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Class 331/116M - Electromechanical resonators other than piezoelectric crystals


Subclass of Class 331 - Oscillators
No. of patents: 69
Last issue date: 04/17/2012


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NumberTitleIssue Date
8159307Logical element
In a logical element, supporting portions, and a beam supported by them at two ends are formed. The beam has a back side surface spaced apart from the top side surface of a substrate, creating a space between the facing surfaces of the beam and substrate. An excitat...
04/17/2012
8018291Transistor-based micrometric or nanometric resonant device
The resonant device comprises an electromechanical resonator of nanometric or micrometric size that comprises a mobile element and a fixed element. Detection means provide detection signals representative of movement of the mobile element with respect to the fixed e...
09/13/2011
7907025Electromechanical resonator and manufacturing method thereof
An electromechanical resonator includes a resonator portion which includes a fixed electrode and an oscillator formed separately from the fixed electrode with a gap. The gap has a first gap region and a second gap region which are arranged in a thickness direction o...
03/15/2011
7893781Low-voltage MEMS oscillator
An electronic device for generating an electric oscillating signal is described based on a micro-electromechanical system (MEMS). The electronic device typically comprises a substrate a moveable element which is moveable with respect to the substrate and an actuatin...
02/22/2011
7876167Hybrid system having a non-MEMS device and a MEMS device
A hybrid system having a non-MEMS device and a MEMS device is described. The apparatus includes a non-MEMS device and an integrated circuit including a MEMS device, the integrated circuit formed on a substrate. The integrated circuit includes a control circuit for t...
01/25/2011
7750745Oscillator based on piezoresistive resonators
An oscillator circuit has a first and a second piezoresistive resonator (1,2), each having a resonant frequency, each piezoresistive resonator having an input for driving the resonator, and each piezoresistive resonator having its input coupled directly to an...
07/06/2010
7728682Micro-oscillator, semiconductor device and communication apparatus
A micro-oscillator in which the dispersion of center frequency, the interference between adjacent oscillator elements and the like are controlled and the resonance characteristic is excellent, and a semiconductor device including the micro-oscillator as well as a co...
06/01/2010
7598820Magnetic drive for high and low temperature mechanical oscillators used in sensor applications
A magnetic drive and mechanical oscillator system comprising a mechanical oscillator, a coil, a means for providing alternating current to said coil thereby creating a magnetic field within and about the coil, said means including an on-off means and a ferromagnetic...
10/06/2009
7443257Mechanical oscillator control electronics
A control system for a mechanical oscillator having a sinusoidal drive signal with a frequency that is a fractional multiple of a frequency of a signal of the mechanical oscillator. The drive signal may be in phase and in registration with the signal from the mechan...
10/28/2008
7382205Transducer and electronic device
The transducer (1) comprises an electrically conductive resonator element (20) extending in a longitudinal direction having a length (l). It can be elastically deformed by an electrically conductive actuator (30) such that the elastic deformatio...
06/03/2008
7369004Microelectromechanical oscillator and method of operating same
There are many inventions described and illustrated herein. In one aspect, the present inventions relate to a temperature measurement system comprising (1) a first microelectromechanical resonator to generate a first output signal having a frequency that varies with...
05/06/2008
7369003Oscillator system having a plurality of microelectromechanical resonators and method of designing, controlling or operating the same
There are many inventions described and illustrated herein. In one aspect, the present inventions relate to oscillator systems which employ a plurality of microelectromechanical resonating structures, and methods to control and/or operate same. The oscillator system...
05/06/2008
7362194Oscillator circuit and L load differential circuit achieving a wide oscillation frequency range and low phase noise characteristics
An oscillator circuit is formed of a differential LC resonant circuit formed of an L load differential circuit including inductance-variable portions and a capacitor element, and a positive feedback circuit formed of N-channel MOS transistors. The inductance-variabl...
04/22/2008
7358822MEMS oscillator drive
The temperature of a remote portion of device having a microelectromechanical oscillator is modulated to create oscillation of the oscillators. In one embodiment, a localized heat source is placed on a device layer of a multilayered stack, consisting of device, sacr...
04/15/2008
7353706Weighted released-beam sensor
A released-beam sensor includes a semiconductor substrate having a layer formed thereon, and an aperture formed in the layer. A beam is mechanically coupled at a first end to the layer and suspended above the layer such that a second end forms a cantilever above the...
04/08/2008
7352254Micro-oscillator, semiconductor device and communication apparatus
A micro-oscillator is provided. In an example, the micro-oscillator applied to a signal filter and the like, ground capacitance thereof is reduced to control the loss of signal output. An oscillator element having a beam facing lower electrodes and to be electrostat...
04/01/2008
7288863Electric appliances having electric motors for driving oscillatory elements
an electric appliance includes an electric motor having a first oscillatory element, a second oscillatory element and an electric coil configured to generate a magnetic field to drive the first and second oscillatory elements. The electric appliance also includes a ...
10/30/2007
7248128Reference oscillator frequency stabilization
Method for stabilizing the frequency of a MEMS (Micro Electro Mechanical Systems) reference oscillator, and a MEMS reference oscillator, wherein the method comprises following steps: using two or more MEMS components, wherein each MEMS component is characterized by ...
07/24/2007
7230501Oscillation circuit and electronic equipment
An oscillation circuit comprises a SAW resonator having a pair of reflectors disposed on a piezoelectric substrate and a pair of IDTs which are set up in parallel between the pair of reflectors and which are constituted by teeth-of-a-comb electrodes; an inverter to ...
06/12/2007
7202761Temperature compensation for silicon MEMS resonator
Thermally induced frequency variations in a micromechanical resonator are actively or passively mitigated by application of a compensating stiffness, or a compressive/tensile strain. Various composition materials may be selected according to their thermal expansion ...
04/10/2007
7199674Low phase noise, wide tune range saw oscillators and methods of operating the same
A two port, single pole SAW resonator is employed for a local oscillator to eliminate the secondary frequency responses of the prior art without adding additional inductances and capacitances within an amplifier stage. The stray capacitance which is seen within the ...
04/03/2007
7190237Open-loop start-up method for a resonating device
A system employing a resonating device and a controller implements a method involving an establishment by the controller of open-loop oscillations of the resonating device at a resonating frequency of the resonating device, and an establishment by the controller of ...
03/13/2007
7179674Bi-directional released-beam sensor
An acceleration sensor includes a semiconductor substrate, a first layer formed on the substrate, a first aperture within the first layer, and a beam coupled at a first end to the substrate and suspended above the first layer for a portion of the length thereof. The...
02/20/2007
7157980Clock converter and electronic apparatus with the same
A voltage controlled oscillating means in a clock converter outputs a positive feedback signal for a positive feedback loop from one output terminal of buffer means forming a portion of a positive feedback loop using voltage controlled phase shifting means and outpu...
01/02/2007
7148017High sensitivity mechanical resonant sensor
A system and method for detecting mass based on a frequency differential of a resonating micromachined structure, such as a cantilever beam. A high aspect ratio cantilever beam is coated with an immobilized binding partner that couples to a predetermined cell or mol...
12/12/2006
7123111Micro-electromechanical systems
A micro-electromechanical system (MEMS) comprises a substrate incorporating an oscillatory ring, forcing electrodes for driving the ring into resonance, and sensing electrodes providing an electrical output signal dependent on oscillation of the ring as a result of ...
10/17/2006
7089794Method and apparatus for tracking a resonant frequency
An arrangement for tracking resonant frequency of electrically resonant structures through a single channel includes a variable frequency oscillator associated with each resonant structure which provides an excitation signal of a variable frequency encompassing a po...
08/15/2006
7071793Temperature compensation for silicon MEMS resonator
Thermally induced frequency variations in a micromechanical resonator are actively or passively mitigated by application of a compensating stiffness, or a compressive/tensile strain. Various composition materials may be selected according to their thermal expansion ...
07/04/2006
7026598Vector-based targeting control for a water cannon
A method for controlling the positioning of a stream of pressurized fluid against a surface zone of a stream generator to clean contaminants. The coordinates of a plurality of points of the surface zone to be cleaned are first determined. The coordinates are measure...
04/11/2006
7004016Probe system for ultrasonic processing tank
The invention provides systems, methods and apparatus for processing delicate parts within a process tank such as an ultrasonic tank. Typically, one or more transducers connect to the tank and respond to drive signals from a generator to produce ultrasound within pr...
02/28/2006
6995622Frequency and/or phase compensated microelectromechanical oscillator
There are many inventions described and illustrated herein. In one aspect, the present invention is directed to a compensated microelectromechanical oscillator, having a microelectromechanical resonator that generates an output signal and frequency adjustment circui...
02/07/2006
6956794Electronically controlled timepiece, and power supply control method and time correction method therefore
An electronically controlled timepiece includes an analog circuit (160) driven by a power source (22), a logic circuit (170) driven by a constant voltage regulator circuit (161) forming part of the analog circuit, an oscillator circuit (
10/18/2005
6946773Apparatus and methods for cleaning and/or processing delicate parts
The invention utilizes harmonics of certain clamped ultrasound transducers to generate ultrasound within the liquid of an ultrasonic tank and in a frequency range of between about 100 khz to 350 khz (i.e., “microsonic” frequencies). The application of microsonic...
09/20/2005
6914493Noise resistant low phase noise, frequency tracking oscillators and methods of operating the same
To secure the benefits of a low phase noise, wide tune range SAW oscillator in noisy environments, the tunable two port SAW resonator circuit within the oscillator is employed in differential mode, connected to a differential amplifier circuit to create a differenti...
07/05/2005
6914364Apparatus and methods for cleaning and/or processing delicate parts
The invention utilizes harmonics of certain clamped ultrasound transducers to generate ultrasound within the liquid of an ultrasonic tank and in a frequency range of between about 100 khz to 350 khz (i.e., “microsonic” frequencies). The application of microsonic...
07/05/2005
6909334Low phase noise, wide tune range saw oscillators and methods of operating the same
A two port, single pole SAW resonator is employed for a local oscillator to eliminate the secondary frequency responses of the prior art without adding additional inductances and capacitances within an amplifier stage. The stray capacitance which is seen within the ...
06/21/2005
6894576Temperature compensation mechanism for a micromechanical ring resonator
A time base including a resonator (4) and an integrated electronic circuit (3) for driving the resonator into oscillation and for producing, in response to the oscillation, a signal having a determined frequency. The resonator is an integrated micromec...
05/17/2005
6859113Temperature compensation mechanism for a micromechanical ring resonator
A time base including a resonator (4) and an integrated electronic circuit (3) for driving the resonator into oscillation and for producing, in response to the oscillation, a signal having a determined frequency. The resonator is an integrated micromec...
02/22/2005
6713938Method and apparatus for filtering signals utilizing a vibrating micromechanical resonator
Several MEMS-based methods and architectures which utilize vibrating micromechanical resonators in circuits to implement filtering, mixing, frequency reference and amplifying functions are provided. Apparatus is provided for filtering signals utilizing vibrating mic...
03/30/2004
6686807Time base comprising an integrated micromechanical ring resonator
A time base having a resonator (4) and an integrated electronic circuit (3) for driving the resonator into oscillation and for producing, in response to this oscillation, a signal having a determined frequency. The resonator is an integrated micromechanic...
02/03/2004
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