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| Number | Title | Issue Date |
| 8149072 | Resonators, resonator arrays, apparatus and methods A resonator includes a substantially disk shaped portion having a plurality of axes of symmetry and is configured to resonate in a plurality of resonant modes by symmetrically deforming about the plurality of axes of symmetry. ... | 04/03/2012 |
| 8143971 | MEMS resonator A MEMS resonator, comprising a planar resonator body formed of two different materials with opposite sign temperature coefficient of Young's modulus. A first portion of one material extends across the full thickness of the resonator body. This provides a design whic... | 03/27/2012 |
| 8120448 | High frequency nanotube oscillator A tunable nanostructure such as a nanotube is used to make an electromechanical oscillator. The mechanically oscillating nanotube can be provided with inertial clamps in the form of metal beads. The metal beads serve to clamp the nanotube so that the fundamental res... | 02/21/2012 |
| 8115573 | Resonance frequency tunable MEMS device System and method for a microelectromechanical system (MEMS) is disclosed. A preferred embodiment comprises a first anchor region, a vibrating MEMS structure fixed to the first anchor region, a first electrode adjacent the vibrating MEMS structure, a second electrod... | 02/14/2012 |
| 8111114 | MEMS filter with voltage tunable center frequency and bandwidth A tunable MEMS filter is disclosed, having a substrate with first and second isolated substrate areas. First and second anchor points are coupled to the substrate. A base is coupled to the first and second anchor points by first and second coupling beams, respective... | 02/07/2012 |
| 8106724 | Thin-film bulk acoustic resonators having perforated resonator body supports that enhance quality factor Micro-electromechanical acoustic resonators include a substrate having a cavity therein and a resonator body suspended over the cavity. The resonator body is anchored on opposing sides thereof (by support beams) to first and second portions of the substrate. These f... | 01/31/2012 |
| 8106723 | Resonant circuit, oscillation circuit, filter circuit, and electronic device A resonant circuit includes a substrate; a MEMS resonator including a fixed electrode and a movable electrode formed above the substrate and having a first terminal and a second terminal, the movable electrode having a movable portion opposing at least a part of the... | 01/31/2012 |
| 8102224 | Micromechanical resonator The invention relates to design of micromechanical resonators and, more precisely, to the design of microelectromechanical systems (MEMS) resonators. The invention provides an improved design structure for a microelectromechanical systems (MEMS) resonator in which t... | 01/24/2012 |
| 8063720 | MEMS resonators having resonator bodies therein with concave-shaped sides that support high quality factor and low temperature coefficient of resonant frequency A microelectromechanical (MEMs) resonator includes a concave bulk acoustic resonator (CBAR). One embodiment of a CBAR includes a substrate and a resonator body suspended over the substrate by a pair of fixed supports that attach to first and second opposing ends of ... | 11/22/2011 |
| 8058952 | MEMS resonator, a method of manufacturing thereof, and a MEMS oscillator The invention relates to a MEMS resonator comprising a first electrode, a movable element (48) comprising a second electrode, the movable element (48) at least being movable towards the first electrode, the first electrode and the movable element (4... | 11/15/2011 |
| 8054145 | Phononic crystal wave structures Phononic crystal wave structures and methods of making same are discussed in this application. According to some embodiments, an acoustic structure can generally comprise a phononic crystal slab configured as a micro/nano-acoustic wave medium. The phononic crystal s... | 11/08/2011 |
| 8049580 | MEMS controlled oscillator An array of micromechanical oscillators have different resonant frequencies based on their geometries. In one embodiment, a micromechanical oscillator has a resonant frequency defined by an effective spring constant that is modified by application of heat. In one em... | 11/01/2011 |
| 8049579 | Resonator having a stator coupled to three stator voltages A resonator includes a translator, a stator, and a control circuit. The control circuit is configured to provide first and second translator voltages and first through third stator voltages, wherein the translator is configured to move with respect to the stator at ... | 11/01/2011 |
| 8044750 | Nano-resonator including beam with composite structure A nano-resonator including a beam having a composite structure may include a silicon carbide beam and/or a metal conductor. The metal conductor may be vapor-deposited on the silicon carbide beam. The metal conductor may have a density lower than a density of the sil... | 10/25/2011 |
| 8040207 | MEMS resonator devices with a plurality of mass elements formed thereon The invention relates to MEMS devices. In one embodiment, a micro-electromechanical system (MEMS) device comprises a resonator element having a circumference, an anchor region, and a plurality of beam elements coupling the anchor region and the resonator element. Fu... | 10/18/2011 |
| 8035462 | Resonant circuit, method of producing same, and electronic device A resonant circuit includes a substrate; a MEMS resonator including a fixed electrode and a movable electrode formed above the substrate and having a first terminal and a second terminal, the movable electrode having a movable portion opposing at least a part of the... | 10/11/2011 |
| 8026779 | Vibrator, resonator using the same and electromechanical filter using the same An object is to provide a resonator and a vibrator with a high Q value in which dissipation of vibration energy in vibration of the vibrator is small, and a thickness of a support part of the vibrator of a beam structure is made thicker than a thickness of the vibra... | 09/27/2011 |
| 8022791 | Radio frequency device comprising a vibratile carbon nanotube and a vibratile tuning electrode An RF device is provided. The RF device includes a vibratile carbon nanotube having a nanotube natural frequency (f0), a negative electrode fixed to a first end of the carbon nanotube, a vibratile tuning electrode having a variable resonance frequency and fac... | 09/20/2011 |
| 8018301 | Micro-electro-mechanical transducer having a surface plate A micro-electro-mechanical transducer (such as a cMUT) is disclosed. The transducer has a base, a spring layer placed over the base, and a mass layer connected to the spring layer through a spring-mass connector. The base includes a first electrode. The spring layer... | 09/13/2011 |
| 8004373 | MEMS ultrasonic device having a PZT and cMUT A MEMS ultrasonic device has an array of PZT transducer elements and a cMUT structure bonded to the array of PZT transducer elements. The MEMS ultrasonic device can be adapted for ultrasonic imaging. The cMUT structure may serve as an active MEMS acoustic filter hav... | 08/23/2011 |
| 8004372 | MEMS resonator devices with a plurality of mass elements formed thereon The invention relates to MEMS devices. In one embodiment, a micro-electromechanical system (MEMS) device comprises a resonator element having a circumference, an anchor region, and a plurality of beam elements coupling the anchor region and the resonator element. Fu... | 08/23/2011 |
| 7999635 | Out-of plane MEMS resonator with static out-of-plane deflection A residual stress gradient in a structural layer is employed to form a resonator deflected out of plane when at rest and the resulting strain gradient is utilized in out-of-plane transduction. Use of the strain gradient enables out-of-plane (e.g., vertical) transduc... | 08/16/2011 |
| 7990232 | Anchor/support design for MEMS resonators Micro-Electro-Mechanical Systems (MEMS) resonator designs having support structures that minimize or substantially reduce anchor losses, thereby improving a quality factor (Q) of the MEMS resonators, are provided. In general, a MEMS resonator includes a resonator bo... | 08/02/2011 |
| 7990233 | MEMS resonator including main and sub movable beams, and exciting electrodes excited by alternating-current signal A MEMS resonator includes a main movable beam, at least one sub movable beam, and at least one exciting electrode. The main movable beam is electrically insulated from a substrate and fixed to at least one fixed end, the sub movable beam is formed to extend from the... | 08/02/2011 |
| 7982558 | Integrated single-crystal MEMS device Method of manufacturing a MEMS device integrated in a silicon substrate. In parallel to the manufacturing of the MEMS device passive components as trench capacitors with a high capacitance density can be processed. The method is especially suited for MEMS resonators... | 07/19/2011 |
| 7965156 | Carbon nanotube resonators comprising a non-woven fabric of unaligned nanotubes Under one aspect, a resonator 400 includes a nanotube element 410 including a non-woven fabric of unaligned nanotubes and having a thickness, and a support structure 404 defining a gap 406 over which the nanotube element 410 is sus... | 06/21/2011 |
| 7932792 | Nanotube device A device comprising a nanotube configured as a resonator, a source electrode, a gate electrode, a drain electrode and at least one impeding element, wherein the at least one impeding element is configured to minimize energy loss due to a contact resistance between a... | 04/26/2011 |
| 7924119 | Micromechanical bulk acoustic mode resonators having interdigitated electrodes and multiple pairs of anchor supports A micromechanical resonator operable in a bulk acoustic mode includes a resonator apparatus suspended over a substrate by a plurality of pairs of anchors. The resonator apparatus includes a conductive metal layer, a piezoelectric layer on the conductive metal layer ... | 04/12/2011 |
| 7915973 | Tunable multiwalled nanotube resonator A tunable nanoscale resonator has potential applications in precise mass, force, position, and frequency measurement. One embodiment of this device consists of a specially prepared multiwalled carbon nanotube (MWNT) suspended between a metal electrode and a mobile, ... | 03/29/2011 |
| 7915974 | Contour-mode piezoelectric micromechanical resonators A contour mode micromechanical piezoelectric resonator. The resonator has a bottom electrode; a top electrode; and a piezoelectric layer disposed between the bottom electrode and the top electrode. The piezoelectric resonator has a planar surface with a cantilevered... | 03/29/2011 |
| 7911296 | Resonator system such as a microresonator system and method of making same A resonator system such as a microresonator system and a method of making same are provided. In at least one embodiment, a mechanical circuit-based approach for boosting the Q of a vibrating micromechanical resonator is disclosed. A low Q resonator is embedded into ... | 03/22/2011 |
| 7907035 | MEMS resonator array structure and method of operating and using same A MEMS array structure including a plurality of bulk mode resonators may include at least one resonator coupling section disposed between the plurality of bulk mode resonators. The plurality of resonators may oscillate by expansion and/or contraction in at least one... | 03/15/2011 |
| 7902943 | Wireless acoustic-electric feed-through for power and signal transmission An embodiment provides electrical energy from a source on one side of a medium to a load on the other side of the medium, the embodiment including a first piezoelectric to generate acoustic energy in response to electrical energy from the source, and a second piezoe... | 03/08/2011 |
| 7902942 | Resonator and filter using the same A resonator and a filter that can be miniaturized and highly integrated are provided. In the invention, a resonator wherein parts of resonators, support sections, and joint sections are mutually shared is formed. The mutual configuration is selectively switched as r... | 03/08/2011 |
| 7898364 | System and method for using MEMS filter bank A method and apparatus for recovering at least one signal of interest are provided. The method includes receiving an overall signal, the overall signal including the at least one signal of interest and a plurality of other signals, identifying at least one of the st... | 03/01/2011 |
| 7893796 | High frequency device, power supply device and communication apparatus A high frequency device including an electrostatic type vibrator, a pad, and a circuit. The electrostatic type vibrator is operable via a DC bias voltage. The pad is configured to supply the DC bias voltage. The circuit is positioned electrically between the pad and... | 02/22/2011 |
| 7880565 | Micro-electro-mechanical transducer having a surface plate A micro-electro-mechanical transducer (such as a cMUT) is disclosed. The transducer has a base, a spring layer placed over the base, and a mass layer connected to the spring layer through a spring-mass connector. The base includes a first electrode. The spring layer... | 02/01/2011 |
| 7876177 | Resonator having an output electrode underneath first and second electrode arms A resonator that can alleviate restrictions in usage and design due to the bias voltage dependency and for which usage and design conditions can be easily determined, includes a movable electrode opposite and sandwiching the fixed electrode, and an extension of the ... | 01/25/2011 |
| 7859365 | Low frequency process-variation-insensitive temperature-stable micromechanical resonators Disclosed are micromechanical resonators having features that compensate for process variations and provide improved inherent temperature stability. Exemplary resonators may comprise comb drive resonators or parallel-plate drive resonators. The resonators comprise a... | 12/28/2010 |
| 7843284 | Lithographically defined multi-standard multi-frequency high-Q tunable micromechanical resonators Disclosed are micromechanical resonator apparatus having features that permit multiple resonators on the same substrate to operate at different operating frequencies. Exemplary micromechanical resonator apparatus includes a support substrate and suspended micromecha... | 11/30/2010 |
