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| Number | Title | Issue Date |
| 5239870 | Semiconductor acceleration sensor with reduced cross axial sensitivity A semiconductor acceleration sensor with a reduced cross axial sensitivity, which is easily manufacturable. In this semiconductor acceleration sensor, two sensor units are provided on two cantilever beams which have the identical shape and are arranged on... | 08/31/1993 |
| 5231879 | Semiconductor acceleration detecting apparatus The fixed end of an acceleration detection beam of a semiconductor acceleration detecting apparatus is mounted onto a board through a supporting base. A weight for increasing the sensitivity to acceleration is disposed on the free end of the acceleration ... | 08/03/1993 |
| 5212986 | Semiconductor acceleration sensor including off axis acceleration cancellation A semiconductor acceleration sensor has an acceleration sensor element on which gauge resistors are arranged so as to cancel sensed output component corresponding to any acceleration acting in a direction different from an acceleration to be sensed. Conse... | 05/25/1993 |
| 5121633 | Semiconductor accelerometer A semiconductor accelerometer including a weight, a support frame surrounding the weight with a gap therebetween, at least one beam for connecting the weight to the support frame, a piezoresistor attached onto the beam for detecting acceleration, and stop... | 06/16/1992 |
| 5000817 | Batch method of making miniature structures assembled in wafer form A batch method for fabricating semiconductor capacitive force transducers is disclosed wherein a first wafer of silicon or fused silica is recessed by etching to define an array of force transducer structures, each including a deflectable portion supporte... | 03/19/1991 |
| 4969359 | Silicon accelerometer responsive to three orthogonal force components and method for fabricating An accelerometer fabricated from silicon which is responsive to the three orthogonal components of an applied force. A method is also disclosed for etching the accelerometer from a single silicon substrate. Three rectangular beams or cantilevers are forme... | 11/13/1990 |
| 4891984 | Acceleration detecting apparatus formed by semiconductor First to third frames are formed by etching to penetrate a silicon substrate on the substrate. A plurality of thin cantilevered beams are formed in different lengths by cutting by etching the substrate in the frames; the beams formed in the first frame ar... | 01/09/1990 |
| 4869107 | Acceleration sensor for use in automotive vehicle A semi-conductor type accelerometer features the provision of four piezo resistors on the surface of a flexible beam which interconnects the main body portion with a weight or mass which is adapted to cause the beam to flex under the application of an acc... | 09/26/1989 |
| 4605919 | Piezoresistive transducer An electromechanical transducer is provided, and the process for making it, which utilizes a piezoresistive element or gage which is crystallinally the same as the base or substrate upon which it is supported. The gage of the invention is a force gage, an... | 08/12/1986 |
| 4553436 | Silicon accelerometer A silicon accelerometer employing the piezoresistive effect of single crystal silicon to measure the flexure of semiconductor beams supporting a semiconductor mass. In one embodiment a rectangular semiconductor center mass is supported at each corner by a... | 11/19/1985 |
| 4488445 | Integrated silicon accelerometer with cross-axis compensation An accelerometer comprising a sheet of silicon configured as an inertia plate separate from a support plate except at a pair of flexure sites spaced along an axis, each flexure site including a pair of flexures mutually offset so that upon acceleration in... | 12/18/1984 |
| 4069591 | Elastomeric inclinometer Information as to borehole inclination is provided by a pendulum in combination with an elastomeric material whose resistance varies with compression. The pendulum is arranged in a housing to compress the elastomer whenever the housing deviates from the v... | 01/24/1978 |
