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| Number | Title | Issue Date |
| 7436271 | Dielectrically transduced single-ended to differential MEMS filter A MEMS filter has an input layer for receiving a signal input, and an output layer for providing a signal output. The MEMS filter also has a first resonator and a second resonator coupled to the first resonator such that movement transduced in the first resonator by... | 10/14/2008 |
| 7406761 | Method of manufacturing vibrating micromechanical structures A method for fabrication of single crystal silicon micromechanical resonators using a two-wafer process, including either a Silicon-on-insulator (SOI) or insulating base and resonator wafers, wherein resonator anchors, a capacitive air gap, isolation trenches, and a... | 08/05/2008 |
| 7323952 | Breath-mode ring resonator structure, and method of designing, operating and using same There are many inventions described and illustrated herein, as well as many aspects and embodiments of those inventions. In one aspect, the present invention is directed to one or more microelectromechanical ring resonator structures having a circular or substantial... | 01/29/2008 |
| 7295088 | High-Q micromechanical resonator devices and filters utilizing same High-Q micromechanical resonator devices and filters utilizing same are provided. The devices and filters include a vibrating polysilicon micromechanical “hollow-disk” ring resonators obtained by removing quadrants of material from solid disk resonators, but pur... | 11/13/2007 |
| 7267130 | Substrate processing apparatus The substrate processing apparatus is provided with a gas-liquid mixing nozzle for generating a process liquid mist by mixing a liquid and a pressurized gas, to discharge the process liquid mist to a substrate at high speeds. The liquid may be remover liquid, interm... | 09/11/2007 |
| 7215061 | Micromechanical electrostatic resonator Exemplary embodiments of the invention provide a micromechanical electrostatic resonator which designs high frequency, increases a ratio of output voltage to input voltage, and designs low drive voltage or reduced power consumption. A micromechanical electrostatic r... | 05/08/2007 |
| 7119636 | Micromechanical resonator device having a desired mode shape A micromechanical resonate device having an extensional wine-glass mode shape is described herein. Different embodiments of the device may employ vibrating polysilicon micromechanical ring resonators, utilizing a unique extensional wine-glass mode shape to achieve l... | 10/10/2006 |
| 6985051 | Micromechanical resonator device and method of making a micromechanical device A micromechanical resonator device and a method of making the micromechanical resonator device, as well as other extensional mode devices are provided wherein anchor losses are minimized by anchoring at one or more side nodal points of the resonator device. Lower da... | 01/10/2006 |
| 6856217 | Micromechanical resonator device and micromechanical device utilizing same A micromechanical resonator device and a micromechanical device utilizing same are disclosed based upon a radially or laterally vibrating disk structure and capable of vibrating at frequencies well past the GHz range. The center of the disk is a nodal point, so when... | 02/15/2005 |
| 6628177 | Micromechanical resonator device and micromechanical device utilizing same A micromechanical resonator device and a micromechanical device utilizing same are disclosed based upon a radially or laterally vibrating disk structure and capable of vibrating at frequencies well past the GHz range. The center of the disk is a nodal poi... | 09/30/2003 |
| 6429755 | Method for constructing an encapsulated MEMS band-pass filter for integrated circuits Integrated circuit fabrication technique for constructing novel MEMS devices, specifically band-pass filter resonators, in a manner compatible with current integrated circuit processing, and completely encapsulated to optimize performance and eliminate en... | 08/06/2002 |
| 4593460 | Method to achieve a desired bandwidth at a given frequency in a dielectric resonator filter There is provided a method and a corresponding apparatus for establishing the proper bandwidth at one frequency in a microwave, dielectric resonator waveguide filter. Bandwidth is determined by the product of the resonant center frequency and the interres... | 06/10/1986 |
