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| Number | Title | Issue Date |
| 7398605 | Method of feeding particulate material to a heated vaporization surface A method for the vaporization of particulate material includes providing one or more containers each containing possibly distinct particulate materials each having at least one component, fluidizing the particulate material in at least one of the containers, and pro... | 07/15/2008 |
| 7398606 | Process for the production of SAP A continuous process for the production of dried superabsorbent polymers (SAPs) the polymerization reaction is carried out either in an initially homogenous aqueous monomer solution (bulk aqueous solution polymerization) or in a heterogeneous water-in-oil reactant m... | 07/15/2008 |
| 7387689 | Methods for drying semiconductor wafer surfaces using a plurality of inlets and outlets held in close proximity to the wafer surfaces Methods for processing substrate through a head that is configured to be placed in close non-contact proximity to a surface of a substrate are provided. One method includes applying a first fluid onto the surface of the substrate from conduits in the head when the h... | 06/17/2008 |
| 7383843 | Method and apparatus for processing wafer surfaces using thin, high velocity fluid layer Among the many embodiment, in one embodiment, a method for processing a substrate is disclosed which includes generating a fluid layer on a surface of the substrate, the fluid layer defining a fluid meniscus. The generating includes moving a head in proximity to the... | 06/10/2008 |
| 7363727 | Method for utilizing a meniscus in substrate processing A method for processing a substrate is provided. The method includes applying an active agent to an active region of a surface of the substrate. Then, the method includes generating a fluid meniscus on the surface of the substrate with a proximity head, where the fl... | 04/29/2008 |
| 7350316 | Meniscus proximity system for cleaning semiconductor substrate surfaces A system and apparatus for cleaning a substrate is provided. The system includes a first head configured as a bar shape that extends approximately a diameter of the substrate. The first head is configured for placement on a first side of the substrate. A second head... | 04/01/2008 |
| 7325330 | Apparatus and method for eliminating wrinkles in clothes Apparatus and method for eliminating wrinkles in clothes in a washing or drying machine using steam to eliminate the wrinkles in clothes, in a state in which the clothes are worn by a user or stored, as well as in a state in which washing of the clothes is terminate... | 02/05/2008 |
| 7251017 | Environmental system including a transport region for an immersion lithography apparatus An environmental system controls an environment in a gap between an optical assembly and a device and includes a fluid barrier, an immersion fluid system, and a transport region. The fluid barrier is positioned near the device and maintains the transport region near... | 07/31/2007 |
| 7240679 | System for substrate processing with meniscus, vacuum, IPA vapor, drying manifold One of many embodiments of a substrate preparation system is provided which includes a drying system, the drying system including at least one proximity head for drying a substrate. The system also includes a cleaning system for cleaning the substrate. ... | 07/10/2007 |
| 7234477 | Method and apparatus for drying semiconductor wafer surfaces using a plurality of inlets and outlets held in close proximity to the wafer surfaces One of many embodiments of a substrate preparation system is provided which includes a head having a head surface where the head surface is proximate to a surface of the substrate. The system also includes a first conduit for delivering a first fluid to the surface ... | 06/26/2007 |
| 7194821 | Vacuum processing apparatus and vacuum processing method The downtime of a vacuum processing apparatus due to wet cleaning is reduced. In a vacuum processing apparatus that requires aging for its chamber or process container after vacuum evacuation of the apparatus and before actual processing of a workpiece, when the cha... | 03/27/2007 |
| 7127831 | Methods and systems for processing a substrate using a dynamic liquid meniscus A system and method of moving a meniscus from a first surface to a second surface includes forming a meniscus between a head and a first surface. The meniscus can be moved from the first surface to an adjacent second surface, the adjacent second surface being parall... | 10/31/2006 |
| 7043853 | Kiln with process water evaporation system A process and apparatus for drying a stack of lumber, wherein the dry comprises a condensation collection device for collecting liquid in the chamber interior space; and an evaporation system for evaporating collected liquid from the chamber interior space. Process ... | 05/16/2006 |
| 6988327 | Methods and systems for processing a substrate using a dynamic liquid meniscus A system and method of moving a meniscus from a first surface to a second surface includes forming a meniscus between a head and a first surface. The meniscus can be moved from the first surface to an adjacent second surface, the adjacent second surface being parall... | 01/24/2006 |
| 6954993 | Concentric proximity processing head In one of the many embodiments, a method for processing a substrate is disclosed which includes generating a first fluid meniscus and a second fluid meniscus at least partially surrounding the first fluid meniscus wherein the first fluid meniscus and the second flui... | 10/18/2005 |
| 6922912 | Drying apparatus The invention provides drying apparatus including a first chamber for receiving articles to be dried and having an outlet, a second chamber having an outlet, and a fan having a fan inlet and a fan outlet, the fan inlet communicating with the outlet of the first cham... | 08/02/2005 |
| 6739073 | Method and apparatus for performing multiple cleaning and vacuum drying operations in enclosed vessels A method for performing multiple cleaning and vacuum drying operations in enclosed vessels uses cleaning and vacuum drying apparatus, low-dissolved-air cleaning solution, and drain-to-vacuum process to produce vacuum in a cleaning vessel, so that influence of air pr... | 05/25/2004 |
| 6640462 | Method of drying wood and a system therefor Disclosed is a method of drying timbers loaded in a drying chamber, which comprises the steps of heating the drying chamber by a heating system up to a temperature of 80 to 100° C., subjecting the timbers to vacuum blowing by connecting the inside of the... | 11/04/2003 |
| 6630031 | Surface purification apparatus and surface purification method By a simple apparatus construction and process, it is made possible to "clean precisely" a surface at the molecular/atomic level, and the purification degree of the surface processed minutely is made into 1012 molecules/cm2 or less. ... | 10/07/2003 |
| 6457259 | Portable apparatus for drying stator windings and related process A transportable skid for drying and testing generator stator windings includes a platform supporting a compressor adapted to supply compressed air to the stator winding; a dryer arranged to receive and dry compressed air from the compressor; a buffer tank... | 10/01/2002 |
| 6226887 | Freeze drying methods employing vapor flow monitoring and/or vacuum pressure control Freeze drying apparatus and associated lyophilization procedures are provided employing vapor flow detection and/or vacuum control for monitoring and control of the lyophilization process. The vapor flow detector, such as a windmill sensor, is disposed to... | 05/08/2001 |
| 6112430 | Vacuum dryer and method of drying semiconductor device using the same A vacuum dryer and a method of drying a semiconductor device using the same are provided. In the present invention, a vacuum dryer using isopropyl alcohol vapor, including an outer bath, an inner bath, a main water supply line, a supplementary water suppl... | 09/05/2000 |
| 5899003 | Method and apparatus for drying of materials containing volatile components A method and apparatus for drying of a material containing a volatile component, in which the material is disposed in a bed in a drying zone which is in communication with a closed circuit in which a gaseous drying medium is circulated. Associated with th... | 05/04/1999 |
| 5343633 | Apparatus for rapidly drying a wet, porous gel monolith A process and apparatus are described for rapidly drying a wet, porous gel monolith of glass or ceramic, at subcritical temperatures without inducing any cracking of the gel. The wet gel is immersed in a liquid solvent in a chamber, and the liquid solvent... | 09/06/1994 |
| 4913771 | Method for dewatering sludge or slurry Sludge or slurry is dewatered by passing it on a screw conveyor through a sealed vessel at a vacuum more negative than -10 inches of Hg. As a result, moisture is removed from the sludge or slurry as water vapor. The vessel is sealed from air by the presence of... | 04/03/1990 |
| 4742623 | Process and equipment for the indirect drying of sludge, especially for the drying of wastewater sludge Referring to process and equipment for the indirect drying of sludge, especially for the drying of wastewater sludge, which may undergo previous mechanical dehydration and/or preheating, it is intended to provide a method that permits utilizing low-value ... | 05/10/1988 |
| 4655048 | Hypobaric storage of non-respiring animal matter without supplementary humidification The hypobaric preservation of non-respiring animal matter without the step of adding fresh air to the storage chamber, and without humidifying the storage atmosphere by contacting it with a supplementary body of heated water, is hereby disclosed, characte... | 04/07/1987 |
| 4467532 | Apparatus and process for drying lumber An apparatus and process for drying lumber under vacuum conditions using a drying vessel operationally connected to a sump which collects the extracted moisture. Vaccum conditions are maintained in the vessel and in the sump within the range of 10,000 to ... | 08/28/1984 |
| 4326341 | Drying method and apparatus for drying prunes, fish, brewers grain, shelled corn, and the like Method and apparatus for drying moisture-containing material by use of a vacuum tank as disclosed. The tank is partially filled with cold liquid, such as water, and the material to be dried is supported in the tank above the liquid surface. Surface conden... | 04/27/1982 |
