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Class 333/191 - Monolithic structure


Subclass of Class 333 - Wave transmission lines and networks
Definition: Subject matter wherein a plurality of coupled vibrators
No. of patents: 160
Last issue date: 01/17/2012


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NumberTitleIssue Date
8098118Bandpass filter and process of fabricating the same
A bandpass filter includes a combination of a BAW filter and a patterned planar filter with stubs. The BAW filter is composed of a plurality of piezoelectric resonators to give a specific frequency bandpass, while the planer filter is configured to attenuate frequen...
01/17/2012
7439825Integrated filter including FBAR and saw resonator and fabrication method therefor
An integrated filter including a film bulk acoustic resonator (FBAR) and a surface acoustic wave (SAW) resonator and a method of fabricating the integrated filter. The integrated filter includes: a substrate; a first electrode positioned in a predetermined first are...
10/21/2008
7408429Coupled FBAR filter
A coupled FBAR filter 100 includes first and second input/output vibration portions 110 and 111 respectively including first and second lower electrodes 104 and 106, first and second upper electrodes 105 and 107, and ...
08/05/2008
7385467Resonator and component with hermetic encapsulation
Proposed is a resonator which works with bulk acoustic waves and is based on a layer structure known in the art, which is arranged over a substrate. According to the invention, the total surface of the layer structure, including all resonators contained therein, is ...
06/10/2008
7365619BAW apparatus
A description is given of a BAW apparatus having a first BAW resonator and a second BAW resonator which are connected antiparallel to one another so as to reduce non-linear effects, in particular harmonics. ...
04/29/2008
7358831Film bulk acoustic resonator (FBAR) devices with simplified packaging
The encapsulated film bulk acoustic resonator (FBAR) device comprises a substrate, an FBAR stack over the substrate, an element for acoustically isolating the FBAR stack from the substrate, encapsulant covering the FBAR stack, and an acoustic Bragg reflector between...
04/15/2008
7355324Silicon film bulk acoustic wave device and process of the same
The present invention relates to a film bulk acoustic wave device and a method of manufacturing the same, wherein comprising an acoustic reflective layer which is formed on a substrate by removing a sacrificial layer on the substrate and becomes an empty space; an o...
04/08/2008
7328497Incremental tuning process for electrical resonators based on mechanical motion
A method is provided for adjusting the resonant frequency of a mechanical resonator whose frequency is dependent on the overall resonator thickness. Alternating selective etching is used to remove distinct adjustment layers from a top electrode. One of the electrode...
02/12/2008
7323953Film bulk acoustic resonator and method of producing the same
A film bulk acoustic resonator includes: a piezoelectric thin film that is formed on a principal surface of a substrate; and a lower electrode and an upper electrode that are arranged to sandwich the piezoelectric thin film. In this film bulk acoustic resonator, the...
01/29/2008
7310861Method of producing a piezoelectric component
A method for producing a piezoelectric component comprising at least two stacked crystal filters comprises the steps of depositing of the layer stack above the bottom electrode and the subsequent patterning of the upper electrically conductive layer and, if appropri...
12/25/2007
7275292Method for fabricating an acoustical resonator on a substrate
Method for fabricating an acoustical resonator on a substrate having a top surface. First, a depression in said top surface is generated. Next, the depression is filled with a sacrificial material. The filled depression has an upper surface level with said top surfa...
10/02/2007
7250831Filter comprising inductor, duplexer using the filter and fabricating methods thereof
A filter using an air gap type film bulk acoustic resonator is provided. The present filter includes a substrate on which a first port, a second port, and a ground port are formed to be connected to an external terminal; at least one first film bulk acoustic resonat...
07/31/2007
7242270Decoupled stacked bulk acoustic resonator-based band-pass filter
The band-pass filter has first terminals, second terminals, a first decoupled stacked bulk acoustic resonator (DSBAR), a second DSBAR, and an electrical circuit connecting the first DSBAR and the second DSBAR in series between the first terminals and the second term...
07/10/2007
7230511Thin film bulk acoustic resonator, method for producing the same, filter, composite electronic component device, and communication device
A thin film bulk acoustic resonator includes a piezoelectric film, and a pair of electrodes between which the piezoelectric film is interposed. The piezoelectric film includes an outer region extending outwards from at least a portion of the periphery of a resonator...
06/12/2007
7221242Bulk acoustic wave resonator and manufacturing method thereof, filter using the same, semiconductor integrated circuit device using the same, and high frequency module using the same
A bulk acoustic wave resonator in which the problem of the technology for forming the diaphragm structure is resolved, which is more compact and improved the frequency accuracy, and the manufacturing method thereof, a filter using the same, a semiconductor integrate...
05/22/2007
7201041Analysis method using piezoelectric resonator
A piezoelectric resonator is immersed in a liquid, an AC signal is applied, and a local maximum of the conductance is determined. A frequency change due to the viscosity effect is determined from two frequencies of three frequencies including a resonance frequency t...
04/10/2007
7199683BAW resonator
A BAW resonator includes a resonator region having a piezo-electric layer between two excitation electrodes, wherein an acoustic standing wave forms when operating the BAW resonator at a resonant frequency. Furthermore, the BAW resonator includes a leaky wave reflec...
04/03/2007
7199504Film bulk acoustic resonator filter
A ladder-type film bulk acoustic resonator (FBAR) filter comprises two series FBARs and two parallel FBARs. Each FBAR has a top electrode, a bottom electrode, and a piezoelectric layer sandwiched between the top and bottom electrodes. The top electrodes of the two s...
04/03/2007
7180224Electronic component having a resonator and fabrication process
An electronic component (1) includes a substrate (2) and at least two piezoelectric resonators (3, 4) each having an active element (6, 9), a lower electrode (5, 8) and an upper electrode (7, 10). The lower electrode (5
02/20/2007
7164222Film bulk acoustic resonator (FBAR) with high thermal conductivity
The specification discloses embodiments of an apparatus comprising a film bulk acoustic resonator (FBAR) filter comprising a piezoelectric membrane having a portion thereof sandwiched between a first electrode and a second electrode, the piezoelectric membrane being...
01/16/2007
7161448Acoustic resonator performance enhancements using recessed region
An acoustic resonator includes a substrate, a first electrode, a layer of piezoelectric material, a second electrode, and a recessed region. The substrate has a first surface. The first electrode is adjacent the first surface of the substrate. The layer of piezoelec...
01/09/2007
7154358Film bulk acoustic resonator structure and method of making
A film bulk acoustic resonator is formed on a substrate having a major surface. The film bulk acoustic resonator includes an elongated stack. The elongated stack includes a layer of piezoelectric material positioned between a first conductive layer deposited on a fi...
12/26/2006
7148604Piezoelectric resonator and electronic component provided therewith
A piezoelectric resonator according to an embodiment of the present invention has a first transducer connected to a first signal terminal, and a second transducer connected to a second signal terminal. The first transducer and the second transducer are stacked in a ...
12/12/2006
7141913Acoustic resonators
An acoustic resonator of one inventive aspect includes a substrate, at least one generally crystalline primer layer provided on the substrate either directly or on top of one or more intermediate layers, a generally smooth and generally crystalline electrode layer p...
11/28/2006
7129806Thin film bulk acoustic wave resonator and production method of the same
A thin film bulk acoustic wave resonator and method of producing same are provided. The thin film bulk acoustic wave resonator has a superior resonance characteristic (e.g., high-orientation and densification of a piezoelectric film), wherein the thin film bulk acou...
10/31/2006
7116040Electronic component and filter including the same
An electronic component of an embodiment of the present invention comprises a first piezoelectric thin film resonator and a second piezoelectric thin film resonator. The first piezoelectric thin film resonator and second piezoelectric thin film resonator are a piezo...
10/03/2006
7111500Analysis method using piezoelectric resonator
A piezoelectric resonator is immersed in a liquid, an AC signal is applied, and a local maximum of the conductance is determined. A frequency change due to the viscosity effect is determined from two frequencies of three frequencies including a resonance frequency t...
09/26/2006
7102465Frequency discrete LC filter bank
An inductive (“L”)-capacitive (“C”) filter bank has application for use in a television receiver. The LC filter includes inductors configured in at least one inductive (“L”) bank, and capacitors configured in at least one capacitive (“C”) bank. The i...
09/05/2006
7098758Acoustically coupled thin-film resonators having an electrode with a tapered edge
Acoustically coupled resonators include a first and a second acoustic resonator. Both the first and second acoustic resonators include a first electrode, a layer of piezoelectric material, and a second electrode. The first electrode is adjacent a first surface of th...
08/29/2006
7075214Piezoelectric resonator and electronic component provided therewith
A piezoelectric resonator according to an embodiment of the present invention is a piezoelectric resonator for obtaining a signal of a predetermined resonance frequency from a bulk acoustic wave propagating inside a piezoelectric film. This piezoelectric resonator h...
07/11/2006
7057477Integration of FBAR filter(s) and on-chip inductors
A component having a FBAR filter with FBARs, and on-chip inductor are described herein. ...
06/06/2006
7057478Component functioning with bulk acoustic waves having coupled resonators
A component that functions with bulk acoustic waves, particularly a bandpass filter, has an increased number of degrees of design freedom in order to improve the transmission characteristics of the component. The component has BAW resonators coupled acoustically in ...
06/06/2006
7019604Piezoelectric filter, duplexer, composite piezoelectric resonator, communication device and method for adjusting frequency of piezoelectric filter
A piezoelectric filter and other electronic components are constructed such that the accuracy of frequency adjustment can be increased and an improvement in efficiency of the adjustment operation can be achieved. The piezoelectric filter includes a plurality of piez...
03/28/2006
6998940Component operating with bulk acoustic waves and a method for producing the component
A component operating with bulk acoustic waves has a carrier substrate, a thin-film resonator and an acoustic mirror arranged between the resonator and carrier substrate. The acoustic mirror is formed by at least one high acoustic impedance layer, which is covered b...
02/14/2006
6995497Film bulk acoustic resonator
A film bulk acoustic resonator of the present invention includes an upper electrode 104, a lower electrode 102, and a piezoelectric film 103 as well as an acoustic multilayer 120 that are provided between the upper electrode 104 an...
02/07/2006
6988300Method of producing a piezoelectric element
A piezoelectric element contains a piezoelectric ceramic body having a layered perovskite structure, and has the C axis selected and oriented in the thickness direction. In the piezoelectric ceramic body, line shaped electrodes are formed perpendicular to the C axis...
01/24/2006
6975183BAW resonator having piezoelectric layers oriented in opposed directions
A BAW resonator includes a first piezoelectric layer made of a material oriented toward a first direction, and a second piezoelectric layer made of a material oriented toward a second direction which is opposed to the first direction. The first piezoelectric layer a...
12/13/2005
6972641FBAR ladder filter and method of grounding of FBAR ladder filters
A FBAR ladder filter which may yield less degradation in the stopband near the passband edges than conventionally grounded FBAR ladder filters. For that purpose a thin film resonator (FBAR) ladder filter having a plurality of serially-coupled FBAR elements, each ser...
12/06/2005
6965281FBAR, FBAR based duplexer device and manufacturing method thereof
Disclosed herein is a film bulk acoustic resonator (FBAR), an FBAR based duplexer device, and a manufacturing method thereof, which a plurality of sacrificial layer units are formed on a substrate wafer so as to be spaced apart from one another at regular distances,...
11/15/2005
6963257Coupled BAW resonator based duplexers
A duplexer comprising a transmit resonator device and a receive resonator device for filtering transmit and receive signals. The resonator device has a first BAW resonator for generating an acoustic wave signal from an input electric signal, a first acoustic delay f...
11/08/2005
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