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| Number | Title | Issue Date |
| 8091243 | Precision stage The invention relates to a positioning system for positioning and/or measuring a movable object, wherein the movable object (10) has an object position that is defined with respect to a at least two axes (X, Y) extending in at least two different directions. ... | 01/10/2012 |
| 7607234 | Positive load alignment mechanism A positive load alignment mechanism comprises a platform device in which are disposed a plurality of driving devices, movable devices and movable bearing platforms. The driving device is connected to the movable device, and the movable bearing platform firmly suppor... | 10/27/2009 |
| 7478481 | Measurement configuration based on linear scales able to measure to a target also moving perpendicular to the measurement axis Laser interferometers and high-quality linear encoders both are competitive linear measurement systems used in high-precision machines. Plane laser interferometry allows measuring to a target that moves perpendicular to the measurement direction and to set up the la... | 01/20/2009 |
| 7475484 | Lock mechanism for stage apparatus A lock mechanism for a stage apparatus, the stage apparatus having a stationary support board and a movable stage, includes a lock member positioned immediately in front or behind the movable stage; lock holes formed in opposed portions of one of the lock member and... | 01/13/2009 |
| 7441341 | Automated robotic measuring system An automated coordinate measuring system comprising a measuring arm used for acquisition of geometry data that incorporates an exoskeletal structure resilient to physical perturbations including thermal changes and vibrations which may affect coordinate data acquisi... | 10/28/2008 |
| 7444072 | Stage apparatus and camera shake correction apparatus using stage apparatus A stage apparatus includes a stationary support plate; a Y-direction movable member supported on, and parallel to, the stationary support plate so as to be relatively movable in a Y-direction, the Y-direction movable member including a Y-direction rod portion and a ... | 10/28/2008 |
| 7437831 | Linear guide apparatus A side seal fixing unit 24, which is made up of a U-shaped pressing member 25 which presses and holds a side seal 20 against a lubricant application member 22, a pivot shaft 26 provided at one end portion of the pressing of the pre... | 10/21/2008 |
| 7426022 | Liquid crystal module brightness measurement apparatus and brightness measurement apparatus A brightness measurement apparatus which includes a placement unit on which an object to be measured is placed, a measurement unit for measuring brightness or chromaticity from an upper surface of the object placed on the placement unit, a placement unit moving mech... | 09/16/2008 |
| 7405500 | Bonding apparatus A wire bonding apparatus 10 including an X table 18 guided to move in the X direction on an XY table base 14 and a driving motor 20 mounted on a motor base 16 with the movable element 22 of the driving motor 20 connec... | 07/29/2008 |
| 7401412 | High precision gantry machine with expansion joint A Cartesian gantry system having an expansion joint between an X-bridge stage and a Y-translation stage comprises a flexure plate having surfaces secured to the X-bridge stage and the Y-translation stage and bolster flanges extending between the X-bridge stage and Y... | 07/22/2008 |
| 7377047 | Machine tool with workpiece measuring instrument and operating method for the same The present invention provides a machine tool with a workpiece measuring instrument which prevents the workpiece measuring instrument from being affected by chips or cutting heat during non-machining, while enabling a workpiece W to be measured near a machining posi... | 05/27/2008 |
| 7370591 | Quilting table for a sewing machine A quilting table (20) includes a frame (22) having box channel rails (50, 52), a first carriage (212), moveable relative to a longitudinal dimension (30) of the frame (22), having wheels (224) engaged with the box cha... | 05/13/2008 |
| 7350308 | Sleeve cone angle measurement system For repeatably and accurately measuring characteristics of workpieces, such angle of taper of a conical cavity defined by a workpiece, examples may include a system having a stage movable in predictable and repeatable increments, and a compliancy fixture. The compli... | 04/01/2008 |
| 7343765 | Method for checking clearance between stamping die and workpiece transfer tool A method and device for checking clearance between a stamping die includes a template representative of relative movement between the stamping die and end tool. A template including a surface representing movement of the end tool relative to the stamping die is posi... | 03/18/2008 |
| 7343684 | Robotic system with traction drive A robotic system including at least one support that supports a carriage for movement. The support may include a drive surface that is a “net shape” surface, i.e., is formed without machining. The carriage may have a traction drive that engages with the drive su... | 03/18/2008 |
| 7331714 | Optomechanical structure for a multifunctional hard x-ray nanoprobe instrument A multifunctional hard x-ray nanoprobe instrument for characterization of nanoscale materials and devices includes a scanning probe mode with a full field transmission mode. The scanning probe mode provides fluorescence spectroscopy and diffraction contrast imaging.... | 02/19/2008 |
| 7327952 | Stage apparatus and camera shake correction apparatus using the stage apparatus A stage apparatus includes a Y-direction deformable body including a stationary support member, a movable support member and a pair of X-direction leaf springs to form a substantially rectangular shape in a free state; and an X-direction deformable body, positioned ... | 02/05/2008 |
| 7319815 | Stage apparatus and camera shake correction apparatus using the same A stage apparatus includes a stationary support base-plate; a Y-direction moving member supported on the stationary support base-plate to move in a Y-direction; and an X-direction moving member supported on the Y-direction moving member to move in an X-direction ort... | 01/15/2008 |
| 7316072 | XY stage module, storage system employing the same and method for fabricating the XY stage module An XY stage module, a storage system including the same and a method for facating the XY stage module are provided. The XY stage module includes: a base; an XY stage horizontally moving above the base in a first direction and a second direction that is orthogonal to... | 01/08/2008 |
| 7316075 | Coordinate measuring machine for metrological determination of a coordinate on a test object A coordinate measuring machine for the metrological determination of a measurement coordinate on a test object comprises a table for mounting the test object. A first and a second bearing support are arranged on the table. A first and a second carriage, each moveabl... | 01/08/2008 |
| 7308747 | Method of positioning a platform relative to a fixed frame and a small scale positioning device A small-scale positioning device employing a platform, a levering mechanism and a floating actuator device. The platform is movably attached to a fixed frame by a lever, a pair of levers, or more. The floating actuator device is coupled between at least one lever an... | 12/18/2007 |
| 7277176 | Emission filter X-Y array An imaging system for obtaining images of a specimen that includes a novel filtering system for filtering radiation emitted from the specimen. The imaging system includes a camera and a novel filter grid that is controllably movable relative to the camera in a manne... | 10/02/2007 |
| 7275332 | Multi-axis positioning apparatus An apparatus for supporting a platform (84) relative to a base (82), has first, second, and third flexible shaft couplings (80). Each flexible shaft coupling (80) is mechanically coupled between the platform (84) and the base (8... | 10/02/2007 |
| 7275468 | Rotary fast tool servo system and methods A high bandwidth rotary fast tool servo provides tool motion in a direction nominally parallel to the surface-normal of a workpiece at the point of contact between the cutting tool and workpiece. Three or more flexure blades having all ends fixed are used to form an... | 10/02/2007 |
| 7271879 | Decoupled planar positioning system A planar positioning system having a rigid base, and first and second linear actuator means mounted to the rigid base, the first and second linear actuator means being arranged orthogonal to one another. A rigid reference surface (2A, 2B) is mounted to... | 09/18/2007 |
| 7257902 | Stage device This invention relates to a stage device which is moved with high accuracy in an X-Y direction and a rotating direction using a planar motor. The invention is aimed at reducing the size of the stage device and at performing accurately measurement of a position of th... | 08/21/2007 |
| 7256866 | Lithographic apparatus and device manufacturing method To enable high acceleration and high moving speed of a pattern support or a substrate table of a lithographic apparatus, one of the pattern support and the substrate table is supported by an actuator for relatively large displacements, whereas an actuator for accura... | 08/14/2007 |
| 7252492 | Devices and methods for aligning a stamp and a substrate There is provided a device for transferring a pattern from a stamp to a substrate, provided with a moldable film, by pressing the stamp and the substrate against each other. The device comprises at least one fixture for retaining a planar object such as the stamp or... | 08/07/2007 |
| 7249420 | Slider device and measuring instrument A slider device includes a base (200), a running head (300) slidably provided on the base (200), a main guide mechanism (410) for guiding in a first direction in which the running head (300) runs, and sub-guide mechanism (450 | 07/31/2007 |
| 7246445 | Alignment device The present invention relates to an alignment device for aligning an object in a plane. ... | 07/24/2007 |
| 7243571 | Ultra-precision positioning system Provided is an ultra-precision positioning system. The system comprises a base, a motion stage movably provided to the top of the base, and first to sixth feeding mechanisms for moving the motion stage to have six degrees of freedom. The first to sixth feed mechanis... | 07/17/2007 |
| 7240434 | Stage apparatus A stage apparatus may include a first stage, a second stage movable with respect to the first stage, at least one flexure hinge to connect the first stage with the second stage, a plurality of actuators provided between the first stage and the second stage to push t... | 07/10/2007 |
| 7239107 | Flexure stage In one embodiment, a flexure stage comprises a base, a stage, a positioning mechanism, and a control device. The base and stage have first and second portions that are spaced apart from each other. The positioning mechanism is coupled between the base and the stage.... | 07/03/2007 |
| 7229266 | Press die alignment A die press is described. In one embodiment, the die press includes an alignment mechanism having one or more flexure members coupled to a die to maintain coupling with the die during a pressing operation. ... | 06/12/2007 |
| 7227647 | Method for measuring surface properties and co-ordinate measuring device A method and apparatus for measuring surface properties of a workpiece in an extremely precise manner by means of a co-ordinate measuring device (10), independently from the material properties of the workpiece. A molded probe element is used which can be dis... | 06/05/2007 |
| 7222431 | Alignment correction system and methods of use thereof Cartesian robots and methods for proper alignment are provided. More specifically, the invention uses reflective spheres and a laser to locate specific points that can then be used to determine correction factors. ... | 05/29/2007 |
| 7222434 | Driving device and measuring instrument A supporting device (300) for supporting a guide rail (200) for guiding a movable member subjected to relative displacement in relation to the base table (3). The supporting device includes, base bodies (410, 510) engaged onto the base ta... | 05/29/2007 |
| 7210239 | Slider device and measuring instrument A slider device (200, 800) according to the present invention includes a base (200); a running head (300) slidably provided on said base (200) along the direction guided by a prespecified guide mechanism (400); a rack (510) ... | 05/01/2007 |
| 7209219 | System for controlling a position of a mass A control system for controlling a position of a mass, such as, for example, a substrate holder in a lithographic apparatus, is presented herein. The control system comprises a first input to receive a desired position of the mass, a second input signal to receive a... | 04/24/2007 |
| 7197828 | Lithographic apparatus and device manufacturing method utilizing FPD chuck Z position measurement A lithographic apparatus comprising a first frame and a second frame, the first frame and the second frame being moveable in a first direction relative to one another. The first frame is provided with a ruler having distance indicators disposed in the first directio... | 04/03/2007 |
