focusing method A photographic lens and test chart provide for a method of inspecting and adjusting the focus of the lens. The test chart is obliquely inclined relative to a plane perpendicular to the viewing axis of the photographic lens. Test photographs are taken of the test cha... | 09/21/2004 |
| 6466302 | Scanning system with document previewing A document scanning system includes a preview sensor that is dedicated to document previewing and distinct from any other sensor that is involved in the document scanning process. The preview sensor is preferably a two-dimensional sensor array that captur... | 10/15/2002 |
| 6377339 | Document imaging system incorporating a selectively opaque/transparent liquid crystal platen A method and apparatus for document imaging is disclosed. The apparatus uses a flatbed scanner with a selectively opaque/transparent liquid crystal platen. The platen is divided into controllable segments defined by an electrode pattern formed within the ... | 04/23/2002 |
| 6157439 | Copy system with document previewing A document copy system includes a preview sensor that is dedicated to document previewing and distinct from any other sensor that is involved in the document copying process. The preview sensor is preferably a two-dimensional sensor array that captures th... | 12/05/2000 |
| 6088084 | Original carrier and image reader An object of this invention is to provide an original carrier and an image reader capable of performing a focusing operation every original carrier. To achieve this object, a slit hole 32 extending in a direction perpendicular to a film conveying direction is ... | 07/11/2000 |
| 6002467 | Exposure apparatus and method An exposure apparatus for transferring a pattern on a mask onto a photosensitized substrate by exposure, having an illumination optical system, a mask stage for moving the mask and a substrate stage for moving the substrate. An attenuator is disposed betw... | 12/14/1999 |
| 5898479 | System for monitoring optical properties of photolithography equipment A focus evaluation technique for photolithography equipment is disclosed. This technique includes providing a substrate having a photoresist coating for treatment by the equipment. The equipment is activated to focus a first part of a image on a region of... | 04/27/1999 |
| 5892573 | Exposure apparatus and method with multiple light receiving means An exposure apparatus including an illumination optical system, a first light receiving system for receiving a portion of exposure light from the illumination optical system, a movable reticle stage having a transmitting portion for transmitting exposure ... | 04/06/1999 |
| 5883697 | Image sensing apparatus and method An image sensing apparatus reliably indicates an image sensing area regardless of the size of an object. In the apparatus, illumination units 14 irradiate spot lights 36 on a base 7 to indicate an image sensing area 37 for sensing an original 6 by a camer... | 03/16/1999 |
| 5673101 | Method of repetitively imaging a mask pattern on a substrate, and apparatus for performing the method A method and apparatus for repetitively imaging a mask pattern (C) on a substrate (W) are described. Various parameters of the apparatus and the projection lens system (PL) can be measured accurately and reliably and measuring devices of the apparatus can... | 09/30/1997 |
| 5656403 | Method and template for focus control in lithography process Disclosed is a template and a method for using the template for focus control of pattern definition image in lithographic process, particularly for IC production. The template has at least a serrated vernier and at least a rhombus printed thereon. In use,... | 08/12/1997 |
| 5610755 | Lens changeable image scanner and lens position control device in the same A lens position control mechanism and method in an image scanner converts a reading line density by changing over lenses. A base rotatable in a plane parallel to an original table is provided, and the lenses are supported on the base so that their optical... | 03/11/1997 |
| 5457742 | Wireless telephone remote control system A telephone remote control system for direct control of the dialing sequence of a telephone from a personal computer. The remote control system includes an RF transmitter unit mounted on a personal computer and an RF receiver unit within a phone. The tran... | 10/10/1995 |
| 5311248 | Copying area display device for a copier A copying area display device for a copier and allowing the operator to easily position a document on a glass platen. The device displays an effective image reading area which is easy to see. When a cover plate is opened, a carriage included in a scanner ... | 05/10/1994 |
| 5287137 | Encoder device An encoder device of the present invention comprises: a motor for driving a photographing lens, a pulse generator operated by a drive force transmitted from the motor to the photographing lens, and generating a coarse pulse signal and a fine pulse signal corre... | 02/15/1994 |
| 5274419 | Camera and photosensitive material feed unit useful therefor A reproduction magnification of an image to be reproduced is inputted through a inputting device. A projection optical system is adjusted according to the reproduction magnification, and then projects image light reflected from an original in the form of ... | 12/28/1993 |
| 5239340 | Linear motor device having vibration reduction unit An improved linear motor device is disclosed having a vibration reduction unit. The linear motor device can be applied to a copying machine. As a magnetic field forming device receives reaction force and is moved, in the opposite direction to the movement... | 08/24/1993 |
| 5237366 | Scanning exposure-reproduction apparatus and scaling reproduction method therefor When an input reproduction scale m is equal to a value mla which lies in a reproduction scale section ml, rated moving speeds Ula and U2a corresponding to the reproduction scale m and a resonance point avoidance coefficient kl (=1) are read in, and practi... | 08/17/1993 |
| 5138400 | Image forming apparatus An image forming apparatus including a copy image forming section for forming a copy image on the basis of an original image under each of a plurality of image forming conditions including a plurality of magnification ratios, a first key for inputing the ... | 08/11/1992 |
| 5097290 | Scanner for scanning an object from a plurality of positions A copying machine has an optical unit for forming a latent image on a photosensitive drum which corresponds to an original document supported for copying on a glass table of the copying machine. The copying machine is operable in two copying modes, in whi... | 03/17/1992 |
| 4970547 | System and method for generating and codifying photo cropping and enlargement information A system and method for generating and codifying cropping and enlargement information for a rectangular photograph utilizes at least one transparent overlay and a grid board for underlying the overlay. The overlay includes markings providing a plurality o... | 11/13/1990 |
| 4952011 | Moving apparatus for optical systems A moving apparatus for an optical system is a duplicating machine is arranged as to effect a scanning operation of document images through the movement of two units of mirror platforms respectively. One of the platform moves at a scanning speed while the ... | 08/28/1990 |
| 4912504 | Copying apparatus capable of divisional copy A copying apparatus capable of divisional copy mode for sheets in which two sheet documents are respectively positioned along two reference edges on a document platen and copy operations for each of documents are conducted on the basis of each of referenc... | 03/27/1990 |
