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Class 34/559 - Subatmospheric pressure


Subclass of Class 34 - Drying and gas or vapor contact with solids
Definition: Apparatus wherein the pressure in the enclosure is below
No. of patents: 16
Last issue date: 12/05/2006


NumberTitleIssue Date
7143528Dry converting process and apparatus
A web converting process and apparatus employing a dry converting station and substrate-handling equipment for conveying the substrate through the dry converting station. The substrate is enveloped in the dry converting station by a close enclosure supplied with one...
12/05/2006
7032324Coating process and apparatus
A web coating process and apparatus employing a coating applicator, dryer or curing station and web-handling equipment for conveying the web past the coating applicator and through the dryer. The web is enclosed from at least the coating applicator to the dryer or c...
04/25/2006
6994239Methods and apparatus for prescribing web tracking in processing equipment
Methods and apparatus to reduce or eliminate misalignment, wrinkles, and creases in coated web product. A relationship between web outgassing pressure and surface roughness of the web and web transporting rollers is developed. This relationship allows for the contro...
02/07/2006
6990747Vacuum processing apparatus and substrate transfer method
An etching processing apparatus 1 has a transfer chamber 2, a plurality of processing chambers 3 and 4, and a plurality of cassette chambers 7 and 8. Inside the transfer chamber 2, a transfer mechanism 14 is pr...
01/31/2006
6923359Methods and apparatus for prescribing web tracking in processing equipment
Methods and apparatus to reduce or eliminate misalignment, wrinkles, and creases in coated web product. A relationship between web outgassing pressure and surface roughness of the web and web transporting rollers is developed. This relationship allows for the contro...
08/02/2005
6659323Methods and apparatus for prescribing web tracking in processing equipment
Methods and apparatus to reduce or eliminate misalignment, wrinkles, and creases in coated web product. A relationship between web outgassing pressure and surface roughness of the web and web transporting rollers is developed. This relationship allows for...
12/09/2003
6640462Method of drying wood and a system therefor
Disclosed is a method of drying timbers loaded in a drying chamber, which comprises the steps of heating the drying chamber by a heating system up to a temperature of 80 to 100° C., subjecting the timbers to vacuum blowing by connecting the inside of the...
11/04/2003
6598316Apparatus to reduce contaminants from semiconductor wafers
A line for processing semiconductor wafers into integrated circuits (ICs) is provided with an input-output (I-O) chamber to help purge residual contamination from the wafers before they are transferred into a processing line. After a cassette containing s...
07/29/2003
6192603Vacuum processing apparatus and magnetic seal rotary bearing unit
A vacuum processing chamber preventing corrosion of a magnetic seal means and removing the heavy metals, organic matter, etc. produced by the corrosion, including a vacuum processing chamber, a rotated member (for example, a susceptor and a wafer holder),...
02/27/2001
6176023Device for transporting flat objects and process for transferring said objects between said device and a processing machine
The present invention relates to a device and process for transporting flat objects confined in a specific atmosphere. The device comprises at least one assembly provided with several thin, flat cells (31) that open onto a lateral face (33) of said assemb...
01/23/2001
5711086Method and apparatus for continuous drying in superheated steam
Apparatus for continuous drying of moist materials in superheated steam comprises a drying enclosure 10, open-ended inlet and outlet ducts 11, 12 communicating with the enclosure, and conveyors 13, 14, 15 for conveying the material to be dried along the i...
01/27/1998
5579590Apparatus for in-line processing of a heated and reacting continuous sheet of material
A drying apparatus for a strip of material or web, including a conditioning zone immediately following but fully integrated with the dryer, to lower the bulk temperature of web. The web of material can be introduced to conditioned air which is substantial...
12/03/1996
5539998High purity bulk chemical delivery system
An apparatus and method are described for delivering hygroscopic, corrosive chemicals such as hydrogen chloride from a source such as a tube trailer to a use point such as a semiconductor fabrication tool minimizing infiltration of moisture, and entrainme...
07/30/1996
5359787High purity bulk chemical delivery system
An apparatus and method are described for delivering hygroscopic, corrosive chemicals such as hydrogen chloride from a source such as a tube trailer to a use point such as a semiconductor fabrication tool minimizing infiltration of moisture, and entrainme...
11/01/1994
5205991Manufacture of extruded ceramics
The present invention features a process and apparatus for fabricating ceramic substrates. The apparatus comprises an extruder of the ram or screw type for forcing the ceramic materials through a die to form a log. After leaving the extrusion die, the log...
04/27/1993
4204408Vacuum cooling
A method of cooling a moisture-containing foodstuff article is described, which involves placing the article in a chamber and evacuating the chamber to reduce the pressure in the chamber, whereby moisture evaporates from the article and the latent heat of...
05/27/1980
 
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