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| Number | Title | Issue Date |
| 8174342 | Microelectromechanical system The invention relates to microelectromechanical systems (MEMS), and more particularly, to MEMS switches using magnetic actuation. The MEMS switch may be actuated with no internal power consumption. The switch is formed in an integrated solid state MEMS technology. T... | 05/08/2012 |
| 8058957 | Magnetic interconnection device According to one embodiment, a first magnetic coupling element is coupled to a first conductive element of a first electrical circuit. A second magnetic coupling element is coupled to a second conductive element of a second electrical circuit. The second magnetic co... | 11/15/2011 |
| 8054147 | High voltage switch and method of making Electrostatic devices, systems and methods are presented. One embodiment is an electrostatic device including a substrate, a first electrode disposed on the substrate, a movable element having a second electrode and a control electrode. The control electrode is disp... | 11/08/2011 |
| 8022794 | Micromachine switch, filter circuit, duplexer circuit, and communication device A micromachine switch switches an electrical connection between signal electrodes in accordance with control signals. The micromachine switch includes a substrate, a rotating body provided on the substrate, and a movable electrode provided on the rotating body. The ... | 09/20/2011 |
| 7898371 | Electromechanical switch with partially rigidified electrode An electromechanical switch with a rigidified electrode includes an actuation electrode, a suspended electrode, a contact, and a signal line. The actuation electrode is disposed on a substrate. The suspended electrode is suspended proximate to the actuation electrod... | 03/01/2011 |
| 7755459 | Micro-switching device and method of manufacturing the same A micro-switching device includes a fixing portion, a movable portion, a first electrode with first and second contacts, a second electrode with a third contact contacting the first contact, and a third electrode with a fourth contact opposing the second contact. In... | 07/13/2010 |
| 7741936 | Tunable micro electromechanical inductor The present invention provides a monolithic inductor developed using radio frequency micro electromechanical (RF MEMS) techniques. In a particular embodiment of the present invention, a tunable radio frequency microelectromechanical inductor includes a coplanar wave... | 06/22/2010 |
| 7728703 | RF MEMS switch and method for fabricating the same An RF MEMS switch and a method for fabricating the same are disclosed, in which the RF MEMS device is down driven at a low voltage using a piezoelectric effect. The RF MEMS switch includes a substrate provided with RF signal lines and a cavity, a cantilever position... | 06/01/2010 |
| 7705698 | Field effect transistor and a linear antenna switch arm A field effect transistor comprising a substrate; an electrically conducting channel within the substrate; an electrically conducting source on the substrate comprising a source finger; an electrically conducing drain on the substrate comprising a drain finger; the ... | 04/27/2010 |
| 7692519 | MEMS switch with improved standoff voltage control A MEMS switch is provided including a substrate, a movable actuator coupled to the substrate and having a first side and a second side, a first fixed electrode coupled to the substrate and positioned on the first side of the movable actuator to generate a first actu... | 04/06/2010 |
| 7639106 | PIN diode network for multiband RF coupling A PIN diode network includes a parallel inductor. In the off state of the PIN diode, the inductor forms a resonant tank circuit in parallel with the PIN diode. The inductor is selected based on the stray capacitance of the PIN diode so that the self resonant frequen... | 12/29/2009 |
| 7583169 | MEMS switches having non-metallic crossbeams A RF MEMS switch comprising a crossbeam of SiC, supported by at least one leg above a substrate and above a plurality of transmission lines forming a CPW. Bias is provided by at least one layer of metal disposed on a top surface of the SiC crossbeam, such as a layer... | 09/01/2009 |
| 7567155 | Configurable high frequency coaxial switch Various embodiments are provided herein for a configurable high frequency coaxial switch. The switch includes a switch housing module that has at least two ports and is adapted for operation in a wide frequency band. The switch also includes at least one frequency-m... | 07/28/2009 |
| 7545234 | Microelectromechanical device having a common ground plane layer and a set of contact teeth and method for making aspects thereof The present invention relates to MEM switches. More specifically, the present invention relates to a system and method for making MEM switches having a common ground plane. One method for making MEM switches includes: patterning a common ground plane layer on a subs... | 06/09/2009 |
| 7541898 | High isolation tunable MEMS capacitive switch The systems and methods described herein provide for a radio frequency micro-electromechanical systems switch having two or more resonant frequencies. The switch can be configured as a capacitive shunt switch having a deflectable member coupled between two electrode... | 06/02/2009 |
| 7538643 | Switch circuit A switch circuit 1 includes a unit circuit including capacitors 12, 14, an inductor 20, and a FET 30 (switching element). The capacitors 12, 14 are provided in a path P1 (first path) connecting I/O terminals 92, 94. T... | 05/26/2009 |
| 7535325 | Component for impedance change in a coplanar waveguide and method for producing a component A component is provided for an impedance change in a coplanar waveguide which includes two grounding conductors and a signal line lying between the grounding conductors, as well as a conducting connecting element, which has a covering surface for the two grounding c... | 05/19/2009 |
| 7532094 | Linear antenna switch arm and a field effect transistor A linear antenna switch arm comprising a field effect transistor comprising a source, a drain and a plurality of gates; a signal line connected between source and drain, the signal line comprising at least one signal line resistor; at least one gate being connected ... | 05/12/2009 |
| 7532093 | RF MEMS series switch using piezoelectric actuation and method of fabrication A microelectromechanical system (MEMS) switch comprising a radio frequency (RF) transmission line; a structurally discontinuous RF conductor adjacent to the RF transmission line; a pair of cantilevered piezoelectric actuators flanking the RF conductor; a contact pad... | 05/12/2009 |
| 7528689 | Vibration type MEMS switch and fabricating method thereof A vibration type MEMS switch and a method of fabricating the vibration type MEMS switch. The vibration type MEMS switch includes a vibrating body supplied with an alternating current voltage of a predetermined frequency to vibrate in a predetermined direction; and a... | 05/05/2009 |
| 7518474 | Piezoelectric in-line RF MEMS switch and method of fabrication A MEMS switch and method of fabrication comprises a RF transmission line; a RF beam structure comprising a RF conductor; a cantilevered piezoelectric actuator coupled to the RF beam structure; a plurality of air bridges connected to the cantilevered piezoelectric ac... | 04/14/2009 |
| 7498908 | High-power PIN diode switch A high-power PIN diode switch for use in applications such as plasma processing systems is described. One illustrative embodiment comprises an input terminal; an output terminal; and first and second transmission-line elements connected in parallel to the input and ... | 03/03/2009 |
| 7463123 | Nanometer electromechanical switch and fabrication process The present invention describes nano-scale fabrication technique used to create a sub-micron wide gap across the center conductor of a coplanar waveguide transmission line configured in a fixed-fixed beam arrangement, resulting in a pair of opposing cantilever beams... | 12/09/2008 |
| 7456713 | RF MEMS switch and fabrication method thereof Disclosed are an RF MEMS switch and a fabrication method thereof. According to an embodiment the RF MEMS switch is actuated with a low voltage and a low consumption power by using a piezoelectric capacitor actuated by being converted to mechanical energy from electr... | 11/25/2008 |
| 7439821 | DC to DC transmission system A DC to DC transmission system includes at least three conductors between a source and a sink, a first switch which alternately connects each conductor to the source, a second switch which alternately connects each conductor to the sink. The switches are synchronize... | 10/21/2008 |
| 7420444 | RF MEMS switch having asymmetrical spring rigidity An RF MEMS switch having asymmetrical spring rigidity. The RF MEMS switch has supporting members spaced apart in a certain interval on a substrate, a membrane being a motion member suspended by plural spring members extended on both sides of the membrane, and a bott... | 09/02/2008 |
| 7420135 | Micro electro-mechanical system switch and method of manufacturing the same A micro electro-mechanical system (MEMS) switch and a method for manufacturing the same are provided. The MEMS switch includes a substrate; signal lines formed on the substrate; main electrodes spaced apart by a distance and formed over the substrate; an actuating b... | 09/02/2008 |
| 7420442 | Micromachined microwave signal control device and method for making same A method for fabricating a signal controller, e.g., a filter or a switch, for a coplanar waveguide during the LIGA fabrication process of the waveguide. Both patterns for the waveguide and patterns for the signal controllers are created on a mask. Radiation travels ... | 09/02/2008 |
| 7420445 | Phase change control devices and circuits for guiding electromagnetic waves employing phase change control devices A circuit for guiding electromagnetic waves includes a substrate for supporting components of the circuit. The circuit includes a control device which includes a first conductive element on the substrate for connection to a first component of the circuit and a secon... | 09/02/2008 |
| 7405639 | Switch A switch includes a first member, one end of which being secured to a substrate, multiple first beam portions respectively having multiple first contact portions, one ends of the multiple beam portions being secured to the first member, multiple contact switch porti... | 07/29/2008 |
| 7405635 | MEMS switch It is to provide an MEMS switch easy to manufacture, microscopic, and capable of obtaining a sufficient ON/OFF capacitance change ratio. An MEMS switch includes a substrate 46, a conductive beam 42 formed on a surface of the substrate, and three... | 07/29/2008 |
| 7394332 | Micro-cavity MEMS device and method of fabricating same A MEM switch is described having a free moving element within in micro-cavity, and guided by at least one inductive element. The switch consists of an upper inductive coil; an optional lower inductive coil, each having a metallic core preferably made of permalloy; a... | 07/01/2008 |
| 7391283 | RF switch An SPNT switch has at least two operating states and comprises N circuit branches. Each circuit branch comprises a first input/output port connected to a second input/output port via a series active device, and a phase shifting component connected in series with a s... | 06/24/2008 |
| 7368311 | Method and system for fabrication of integrated tunable/switchable passive microwave and millimeter wave modules An interconnect module and a method of manufacturing the same. The method of making an interconnect module on a substrate comprises forming an interconnect section on the substrate. The interconnect section comprises at least two metal interconnect layers separated ... | 05/06/2008 |
| 7361962 | Micro-electro-mechanical system (MEMS) variable capacitor apparatuses, systems and related methods Micro-electro-mechanical system (MEMS) variable capacitor apparatuses, system and related methods are provided. According to one embodiment, a MEMS variable capacitor is provided. The variable capacitor can include first and second actuation electrodes being spaced ... | 04/22/2008 |
| 7362605 | Nanoelectromechanical memory cells and data storage devices Nanoelectromechanical (NEM) memory cells are provided by anchoring a conductive nanometer-scale beam (e.g., a nanotube) to a base and allowing a portion of the beam to move. A charge containment layer is provided in the vicinity of this free-moving portion. To read ... | 04/22/2008 |
| 7358579 | Reducing the actuation voltage of microelectromechanical system switches A microelectromechanical system switch may include a relatively stiff cantilevered beam coupled, on its free end, to a more compliant or flexible extension. A contact may be positioned at the free end of the cantilevered beam. The extension reduces the actuation vol... | 04/15/2008 |
| 7355258 | Method and apparatus for bending electrostatic switch An electronic circuit is formed by closely spacing metallic gate and drain interconnects to a flexible portion of a source interconnect. A gate voltage results in electrostatic attraction and lateral mechanical movement of the flexible source interconnect portion an... | 04/08/2008 |
| 7354787 | Electrode design and positioning for controlled movement of a moveable electrode and associated support structure A MEMS system including a fixed electrode and a suspended moveable electrode that is controllable over a wide range of motion. In traditional systems where an fixed electrode is positioned under the moveable electrode, the range of motion is limited because the supp... | 04/08/2008 |
| 7348870 | Structure and method of fabricating a hinge type MEMS switch A hinge type MEMS switch that is fully integratable within a semiconductor fabrication process, such as a CMOS, is described. The MEMS switch constructed on a substrate consists of two posts, each end thereof terminating in a cap; a movable conductive plate having a... | 03/25/2008 |
