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| Number | Title | Issue Date |
| 8188810 | Acoustic resonator performance enhancement using selective metal etch An acoustic resonator comprises: a substrate; a first electrode adjacent the substrate; a layer of piezoelectric material adjacent the first electrode; a second electrode adjacent the layer of piezoelectric material; and a passivation layer adjacent the layer of pie... | 05/29/2012 |
| 8164399 | Thin film piezoelectric vibrator, thin film piezoelectric bulk acoustic wave resonator, and radio-frequency filter using such resonator A thin film piezoelectric bulk acoustic wave resonator has a multilayer structure including a piezoelectric thin film, a first metal electrode film, and a second metal electrode film. At least a part of the piezoelectric thin film is interposed between the first and... | 04/24/2012 |
| 8085115 | Piezoelectric thin film resonator, filter, and communication apparatus A piezoelectric thin film resonator includes a substrate, a lower electrode formed on the substrate, a piezoelectric film formed on the substrate and the lower electrode, and an upper electrode formed on the piezoelectric film and opposing the lower electrode, an up... | 12/27/2011 |
| 8076999 | Electroacoustic resonator, filter, duplexer and method for determining parameters of a resonator An electroacoustic resonator includes a resonator area for propagating an acoustic wave and a resonator surface area configured so that, when an input signal power of 0 dBm is applied at a resonant frequency fr, power density in the resonator area does no... | 12/13/2011 |
| 8063721 | Micro-electro-mechanical-system (MEMS) resonator and manufacturing method thereof A micro-electro-mechanical-system resonator, includes: a substrate; a fixed electrode formed on the substrate; and a movable electrode, arranged facing the fixed electrode and driven by an electrostatic attracting force or an electrostatic repulsion force that acts ... | 11/22/2011 |
| 8049581 | Piezoelectric filter and method for manufacturing the same A piezoelectric filter of the present invention is provided with first and second piezoelectric vibrators, each having a substrate, a lower load film formed on the substrate, a lower electrode formed on the lower load film, a piezoelectric element formed on the lowe... | 11/01/2011 |
| 8035463 | Lamb-wave resonator and oscillator A Lamb-wave resonator includes: a piezoelectric substrate; an interdigital transducer electrode formed on a main surface of the piezoelectric substrate, the interdigital transducer electrode including a plurality of electrode finger elements being interdigitated, an... | 10/11/2011 |
| 8018302 | Micro-electro-mechanical-system (MEMS) resonator and manufacturing method thereof A micro-electro-mechanical-system resonator, includes: a substrate; a fixed electrode formed on the substrate; and a movable electrode, arranged facing the fixed electrode and driven by an electrostatic attracting force or an electrostatic repulsion force that acts ... | 09/13/2011 |
| 8008993 | Thin-film bulk-acoustic wave (BAW) resonators A thin-film bulk acoustic wave (BAW) resonator, such as SBAR or FBAR, for use in RF selectivity filters operating at frequencies of the order of 1 GHz. The BAW resonator comprises a piezoelectric layer (14) having first and second surfaces on opposing sides, ... | 08/30/2011 |
| 7994877 | MEMS-based quartz hybrid filters and a method of making the same An integrated Micro-Electro-Mechanical Systems (MEMS) filter includes an insulating substrate bonded to a base substrate such that at least a portion of the insulating substrate is separated from the base substrate by a gap, the insulating substrate having a first s... | 08/09/2011 |
| 7965157 | Cancellation of anti-resonance in resonators Briefly, in accordance with one embodiment of the invention, a resonator such as an electromechanical resonator may be coupled with a cancellation network to reduce and/or cancel an anti-resonance effect in the resonator, which may be due to, for example, a static c... | 06/21/2011 |
| 7940145 | Thin film piezoelectric vibrator, thin film piezoelectric bulk acoustic wave resonator, and radio-frequency filter using such resonator A thin film piezoelectric bulk acoustic wave resonator has a multilayer structure including a piezoelectric thin film, a first metal electrode film, and a second metal electrode film. At least a part of the piezoelectric thin film is interposed between the first and... | 05/10/2011 |
| 7924120 | Piezoelectric resonator and piezoelectric filter having a heat-radiating film A piezoelectric resonator includes a substrate and a thin-film section. The thin-film section includes a first thin-film section supported by the substrate, and an acoustically-isolated second thin-film section which is separated from the substrate. In the second th... | 04/12/2011 |
| 7889027 | Film bulk acoustic resonator shaped as an ellipse with a part cut off An object is to provide a film bulk acoustic resonator capable of improving resonant characteristics by reducing the generation of a standing wave to be caused by a transverse-mode acoustic wave to a minimum. In a film bulk acoustic resonator including a resonant po... | 02/15/2011 |
| 7855618 | Bulk acoustic resonator electrical impedance transformers An electrical impedance transformer comprises a first film bulk acoustic resonator (FBAR), having a first electrical impedance and a first resonance frequency. The electrical impedance transformer also comprises: a second FBAR, having a second electrical impedance a... | 12/21/2010 |
| 7847656 | Monolithic thin-film piezoelectric filters Disclosed are exemplary monolithic acoustically coupled thin film piezoelectric-on-substrate filters that operate in a wide frequency range. The monolithic thin-film-piezoelectric acoustic filters includes a resonant structure that is released from and supported by ... | 12/07/2010 |
| 7843285 | Piezoelectric thin-film filter A piezoelectric thin-film filter includes a first electrode pair having two or more first electrode fingers disposed on one main surface of a piezoelectric thin film and second electrode fingers disposed on the other main surface of the piezoelectric thin film so as... | 11/30/2010 |
| 7834720 | Bulk acoustic wave filter device and a method for trimming a bulk acoustic wave filter device A bulk acoustic wave (BAW) filter device includes at least one first serial BAW resonator, at least one first shunt BAW resonator, at least one second serial BAW resonator or at least one second shunt BAW resonator. The resonance frequencies of the first and the sec... | 11/16/2010 |
| 7825747 | Thin-film BAW filter, and a method for production of a thin-film BAW filter A thin-film BAW filter has at least one CRF section and at least one ladder or grating filter section, with the CRF section having at least two coupled resonators, with the CRF section and the ladder or grating filter section being integrated on a common substrate, ... | 11/02/2010 |
| 7816998 | Film bulk acoustic resonator and filter A film bulk acoustic resonator includes a lower electrode that is formed on a void of a substrate or is formed so that a void is formed between the lower electrode and the substrate, a piezoelectric film that is formed on the lower electrode, an upper electrode that... | 10/19/2010 |
| 7812692 | Piezo-on-diamond resonators and resonator systems Disclosed are piezoelectrically-transduced micromachined bulk acoustic resonators fabricated on a polycrystalline diamond film deposited on a carrier substrate. Exemplary resonators comprise a substrate having a smooth diamond layer disposed thereon. A piezoelectric... | 10/12/2010 |
| 7795997 | Apparatus and method for measuring an environmental condition A sensor senses an environmental condition. The sensor includes a film bulk acoustic resonator that includes a layer of material that causes resonant frequency and/or quality factor shifts of the film bulk acoustic resonator in response to changes in the environment... | 09/14/2010 |
| 7795998 | Resonator functioning with acoustic volume waves A resonator operating with bulk acoustic waves includes a resonator stack. The resonator stack includes a resonator area configured to allow propagation of an acoustic main mode and an acoustic secondary mode. The resonator stack also includes an acoustic mirror tha... | 09/14/2010 |
| 7791434 | Acoustic resonator performance enhancement using selective metal etch and having a trench in the piezoelectric An acoustic resonator that includes a substrate, a first electrode, a layer of piezoelectric material, and a second electrode. The substrate has a first surface and the first electrode is adjacent the first surface of the substrate. The layer of piezoelectric materi... | 09/07/2010 |
| 7768364 | Bulk acoustic resonators with multi-layer electrodes Bulk acoustic resonators with multi-layer electrodes for Bulk Acoustic Wave (BAW) resonator devices. Various electrode combinations are disclosed. The invention provides a better compromise at resonant frequencies from 1800 MHz to 4 GHz in terms of keff2 and resista... | 08/03/2010 |
| 7741933 | Electromagnetic composite metamaterial An electromagnetic composite metamaterial including an electromagnetic medium and a plurality of spaced electromechanical resonators disposed in or on the electromagnetic medium configured to control electromagnetic wave propagation properties in the electromagnetic... | 06/22/2010 |
| 7737806 | Piezoelectric thin-film resonator and filter A piezoelectric thin-film resonator includes: a lower electrode that is formed on a substrate; a piezoelectric film that is formed on the substrate and the lower electrode; an upper electrode that is formed on the piezoelectric film, with a portion of the piezoelect... | 06/15/2010 |
| 7737805 | Electrical circuit and component with said circuit An electrical circuit that includes an electric four-terminal network is disclosed. The electric four-terminal network includes a first electrical port with a first terminal and a second terminal and a second electrical port with a first terminal and a second termin... | 06/15/2010 |
| 7737804 | Support for acoustic resonator and corresponding integrated circuit An integrated circuit includes at least one interconnection level and an acoustic resonator provided with an active element and a support. The includes at least one bilayer assembly having a layer of high acoustic impedance material and a layer of low acoustic imped... | 06/15/2010 |
| 7733198 | Microfabricated bulk wave acoustic bandgap device A microfabricated bulk wave acoustic bandgap device comprises a periodic two-dimensional array of scatterers embedded within the matrix material membrane, wherein the scatterer material has a density and/or elastic constant that is different than the matrix material... | 06/08/2010 |
| 7719388 | Resonator operating with bulk acoustic waves Disclosed is a resonator that is mounted on a substrate, operates with acoustic bulk waves, and is disposed above an acoustic mirror. According to the invention, the basic mode of the acoustic bulk wave that can be generated in the resonator is suppressed while a hi... | 05/18/2010 |
| 7714684 | Acoustic resonator performance enhancement using alternating frame structure Disclosed is an acoustic resonator that includes a substrate, a first electrode, a layer of piezoelectric material, a second electrode, and an alternating frame region. The first electrode is adjacent the substrate, and the first electrode has an outer perimeter. Th... | 05/11/2010 |
| 7701312 | Integrated device and fabricating method thereof An integrated device is constructed by integrating an FBAR and a tunable capacitor. The integrated device includes a substrate; a resonator formed on the substrate; a driving electrode layer formed on the substrate apart from the resonator; a first electrode layer f... | 04/20/2010 |
| 7683741 | Package for suppressing spurious resonance in an FBAR Disclosed is a package having a thin film bulk acoustic resonator (FBAR). The package may be utilized for suppressing spurious resonance occurred during operation of the FBAR. The package includes a negative impedance converter (NIC) operatively coupled to the FBAR ... | 03/23/2010 |
| 7667558 | Thin film elastic wave resonator An upper electrode (50) includes a first electrode (51) formed in a circle and a second electrode (52) formed in an annulus outside the first electrode (51). The first electrode (51) and the second electrode (52) are electri... | 02/23/2010 |
| 7656252 | Micro-electro-mechanical-system (MEMS) resonator and manufacturing method thereof A micro-electro-mechanical-system resonator, includes: a substrate; a fixed electrode formed on the substrate; and a movable electrode, arranged facing the fixed electrode and driven by an electrostatic attracting force or an electrostatic repulsion force that acts ... | 02/02/2010 |
| 7619493 | Bulk acoustic resonator and filter element A bulk acoustic resonator has an acoustic reflector portion formed on a substrate and including one or more low acoustic impedance layers and one or more high acoustic impedance layers having a higher acoustic impedance than the low acoustic impedance layer which ar... | 11/17/2009 |
| 7619492 | Film bulk acoustic resonator and a method for manufacturing the same A film bulk acoustic resonator (FBAR) including a substrate having an etched air gap therethrough; a resonance part having a first electrode, a piezoelectric film and a second electrode which are laminated in turn above the air gap; and an etching resistance layer d... | 11/17/2009 |
| 7609132 | Hybrid resonant structure A bulk wave acoustic resonant structure which is in accordance with the invention allows the difficulties encountered at high frequency, the impossibility of working at low frequency on simple structures and the absence of an adequate coupling level to be overcome. ... | 10/27/2009 |
| 7609133 | Piezoelectric thin film device having an additional film outside an excitation region An object of the present invention is to provide a piezoelectric thin film device including a single or a plurality of film bulk acoustic resonators wherein a frequency impedance characteristic is unsusceptible to spuriousness. In a film bulk acoustic resonator, a p... | 10/27/2009 |
